CN107078048B - 使用加成制造工艺的具复合材料特性的cmp衬垫建构 - Google Patents

使用加成制造工艺的具复合材料特性的cmp衬垫建构 Download PDF

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Publication number
CN107078048B
CN107078048B CN201580060603.3A CN201580060603A CN107078048B CN 107078048 B CN107078048 B CN 107078048B CN 201580060603 A CN201580060603 A CN 201580060603A CN 107078048 B CN107078048 B CN 107078048B
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China
Prior art keywords
features
polishing pad
polishing
material composition
composite
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Chinese (zh)
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CN107078048A (zh
Inventor
R·巴贾杰
K·克里希南
M·C·奥里拉利
D·莱德菲尔德
F·C·雷德克
N·B·帕迪班德拉
G·E·蒙柯
J·G·方
R·E·帕里
R·E·达文波特
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
CN201580060603.3A 2014-10-17 2015-04-24 使用加成制造工艺的具复合材料特性的cmp衬垫建构 Active CN107078048B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110880110.1A CN113579992A (zh) 2014-10-17 2015-04-24 使用加成制造工艺的具复合材料特性的cmp衬垫建构

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462065193P 2014-10-17 2014-10-17
US201462065270P 2014-10-17 2014-10-17
US62/065,193 2014-10-17
US62/065,270 2014-10-17
PCT/US2015/027473 WO2016060712A1 (en) 2014-10-17 2015-04-24 Cmp pad construction with composite material properties using additive manufacturing processes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202110880110.1A Division CN113579992A (zh) 2014-10-17 2015-04-24 使用加成制造工艺的具复合材料特性的cmp衬垫建构

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CN107078048A CN107078048A (zh) 2017-08-18
CN107078048B true CN107078048B (zh) 2021-08-13

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CN201580060603.3A Active CN107078048B (zh) 2014-10-17 2015-04-24 使用加成制造工艺的具复合材料特性的cmp衬垫建构
CN202110880110.1A Pending CN113579992A (zh) 2014-10-17 2015-04-24 使用加成制造工艺的具复合材料特性的cmp衬垫建构

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Country Status (6)

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US (2) US10384330B2 (enExample)
JP (4) JP6545261B2 (enExample)
KR (4) KR102295988B1 (enExample)
CN (2) CN107078048B (enExample)
SG (2) SG11201703114QA (enExample)
WO (1) WO2016060712A1 (enExample)

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