Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
  • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
  • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
  • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/04—Arrangements of vacuum systems or suction cups

Definitions

• the present invention relates to a glass substrate for a flat panel display (hereinafter abbreviated as FPD) such as a large liquid crystal display (hereinafter abbreviated as LCD) or a plasma display panel (hereinafter abbreviated as PDP).
• FPD flat panel display
• LCD large liquid crystal display
• PDP plasma display panel
• the present invention relates to a substrate transfer device that floats on a transfer path and transfers the substrate.
• the glass substrate is transported to the defect inspection unit by the roller transport unit, the glass substrate is positioned, and the glass substrate is held by the gripping mechanism.
• Defect inspection is performed by gripping the end.
• high-pressure air is blown from the air outlet provided on the air-floating stage to keep the glass substrate at a constant height in order to support the glass substrate in a non-contact manner.
• the former glass substrate transport uses a pair of support roller mechanisms and a pair of regulating roller mechanisms, when the glass substrate is transported at high speed, the glass substrate that comes into contact with the rollers rolls. Roller friction marks are formed on the beveled surface.
• the glass substrate is transported by the roller transporter. Therefore, when the glass substrate is transported at a high speed in the same manner as the former, friction marks are generated on the rolling surface of the glass substrate in contact with the roller.
• a substrate floating mechanism is provided along a transport path to lift a substrate on the transport path, and both ends of the substrate floated by the substrate floating mechanism are held on the transport path. And a transport mechanism for transporting the substrate along the substrate.
• FIG. 1 is a plan view showing a substrate transfer apparatus according to a first embodiment of the present invention.
• Figure 2 is a side view of the device.
• FIG. 3 is a view showing a glass substrate floated on the substrate mounting table 1 in the apparatus.
• Figure 4 is a diagram showing the air transfer operation of the glass substrate in the same device.
• Figure 5 shows the alignment operation in the same device.
• Figure 6 shows the alignment operation in the same device.
• Figure 7 shows the alignment operation in the same device.
• Fig. 8 is a view showing the transfer of the glass substrate after the alignment operation in the same apparatus.
• FIG. 9 is a configuration diagram showing a second embodiment of the substrate transfer device according to the present invention.
• FIG. 10 is a view showing a plurality of grooves formed on a floating block in the apparatus.
• FIG. 1 is a plan view showing a case where the substrate transfer apparatus is applied to an in-line inspection in a process of manufacturing an FPD such as a large LCD or PDP
• FIG. 2 is a side view showing the apparatus.
• the loading substrate mounting table 1 is provided on the vibration isolation table 2.
• the substrate mounting table 1 has the glass substrate 3 loaded thereon, and the width thereof (perpendicular to the transport direction C) is formed to be slightly shorter than the width of the glass substrate 3. I have.
• a plurality of air holes 4 are provided on the upper surface of the substrate mounting table 1 for both air blowing and suction.
• the air holes 4 may be provided almost regularly on the entire surface of the substrate mounting table 1.
• Two grooves 5 are formed on the substrate mounting table 1 in a direction parallel to the transport direction C. And are formed at predetermined intervals.
• the substrate mounting table 1 is provided with a plurality of lift bins 6 which move up and down when the glass substrate 3 is carried in.
• a carry-in transfer robot 7 is provided on the entrance side of the substrate mounting table 1 in a direction perpendicular to the transfer direction C.
• the carry-in port 7 is used to take an uninspected glass substrate 3 from the cassette while rotating, advancing and retracting the two hand arms 8 by an articulated arm (not shown). Exit and carry it onto the substrate mounting table 1.
• transfer frames 9 are arranged side by side in the transfer direction C.
• the transfer platform 9 is formed to have a length from the loading side of the glass substrate 3 to the unloading side.
• the transfer frame 9 is placed on the vibration isolation table 10.
• a floating block 11 is provided from the loading side to the unloading side on the transfer frame 9 over the entire length of the loading side and the unloading side.
• the floating block 11 is formed to have a width (perpendicular to the transport direction C) slightly shorter than the width of the glass substrate-.3.
• a plurality of air holes 12 for both air blowing and suction are provided on the upper surface of the floating block 11. Note that these air holes 12 need only be provided substantially uniformly over the entire surface of the floating block 11.
• two grooves 13 are formed at a predetermined interval in a direction parallel to the transport direction C.
• the surface height of the floating block 11 is almost the same as the surface height of the substrate mounting table 1.
• An inspection unit that performs various inspections on the glass substrate 3 conveyed at a constant speed is provided at a substantially intermediate position in the conveyance direction C on the conveyance stand 9. E is provided.
• various inspection devices 14 such as a microscope, a line sensor or a CCD camera are mounted on a portal arm 15.
• the inspection equipment 14 acquires the image data of the glass substrate 3 by using a plurality of line sensors.
• the image data is subjected to image processing or the like, for example, pattern inspection or defect inspection of the glass substrate 3 is performed.
• substrate mounts 16 for unloading are arranged side by side along the transfer direction C.
• the substrate mounting table 16 is provided on the vibration isolation table 17.
• the substrate mounting table 16 temporarily holds the glass substrate 3 conveyed from the floating block 11 in order to carry out the glass substrate 3, and its width (in the direction perpendicular to the conveyance direction C) is glass. It is formed slightly shorter than the width of the substrate 3.
• On the upper surface of the substrate mounting table 16 a plurality of air holes 18 that serve both air blowing and suction are provided.
• the air holes 18 may be provided almost regularly on the entire surface of the substrate mounting table 16.
• two grooves 1.9 are formed in a direction parallel to the transport direction C and at a predetermined interval.
• the substrate mounting table 16 is provided with a plurality of lift pins 20 which move up and down when the glass substrate 3 is carried out.
• the surface height of the substrate mounting table 16 is almost the same as the surface height of the floating block 11.
• An unloading transfer port hot 21 is provided on the outlet side of the substrate mounting table 16 in the direction perpendicular to the transfer direction C.
• the unloading transfer robot 21 has been inspected while rotating, advancing and retracting the two hand arms 22 by an articulated arm (not shown).
• the glass substrate 3 is stored in the cassette.
• a plurality of pairs of each of the sliders 23 to 28 are mounted on the transfer frame 9 and the vibration isolation table 17 with the floating block 11 and the substrate mounting table 16 interposed therebetween, and are parallel to each other along the transfer direction C. It is provided.
• the pair of sliders 23, 24 and 27, 28 are provided outside the pair of sliders 25, 26. The height positions of the sliders 23 to 28 are the same.
• the paired sliders 23 and 24 are provided in the alignment section A on the entrance side of the transfer stand 9.
• the sliders 23 and 24 are provided with a pair of transport ends 29 and 30 movably, respectively.
• the transport ends 29 and 30 are provided at the ends of the arms 29 a and 30 a, which are provided to be vertically expandable and contractible and rotatable, respectively, and the arms 29 a and 30 a.
• the suction holes hold both ends of the back surface of the glass substrate 3 by suction.
• Heads 29b, 30b and provided within each of the transport ends 29, 30.- Each platform for moving each arm 29a, 30a in the transport direction ⁇ C and in the vertical direction. And have
• the pair of sliders 25 and 26 are provided between the exit side of the alignment unit A and the exit side of the transfer frame 9.
• the sliders 25 and 26 are provided with a pair of transfer ends 31 and 32 movably, respectively.
• These transport ends 31 and 32 are, like the transport ends 29 and 30, connected to the arms 31 a and 32 a and the suction nozzles, respectively. Heads 31b and 32b.
• the pair of sliders 27 and 28 are provided between the exit side of the transfer stand 9 and the exit side of the substrate placing table 16. These sly The transfer ends 33, 34 in pairs are provided movably on the dies 27, 28, respectively. These transport ends 33 and 34 are, like the transport ends 29 and 30, each arm 33a and 34a and each suction end. Heads 33b and 34b.
• each arm 29 a, 30 a, 33 a, 34 a is set so as to be the same as the position of the transfer end portions 29, 30, 3.
• 1, 32, 33, and 34 are mechanisms that can finely move the arms 29 a, 30 a, 3 la, 32 b, 33 a, and 34 a that hold the glass substrate 3 in the XY direction. If so, any configuration may be used.
• the alignment part A on the levitation block 11 is provided with three positioning means. Sensors 4-3 to 45 are provided.
• the positioning sensors 43 to 45 detect each edge of the glass substrate 3 on two sides (vertical and horizontal) orthogonal to each other, and output each detection signal indicating the edge position.
• Each of the positioning sensors 43 to 45 is a line sensor in which a plurality of detection elements are arranged in a line.
• the positioning sensor 43 is provided at an intermediate position in the width direction of the floating block 11 and the line detection direction is the same as the transport direction C.
• the positioning sensor 43 is an edge on the front side in the transport direction C of the glass substrate 3 stopped floating at the alignment portion A. Is detected.
• the positioning sensors 44 and 45 are provided at predetermined intervals on the side surface of the floating block 11. These positioning sensors 44 and 45 are provided with the line detection direction perpendicular to the transport direction C. These positioning sensors 44 and 45 detect an edge in the same direction as the transfer direction C of the glass substrate 3 that has stopped floating at the alignment part A.
• the compressed air supply unit 46 communicates with the gaps of the loading board mounting table 1, the floating block 11 and the unloading board mounting table 16 through the pipes, respectively. By selectively supplying compressed air, the compressed air is blown up from each of the air holes 4, 12, and 18, and the substrate mounting table 1 for loading, the floating block 11, or the substrate mounting table 16 for unloading Then, the glass substrate 3 is floated. Further, the compressed air supply unit 46 blows air having a static elimination effect from each of the air holes 4, 12, 18, for example, air ionized into a positive ion or a negative ion. .increase. -The vacuum suction part 47 communicates selectively with the board mounting table 1 for loading, the floating block 11 and the gaps of the board mounting table 16 for unloading through piping. The glass substrate 3 is sucked and held on the loading substrate mounting table 1 and the unloading substrate mounting table 16 via the air holes 4, 1 218 through the air holes 4.
• the vacuum suction section 47 communicates with the suction pads 29b30b, 31b, 32b, 33b, and 34b through pipes.
• the heads 29b, 30b, 31b, 32b, 33b34b are evacuated to hold the glass substrate 3 by suction.
• the movement control unit 48 is configured to transfer each of the transport ends 29, 30, 31, 32, 33, and 34 to the respective sliders 23, 24, 25, 26, 27, and 2. 8 Move up control.
• the posture recognition section 49 receives the respective detection signals output from the three positioning sensors 43 to 45, and based on the three edge position information of the glass substrate 3 indicated by the detection signals. The posture of the glass substrate 3 is recognized.
• the posture control unit 50 moves the pair of conveyance ends 31 and 32 with the conveyance direction C. The movement is controlled in the direction perpendicular to the transport direction C.
• Each of the transport ends 29 and 30 moves to the loading side on each of the sliders 23 and 24 and stops and stands by. .
• the carry-in transfer robot 7 rotates the hand arm 8, advances and retreats, removes the uninspected glass substrate 3 from the cassette, and transfers the glass substrate 3 above the substrate mounting table 1. At the same time, each lift pin 6 of the substrate mounting table 1 rises.
• the loading transport robot 7 lowers the hand arm 8 and places the glass substrate 3 on each lift bin 6.
• the glass substrate 3 is placed on the substrate mounting table 1 by lowering each of the lift pins 6. Since the width of the glass substrate 3 is longer than the width of the substrate mounting table 1, both ends of the glass substrate 3 protrude from the substrate mounting table 1.
• each transfer end 29, 30 raises each arm 29a, 30a and moves each suction pad 29b, 30b to the substrate mounting table 1. It is adsorbed on the back surface of the glass substrate 3 that comes out.
• the suction positions of these suction pads 29 b and 30 b are at the rear end of the glass substrate 3 where the circuit pattern is not formed, for example, in front of the glass substrate 3 in the transport direction C. These are both ends of the back surface.
• each of the suction nodes 29 b and 30 b slightly rises above the surface height of the substrate mounting table 1 in a state of being suctioned to the back surface of the glass substrate 3.
• the compressed air supply section 46 supplies compressed air to the gap of the substrate mounting table 1 through a pipe, and blows up the compressed air from the air hole 4.
• the compressed air which is ionized to have a static elimination effect, is used to neutralize the static electricity of the glass substrate 3 and prevent the glass substrate 3 from being charged.
• the movement control section 48 includes the respective transport end sections 29, 30 b having the suction pads 29 b, 30 b adsorbed on the back surface of the glass substrate 3. (Arms 29a and 30a) are synchronized at the same speed, and are moved in the transport direction C on the respective sliders 23 and 24. As a result, the glass substrate 3 floats and is completely in non-contact with the upper surface of the substrate mounting table 1 and the upper surface of the floating block 11, and is pulled by the transport ends 29 and 30. It is transported at high speed in the transport direction C. By this high-speed transfer, the glass substrate 3 reaches the alignment portion A on the floating block 11.
• the glass substrate 3 When reaching the alignment part A, the glass substrate 3 may be inclined with respect to the transport direction C as shown in FIG.
• the positioning sensor 43 detects an edge of one side of the glass substrate 3 that has stopped rising and rising in the alignment section A in the transport direction C and outputs the detection signal. I do.
• each of the positioning sensors 44 and 45 detects an edge of the other side in the same direction as the transport direction C of the glass substrate 3 that has stopped floating at the alignment portion A and outputs a detection signal. .
• the posture recognition section 49 receives the detection signals output from the three positioning sensors 43 to 45, respectively, and outputs the detection signals from the three positions of the glass substrate 3 which are indicated by the detection signals.
• the attitude of the glass substrate 3 is recognized based on the edge position information. In this case, the right end of the glass substrate 3 on the tip side with respect to the transport direction C projects forward from the left end, and is inclined leftward with respect to the transport direction C.
• the posture control unit 50 first moves one of the conveying ends 30 in the conveying direction C as shown in FIG. Move slightly in the opposite direction (rear side).
• the glass substrate 3 is adsorbed. It is rotated in the direction of arrow F with the rod 29 a as the center axis, and is arranged parallel to the transport direction C.
• the posture recognition unit 49 recognizes the posture of the glass substrate 3 by inputting the respective detection signals output from the three positioning sensors 43 to 45, respectively. As a result of this recognition, the left end of the glass substrate 3 is closer to the slider 23 as shown in FIG.
• the attitude control unit 50 drives the plunger at one of the transport ends 29 to extend the arm 29a in the direction of arrow H (in the direction perpendicular to the transport direction C).
• the plunger of the other transfer end 30 is driven to shrink the arm 30a in the direction of the arrow H, and the glass substrate 3 is moved in the direction of the arrow H to move the center of the glass substrate 3 to the center. Adjust the position to the center position of the transport path.
• the attitude control section 50 synchronizes the transport ends 29 and 30 so that the front ends of the glass substrates 3 are aligned with the center of the positioning sensor 43 and moves them forward.
• each of the transport ends 29 and 30 slightly moves in the direction of arrow N, for example, as shown in FIG. 7.
• the glass substrate 3 moves to the reference position, ie, And the center of the glass substrate 3 is aligned so as to substantially coincide with the center position of the transport path.
• the reference position is where each of the three positioning sensors 43 to 45 detects the edge position of the glass substrate 3 at the center of the sensor.
• the movement control unit 48 moves the transport ends 31 and 32 at the same speed in the direction opposite to the transport direction C as shown in FIG. And synchronize them to move them on the respective sliders 25 26.
• These transport ends 3 1 and 3 2 reach below the glass substrate 3 Then, it stops at the substrate transfer reference position on each slider 25, 26, raises each arm 31a, 32a, and moves each suction pad 31b, 32b to the glass substrate. Adsorb on the back of 3.
• the suction positions of the suction pads 31b and 32b are both ends of the rear surface which is on the front side in the transport direction C on the glass substrate 3.
• the suction holding of the glass substrate 3 is transferred to the respective transport ends 31 and 32 from the respective transport ends 29 and 30.
• the transport end portions 29 and 30 move on the respective sliders 23 and 24 in the direction opposite to the transport direction C (rear side), and move to the substrate transfer reference position of the loading substrate mounting table 1. Stop and wait.
• the respective transport ends 31 1 and 32 are synchronized at the same speed as shown in FIG. 8 to move on the respective sliders 25 and 26 in the transport direction C. Moving.
• the glass substrate 3 floating on the floating block 11 is pulled by the respective transport ends 31 and 32 and transported at high speed in the transport direction C.
• the inspection unit E is reached.
• the compressed air supply section 46 stops the supply of the compressed air to each of the air holes 4 of the floating block 11.
• the vacuum suction part 47 evacuates each air hole 12 of the floating block 11 through a pipe to suck and hold the glass substrate 3 on the floating block 11. At this time, the suction pads 3 1 b and 3 2 b holding the back surface of the glass substrate 3 by suction were used. Suction is released and each arm 31a and 32a descends.
• a pattern inspection and a defect inspection of the glass substrate 3 are performed by using image data acquired by various inspections of the glass substrate 3 using an inspection device 14 having a sensor. What do you do? In this case, the entire surface of the glass substrate 3 is inspected by the inspection device 14 by moving the portal arm 15 on which the inspection device 14 is mounted in the front-rear direction with respect to the transport direction C. .
• each transport end 31, 32 raises each arm 31a, 32a, and moves each suction pad 31b32b to the glass substrate 3.
• the back surface which is the front side in the transport direction C in the above.
• the vacuum suction unit 47 stops the evacuation of the air holes 12 of the floating block 11. Then, switching from the vacuum suction section 47 to the compressed air supply section 46 is performed.
• the compressed air supply unit 46 supplies compressed air to each of the air holes 12 of the levitation block 11 to blow up ionized compressed air from these air holes 12. Float the glass substrate 3.
• the transport ends 3 1 and 3 2 were synchronized with the transport direction C at a constant speed, with the glass substrate 3 floating above the floating block 11. Then, it may be performed while moving on each of the sliders 23 and 24.
• each of the transport ends 3 1, 3 2 is moved to the respective slider 25.
• the glass substrate 3 is moved at high speed in the transfer direction C by moving on the substrate 26.
• the suction holding of the glass substrate 3 is transferred from each of the transfer ends 31 and 32 to each of the transfer ends 33 and 34.
• the compressed air supply unit 46 supplies compressed air to each air hole 8 of the substrate mounting table 16. .
• the transfer of the glass substrate 3 to the transfer ends 3 3, 3 4 from the transfer ends 3 1, 3 2 is performed from the transfer ends 29, 30 to the transfer ends 31, 3. It is performed in the same way as the transfer to 2.
• the respective transport ends 33, 34 move on the respective sliders 27, 28 to transport the glass substrate 3 in the transport direction C. Then, when the glass substrate 3 reaches above the substrate mounting table 16 for unloading, each of the transport ends 33, 34 stops at the substrate transfer reference position.
• Each lift pin 20 rises on the substrate mounting table 16.
• the compressed air supply section 46 stops the supply of compressed air to the air holes 18 of the substrate mounting table 16 and, at the same time, the suction pads 33 b and 34 are attached to the back of the glass substrate 3. Release the adsorption to, and lower each arm 33a and 34a. Thus, the glass substrate 3 is placed on each of the lift pins 20.
• the unloading transfer robot 21 rotates, advances, and retracts the handle arm 22 to take out the inspected glass substrate 3 from each lift bin 20 and stores it in the cassette. I do.
• each substrate mounting The glass substrate 3 is conveyed while air is blown up from the air holes 4, 18, and 12 formed in the tables 1, 16 and the floating block 11 to float the glass substrate 3. It transports while holding both ends of the tip in the direction C by suction.
• the large glass substrate 3 can be conveyed at a high speed without damaging the glass substrate 3 in a floating state.
• a plurality of air holes 4, 18 and 12 are regularly provided on the air carrying surface of each of the substrate mounting tables 1 and 16 and the floating block 11 and the grooves 5, 13 and 19 are formed. Since the air blown by the plurality of air holes 4, 18 and 12 flows through each groove 5, 13 and 19, the glass substrate 3 and the substrate mounting table 1 and Air does not accumulate between 16 and the floating block 11 and flows through each groove 5, 13 19. Thus, the large-sized glass substrate 3 can be transported while maintaining a high flatness without bending such as rising at the center.
• the air blowing pressure distribution becomes uniform in the transport direction C. Thereby, the glass substrate 3 can be transported in a stable state without swinging in the vertical direction during transport.
• the glass substrate 3 is conveyed at a high speed while forcibly pulling while sucking and holding both front and rear ends of the glass substrate 3 in the conveying direction C of the glass substrate 3. Thereby, the glass substrate 3 can be stably conveyed in a floating state without swinging in the conveying direction C such as meandering.
• both sides of the back surface of the glass substrate 3 are held by suction, the portion of the circuit pattern formed on the glass substrate 3 It does not touch the circuit and does not affect the circuit pattern.
• the large glass substrate 3 can be transferred at a high speed in a non-contact manner in this way, in a semiconductor manufacturing field such as FPD manufacturing, the product productivity is improved without deteriorating the product quality. Can be satisfied.
• the alignment is performed by the three positioning sensors 43 to 45, the attitude recognition section 49 and the attitude control section 50 while the glass substrate 3 is floated. In a non-contact state in which the glass substrate 3 is floated, the alignment can be surely performed without damaging the large glass substrate 3.
• each of the transport ends 29, 30 for transporting the glass substrate 3 is slightly moved in the two-dimensional direction so that the transport ends 29, 30 are moved.
• the glass substrate 3 transfer function it can also be used as an argument, and the transfer of the glass substrate 3 can be followed by successive alignments. The time required for ment can be shortened.
• the position of the glass substrate 3 is recognized by the three positioning sensors 43 to 45, so that the position of the glass substrate 3 can be detected with high accuracy.
• each positioning sensor 43 to 45 are embedded in the levitation block 11, each positioning sensor 43 to 45 The reference position of No. 5 does not shift, and the glass substrates 3 can always be aligned with high accuracy based on the edge position information of the three points.
• the first embodiment may be applied to, for example, a process in which a plurality of inspection units E are provided or in which various processing processes are provided.
• FIG. 9 is a configuration diagram of the substrate transfer device.
• the forward and backward directions of the hand arms 8, 22 of the transfer robots 7, 21 for loading and unloading are set so that the forward and backward directions are the same as the transfer direction C.
• the transfer robots 7 and 21 are provided, and the holder 60 that holds the glass substrate 3 by suction on the transfer stand 9 can be moved in the transfer direction C.
• each of the transfer robots 7 and 16 has been removed.
• the glass substrate 3 was directly mounted on the substrate mounting table 21 by inserting the respective node arms 82 into the grooves 5 and 19 of the substrate mounting tables 1 and 16. Remove the glass substrate 3 directly from the substrate mounting table 16.
• a moving floating block 60 (hereinafter, referred to as a holder) 60 is movably provided.
• the surface of the holder 60 is used for both air blowing and suction
• a plurality of air holes 62 are provided on the entire surface.
• This holder 6 ⁇ has a width slightly smaller than the width of the glass substrate 3, and the height of the holder surface is almost the same as the surface height of the substrate mounting table 1, similarly to the substrate mounting table 1. Is formed.
• a pair of sliders 6 3 and 6 4 are provided on the transfer stand 9 in parallel with each other along the transfer direction C with the holder 60 interposed therebetween. These sliders 6 3 and 6 4 are connected to the loading side. It is provided between the substrate mounting table 1 and the transfer robot 21 on the unloading side. The sliders 6 3 and 6 4 are capable of moving a pair of transport ends 29 and 30 on the alignment side and a transport end 31 and 32 on the inspection side, respectively. Is provided.
• the transfer ends 29 and 30 on the alignment side are the left end on the transfer robot 7 side on the loading side and the right end of the alignment section A on each of the sliders 63 and 64. Reciprocate between section A a and.
• the transport ends 31 and 32 on the inspection side are located on the right end A a.
• Reciprocate between and the right end of the side is performed in the same manner as in the first embodiment.
• the glass substrate 3 carried in from the carat by the transfer robot 7 floats on the substrate mounting table 1 and moves in the transfer direction C.
• each of the transfer ends 29, 30 is pulled by the transfer ends 29, waits at the alignment unit A, and is transferred above the holder 60.
• the suction positions of the transfer ends 29 and 30 are both ends of the rear surface of the glass substrate 3 which is on the front side in the transfer direction C.
• the glass substrate 3 is aligned on the holder 60 by the fine movement of the transfer ends 29 and 30 in the same manner as in the first embodiment. .
• the compressed air supply unit 46 is switched to the vacuum suction unit 47, and the glass substrate 3 is suction-held on the holder 60.
• the transfer end portions 29 and 30 release the suction holding to the glass substrate 3, and the left end portion of the transfer side transfer robot 7 side on each of the sliders 63 and 64 (substrate delivery).
• the holder 60 moves in the transport direction C while holding the glass substrate 3 by suction.
• various inspections of the glass substrate 3 are performed in the inspection section E in the same manner as described above.
• the arms of the transport ends 3 1 and 3 2 waiting at the substrate transfer reference position—3 1 a 3 2 a are raised, and the suction pads 3 1 b
• the rear surface of the glass substrate 3 is sucked and held by 3b.
• the suction positions of the transfer ends 31 and 32 are both ends of the rear surface of the glass substrate 3 on the front side in the transfer direction C.
• compressed air is supplied from the compressed air supply unit 46 to the substrate mounting table 16 to float the glass substrate 3 from above the holder 60. In this state, the glass substrate 3 is pulled by the transfer ends 31 and 32 and transferred at high speed onto the substrate mounting table 16.
• the unloading transfer robot 21 is inserted into the groove 19 and slightly raised. To hold the back surface of the glass substrate 3 by suction. At this time, the suction of the suction pads 3 1 b 3 2 b of the respective transport ends 31 and 32 from the back surface of the glass substrate 3 is released. The unloading transfer robot 21 raises the hand arm 22 and rotates the hand arm 22 forward and backward to remove the glass substrate 3 that has been inspected from the substrate mounting table 16. And store it in cassette ⁇ .
• the same effects as those of the first embodiment can be obtained.
• the lift pins 6 and 20 provided on the substrate mounting tables 1 and 16 for loading and unloading were eliminated, the operation time of each of the lift pins 6 and 20 was reduced. Can save time.
• the method of floating the glass substrate 3 is not limited to blowing air on the back surface of the glass substrate 3, but may be floating by an electrostatic method.
• the glass substrate 3 is levitated by the electrostatic method, it is preferable that the glass substrate 3 be neutralized.
• the method of transporting the floating glass substrate 3 is not limited to, for example, moving the pair of transport ends 29, 30 to a pair of sliders 23, 24, but also moving each groove 13
• Each transfer end having each suction pad may be movably provided therein, and the transfer end may transfer the suction while holding the back surface of the front end of the glass substrate 3.
• the suction holding position when the glass substrate 3 is transported is not limited to both ends of the glass substrate 3 in the transport direction C, but may be a glass substrate.
• the glass substrate 3 may be sucked and held at both ends of the front end and the rear end, or may be sucked and held at a plurality of locations along the center of each of two opposing sides of the glass substrate 3 or along the two sides. If the glass substrate 3 is sucked and held at the four corners of the glass substrate 3, the center of the two opposing sides, or at a plurality of locations along the two sides, not only the conveyance in the conveyance direction C but also the conveyance direction C The transport in the opposite direction is also possible. Further, the suction holding position of the glass substrate 3 may be the front surface or the front and back surfaces of the glass substrate 3 as long as it is a portion where a circuit pattern is not formed.
• any mechanism other than the transfer robots 7 and 21 may be used.
• substrate floating transfer means such as air transfer from another line may be used.
• the transfer of the glass substrate 3 in the in-line inspection in the manufacturing process of a flat panel such as a large LCD or a PDP has been described.
• the present invention is not limited to this. It can also be applied to levitating various substrates and plate-like objects and transporting them at high speed.
• the method of floating the glass substrate 3 and transporting it at high speed is not limited to the transport from the substrate mounting table 1 to the holder 60, but also to the case where a plurality of movable holders 60 are provided. It can also be applied to transport between different locations.
• Each of the positioning sensors 43 to 45 used in the alignment unit A uses a line sensor, but is not limited to this, and uses a two-dimensional CCD camera to recognize the edge position of the glass substrate 3. May be.
• Two grooves 5, 13, and 19, which serve as air escape paths, are provided to eliminate flatness in the center of the substrate 3 and maintain flatness, but these grooves 5, 13, and 19 are provided. As shown in FIG. 10, a plurality may be provided in parallel with the transport direction C. These grooves 5, 13 19 are air escape holes for the air holes 4, 12, and 18, so that both ends of the grooves are air-tight so that air can be discharged well. It is better to open the hole or to provide a round-slit air escape hole penetrating the back surface in the groove.
• each of the grooves 5, 13 and 19 may be quadrilateral, U-shaped, V-shaped, or arc-shaped.
• the width of each of the grooves 5, 13 and 19 is determined by forming an air layer between each of the substrate mounting tables 1 and 16 and the floating block 11 and the glass substrate 3 to form the glass substrate 3. The width length that allows for floating is good.
• the width of these grooves 5, 13 and 19 is preferably the same in the transport direction C, and the air pressure applied to the glass substrate 3 in the transport direction C is preferably uniform.
• a number of air blowing holes are provided at both ends of each substrate mounting table 1, 16 and the floating block 11. Air may be blown to both ends of the glass substrate 3 respectively.
• the respective sliders 63 and 64 are extended to the carry-out transfer port 21 side, but may be extended to the carry-in transfer port port 7 side.
• the present invention is applicable to manufacturing of large-sized LCDs and FPDs such as PDPs. It is used for the transfer of glass substrates in in-line inspection in the process, and the high-speed transfer of various substrates and plate-like objects by floating.

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• 2003
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