WO2009016920A1 - 浮上搬送装置および浮上搬送装置を備えた処理システム - Google Patents

浮上搬送装置および浮上搬送装置を備えた処理システム Download PDF

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Publication number
WO2009016920A1
WO2009016920A1 PCT/JP2008/062091 JP2008062091W WO2009016920A1 WO 2009016920 A1 WO2009016920 A1 WO 2009016920A1 JP 2008062091 W JP2008062091 W JP 2008062091W WO 2009016920 A1 WO2009016920 A1 WO 2009016920A1
Authority
WO
WIPO (PCT)
Prior art keywords
floating
region
unit
transfer apparatus
transfer
Prior art date
Application number
PCT/JP2008/062091
Other languages
English (en)
French (fr)
Inventor
Kensuke Hirata
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to KR1020107001201A priority Critical patent/KR101141122B1/ko
Priority to CN200880100155.5A priority patent/CN101815661B/zh
Publication of WO2009016920A1 publication Critical patent/WO2009016920A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

　外部の装置から対象物を引き出して流体により浮上および搬送する用途のための浮上搬送装置は、第１の領域と第２の領域を有する基台と、前記対象物に接触して前記第１の領域から前記第２の領域へ搬送するべくそれぞれ構成された、前記第１の領域に配列された第１の搬送装置および前記第２の領域に配列された第２の搬送装置と、前記対象物へ浮力を付与するべく前記流体を噴出するための噴出孔を備え、前記基台上に配置された第１の浮上装置と、前記基台上に前記第１の搬送装置に沿って配置され、前記対象物へ浮力を付与するべく前記流体を噴出するための噴出孔を備え、前記対象物の前記第１の搬送装置上における浮上高さを、前記第２の搬送装置が前記対象物に駆動的に接触することを防止する第１の高さと、前記搬送装置が前記対象物に駆動的に接触することを許容する第２の高さとの間で制御する第２の浮上装置と、を備える。
PCT/JP2008/062091 2007-07-27 2008-07-03 浮上搬送装置および浮上搬送装置を備えた処理システム WO2009016920A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020107001201A KR101141122B1 (ko) 2007-07-27 2008-07-03 부상 반송 장치 및 부상 반송 장치를 포함하는 처리 시스템
CN200880100155.5A CN101815661B (zh) 2007-07-27 2008-07-03 悬浮输送装置及具有悬浮输送装置的处理系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007195828A JP5125290B2 (ja) 2007-07-27 2007-07-27 浮上搬送装置及び処理搬送システム
JP2007-195828 2007-07-27

Publications (1)

Publication Number Publication Date
WO2009016920A1 true WO2009016920A1 (ja) 2009-02-05

Family

ID=40304157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062091 WO2009016920A1 (ja) 2007-07-27 2008-07-03 浮上搬送装置および浮上搬送装置を備えた処理システム

Country Status (5)

Country Link
JP (1) JP5125290B2 (ja)
KR (1) KR101141122B1 (ja)
CN (1) CN101815661B (ja)
TW (1) TWI411567B (ja)
WO (1) WO2009016920A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010232472A (ja) * 2009-03-27 2010-10-14 Dainippon Screen Mfg Co Ltd 基板搬送装置および基板処理装置
CN102515069B (zh) * 2011-12-28 2013-09-18 余文胜 空气浮力托举移动器及使用其的运输设备
JP5924018B2 (ja) * 2012-02-14 2016-05-25 株式会社Ihi 搬送装置および搬送方法
NL2009764C2 (en) * 2012-11-06 2014-05-08 Univ Delft Tech An apparatus for carrying and transporting a product.
CN105151780B (zh) * 2015-08-28 2018-11-23 武汉华星光电技术有限公司 一种超声波传送装置
CN108373043A (zh) * 2018-03-20 2018-08-07 郑州铁陇实业有限公司 一种利用浮力的物料输送设备
JP6853520B2 (ja) * 2018-09-20 2021-03-31 株式会社Ｎｓｃ 浮上搬送装置
CN109638122B (zh) * 2018-12-20 2019-08-27 广东工业大学 一种采用超声驻波操纵Micro-LED巨量转移的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003086917A1 (fr) * 2002-04-18 2003-10-23 Olympus Corporation Dispositif de transport de substrat
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4330703B2 (ja) * 1999-06-18 2009-09-16 東京エレクトロン株式会社 搬送モジュール及びクラスターシステム
JP3759450B2 (ja) * 2001-12-19 2006-03-22 株式会社白井▲鉄▼工所 液晶パネルの折割装置
JP2005321505A (ja) * 2004-05-07 2005-11-17 Kokusai Gijutsu Kaihatsu Co Ltd 露光装置
JP4704756B2 (ja) * 2005-01-04 2011-06-22 オリンパス株式会社 基板搬送装置
JP4594241B2 (ja) * 2006-01-06 2010-12-08 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びコンピュータプログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003086917A1 (fr) * 2002-04-18 2003-10-23 Olympus Corporation Dispositif de transport de substrat
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置

Also Published As

Publication number Publication date
JP5125290B2 (ja) 2013-01-23
KR20100032431A (ko) 2010-03-25
TW200914348A (en) 2009-04-01
JP2009029579A (ja) 2009-02-12
KR101141122B1 (ko) 2012-05-02
TWI411567B (zh) 2013-10-11
CN101815661A (zh) 2010-08-25
CN101815661B (zh) 2013-04-24

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