JP6853520B2 - 浮上搬送装置 - Google Patents
浮上搬送装置 Download PDFInfo
- Publication number
- JP6853520B2 JP6853520B2 JP2018175852A JP2018175852A JP6853520B2 JP 6853520 B2 JP6853520 B2 JP 6853520B2 JP 2018175852 A JP2018175852 A JP 2018175852A JP 2018175852 A JP2018175852 A JP 2018175852A JP 6853520 B2 JP6853520 B2 JP 6853520B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- glass substrate
- levitation
- transport
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007667 floating Methods 0.000 title claims description 62
- 238000012546 transfer Methods 0.000 title claims description 57
- 239000000758 substrate Substances 0.000 claims description 141
- 230000032258 transport Effects 0.000 claims description 103
- 239000011521 glass Substances 0.000 claims description 88
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 66
- 238000005339 levitation Methods 0.000 claims description 62
- 238000002347 injection Methods 0.000 claims description 33
- 239000007924 injection Substances 0.000 claims description 33
- 238000005530 etching Methods 0.000 description 69
- 239000000243 solution Substances 0.000 description 24
- 239000007788 liquid Substances 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 229920000306 polymethylpentene Polymers 0.000 description 7
- 239000011116 polymethylpentene Substances 0.000 description 7
- 239000007921 spray Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229960002050 hydrofluoric acid Drugs 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 208000028659 discharge Diseases 0.000 description 1
- -1 fluororesin Polymers 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920005678 polyethylene based resin Polymers 0.000 description 1
- 229920005673 polypropylene based resin Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/01—Hydraulic transport of articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
12‐搬入部
14-前水洗チャンバ
161‐第1のエッチングチャンバ
18-後水洗チャンバ
24‐ガラス基板
30-搬送ローラ
60-浮上搬送ユニット
62‐水浮上搬送部
64-エアナイフ
66-第1のエア浮上搬送部
68-第2のエア浮上搬送部
Claims (4)
- ガラス基板を浮上させた状態で搬送する浮上搬送装置であって、
表面上に水膜を形成するように構成された水膜形成プレートを有する水浮上搬送部と、
前記水浮上搬送部の後段に配置され、前記ガラス基板にエアを噴射するように構成されたエアナイフと、
前記エアナイフの後段に配置され、前記ガラス基板に下方からエアを噴射する噴射孔が形成された浮上搬送プレートを有するエア浮上搬送部と、
前記水浮上搬送部および前記エア浮上搬送部において、前記ガラス基板の搬送方向に沿って、前記ガラス基板の下面に接触するように配置されるベルトが張架された搬送ローラと、
を少なくとも備える浮上搬送装置。 - 前記エア浮上搬送部は、第1のエア浮上搬送部と、第2のエア浮上搬送部と、
を有し、
第1のエア浮上搬送部は、前記エアナイフと前記第2のエア浮上搬送部の間に配置され、
前記第2のエア浮上搬送部は、前記浮上搬送プレートの表面にエアを吸引する吸引孔が形成されていることを特徴とする請求項1に記載の浮上搬送装置。 - 前記第1のエア浮上搬送部は、前記エアナイフと接する領域にエアを吸引する吸引孔を備えることを特徴とする請求項2に記載の浮上搬送装置。
- 前記エアナイフは、前記ガラス基板の両主面にエアを噴射することを特徴とする請求項1〜3のいずれか1項に記載の浮上搬送装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018175852A JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
PCT/JP2019/036747 WO2020059796A1 (ja) | 2018-09-20 | 2019-09-19 | 浮上搬送装置 |
CN201980075803.4A CN113412535B (zh) | 2018-09-20 | 2019-09-19 | 悬浮输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018175852A JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020047820A JP2020047820A (ja) | 2020-03-26 |
JP6853520B2 true JP6853520B2 (ja) | 2021-03-31 |
Family
ID=69888457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018175852A Active JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6853520B2 (ja) |
CN (1) | CN113412535B (ja) |
WO (1) | WO2020059796A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115156142B (zh) * | 2022-05-30 | 2024-04-30 | 江苏亚电科技股份有限公司 | Psg水膜喷淋机构及光伏硅片附水膜方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP4217963B2 (ja) * | 2003-07-08 | 2009-02-04 | 株式会社ダイフク | 板状体搬送装置 |
JP2005247516A (ja) * | 2004-03-05 | 2005-09-15 | Tokyo Electron Ltd | 浮上式基板搬送処理装置 |
JP4608954B2 (ja) * | 2004-06-09 | 2011-01-12 | 株式会社Ihi | 搬送装置 |
JP4745040B2 (ja) * | 2005-12-05 | 2011-08-10 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理装置 |
JP5125290B2 (ja) * | 2007-07-27 | 2013-01-23 | 株式会社Ihi | 浮上搬送装置及び処理搬送システム |
DK2289097T3 (da) * | 2008-06-19 | 2013-01-14 | Rena Gmbh | Fremgangsmåde og anordning til transportering af genstande |
JP5426890B2 (ja) * | 2009-02-03 | 2014-02-26 | 株式会社渡辺商行 | 浮上搬送装置および浮上搬送方法 |
JP2010206037A (ja) * | 2009-03-05 | 2010-09-16 | Tokyo Electron Ltd | 基板搬送装置 |
JP5369128B2 (ja) * | 2011-03-01 | 2013-12-18 | 東京エレクトロン株式会社 | 浮上式塗布装置 |
JP5877954B2 (ja) * | 2011-03-07 | 2016-03-08 | 株式会社ゼビオス | 非接触浮上搬送機能を有する基板処理装置 |
JP5334216B2 (ja) * | 2011-10-28 | 2013-11-06 | 株式会社Nsc | ガラス基板の製造方法 |
JP5990914B2 (ja) * | 2012-02-01 | 2016-09-14 | 株式会社Ihi | 搬送装置 |
JP5912642B2 (ja) * | 2012-02-20 | 2016-04-27 | 日本電気硝子株式会社 | ガラス板の搬送装置及びその搬送方法 |
JP5943799B2 (ja) * | 2012-09-28 | 2016-07-05 | AvanStrate株式会社 | ガラス基板の搬送装置、および、ガラス基板の製造方法 |
KR101773494B1 (ko) * | 2013-02-26 | 2017-08-31 | 가부시키가이샤 아이에이치아이 | 반송 장치 |
JP6949455B2 (ja) * | 2014-12-24 | 2021-10-13 | 株式会社タンケンシールセーコウ | 非接触搬送装置、および非接触吸着盤 |
-
2018
- 2018-09-20 JP JP2018175852A patent/JP6853520B2/ja active Active
-
2019
- 2019-09-19 CN CN201980075803.4A patent/CN113412535B/zh active Active
- 2019-09-19 WO PCT/JP2019/036747 patent/WO2020059796A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2020047820A (ja) | 2020-03-26 |
WO2020059796A1 (ja) | 2020-03-26 |
CN113412535A (zh) | 2021-09-17 |
CN113412535B (zh) | 2024-06-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101322983B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
JP2009148699A (ja) | 基板処理装置 | |
JP2001085496A (ja) | 板状部材の搬送装置 | |
KR101069600B1 (ko) | 부상식 기판 코터 장치 및 그 코팅 방법 | |
JP6853520B2 (ja) | 浮上搬送装置 | |
KR20190013479A (ko) | 스크라이브 장치 | |
KR100670630B1 (ko) | 처리액 공급장치 | |
KR100764683B1 (ko) | 기판처리장치 | |
JP3901635B2 (ja) | 板材の酸処理設備 | |
JP2006019525A (ja) | 基板処理装置 | |
KR101634705B1 (ko) | 기판 처리 장치 | |
JP2014114085A (ja) | 基板浮上装置および基板浮上装置の洗浄方法 | |
JP2021120623A (ja) | 板厚測定装置 | |
KR101280220B1 (ko) | 인라인 타입의 기판 코터 장치 및 그 방법 | |
JP2010131485A (ja) | 基板の液切り装置および液切り方法 | |
KR100548944B1 (ko) | 판상부재의 반송장치 | |
WO2020004569A1 (ja) | エッチング装置 | |
JP5906035B2 (ja) | 塗布装置 | |
JP2020019667A (ja) | エッチング装置 | |
TWI748386B (zh) | 塗佈裝置及塗佈方法 | |
KR101303461B1 (ko) | 약액의 얼룩을 방지하는 인라인 타입의 기판 코터 장치 및 그 방법 | |
JP5604940B2 (ja) | 浮上搬送装置 | |
KR20080005948U (ko) | 기판 부상패드 및 이를 이용한 대면적 기판 부상장치 | |
JP2018073960A (ja) | エッチング装置 | |
KR101857770B1 (ko) | 기판 코팅장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181024 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190919 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191010 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191212 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200928 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201117 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210302 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210302 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6853520 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |