DK2289097T3 - Fremgangsmåde og anordning til transportering af genstande - Google Patents
Fremgangsmåde og anordning til transportering af genstandeInfo
- Publication number
- DK2289097T3 DK2289097T3 DK09765641.7T DK09765641T DK2289097T3 DK 2289097 T3 DK2289097 T3 DK 2289097T3 DK 09765641 T DK09765641 T DK 09765641T DK 2289097 T3 DK2289097 T3 DK 2289097T3
- Authority
- DK
- Denmark
- Prior art keywords
- transporting objects
- transporting
- objects
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008028848 | 2008-06-19 | ||
PCT/EP2009/004461 WO2009153061A1 (de) | 2008-06-19 | 2009-06-19 | Verfahren und vorrichtung zum transportieren von gegenständen |
Publications (1)
Publication Number | Publication Date |
---|---|
DK2289097T3 true DK2289097T3 (da) | 2013-01-14 |
Family
ID=41065980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK09765641.7T DK2289097T3 (da) | 2008-06-19 | 2009-06-19 | Fremgangsmåde og anordning til transportering af genstande |
Country Status (7)
Country | Link |
---|---|
US (1) | US9355880B2 (da) |
EP (1) | EP2289097B1 (da) |
KR (1) | KR101225003B1 (da) |
CN (1) | CN102105974B (da) |
DK (1) | DK2289097T3 (da) |
ES (1) | ES2396037T3 (da) |
WO (1) | WO2009153061A1 (da) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010053332A1 (de) * | 2010-12-03 | 2012-06-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Handhaben von Werkstücken |
KR101289167B1 (ko) * | 2011-09-05 | 2013-07-26 | 주식회사 포스코 | 벨트 컨베이어 슈트 충격 완화 스탠드 |
EP2648213B1 (en) * | 2012-04-04 | 2014-10-22 | RENA GmbH | Apparatus and method for the transport on a liquid |
DE102012221452A1 (de) * | 2012-07-20 | 2014-01-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Separieren von Wafern |
DE102012110916B4 (de) * | 2012-11-13 | 2014-07-17 | Hochschule Offenburg | Verfahren und Vorrichtung zum Transport flacher Substrate |
JP6853520B2 (ja) * | 2018-09-20 | 2021-03-31 | 株式会社Nsc | 浮上搬送装置 |
JP7437186B2 (ja) * | 2020-02-26 | 2024-02-22 | Jswアクティナシステム株式会社 | 浮上搬送装置、及びレーザ処理装置 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3588176A (en) | 1968-11-13 | 1971-06-28 | Ibm | Article transport system and method |
US3761002A (en) * | 1972-11-15 | 1973-09-25 | Ibm | Fluid bearing having discrete holes formed by vortex restrictors |
US3870460A (en) * | 1974-04-03 | 1975-03-11 | Gca Corp | Single or multi-track fluid bearing heating apparatus and method |
US4395165A (en) * | 1980-12-19 | 1983-07-26 | International Business Machine Corp. | Chip shuttle track |
NL8401776A (nl) * | 1984-06-04 | 1986-01-02 | Bok Edward | Verbeterde double-floating wafer transport/processing installatie. |
US4722276A (en) * | 1986-08-01 | 1988-02-02 | Tyler Jack D | Air blast for preventing contact of wet ink sheets with printing press delivery mechanisms |
US4874273A (en) * | 1987-03-16 | 1989-10-17 | Hitachi, Ltd. | Apparatus for holding and/or conveying articles by fluid |
DE3923405A1 (de) | 1989-07-14 | 1991-01-24 | Wacker Chemitronic | Vorrichtung zum transportieren und positionieren von scheibenfoermigen werkstuecken, insbesondere halbleiterscheiben, und verfahren zur nasschemischen oberflaechenbehandlung derselben |
DE4039313A1 (de) | 1990-12-04 | 1992-08-20 | Hamatech Halbleiter Maschinenb | Transportvorrichtung fuer substrate |
DE4100526A1 (de) * | 1991-01-10 | 1992-07-16 | Wacker Chemitronic | Vorrichtung und verfahren zum automatischen vereinzeln von gestapelten scheiben |
WO1994002395A1 (en) | 1992-07-15 | 1994-02-03 | Minnesota Mining And Manufacturing Company | Fluid transport system for transporting articles |
DE69306581T2 (de) | 1992-07-15 | 1997-06-05 | Minnesota Mining & Mfg | Handhabungssystem für artikel |
US5669953A (en) * | 1995-03-07 | 1997-09-23 | Glasstech, Inc. | Glass sheet forming system |
US6053668A (en) * | 1997-08-29 | 2000-04-25 | Daitron, Inc. | Water slide for transferring semiconductor wafers |
US6203250B1 (en) * | 1997-12-16 | 2001-03-20 | Ngk Insulators, Ltd. | Article feeding apparatus |
AT406046B (de) * | 1998-02-24 | 2000-01-25 | Lisec Peter | Vorrichtung zum transportieren und kühlen von glasscheiben |
US6264404B1 (en) * | 1998-07-13 | 2001-07-24 | Seagate Technology, Inc. | System and method for hydrodynamic loading and unloading of objects into and out of substantially touchless hydrodynamic transport systems |
NL1009719C2 (nl) * | 1998-07-23 | 2000-01-25 | Greefs Wagen Carrosserie | Inrichting en werkwijze voor het vanuit een houder met vloeistof verenkelen en/of op steek brengen van vruchten. |
US6336775B1 (en) * | 1998-08-20 | 2002-01-08 | Matsushita Electric Industrial Co., Ltd. | Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus |
EP1350830A4 (en) | 2000-10-24 | 2004-12-01 | Jgc Corp | REFINED OIL AND PROCESS FOR PRODUCING THE SAME |
US6676365B2 (en) * | 2001-03-16 | 2004-01-13 | Toda Kogyo Corporation | Air track conveyor system for disk production |
DE50210613D1 (de) * | 2002-12-05 | 2007-09-13 | Peter Lisec | Vorrichtung zum festhalten von werkstoffplatten, wie glasscheiben während ihrer bearbeitung |
KR100968284B1 (ko) * | 2002-12-27 | 2010-07-06 | 코레플로우 사이언티픽 솔루션스 리미티드 | 고성능 비접촉식 지지 플랫폼 |
TWI295658B (en) * | 2003-08-21 | 2008-04-11 | Daifuku Kk | Transporting apparatus |
US7080962B1 (en) * | 2005-05-31 | 2006-07-25 | Kimberly-Clark Worldwide, Inc. | Air conveyance apparatus |
JP4594241B2 (ja) * | 2006-01-06 | 2010-12-08 | 東京エレクトロン株式会社 | 基板搬送装置、基板搬送方法及びコンピュータプログラム |
DE102007024945A1 (de) * | 2006-06-06 | 2007-12-13 | Eastman Kodak Co. | Verfahren und Vorrichtung zum Transport eines Bogens in einer Druckmaschine |
JP2008024508A (ja) * | 2006-06-19 | 2008-02-07 | Duplo Corp | 給紙装置 |
CN102341211A (zh) * | 2009-03-03 | 2012-02-01 | 日立Via机械株式会社 | 工件的薄膜加工方法及薄膜加工装置 |
US20120213599A1 (en) * | 2009-07-15 | 2012-08-23 | Toyo Kohan Co., Ltd | Web Floating and Conveying Device and Method of Manufacturing Same |
JP2013528544A (ja) * | 2010-05-03 | 2013-07-11 | イノバ・リゼツク・テクノロジーツエントルム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 板状素子を運搬するための装置 |
-
2009
- 2009-06-19 DK DK09765641.7T patent/DK2289097T3/da active
- 2009-06-19 ES ES09765641T patent/ES2396037T3/es active Active
- 2009-06-19 KR KR1020107029617A patent/KR101225003B1/ko active IP Right Grant
- 2009-06-19 WO PCT/EP2009/004461 patent/WO2009153061A1/de active Application Filing
- 2009-06-19 CN CN200980128679.XA patent/CN102105974B/zh active Active
- 2009-06-19 EP EP09765641A patent/EP2289097B1/de active Active
- 2009-06-19 US US12/999,061 patent/US9355880B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20110097160A1 (en) | 2011-04-28 |
EP2289097A1 (de) | 2011-03-02 |
EP2289097B1 (de) | 2012-10-10 |
CN102105974A (zh) | 2011-06-22 |
WO2009153061A1 (de) | 2009-12-23 |
US9355880B2 (en) | 2016-05-31 |
KR20110016459A (ko) | 2011-02-17 |
ES2396037T3 (es) | 2013-02-18 |
KR101225003B1 (ko) | 2013-01-22 |
CN102105974B (zh) | 2016-04-20 |
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