WO2003086917B1 - Dispositif de transport de substrat - Google Patents

Dispositif de transport de substrat

Info

Publication number
WO2003086917B1
WO2003086917B1 PCT/JP2003/004835 JP0304835W WO03086917B1 WO 2003086917 B1 WO2003086917 B1 WO 2003086917B1 JP 0304835 W JP0304835 W JP 0304835W WO 03086917 B1 WO03086917 B1 WO 03086917B1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
transfer apparatus
correction
transport direction
floating block
Prior art date
Application number
PCT/JP2003/004835
Other languages
English (en)
Japanese (ja)
Other versions
WO2003086917A1 (fr
Inventor
Mamoru Yasuda
Nobuo Fujisaki
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to CN038087073A priority Critical patent/CN1646400B/zh
Priority to JP2003583893A priority patent/JP4384504B2/ja
Priority to KR1020047014207A priority patent/KR100633970B1/ko
Publication of WO2003086917A1 publication Critical patent/WO2003086917A1/fr
Publication of WO2003086917B1 publication Critical patent/WO2003086917B1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un dispositif de transport de substrat, dans lequel de l'air est soufflé à travers plusieurs trous de passage d'air (4, 18, 12) formés dans des tables de placement de substrat (1, 16) et un bloc flottant (11) permettant de faire flotter un substrat de verre (3), et le substrat de verre (3) flotté est transporté alors que ses deux extrémités de pointe sont maintenues par succion et tirées dans une direction de transport (C).
PCT/JP2003/004835 2002-04-18 2003-04-16 Dispositif de transport de substrat WO2003086917A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN038087073A CN1646400B (zh) 2002-04-18 2003-04-16 衬底输送装置
JP2003583893A JP4384504B2 (ja) 2002-04-18 2003-04-16 基板搬送装置
KR1020047014207A KR100633970B1 (ko) 2002-04-18 2003-04-16 기판 반송 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002-116581 2002-04-18
JP2002116581 2002-04-18

Publications (2)

Publication Number Publication Date
WO2003086917A1 WO2003086917A1 (fr) 2003-10-23
WO2003086917B1 true WO2003086917B1 (fr) 2004-04-08

Family

ID=29243459

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/004835 WO2003086917A1 (fr) 2002-04-18 2003-04-16 Dispositif de transport de substrat

Country Status (5)

Country Link
JP (4) JP4384504B2 (fr)
KR (3) KR100848228B1 (fr)
CN (4) CN101412472B (fr)
TW (1) TWI226303B (fr)
WO (1) WO2003086917A1 (fr)

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* Cited by examiner, † Cited by third party
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JP4633161B2 (ja) 2011-02-16
CN101407283A (zh) 2009-04-15
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CN1646400A (zh) 2005-07-27
JP2009051672A (ja) 2009-03-12
WO2003086917A1 (fr) 2003-10-23
JP4896112B2 (ja) 2012-03-14
KR20060081423A (ko) 2006-07-12
CN101407284A (zh) 2009-04-15
KR20040099319A (ko) 2004-11-26
JPWO2003086917A1 (ja) 2005-08-18
CN101407284B (zh) 2012-09-05
CN101407283B (zh) 2013-07-10
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JP4384504B2 (ja) 2009-12-16
CN101412472B (zh) 2012-11-28
CN101412472A (zh) 2009-04-22
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KR100848229B1 (ko) 2008-07-24
TWI226303B (en) 2005-01-11

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