TW200306938A - Substrate carrying device - Google Patents

Abstract

A substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction.

Description

200306938

FIELD OF THE INVENTION The present invention relates to: 嫱 ii ^ Γτ rn :: Lets, for example, a large liquid crystal screen (hereinafter referred to as "rabbit rabbit LCD"), or a thunder candle, 栴 栴 栴 栴 ,, 水 幕 幕 ( Hereafter referred to as "PDP") and other early-slate glass substrates (hereinafter referred to as "ρρη,, t J seeking ten faces am ^ ^-hh") are floated on the transport route to order a substrate for I shipment Transfer device. Heavenly prior art

In recent years, in order to meet the requirements of large-scale daylight and cost reduction, the glass substrate size in the FPD process in the FPD field has shown a tendency to increase in size; in the FpD process, the method of transporting large glass-based phases A rolling conveying mechanism using a roller is most widely known. The technology for conveying large glass substrates has been described in, for example, Japanese Patent Laid-Open No. 200 0-1 93604 and Japanese Patent Laid-Open No. 2000-9660 1; the former Because of the restriction of bending of this glass substrate, air pressure is blown under the glass substrate. Only a pair of supporting roller mechanism is used to contact the left and right sides below the substrate to be inspected (equivalent to the glass substrate), and then Supported by a pair of restricting roller mechanisms that contact the left and right end edges of the glass substrate to restrict the left and right direction; in addition, the middle part of the glass substrate will bend down due to its own weight

The latter belongs to: after the glass substrate is transported to the defect inspection section by the rolling conveying section, after positioning the glass substrate, the end of the glass substrate is supported through the support mechanism, and then the defect inspection is performed; when the defect inspection is performed, The glass substrate is supported by the secondary type, so high-pressure air is blown out from an air outlet provided on the air-floating table, so as to keep the height of the glass substrate at a constant level.

Page 6 200306938 V. Description of Invention (2) State. ^ When transporting the former glass, the wheel mechanism, and a pair of pp systems, swallow the detachable substrate 牯 because of the use of-after supporting the roller, contacting the glass of the roller 2 :: 2 'so when the broken glass substrate is transported at high speed trace. The rolling surface of the soil plate will cause the friction marks of the roller. The former is the same as the rolling surface because it transports the glass substrate: The roller will also generate :::; =: The glass substrate contacting the roller leaves the glass substrate 4: = ,; : Transfer in non-contact state. Under the condition of "high-speed transportable"-the main content of the base content according to the present invention has been provided, along the transport route: a substrate floating mechanism with a route, and the two ends of the board, and then transported along Looking at the route, the provided substrate transfer device can float the substrate on the transfer substrate floating mechanism to support the transfer mechanism for the floating substrate transfer. Embodiment ^ A first embodiment of the present invention will be described below with reference to the drawings. #

Fig. 1 is a plan view of a substrate transfer device used for in-llne inspection of FPDs such as large LCDs or PDPs, and Fig. 2 is a side view of the device. The substrate stage i for transportation is placed on the vibration isolation stage 2;

7 pages 200306938 V. Description of the invention " --- 4 = 1 contains the glass substrate 3 that has been moved in, Yan Xuankuan

The main vertical direction) is only slightly wider than the width of the glass substrate 3. In this direction, C = the soil surface, it is provided with both blowing air and attracting "on the stage 1 1 and on the substrate stage 丨, Then, there is an interval between two people on the stage. In addition, the substrate stage 16 (lift pin). The number of lift pins that are used to perform the elevation are shown in the direction C of the μ stage 1. At the entrance end in the vertical direction, is shown in the figure: 俨 = # 7; the loading robot arm 7 is used to move, forward and backward; the arm allows the two arms 8 to rotate the glass substrate 3 and then move people (⑽ette) takes out the unchecked glass into a length; the carrying-in port and the carrying-in end of the glass substrate 3 are carried out from the carrying rod and mounted on the vibration isolation table 10. (The carrying direction c is " Vertical " " Set pollution lifting block 11; the width-width of this floating block 11; the floating block u is upward)) 'Slightly shorter than the number of air holes 12 of the glass substrate 3; Ran Qu is provided with both air blowing and suction functions. It can be installed on the floating block 1 丨. These air holes 12 can be provided. As long as the equal comprehensive groove 13 is flat in the transport direction c, this floating block 11 Then, the surface height of the two tender grooves 11 is formed, and the direction is set at a predetermined interval. In addition, the floating height J is equal to the surface height of the substrate stage 1.

200306938 V. Description of the invention (4) The conveying direction c of the conveying rack 9 is provided at the central position of the glass which is conveyed at a certain speed, and E can be provided for this inspection section E; this inspection section E belongs to, for example, the inspection section for performing various inspections. (Line sensor) or CCD camera is equipped with a line sensor. For the inspection machine 14 is a line sensor for obtaining the material of the glass substrate 3 by using various examples of inspection machines, for pattern inspection, defect inspection, etc. To Y / this and then ^ and so on. In order to perform image processing on this image data, the exit end of the wafer is provided with a substrate stage 16 for carrying out along the conveying direction C; is this substrate art! Β on the skin & respect% W, e Loading. 1 6 ， It is installed on the vibration isolation table Η | 'This substrate stage 16 暂时 is temporarily set in order to carry out from ^ ^' its wide width (vertical to the conveying direction c = base id glass: substrate 3 Wide; on top of the substrate stage 16, set ^ = several air holes 18 that play a role of lice and suction function; Moreover, the two different holes 18, K must be fully set on the substrate stage in a regular manner That is, on the substrate-on the substrate stage 16, two grooves 19 are formed, and the conveying direction is a pair of directions, and there is a predetermined interval; in addition, when the substrate carrier is removed from the glass substrate 3 ' The several liters used to perform the lifting :::, the surface height of the object table u is almost the same as the base surface of the floating block 20 'degree. _. The direction C for the substrate stage 16 is vertical At the exit end, there is a carrying robot arm 21 for carrying out; the carrying robot arm for carrying out is used, and the arm 3 wire is a multi-joint arm not shown on the figure, so that the two arms 22 can be turned around and moved in and out. Move back and store the inspected glass substrate 3 in the cassette

200306938 V. Description of Invention (5). A pair of sliders 23 are arranged in parallel along the transport directions C of several assemblies in such a manner that the floating block 11 and the substrate stage 16 are clamped on the transport rack 9 and the vibration isolation stage 17. ~ 28 ;, the sliders 23, 24, and 27, 28 are provided outside the pair of sliders 25, 26; in addition, the setting height positions of these sliders 23 to 28 are almost the same. A pair of sliders 2 3, 2 4 are provided at an alignment A at the entrance end of the conveyance rack 9; these sliders 23, 24 are provided with a movable pair of conveying end portions 2 9, 3 0 ; The transport ends 29, 30 are arranged on the arms 29a, 30a which can be extended and retracted in the up-down direction, and can rotate freely, and the front ends of these arms 29a, 30a are in charge of the adsorption branch In the suction cups 29b, 30b and each of the conveying end portions 29, 30, there are two end portions of the inner surface of the glass substrate 3, and each arm 2 9a, 30a. It has a conveying direction C and a vertical direction Moving plunger. '' A pair of sliders 25 and 26 are provided between the exit end of the alignment section A and the exit end of the transport rack 9; these sliders 2 5 and 2 are provided with a movable pair of each transport end 3 1 These conveying end portions 3 1 and 3 2 are the same as the respective conveying end portions 29 and 30 and have respective arms 31 a and 3 2 b and suction cups 31 b and 32 b. A pair of sliders 27 and 28 is provided between the exit end of the conveyance rack 9 and the exit end of the substrate stage 16; these sliders 2 7, 2 8 are provided with a movable pair of conveyance ends. 33, 34; these transfer end portions 33, 34 are the same as each transfer end portion 29, 30, and have arms 33a, 34b and suction cups 33b, 34b 9; further, a pair of sliders 23, 24, and 27 , 28 are set on a pair of slides

Page 10 200306938 V. Description of the invention (6) The outside of blocks 2 5, 26, so the positions of the suckers 29b, 30b \ 33b, 34b of each slider 23, 24 and 27, 28 are the same as those of each slider 25 The positions of the suction cups 31b and 32b of 26 and 26 set the lengths of the arms 29a, 30a, 33a and 34a. In addition, as long as these conveying end portions 29, 30, 31, 32, 33, and 34 have a mechanism that supports the glass substrate 3 and allows each arm 29a, 30a, 31a, 32b, 33a, and 34a to move in the XY direction, it does not matter Any kind of composition is acceptable. The alignment part A 'on the floating block 11 is provided with three positioning sensors 4 3 ~ 4 >5; these positioning sensors 43 ~ 45 are responsible for detecting the straight parent of the glass & plate 3. After each edge of two sides (vertical and horizontal), a 夂 detection signal indicating the position of the edge is output; these positioning sensors 43 to 45 are linear sensors in which a plurality of detection elements σ are arranged in a line. The position sensor 4 3 sets the linear detection direction to be the same as the conveying direction w at the middle position of the π width direction of the floating block; this positioning inspection is performed by f 'to stop floating at the alignment portion A. The bright edge of the glass substrate 3 in the conveying direction C. The center of the heart = 4,4,45 'is provided with a predetermined measurement on the side of the floating block 11, and 45' is linearly detected in the conveying direction c, and the position of the sensor 44 ... is positioned. Drought 7 and 7, the edge of the glass substrate 3 in the conveying direction c

Page 11 V. Description of the invention (7) The gap part is then supplied in a selective manner and is willing to be shrunk ^ ... blown, compressed air, and the glass substrate 3 is floated on the carrying port 1, the floating block 11 and the carrying substrate for carrying On the object table 16; In addition, the material should be: 46 has ionization air for each air hole 4, 12, 18 to play an antistatic effect, starting from% ionized air such as cation or anion. The work is carried through the substrate stage for carrying in through the take-over I / Λ substrate stage! Or moving out of the utensils, including: loading port ^, holes 4, 12, 18, and the board 3 for moving in. On the substrate stage 16 for discharge, the glass substrate 30b i 30b Hb, 3 holes, 3 flutters, and 3 strands are adsorbed and supported, and the suction mechanism sucks each of the suction cups 2 仏, and the movement control unit 48 is responsible for holding the 夂 舻 ... / Adsorb and support the glass substrate 3. The posture recognition unit 49 is responsible for _out & 27, 28 to enter the control. Each of the output detection signals: == the position of the glass substrate 3 indicated by the position of the glass substrate 3 indicated by the two edge detection signals from the three edge positions of the substrate 3 of the two positioning sensors 43 to 45, and the position of the glass substrate 3. Substrate 3. The posture is regarded as the identification portion 49 ′, and the identified glass is aligned toward C and the conveying direction e toward ^^, so it is 1 2 to the conveying party. The pair of conveyance end portions 31 are controlled by the private movement in the straight direction. 1. The operation of the above-mentioned device will be described below. '' Each transfer her, 30, move to the carry-in end on each slider 23, 24 200306938 V. Description of the invention (8), then stop to enter the standby state. Back :: use; let arm 8 perform rotation, forward and substrate loading? After the glass door 3 of Λ Λ comes out of the square door, it will be transferred to the ascending ^ At the same time, each of the lifting pins 6 of the substrate stage 1, then ifv ;, J ^ ^ ^ κ y on each of the lifting pins 6, each lifting pin;:; r · each of the lifting pins ~ === drop c = object table wide, 'this will be from the substrate stage丨 protruding glass; base length: = come to each of the conveyance ends 29, 30 ', then let each arm 29a, 30a rise so that each sucker 29b, 30b adsorbs from the substrate load · (* ^ 3 ^^; at ^ «29b.3〇b ^^^: The plate 3 forms the inner end of the circuit pattern, for example, two two, and the glass substrate 3 forms the two ends of the inner end of the front end; & And 30b in the state where the inner surface of the glass substrate 3 is adsorbed is higher than the surface height of the substrate stage 1. The compressed air supply section 46 is opened on the upper side through the pipe, and then blows from the air hole 4 To compress the air, use the static electricity of the ion * ^ ^ with static elimination effect to prevent the glass substrate 3 from having static electricity. * &Quot; 5 substrate 3 pain door jealous 5 f ^ :: chaos' on the substrate stage 1 with Table 2 of the glass substrate 3 :: This Γ ΓΛ is shown in Fig. 3 'will be contaminated from the surface of the substrate stage 1 scoop. Here, the air blown from each air hole 4 is from the air layer. Each groove 5 'on the substrate stage] and the glass substrate

200306938 V. Description of the invention (9) _ flow; in other words, air circulates without being trapped between the substrate stage 丨 toilet ′. Therefore, glass substrate = substrate 3 floats on the substrate stage 丨. θ comments are thousands of degrees, and the next 'movement control section 48 is shown in FIG. 4 and will be adsorbed on the inner surface of the glass substrate 3 with cymbal ^, and has each sucker 29b, 30: speed 5 Xiangbu 29, 30 (Arms 29a, 30a) synchronize, and then move the end blocks 23, 24 again. 3. Limen dagger moves the sliding glass substrates 3 privately. In this way, the top of the floating substrate load and the top of the lifting block 11 are completely in a non-contact state, and then the openings are pulled up to the ends 29 and 30. The glass substrate 3 that is stretched and then transported at a high speed to the transporting side will arrive on the floating block U? If the glass substrate 3 reaches the alignment section A, as shown in FIG. 5, the positioning sensor 43 at the alignment section A is responsible for detecting and stopping the glass substrate 3 that is floating. The detection signal is abundant in the front of the direction c.丨 Wen Qiu Qiu Qi again, each positioning sensor 44, 45 is responsible for detecting, and outputs the detection signal in the same direction as other edges in the direction C of the glass substrate 3 which has stopped floating in J2. Dan ’s potential identification unit 49 then inputs the signals output by the three positioning sensors 43 to 45, and then uses these detection signals to read the glass substrate 3 based on its reading of the H substrate data to identify the glass substrate 3. At this time, the glass dagger is at the right end of the front end in the conveying direction C, and then protrudes from the left end to the left in the conveying direction C. Next, the posture control unit 50 passes through the glass substrate of the posture recognition unit 49.

Page 14 200306938 V. Description of the invention (10) In the result of the identification of the plate 3, as shown in FIG. 5, the end 30 at one end is moved in the opposite direction (rear) to the conveying direction; the glass substrate 3 is In this way, the suction cup 2 9 a is regarded as the central axis, and then rotated to the direction of the arrow f, and then the conveying direction C is arranged in parallel. The posture recognition unit 49 inputs the detection signals output by the three positioning sensors 4 3 to 4 5 again to recognize the posture of the glass substrate 3; the recognition result is' glass substrate 3 as shown in FIG. 6 , Lean the left end toward the slider 2 3. As shown in the figure, the control unit 50 drives one end to move the living base of the end 2 9 ', so that the arm 29a straightens in the direction of the arrow (vertical to the conveying direction C), and simultaneously drives the other conveying ends. Part 30 piston, and then let the arm 30a retract to the direction of the head, move the glass plate 3 back to the arrow n, and align the center position of the glass substrate 3 with the center position of the transport route. In order to make the front end of the glass substrate 3 conform to "middle ...", make the conveying end portions 29, 30 the same as *, and then move it to / end, '. When the mouth is moved, each conveying end portion 29, 30, Then, as shown in Fig. 7, the fine movement is performed in the direction of the arrow N. As a result, the glass substrate 3 is parallel to the standard position (also in the conveying direction C) as shown in Fig. 7, and the center of the glass substrate 3 is cleaned. The center positions of the moving routes are consistent with each other, so the alignment is performed. In addition, the three = sensor 43 to the center of the sensor to detect the position of each glass edge. ° Once the glass substrate 3 is aligned , The movement control unit 48 is shown in FIG. 4 = at the same speed, the conveying ends 31 and 32 are synchronized in a reverse state completely different from the conveying direction c, and then moved to each slider, ^, 26

5. Description of the invention (11). When these conveying ends 31 and 32 reach below the glass substrate 3, the substrates on the sliders 25, 26 will be delivered to the standard position, and the arms 31a, 32a will be raised, and then the suction cups 31b will be raised. And 32b are adsorbed on the inner surface of the glass substrate 3, and the suction positions of the suction pads 3 1 b and 3 2 b are such that the glass substrate 3 faces both ends of the inner surface of the front end in the direction C :. The soil plate 3 is moved toward these items. After these suction cups 31b and 32b adsorb the glass substrate 3, the suction cups 29b and 30b of each of the transport # sections 29 and 30 are released, and the arms 29a and 30a are lowered. <, For the adsorption and support of the glass substrate 3, from the respective conveying end portions 29, 30,? Pay to each conveying end 31, 32; each conveying end 29, 30, move each // block 23, 24 to the reverse position (rear side) 'position σ,' which is different from the conveying direction c, stop The substrate is delivered to the standard position of the substrate stage for carrying in, and the machine is used. After the glass substrate 3 is delivered, each of the transfer ends 31, 3 :: is shown by the user, and the two are synchronized at the same speed. , Move to the conveying side, > The glass substrate 3 'starting from the floating block u is conveyed by each conveying end ^. , 32 are stretched, and then transported to the conveying direction at high speed, and the inspection is performed: = In the inspection section E, the air supply section 46 is contracted, and the material will be compressed to the air holes 4 of the Yangqi block 11 in total. Fine work defects, then switch from the compressed air supply unit 46 to true 47 4 vacuum suction unit 47, vacuum suction of the floating block u through the piping ^ 12 through the pipe, so that the glass substrate 3 adsorption and support on the floating block n; \ "" Release the suction cups from the inner surface of the supporting glass substrate 3, and then: 夂 200306938 V. Description of the invention (12) Lower each arm 31a, 32a

The eight inspection department E is responsible for performing, for example, image data obtained through various inspections of the glass substrate 3 using the inspection machine 14 equipped with a line position sensor: to perform pattern inspection and defect inspection of the glass substrate 3; At this time, the round arm 15 of the inspection machine 14 is set to move forward and backward ^ toward the transport direction C, and then the inspection machine 14 is used to perform a full L inspection on the entire glass substrate 3. 々When the inspection section E completes the inspection, each of the conveying end portions 31 and 32 raises each hand 3 and la ^^ 2a, so that the suction cups and 32b are attracted to the glass substrate 3 toward the conveying direction C to form two inner surfaces of the front end. On the end. % *. The vacuum suction unit 47 stops executing the true bow 2 on the floating blocks 丨 丨 each air hole 丨 2; next, it changes from the vacuum suction unit 47 to the ink shrink air supply 1: the compressed air supply 46, then Compressed air is supplied to the float. The air holes 12 are blown up from these air holes 2 to generate the glass substrate 3. In the above state, the inspection unit can also allow the glass substrate 3 to float in the shape of the floating block 11 ^ In the conveying direction, each of the conveying end portions 31 and 32 can be moved to each slider 23 at a certain speed. 24 at the same time to perform the inspection. Empty house: The glass substrate 3 'on the floating block U is shown in a fully floating state by blowing pressure 3%, and each of the end portions 31, C is conveyed toward C. I, sliders 25, 26 'The glass substrate 3 is transported to the conveyer at a high speed to absorb the glass 3, 1 After reaching the exit end of block U, the glass substrate 3 is conveyed to the end 3 1 and 3 2 Transport end 3 3

Page 7 2003200338

V. Description of the invention (13) 34 [Small second milk 7. Shoulder 46, the compressed air is supplied to each of the air holes 8; From this must be transferred to the end Qiu called Q〇M 物 口 ^ QQ Q / 1 M /邛 31, 32, which are delivered to the glass substrates 3 of each of the transfer ports P 3, 3, 4 are the same; ^ b; +, 々λ々 are delivered from the transfer ends 29, 30 to the transfers as described above端 部 31、32。 Ends 31, 32. After the glass substrate 3 has been delivered, each of the conveyance ends 33 moves the slides 27 and 28, and then the glass substrate 3 is conveyed to the conveying direction c. Next, the glass substrate 3 reaches the substrate stage for conveyance 丨 β After the upper part, the cymbal ends 3 3, 3 4 stop at the substrate delivery standard position. . The lifting pins located on the substrate stage 16 rise; the compressed air supply unit 46 stops supplying compressed air to the air holes 18 of the substrate stage, and at the same time, the suction cups 33b and 34b release the glass. The suction action of the inner surface of the substrate 3 lowers each of the arms 33a, 34a; the glass substrate 3 is carried on each of the lifting pins 20 by this method; the transfer robot arm 2 for carrying out, and the arm 2 2 Perform rotation, forward and back alignment, and then take out the inspected glass substrate 3 from each of the lifting pins 20, and finally store it in the cassette. Next, carry it into several glass substrates 3 according to repeated execution. Work for substrate stage 1, air transfer, alignment, inspection, and removal from substrate stage 丨 6.

In the above-mentioned first embodiment, air is blown from the plurality of air holes 4, 18, 12 formed on each of the substrate stage 1, 6 and the floating block 11 to float the glass substrate 3 In the state of suction, the two sides of the front end of the glass substrate 3 in the conveying direction C are stretched while being stretched; in the state of floating the large glass substrate 3, the high-speed conveyance can be performed without harming the glass substrate 3 . Several air holes 4, 18, 12 are regularly arranged on each substrate

200306938

The air conveying surfaces of the tables 1, 16 and the floating block ， are also provided with grooves $, 1 3, 1 9 ', so the air blown from the several air holes 4, 1 8, 1 2 , + Moves in the grooves 5, 13, 19, so no air is trapped between the glass substrate 3, each grave plate stage 1, 16 and the floating block 1 1 and passes through the grooves 5, 1 3 And 19, and the large glass substrate 3 can be transported while maintaining a high flatness without causing the central portion to be raised and bent. Each groove 5, 1 3 19 is formed in the same direction as the conveying direction c (------ ~ .V because the blowing pressure distribution to the air is also the same as the conveying direction c; the glass substrate 3 passes through A in a manner, During the transportation, there is no shaking in the vertical direction, and the transportation can be performed.

When the sender Sc sends the "I-based inner plate 3", they each adsorb and move the branch toward the glass substrate 3, etc., and they can be fixed to tear down. They will not cause a meandering pattern in the conveying direction c. A requirement that affects the circuit pattern and the circuit formed on the glass substrate 3 can improve the productivity of a product by manufacturing a semiconductor device such as FPD at a high speed by using a non-contact method. The large-scale glass substrate 3 is transported, and the quality can be satisfied without affecting the product. Since the glass substrate 3 that allows air from the air can be quickly transported, the ionized compression static electricity is blown by WH4, 18, and 12. Neutralize electricity and stop the glass substrate.

The alignment part A is positioned by three positions in the state of Chun # * broken glass substrate 3

Chapter 9: 200306938 V. Description of the invention (15) Sensors 43 ~ 45, posture recognition section 49, and posture control section 50: Note: If the glass substrate 3 is in a non-contact state, it will cause a large damage. The glass substrate 3 can be accurately aligned. Alignment in the 30th direction is to allow each of the transfer end portions 29 and glass of the glass substrate 3 to be transported. The second and second: Ding micro-movement, so that these transfer end portions 29 and 30 have a transport H. It can also be used as an alignment unit. In the transport glass = 3. After that, 'the alignment can be performed continuously and the required alignment can be shortened, it is possible to detect the glass substrate through the three-dimensional positioning sensor 43 ~ 45 in the posture of the base r': ;: = 43 ~ 45 'is buried in the floating block 11, because you Jinji 2 senses the standard position of 43 ~ 45, and it can also be aligned at any time based on the three-point edge position shell material. Each glass substrate 3. Ming Ming: Here, the second embodiment of the present invention will be described; again; parts in FIG. 1 are marked with the same symbols, so detailed description of the structure of the substrate transfer device shown on the port 9 is omitted; This substrate conveying device is provided with 'arm 7': arms 7, 21 'are more suitable for carrying in and out of each conveying machine (, the forward and backward directions of each arm 8, 22 are the same as the conveying side i60 and the racking platform 9 'can move the support ^ bU of the suction and support glass substrate 3 to the conveying direction C. In addition, each substrate stage i and 6 for carrying in and carrying out are provided.

200306938 V. Description of the invention (16) The lower pins 6 and 20 are removed with caution; each arm 8, 22 is placed into each substrate # 2 arm 7, 21, and the on-board stages 1 and j The glass substrate 3 of 6 is directly loaded in the base W = upper 9, and the glass substrate 3 is taken out by the stage 16. The two handles on the feeding platform 9 are directly or directly mounted on the substrate rack, and the private beta 1 is provided; these slide rails 61 are "parallel to the conveying direction u" (hereinafter referred to as "support frame") 60. @ 移动 专 洋 起 块 (Take the surface of the supporting building 60, then there is an air hole 62; these supports plus (R 二 _ ϋ 人 巳) attract the air and use the wide width only slightly shorter than the glass ^ For the base load stage 1, the degree of formation is almost the same as that of the substrate J and the surface of the support frame is high on the conveyance table 9. Then, the "movement degree" is set. A pair of sliders 63 of the frame 60 are arranged in parallel to ease the support. At the end of the substrate, the sliders 63 and 64 are placed between the carrying-in 0 and the carrying robot at the carrying-out side.?, 63, 64 are between the movable U robots, and some slider ends 2 9, 3 0, and Yu Zhishan Pass and σ are each a pair of aligned ends of each conveying stomach μ & happily each of the conveying ends 31, 32 0 is moved back and forth to mouth I, and the ends 29, 30 are at On each of the sliders 63 and 64, there is no Aai at the right end: the lifting machine! The left end of the arm 7 and the alignment section A on the sliders 63 and 64, I, and each of the transport ends 31 and 32 of the inspection end, Then, on each of the substrate stage 16: Aa moved to the right end of the alignment portion A, and carried out 29, 30, and delivered to the private end; the transfer ends from the alignment end are the same as above. Chacha Each end portion of the conveyance of the glass substrate 31, 32 3, then the following will be on =; = state to be operated in the above-described apparatus configuration.

200306938

V. Description of the invention (17) With the transfer robot arm 7, the glass beautiful cup q carried by Carat is lifted from the substrate carrier μ, and moves synchronously toward the transfer direction c, and Jiu Bei = row pull ^ Standby on the alignment part eight ° supporting teeth ", and the suction positions of the respective conveying end portions 29, 30 are: the glass substrate 3 is formed on the glass substrate 3 toward the conveying direction c, and both end portions on the inner side of the front end are formed: the glass substrate 3 on the alignment portion A Then, the same as the above-mentioned first embodiment, the support frame 60 is aligned by the fine movement of each of the conveying end portions 29 and 30. After the alignment of the glass substrate 3 is t, the compressed air supply unit is used. "Switch to the octagonal adsorption unit 47, and let the glass substrate 3 be adsorbed and supported on the support frame 60. At this time, each of the conveying end portions 29 and 30 releases the suction branch from the glass substrate 3 and returns to the conveying robot arm located at the conveying end of each of the sliders 63 and 64? End (standard position for substrate delivery). Next, the support frame 60 is moved away from the glass substrate 3 in the state of being sucked and supported, and moved toward the conveying direction C. When the support frame n reaches the inspection section, it will be executed on the inspection section E as above. Various inspections of the glass substrate 3. After the glass substrate 3 is inspected, the arms 31a and 32a of the transport ends 31 and 32 waiting at the substrate delivery standard position are raised, and the inner surface of the glass substrate 3 is adsorbed and supported through the suction cups 31b and 32b; The suction positions of these transport ends = 3 1 and 3 2 are the glass substrate 3 facing the transport direction. Both ends on the front end side. Next, compressed air is supplied from the compressed air supply unit 46 to the substrate stage, 16. Then, the glass substrate 3 is lifted from the support frame 60; in this state, the glass substrate 3 is transported to the substrate stage 16 at a high speed by each of the conveying end portions 3, 32 and 'stretched'. The carrying robot 21 for carrying out is inserted into the groove 19,

Page 22 200306938 V. Description of the invention (18) After “18”, the I side of the glass substrate 3 is lifted and the suction end 31, the suction cup 31 and the machine 2 are lifted, and the arm 2 is raised while the arm 22 is raised. 2; 2: Two-way carry-in and retreat, from the substrate stage / Ding board 3, and then stored in the card cage. Taken out the glass-based application type that has been checked, the second 2Λ application type is known, and it can exhibit the same as the above-mentioned first reality, and there are no lifting pins. 丨 Personal and carrier substrate stages 1 and 16 Therefore, it is possible to: The time V does not have the driving pins of the lifting pins 6, 20. The main purpose: to produce t π? Is limited to the above-mentioned embodiments, and various deformations can also be performed within the range of the floating stage. The air-blow method is not limited to blowing into the inner surface of the glass substrate 3 to float; by floating electrostatically, it is only necessary to perform a static elimination operation on the glass substrate 3. The method of lifting up the glass substrate 3 by the block 2 3 j is not limited to, for example, moving a pair of each of the conveying end portions 29 and 30 in a pair of chute-like U, in fact, it can also be located at each of these: the conveying end is provided with each suction cup The movable end 搬 can be moved, and the position of the suction support when the glass substrate 3 is transported when the front end of the glass substrate 3 is adsorbed and supported by means of t 卩, is not limited to the transport side 0 ::: ! ΐ Plate: The two front ends can also be supported by the two front ends of the glass substrate 3 and two or, or η · Straight 仃, or the central portions of the two opposite sides of the glass substrate 3, i U t attached to and supports several locations ; As long as these glass substrates 3 are at the center of the four opposite two sides and at several positions along the two sides,

200306938 V. Description of the invention (19) Glass-supported substrate 3: It can only be transported to the conveying direction c, or it can be conveyed completely. It is different from the normal position of the conveying direction c; moreover, the adsorption support position of the broken glass substrate 3 For example, if there is no circuit pattern, the surface of the substrate 3 or the inner surface of the substrate 3 is 5r? ^, Then it can be located on the glass substrate 基 n f! Loaded on the substrate stage 1, or take out the glass coupler substrate 3 from the substrate stage 16, in addition to each of the transfer robot arms 7, 21, also two Its: Ren: Institutions can also cleanly transfer substrates from other production lines by air transfer and other methods. In the above implementation mode, the large glass LCD, PDP, and other flat panels are described as follows: = the glass substrate 3 is inspected in series, but it can also be applied to floating semiconductors. Φ Move, ¥ Riri® After finding various substrates, or plate-like objects: Quick delivery; In addition, the method of floating glass substrate 3 and high-speed transportation is not limited to the substrate stage i and the support frame 6 〇 , Move the support frame 60, and then transport it to each support frame 60. 、 Use for -set But except: A is used outside: D each positioning sensor 43 ~ 45 ′ Although the linear sensor is used, the side position. A 2-dimensional 0 ^ 0 camera can be used to identify the central stage V 16 of the glass substrate 3 and the floating block 11 'there is no air in the glass substrate 3: the root V 2 is 3…: each setting should be in the transport direction Γ- These grooves are shown in Fig. 10, only in the number of each air hole: solid: I: These grooves 5, 13, 19 are exhaust air, and i, & For the smooth passage of the air channel, 1. The two ends of the trough are open to open air. The air vents can also be located inside the groove or in the shape of a slit. Page 24 200306938, description of the invention (20) 1.] Now the shape of these grooves 5, 13, 19 can also be made into quadrilateral, u-shaped, v-shaped, circular concave; These grooves 5 and 13 may also belong to, each of the substrate stage], 16 and an air layer formed between the floating and the broken glass = 3, so as to float the wide width of the glass substrate 3. The widths of the grooves 5, 13, 13, 19 are in the conveying direction. The same wide field is formed, and the glass substrate 3 and the air pressure portion in the conveying direction c are equal. In addition, since there is no bending deflection under the two ends of the glass substrate 3, several blow holes are set on the two ends of the stage 16, 16 and the floating block η; The iiC type of the conveyor is to extend each slider 63, 64 to the carrying-out moving hand # 2 1, but it can also be extended to the carrying-in carrying robotic arm 7 end for application in the industry. P, the invention is applicable Therefore, in large LCD or PDP and other FPD and other processes, high-speed glass substrates, various substrates or plate-shaped objects floating at high speed. ,

Page 25 200306938 Brief description of the drawings —— Brief description of the drawings FIG. 1 is a plan view of the first embodiment of the substrate transfer device of the present invention. FIG. 1 is a side configuration view of a first embodiment of the substrate transfer apparatus of the present invention. FIG. 2 is a view showing a glass substrate of the floating substrate carrier 1 in the first embodiment of the substrate transfer device of the present invention. " " Fig. 4 is a diagram showing the air movement of a glass substrate in the first embodiment of the substrate transfer device of the present invention. Fig. 5 is a diagram showing the air of a glass substrate in the first embodiment of the substrate transfer method of the present invention. 'FIG. 6 is a diagram showing an operation of an alignment portion in the first embodiment of the substrate transfer apparatus of the present invention. Also, Fig. 7 is a diagram showing the operation of the alignment portion ffl in the first embodiment of the substrate transfer device of the present invention, and Fig. 8 is a diagram showing the operation of the alignment portion ffl in the first embodiment of the substrate transfer device of the present invention. The substrate transfer device of the present invention is a diagram showing the first glass substrate transfer. Fig. 10 is a diagram showing the second plurality of grooves of the substrate transfer apparatus of the present invention. [Explanation of Symbols] is formed on the floating block in the embodiment after the alignment portion is actuated in the embodiment. '1 ... ....... Vibration Isolator 3 ........ Glass Substrate

Page 26 200306938 Brief description of the drawings 4.... Air holes 5... 6 ........ Lifting pin 7 ..... Robotic arm 8 ..... ............. Arm 9 ........ Transfer stand 10 ............. . Damper 11 ............... Floating block 12 ............... Air hole (

13 ............... Groove 14 ............... Inspection machine 15 ........... .... Gate arm 16 ... Substrate stage 17 ......... Vibration eliminator 18 .. ........ Secondary air holes 19 ......... Groove 2 0 ............. .... Lifting pin 21 ............... Robot arm

22 ............. Arm 23 ............... Slider 24 ............. ..Slider 4 2 5 ............ · Slider 2 6 ............... Slider 27 ..... .......... slider

Page 27 200306938 Brief description of the drawings 28 ... Slider 29 ......... Transporting end 29a ... .......... Arm 29b ............. Sucker 30 ............... Transporting end 30a ... ......... •• arm 30b ............. suction cup 31 ...... transfer end 32 .. ............. Transportation end (33 ............... Transportation end 3 4 ............ .... transport end 4 3 ... sensor 44 ... ... sensor 4 5. .............. Sensors 46 ...... Air Supply Unit 4 7 ............. .... Vacuum suction section 48 ............. Motion control section 49 ........... Pose recognition section 50 ..... .......... Posture control unit 60 ............... support frame 61 ............... '6 2 ............... air hole 63 ............. slider 64 ............. · Slider

Page 28 200306938

Page 29

Claims (1)

200306938 The scope of the patent application: The substrate transfer carrier is characterized in that it is provided with a > transportation route of the substrate and the substrate floating mechanism; the board sweat originates from the foregoing: the transportation route and the substrate floating mechanism. The two substrates are then transported along the aforementioned transport route. The aforementioned substrate 2 should preferably be blown out of the clothing at least as described in the substrate floating mechanism described in item (1) of the patent application scope. 1 hole, let's say that the substrate is the substrate conveying device described in Item 1 Λ 干 Ganwei Item 1 ... ", the substrate Yangqi mechanism, by blowing up and sucking the characteristics described above are its characteristics. The holes are lifted to describe the substrate. As described in the patent claim No. i, the substrate moving substrate floating mechanism is provided with a floating block, and front, middle: the holes for blowing air, and Floating = The exhaust groove for the aforementioned air is formed in the conveying direction. 5. The substrate conveying device described in item '丨 of the patent application scope, the conveying machine is provided with sliders arranged along both ends of the conveying route. , And use: These sliders are provided in a moving manner, which are characterized by the respective transport ends at both ends of the aforementioned substrate that support the front end of the front plate transport direction. Page 30 200306938 By. Among them, the aforementioned suction cup δ. The famous plate transfer device described in item 5 of the scope of patent application is provided at each of the transfer end portions, and each of the adsorptions has its own characteristics. And the two ends of the inner surface of the pull-speed baseplate with a support 7 are as described in the patent application scope of the work item for the substrate removal: prepare δ and place it on the floating length of the Lishu transportation route, and form on the block. At least responsible for performing blow-up air = several holes, and on the floating block, along the aforementioned base = forming the exhaust groove of the aforementioned air, and several sliders arranged along the side of the transport route, and These slides can be installed in a movable manner. The suction cups at the front end of the substrate transporting direction are described as follows: The substrate transporting device described in item i of the patent application scope. The basin substrate floating mechanism is provided. A carrying θ "stand provided on the entire length of the carrying path, and a movable supporting stand provided on the carrying stand, a plurality of holes formed on the supporting stand to perform at least air blowing, and on the supporting stand, along the carrying stand, The air exhaust ditch is formed along the conveying direction of the substrate, and several f-blocks are arranged along both sides of the entire length of the conveying path, and these sliders are movably arranged to each absorb and support the 棊Inside of the board Each sucker is its characteristic. " 200306938 VI. Patent application scope Major-end micro-movement to the front support floating; middle rj; substrate at both ends, and to -Γ, ten, Λ 、 machine, quasi 1-speed transfer party to transfer the substrate in doubt, and then ^ ^ ^ The alignment part of the quasi-standard position is its characteristic. The ft substrate transfer device of the No. 1 project center includes the front & $ + 蒋 一 II #, and both ends of the substrate in the floating state are lifted, and the plate is slightly moved to the transportation direction to rotate the base substrate. Alignment f ,, and ° in position "If the substrate is not slightly moved in the vertical direction as described above, for the transportation direction, let the substrate part be its characteristic person, and then align the substrate with the standard position. Wherein the former I :: 所述] The substrate transfer device described in item 9 or 10, the number of edge positions: the device that detects the two sides of the substrate 2 that are orthogonal to the substrate, 2 In addition, the posture recognition unit and the position of the text detected by these sensors are used to identify the substrate posture and the substrate posture is correct. The posture recognition unit sends the posture protection of the mechanism before identification to the f standard position. It is characterized by the movement and control of the aforementioned moving control unit. As described in the patent application scope of the flute 1 η, the aforementioned several sensors, the substrate transfer device described in θ 1 1 ', among which is a linear sensor, — 疋 ^ Several detection elements are arranged The three like the linear sensor are located in the aforementioned Page 32 200306938 VI. Patent application scope Substrate 2 transport ㊁: central ^ outer 2 and the linear direction is set to deviate from the aforementioned end of the substrate at the same interval as above, and feel; ^ 'is used to specify the vertical direction of the substrate transport direction The Gangu-shaped direction is set on the front jw soil and it is characterized by the universal direction. The aforementioned posture control :: to: i ::::: substrate transfer device, where the two substrates are described, and white 3 is the front end of the substrate transportation direction. Each of the slides m arranged in the front moves to at least one of the conveying ends along the conveying direction at both ends of the conveying route. At least one of the conveying ends is arranged toward the conveying π &, + sub-fine rotation of the substrate, and the substrate The flat surface is arranged in the direction of the description of the conveying direction as its characteristic. Plate ten! 4. If the above-mentioned attitude is applied, the slide conveying directions of the two ends of the substrate are arranged slightly parallel to each other if the substrate support is synchronized, and the substrate is aligned with the substrate. The substrate conveying device according to item 11 of the standard patent scope, in which the 4 negative shells support the front end of the substrate in the conveying direction and move to each of the substrates along the two ends of the conveying route. At least one end of the support portion is moved toward the aforementioned substrate, and the aforementioned substrate is conveyed in the conveying direction by rotating the aforementioned substrate. As a result of the rotation of the aforementioned substrate, if the substrate is not aligned with the position of the substrate, the aforementioned substrates are moved to the aforementioned conveyor. The direction is slightly moved in the vertical direction, and the center position of the above-mentioned conveyance is aligned so that the above-mentioned quasi-position is its characteristic. 5. The substrate conveying device according to item 1 of the scope of patent application, wherein Page 33 200306938 VI. The transfer mechanism described in the scope of the patent application transfers the substrates carried in by the carrying-in end of the transportation route to the inspection section. After the inspection of the substrates in the inspection section, the substrates are transported to the transportation route. Its moving end is its characteristic. « Page 34