JP6282682B2 - 垂直集積システム - Google Patents
垂直集積システム Download PDFInfo
- Publication number
- JP6282682B2 JP6282682B2 JP2016039743A JP2016039743A JP6282682B2 JP 6282682 B2 JP6282682 B2 JP 6282682B2 JP 2016039743 A JP2016039743 A JP 2016039743A JP 2016039743 A JP2016039743 A JP 2016039743A JP 6282682 B2 JP6282682 B2 JP 6282682B2
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- integrated circuit
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Description
110 半導体ダイ
120 アクティブ面
130 裏面
140 パッシブ部品
150 TSV
160 端子
Claims (20)
- 集積回路システムであって、
半導体ダイのアクティブ層であって、アクティブ回路を備えたアクティブ層と、
前記アクティブ層と集積された測定層であって、流体の特性の指標を発生させるように構成された感知素子を備える測定層と、
前記測定層と前記アクティブ回路との間の電気接続を提供するように構成された導電経路と、
前記流体の特性を表す信号を遠隔地に伝送するように構成された信号伝送層と、
前記集積回路システム内の異なる複数の層の間に前記流体を通すように構成されている少なくとも一つの非導電性経路とを備える集積回路システム。 - 前記流体の特性を表す信号が、前記流体の特性が閾値を満たしていることを表すアラーム信号である、請求項1に記載の集積回路システム。
- 前記測定層が前記流体のpHレベルを測定するように構成されている、請求項1に記載の集積回路システム。
- 前記信号伝送層が、前記流体のpHの特性を表す信号を前記遠隔地に伝送するように構成されたコイルを備える、請求項3に記載の集積回路システム。
- 前記集積回路システムの外部から前記感知素子に前記流体を提供するように構成された開口を更に備えた請求項3に記載の集積回路システム。
- 前記測定層が微小電気機械システム(MEMS)部品を備える、請求項1に記載の集積回路システム。
- 前記流体が気体である、請求項1に記載の集積回路システム。
- 前記測定層が前記アクティブ層と垂直集積されている、請求項1に記載の集積回路システム。
- 前記集積回路システムの外部から前記感知素子に前記流体を提供するように構成された導管であって、前記流体の流れを操作するように構成された構造を有する導管を更に備える請求項1に記載の集積回路システム。
- 前記流体の流れを操作するように構成された構造が先細りである、請求項9に記載の集積回路システム。
- 前記測定層が、前記流体の濾過と分離のうち少なくとも一方を行うように構成されている、請求項1に記載の集積回路システム。
- 前記半導体ダイと集積された流体保持層であって、前記流体を流すためのチャネルを含む流体保持層を更に備える請求項1に記載の集積回路システム。
- パッシブ部品と、前記集積回路システムの組み立て後に修正可能である修正可能リンクとを備えた部品層を更に備える請求項1に記載の集積回路システム。
- 集積回路システムであって、
半導体ダイのアクティブ層であって、アクティブ回路を備えるアクティブ層と、
前記半導体ダイと集積された測定層であって、流体のpHの指標を発生させるように構成されたセンサを備え、前記流体のpHの指標を前記アクティブ回路に提供するように構成された測定層と、
前記集積回路システムの外部から前記センサに前記流体を提供するように構成された開口と、
前記測定層と前記アクティブ回路との間の電気接続を提供するように構成された導電経路と、
前記流体のpHを表す信号を該集積回路システムから離れた箇所に伝送するように構成されたコイルを備える信号伝送層と、
前記集積回路システム内の異なる複数の層の間に前記流体を通すように構成されている少なくとも一つの非導電性経路とを備える集積回路システム。 - 前記流体のpHを表す信号が、前記流体のpHが所定レベルを超過しているかどうかを表すアラーム信号である、請求項14に記載の集積回路システム。
- 前記集積回路システムが、前記流体のpHを連続的にモニタリングするように構成されている、請求項14に記載の集積回路システム。
- 回路板と、
前記回路板上の垂直集積回路とを備えたモニタリングデバイスであって、
前記垂直集積回路が、
半導体ダイのアクティブ層であって、アクティブ回路を備えるアクティブ層と、
前記アクティブ層と垂直集積された測定層であって、流体の特性の指標を発生させるように構成された感知素子を備える測定層と、
前記測定層と前記アクティブ回路との間の電気接続を提供するように構成された導電経路と、
前記流体の特定を表す信号を遠隔地に伝送するように構成された信号伝送層と、
前記垂直集積回路内の異なる複数の層の間に前記流体を通すように構成されている少なくとも一つの非導電性経路とを備える、モニタリングデバイス。 - 前記流体の特性を表す信号が、前記流体の特性が閾値を満たしていることを表すアラーム信号である、請求項17に記載のモニタリングデバイス。
- 前記流体のpHレベルをモニタリングするように構成されている請求項17に記載のモニタリングデバイス。
- 前記垂直集積回路が、前記半導体ダイと集積された流体保持層を更に備え、前記流体保持層が前記流体を流すためのチャネルを含む、請求項17に記載のモニタリングデバイス。
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US12/975,847 US8569861B2 (en) | 2010-12-22 | 2010-12-22 | Vertically integrated systems |
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EP (4) | EP2469595B1 (ja) |
JP (5) | JP2012164970A (ja) |
KR (1) | KR101372000B1 (ja) |
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TW (4) | TWI487072B (ja) |
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US8310841B2 (en) * | 2009-11-12 | 2012-11-13 | International Business Machines Corporation | Integrated circuit die stacks having initially identical dies personalized with switches and methods of making the same |
US8315068B2 (en) | 2009-11-12 | 2012-11-20 | International Business Machines Corporation | Integrated circuit die stacks having initially identical dies personalized with fuses and methods of manufacturing the same |
US8258619B2 (en) | 2009-11-12 | 2012-09-04 | International Business Machines Corporation | Integrated circuit die stacks with translationally compatible vias |
CN103221331B (zh) | 2010-09-18 | 2016-02-03 | 快捷半导体公司 | 用于微机电系统的密封封装 |
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