JP5398908B2 - 使用センサ - Google Patents
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- JP5398908B2 JP5398908B2 JP2012512478A JP2012512478A JP5398908B2 JP 5398908 B2 JP5398908 B2 JP 5398908B2 JP 2012512478 A JP2012512478 A JP 2012512478A JP 2012512478 A JP2012512478 A JP 2012512478A JP 5398908 B2 JP5398908 B2 JP 5398908B2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02016—Circuit arrangements of general character for the devices
- H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/10—Controlling the light source
- H05B47/105—Controlling the light source in response to determined parameters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/10—Controlling the light source
- H05B47/105—Controlling the light source in response to determined parameters
- H05B47/115—Controlling the light source in response to determined parameters by determining the presence or movement of objects or living beings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
- Y02B20/40—Control techniques providing energy savings, e.g. smart controller or presence detection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Photovoltaic Devices (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Description
Claims (10)
- 熱センサ、バッテリ、アンテナ、電気回路及び太陽電池を一の半導体キャリアにおいて一体的に一緒に有するセンサデバイスを製造するための方法であって、
2つの対向する相互に平行な主表面をもつウェハー本体部をもつシリコンウェハーを設けるステップと、
第1の処理ステージにおいて、少なくとも1つの熱センサをもつ熱センサ部分を有する前記主表面の一方内又はその上に第1の機能層を作るとともに、前記熱センサ部分との非オーバーラップの関係で設けられた電気回路を有する第1の機能層を作るステップと、
前記第1の処理ステージの後の第2の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられるバッテリ及びアンテナを含む材料部分をもつ第2の機能層を作るステップと、
前記第1の処理ステージの後の第3の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられた1又はそれ以上の太陽電池を含む材料部分をもつ第3の機能層を作るステップと、
前記第3の処理ステージの後の第4の処理ステージにおいて、底面側から前記第1の機能層内の前記熱センサ部分に達する深さをもつ凹部をもたらすように、前記熱センサ部分の下の前記ウェハー本体部の部分が除去されるステップとを有し、
バッテリ及びアンテナをもつ前記第2の機能層は、前記第1の機能層上に作られ、太陽電池をもつ前記第3の機能層は、前記第2の機能層上に作られる、方法。 - 熱センサ、バッテリ、アンテナ、電気回路及び太陽電池を一の半導体キャリアにおいて一体的に一緒に有するセンサデバイスを製造するための方法であって、
2つの対向する相互に平行な主表面をもつウェハー本体部をもつシリコンウェハーを設けるステップと、
第1の処理ステージにおいて、少なくとも1つの熱センサをもつ熱センサ部分を有する前記主表面の一方内又はその上に第1の機能層を作るとともに、前記熱センサ部分との非オーバーラップの関係で設けられた電気回路を有する第1の機能層を作るステップと、
前記第1の処理ステージの後の第2の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられるバッテリ及びアンテナを含む材料部分をもつ第2の機能層を作るステップと、
前記第1の処理ステージの後の第3の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられた1又はそれ以上の太陽電池を含む材料部分をもつ第3の機能層を作るステップと、
前記第3の処理ステージの後の第4の処理ステージにおいて、底面側から前記第1の機能層内の前記熱センサ部分に達する深さをもつ凹部をもたらすように、前記熱センサ部分の下の前記ウェハー本体部の部分が除去されるステップとを有し、
バッテリ及びアンテナをもつ前記第2の機能層は、前記第1の機能層上に作られ、太陽電池をもつ前記第3の機能層は、前記主表面のうちの第2の主表面上に作られる、方法。 - 熱センサ、バッテリ、アンテナ、電気回路及び太陽電池を一の半導体キャリアにおいて一体的に一緒に有するセンサデバイスを製造するための方法であって、
2つの対向する相互に平行な主表面をもつウェハー本体部をもつシリコンウェハーを設けるステップと、
第1の処理ステージにおいて、少なくとも1つの熱センサをもつ熱センサ部分を有する前記主表面の一方内又はその上に第1の機能層を作るとともに、前記熱センサ部分との非オーバーラップの関係で設けられた電気回路を有する第1の機能層を作るステップと、
前記第1の処理ステージの後の第2の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられるバッテリ及びアンテナを含む材料部分をもつ第2の機能層を作るステップと、
前記第1の処理ステージの後の第3の処理ステージにおいて、前記熱センサ部分との非オーバーラップの関係で設けられた1又はそれ以上の太陽電池を含む材料部分をもつ第3の機能層を作るステップと、
前記第3の処理ステージの後の第4の処理ステージにおいて、底面側から前記第1の機能層内の前記熱センサ部分に達する深さをもつ凹部をもたらすように、前記熱センサ部分の下の前記ウェハー本体部の部分が除去されるステップとを有し、
バッテリ及びアンテナをもつ前記第2の機能層は、前記主表面のうちの第2の主表面上に作られ、太陽電池をもつ前記第3の機能層は、前記第1の機能層上に作られる、方法。 - 前記第2の機能層は、前記熱センサ部分と合わせられた空洞を有し、及び/又は、前記第3の機能層は、前記熱センサ部分と合わせられた空洞を有する、請求項1〜3のうちいずれか一項に記載の方法。
- 前記第2の機能層を製造するための製造プロセスは、400℃未満で実行される、請求項1〜3のうちいずれか一項に記載の方法。
- 前記第3の処理ステージは、前記第2の処理ステージの後に実行される、請求項1〜3のうちいずれか一項に記載の方法。
- 前記第3の機能層を製造するための製造プロセスは、300℃未満で実行される、請求項6に記載の方法。
- 請求項1〜7のうちいずれか一項に記載の方法により一の半導体本体において一体的に製造された熱センサ、バッテリ、アンテナ、電気回路及び太陽電池を有する、センサデバイス。
- 前記熱センサは、4つの個別センサ部分を有し、各センサ部分が、薄型中央長手本体部と前記中央本体部の対向する長手縁部に沿って設けられた複数の熱電対とを有する、請求項8に記載のセンサデバイス。
- 前記熱センサは、薄型中央長手本体部と、端部の熱電対に接触する端子及び中間の熱電対に接触する端子をもつ、前記中央本体部の対向する長手縁部に沿って設けられた複数の熱電対とを有し、従って、センサ信号は、前記センサの異なる部分から取得可能である、請求項8に記載のセンサデバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09161189 | 2009-05-27 | ||
EP09161189.7 | 2009-05-27 | ||
PCT/IB2010/052020 WO2010136919A1 (en) | 2009-05-27 | 2010-05-07 | Occupancy sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012528322A JP2012528322A (ja) | 2012-11-12 |
JP5398908B2 true JP5398908B2 (ja) | 2014-01-29 |
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Application Number | Title | Priority Date | Filing Date |
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JP2012512478A Expired - Fee Related JP5398908B2 (ja) | 2009-05-27 | 2010-05-07 | 使用センサ |
Country Status (8)
Country | Link |
---|---|
US (1) | US8357550B2 (ja) |
EP (1) | EP2436237B1 (ja) |
JP (1) | JP5398908B2 (ja) |
KR (1) | KR20120020186A (ja) |
CN (1) | CN102450106B (ja) |
CA (1) | CA2763240A1 (ja) |
RU (1) | RU2011153187A (ja) |
WO (1) | WO2010136919A1 (ja) |
Families Citing this family (12)
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DE102010062559A1 (de) | 2010-12-07 | 2012-06-14 | Robert Bosch Gmbh | Mikroelektromechanisches Sensormodul sowie entsprechendes Herstellungsverfahren |
US8569861B2 (en) | 2010-12-22 | 2013-10-29 | Analog Devices, Inc. | Vertically integrated systems |
US20140345669A1 (en) * | 2011-12-21 | 2014-11-27 | Dow Global Technologies Llc | Method of producing two or more thin-film-based interconnected photovoltaic cells |
US10557881B2 (en) | 2015-03-27 | 2020-02-11 | Analog Devices Global | Electrical overstress reporting |
US9871373B2 (en) | 2015-03-27 | 2018-01-16 | Analog Devices Global | Electrical overstress recording and/or harvesting |
KR20170089340A (ko) * | 2016-01-26 | 2017-08-03 | 엘지전자 주식회사 | 플렉서블 센서 모듈 및 이의 제조 방법 |
US10338132B2 (en) | 2016-04-19 | 2019-07-02 | Analog Devices Global | Wear-out monitor device |
US10365322B2 (en) | 2016-04-19 | 2019-07-30 | Analog Devices Global | Wear-out monitor device |
US11024525B2 (en) | 2017-06-12 | 2021-06-01 | Analog Devices International Unlimited Company | Diffusion temperature shock monitor |
US10730743B2 (en) | 2017-11-06 | 2020-08-04 | Analog Devices Global Unlimited Company | Gas sensor packages |
US11587839B2 (en) | 2019-06-27 | 2023-02-21 | Analog Devices, Inc. | Device with chemical reaction chamber |
JP2021118551A (ja) * | 2020-01-22 | 2021-08-10 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置、センサ装置及び電子機器 |
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US10103A (en) * | 1853-10-11 | Detachable lining for the fire-boxes of steam-boilers | ||
JPH08304174A (ja) * | 1995-04-28 | 1996-11-22 | Fujitsu Ltd | サーモパイル赤外線センサおよびセンサアレイ |
JPH10242443A (ja) * | 1997-02-27 | 1998-09-11 | Toshiba Corp | 機能集積半導体装置 |
DE10222499A1 (de) * | 2002-05-22 | 2003-12-11 | Bosch Gmbh Robert | Verfahren zur Herstellung eines Bauteils, insbesondere eines thermischen Sensors, sowie thermischer Sensor |
JP2004093535A (ja) * | 2002-09-04 | 2004-03-25 | Mitsubishi Electric Corp | 熱型赤外線固体撮像装置およびその製造方法 |
US7868358B2 (en) * | 2003-06-06 | 2011-01-11 | Northrop Grumman Systems Corporation | Coiled circuit device with active circuitry and methods for making the same |
JP2005106802A (ja) * | 2003-07-10 | 2005-04-21 | Canon Inc | 環境センサー、環境測定装置及び環境測定システム |
EP1523043B1 (en) * | 2003-10-06 | 2011-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Optical sensor and method for manufacturing the same |
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JP2007280368A (ja) * | 2006-03-15 | 2007-10-25 | Semiconductor Energy Lab Co Ltd | 半導体装置及び当該半導体装置を具備するidラベル、idタグ、idカード |
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US8459445B2 (en) * | 2006-07-21 | 2013-06-11 | Menicon, Co., Ltd. | Colored contact lens primary packaging |
JP2008066402A (ja) * | 2006-09-05 | 2008-03-21 | Fujifilm Corp | 撮像素子および撮像装置 |
WO2008054715A2 (en) | 2006-10-31 | 2008-05-08 | Solicore, Inc. | Powered print advertisements, product packaging, and trading cards |
WO2009150562A1 (en) | 2008-06-11 | 2009-12-17 | Koninklijke Philips Electronics N.V. | Wireless sensor device and illumination system comprising such a device |
-
2010
- 2010-05-07 US US13/322,296 patent/US8357550B2/en not_active Expired - Fee Related
- 2010-05-07 CA CA2763240A patent/CA2763240A1/en not_active Abandoned
- 2010-05-07 RU RU2011153187/07A patent/RU2011153187A/ru not_active Application Discontinuation
- 2010-05-07 CN CN201080023392.3A patent/CN102450106B/zh not_active Expired - Fee Related
- 2010-05-07 JP JP2012512478A patent/JP5398908B2/ja not_active Expired - Fee Related
- 2010-05-07 WO PCT/IB2010/052020 patent/WO2010136919A1/en active Application Filing
- 2010-05-07 EP EP10719627A patent/EP2436237B1/en not_active Not-in-force
- 2010-05-07 KR KR1020117031004A patent/KR20120020186A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2012528322A (ja) | 2012-11-12 |
CN102450106A (zh) | 2012-05-09 |
CA2763240A1 (en) | 2010-12-02 |
RU2011153187A (ru) | 2013-07-10 |
EP2436237A1 (en) | 2012-04-04 |
WO2010136919A1 (en) | 2010-12-02 |
KR20120020186A (ko) | 2012-03-07 |
US8357550B2 (en) | 2013-01-22 |
EP2436237B1 (en) | 2012-12-26 |
CN102450106B (zh) | 2014-07-16 |
US20120077291A1 (en) | 2012-03-29 |
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