JP2019507333A5 - - Google Patents

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JP2019507333A5
JP2019507333A5 JP2018535825A JP2018535825A JP2019507333A5 JP 2019507333 A5 JP2019507333 A5 JP 2019507333A5 JP 2018535825 A JP2018535825 A JP 2018535825A JP 2018535825 A JP2018535825 A JP 2018535825A JP 2019507333 A5 JP2019507333 A5 JP 2019507333A5
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Japan
Prior art keywords
temperature
wafer
slot assembly
thermal
cartridge
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JP2018535825A
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English (en)
Japanese (ja)
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JP2019507333A (ja
JP7045995B2 (ja
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Priority claimed from PCT/US2017/012597 external-priority patent/WO2017120514A1/en
Publication of JP2019507333A publication Critical patent/JP2019507333A/ja
Publication of JP2019507333A5 publication Critical patent/JP2019507333A5/ja
Priority to JP2022045659A priority Critical patent/JP7362817B2/ja
Application granted granted Critical
Publication of JP7045995B2 publication Critical patent/JP7045995B2/ja
Priority to JP2023172760A priority patent/JP2023178335A/ja
Priority to JP2024135246A priority patent/JP2024155956A/ja
Priority to JP2024232440A priority patent/JP2025039623A/ja
Priority to JP2025066166A priority patent/JP2025119616A/ja
Priority to JP2025067952A priority patent/JP2025107187A/ja
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JP2018535825A 2016-01-08 2017-01-06 電子試験装置における装置の熱制御のための方法及びシステム Active JP7045995B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2022045659A JP7362817B2 (ja) 2016-01-08 2022-03-22 電子試験装置における装置の熱制御のための方法及びシステム
JP2023172760A JP2023178335A (ja) 2016-01-08 2023-10-04 電子試験装置における装置の熱制御のための方法及びシステム
JP2024135246A JP2024155956A (ja) 2016-01-08 2024-08-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2024232440A JP2025039623A (ja) 2016-01-08 2024-12-27 電子試験装置における装置の熱制御のための方法及びシステム
JP2025066166A JP2025119616A (ja) 2016-01-08 2025-04-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2025067952A JP2025107187A (ja) 2016-01-08 2025-04-17 電子試験装置における装置の熱制御のための方法及びシステム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662276746P 2016-01-08 2016-01-08
US62/276,746 2016-01-08
PCT/US2017/012597 WO2017120514A1 (en) 2016-01-08 2017-01-06 Method and system for thermal control of devices in an electronics tester

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022045659A Division JP7362817B2 (ja) 2016-01-08 2022-03-22 電子試験装置における装置の熱制御のための方法及びシステム

Publications (3)

Publication Number Publication Date
JP2019507333A JP2019507333A (ja) 2019-03-14
JP2019507333A5 true JP2019507333A5 (enExample) 2020-02-13
JP7045995B2 JP7045995B2 (ja) 2022-04-01

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ID=59274465

Family Applications (7)

Application Number Title Priority Date Filing Date
JP2018535825A Active JP7045995B2 (ja) 2016-01-08 2017-01-06 電子試験装置における装置の熱制御のための方法及びシステム
JP2022045659A Active JP7362817B2 (ja) 2016-01-08 2022-03-22 電子試験装置における装置の熱制御のための方法及びシステム
JP2023172760A Pending JP2023178335A (ja) 2016-01-08 2023-10-04 電子試験装置における装置の熱制御のための方法及びシステム
JP2024135246A Pending JP2024155956A (ja) 2016-01-08 2024-08-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2024232440A Pending JP2025039623A (ja) 2016-01-08 2024-12-27 電子試験装置における装置の熱制御のための方法及びシステム
JP2025066166A Pending JP2025119616A (ja) 2016-01-08 2025-04-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2025067952A Pending JP2025107187A (ja) 2016-01-08 2025-04-17 電子試験装置における装置の熱制御のための方法及びシステム

Family Applications After (6)

Application Number Title Priority Date Filing Date
JP2022045659A Active JP7362817B2 (ja) 2016-01-08 2022-03-22 電子試験装置における装置の熱制御のための方法及びシステム
JP2023172760A Pending JP2023178335A (ja) 2016-01-08 2023-10-04 電子試験装置における装置の熱制御のための方法及びシステム
JP2024135246A Pending JP2024155956A (ja) 2016-01-08 2024-08-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2024232440A Pending JP2025039623A (ja) 2016-01-08 2024-12-27 電子試験装置における装置の熱制御のための方法及びシステム
JP2025066166A Pending JP2025119616A (ja) 2016-01-08 2025-04-14 電子試験装置における装置の熱制御のための方法及びシステム
JP2025067952A Pending JP2025107187A (ja) 2016-01-08 2025-04-17 電子試験装置における装置の熱制御のための方法及びシステム

Country Status (6)

Country Link
US (6) US10466292B2 (enExample)
JP (7) JP7045995B2 (enExample)
KR (4) KR102842851B1 (enExample)
CN (1) CN108780114B (enExample)
TW (3) TWI782508B (enExample)
WO (1) WO2017120514A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102461321B1 (ko) * 2017-08-18 2022-11-02 (주)테크윙 전자부품 테스트용 핸들러
CN120254561A (zh) * 2020-10-07 2025-07-04 雅赫测试系统公司 电子测试器
JP7548670B2 (ja) * 2021-01-19 2024-09-10 東京エレクトロン株式会社 検査装置、制御方法及び制御プログラム
CN117092557A (zh) * 2022-05-19 2023-11-21 群创光电股份有限公司 电子装置
JP2023177687A (ja) * 2022-06-02 2023-12-14 株式会社アドバンテスト ヒータ駆動制御装置、電子部品ハンドリング装置、電子部品試験装置、及び、ヒータ駆動制御方法

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