JP2010183085A5 - - Google Patents
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- Publication number
- JP2010183085A5 JP2010183085A5 JP2010026002A JP2010026002A JP2010183085A5 JP 2010183085 A5 JP2010183085 A5 JP 2010183085A5 JP 2010026002 A JP2010026002 A JP 2010026002A JP 2010026002 A JP2010026002 A JP 2010026002A JP 2010183085 A5 JP2010183085 A5 JP 2010183085A5
- Authority
- JP
- Japan
- Prior art keywords
- immersion exposure
- exposure system
- liquid
- optical element
- terminal optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007654 immersion Methods 0.000 claims 27
- 239000012530 fluid Substances 0.000 claims 17
- 239000007788 liquid Substances 0.000 claims 16
- 230000003287 optical effect Effects 0.000 claims 14
- 238000000034 method Methods 0.000 claims 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- 230000003068 static effect Effects 0.000 claims 2
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46211203P | 2003-04-10 | 2003-04-10 | |
| US60/462,112 | 2003-04-10 | ||
| US48447603P | 2003-07-01 | 2003-07-01 | |
| US60/484,476 | 2003-07-01 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006506634A Division JP4775256B2 (ja) | 2003-04-10 | 2004-03-29 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012083119A Division JP5541309B2 (ja) | 2003-04-10 | 2012-03-30 | 露光装置及び露光方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010183085A JP2010183085A (ja) | 2010-08-19 |
| JP2010183085A5 true JP2010183085A5 (enExample) | 2011-09-08 |
| JP5152219B2 JP5152219B2 (ja) | 2013-02-27 |
Family
ID=33162259
Family Applications (10)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006506634A Expired - Fee Related JP4775256B2 (ja) | 2003-04-10 | 2004-03-29 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2010026002A Expired - Fee Related JP5152219B2 (ja) | 2003-04-10 | 2010-02-08 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2011097540A Expired - Fee Related JP5550188B2 (ja) | 2003-04-10 | 2011-04-25 | 露光装置、及び露光方法 |
| JP2012083119A Expired - Fee Related JP5541309B2 (ja) | 2003-04-10 | 2012-03-30 | 露光装置及び露光方法 |
| JP2013167890A Expired - Fee Related JP5692304B2 (ja) | 2003-04-10 | 2013-08-12 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2013272247A Expired - Lifetime JP5745611B2 (ja) | 2003-04-10 | 2013-12-27 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2014227827A Expired - Fee Related JP5949876B2 (ja) | 2003-04-10 | 2014-11-10 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2015218810A Expired - Fee Related JP6137276B2 (ja) | 2003-04-10 | 2015-11-06 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2016201561A Expired - Fee Related JP6332394B2 (ja) | 2003-04-10 | 2016-10-13 | 露光装置及び露光方法 |
| JP2017229742A Pending JP2018028705A (ja) | 2003-04-10 | 2017-11-30 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006506634A Expired - Fee Related JP4775256B2 (ja) | 2003-04-10 | 2004-03-29 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
Family Applications After (8)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011097540A Expired - Fee Related JP5550188B2 (ja) | 2003-04-10 | 2011-04-25 | 露光装置、及び露光方法 |
| JP2012083119A Expired - Fee Related JP5541309B2 (ja) | 2003-04-10 | 2012-03-30 | 露光装置及び露光方法 |
| JP2013167890A Expired - Fee Related JP5692304B2 (ja) | 2003-04-10 | 2013-08-12 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2013272247A Expired - Lifetime JP5745611B2 (ja) | 2003-04-10 | 2013-12-27 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2014227827A Expired - Fee Related JP5949876B2 (ja) | 2003-04-10 | 2014-11-10 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2015218810A Expired - Fee Related JP6137276B2 (ja) | 2003-04-10 | 2015-11-06 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
| JP2016201561A Expired - Fee Related JP6332394B2 (ja) | 2003-04-10 | 2016-10-13 | 露光装置及び露光方法 |
| JP2017229742A Pending JP2018028705A (ja) | 2003-04-10 | 2017-11-30 | 液浸リソグラフィ装置用の減圧排出を含む環境システム |
Country Status (7)
| Country | Link |
|---|---|
| US (13) | US7321415B2 (enExample) |
| EP (7) | EP3232271A1 (enExample) |
| JP (10) | JP4775256B2 (enExample) |
| KR (13) | KR101319152B1 (enExample) |
| CN (7) | CN104597717B (enExample) |
| SG (6) | SG2014015184A (enExample) |
| WO (1) | WO2004090634A2 (enExample) |
Families Citing this family (215)
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