JP2006261311A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2006261311A JP2006261311A JP2005075165A JP2005075165A JP2006261311A JP 2006261311 A JP2006261311 A JP 2006261311A JP 2005075165 A JP2005075165 A JP 2005075165A JP 2005075165 A JP2005075165 A JP 2005075165A JP 2006261311 A JP2006261311 A JP 2006261311A
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Abstract
【解決手段】 複数の半導体チップ2a、2bと、半導体チップ2a、2b間を電気的に接続するためのチップ間接続配線4とこのチップ間接続配線4に接続されたチップ接続用パッド5とが同じ面側に形成された半導体基板3と、ランド6を有する配線基板7とを備え、半導体チップ2a、2bはその主面が第1接続端子8、9を介してチップ接続用パッド5に接続されて半導体基板3に搭載されており、半導体チップ2a、2bの主面において半導体基板3に向き合わされない部分には外部接続用パッド13が形成され、この外部接続用パッド13は第2接続端子12を介して配線基板7のランド6と接続されている。
【選択図】 図1
Description
すなわち、本発明の半導体装置は、複数の半導体チップと、これら複数の半導体チップ間を電気的に接続するためのチップ間接続配線とこのチップ間接続配線に接続された複数のチップ接続用パッドとが同じ面側に形成された半導体基板と、チップ接続用パッドより大きいピッチで配置された複数のランドを有する配線基板と、を備え、複数の半導体チップはその主面が第1接続端子を介してチップ接続用パッドに接続されて半導体基板に搭載されており、半導体チップの主面において半導体基板に向き合わされない部分には外部接続用パッドが形成され、この外部接続用パッドは第2接続端子を介して配線基板のランドと接続されている。
図1は本発明の第1の実施形態に係る半導体装置1の一部断面斜視図を示し、図2はその半導体装置1の断面図を示す。
次に、図9は本発明の第2の実施形態に係る半導体装置21の一部断面斜視図を示し、図10はその半導体装置21の断面図を示す。なお、上記第1の実施形態と同じ構成部分には同一の符号を付しその詳細な説明は省略する。
次に、図13は本発明の第3の実施形態に係る半導体装置31を示す。なお、上記第1、第2の実施形態と同じ構成部分には同一の符号を付しその詳細な説明は省略する。
Claims (6)
- 複数の半導体チップと、
前記複数の半導体チップ間を電気的に接続するためのチップ間接続配線とこのチップ間接続配線に接続された複数のチップ接続用パッドとが同じ面側に形成された半導体基板と、
前記チップ接続用パッドより大きいピッチで配置された複数のランドを有する配線基板と、を備え、
前記複数の半導体チップはその主面が、第1接続端子を介して前記チップ接続用パッドに接続されて前記半導体基板に搭載されており、
前記半導体チップの前記主面において前記半導体基板に向き合わされない部分には外部接続用パッドが形成され、前記外部接続用パッドは第2接続端子を介して前記配線基板の前記ランドと接続されている
ことを特徴とする半導体装置。 - 前記半導体基板は、前記配線基板に形成された凹所内に位置している
ことを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板を囲むように前記凹所内に樹脂材が充填され前記樹脂材を介して前記半導体基板と前記配線基板とが接合されている
ことを特徴とする請求項2に記載の半導体装置。 - 複数の半導体チップと、
前記複数の半導体チップ間を電気的に接続するためのチップ間接続配線とこのチップ間接続配線に接続された複数のチップ接続用パッドとが同じ面側に形成された半導体基板と、を備え、
前記複数の半導体チップはその主面が、接続端子を介して前記チップ接続用パッドに接続されて前記半導体基板に搭載されており、
前記半導体チップの前記主面において前記半導体基板に向き合わされない部分には、前記チップ接続用パッドより大きいピッチで配置された複数の外部接続用パッドが形成されている
ことを特徴とする半導体装置。 - 半導体基板に、チップ間接続配線及びこのチップ間接続配線と接続された複数のチップ接続用パッドを同じ面側に形成する工程と、
半導体チップの主面において前記半導体基板に向き合わされない部分に、前記チップ接続用パッドより大きいピッチで配置された複数の外部接続用パッドを形成する工程と、
配線基板に前記外部接続用パッドと等ピッチなランドを形成する工程と、
前記半導体基板の前記チップ接続用パッドに、第1接続端子を介して複数の前記半導体チップの前記主面を接続させ複数の前記半導体チップを前記半導体基板に搭載する工程と、
前記半導体チップの前記外部接続用パッドと、前記配線基板の前記ランドとを第2接続端子を介して接続させる工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記半導体基板に前記半導体チップが搭載される前に、前記チップ接続用パッドを前記配線基板における前記ランドの形成面側に露出させて前記半導体基板を前記配線基板上に搭載または前記配線基板中に配置してから、前記チップ接続用パッドに前記複数の半導体チップを接続させる
ことを特徴とする請求項5に記載の半導体装置の製造方法。
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KR101210140B1 (ko) | 2012-12-07 |
US20060226527A1 (en) | 2006-10-12 |
US7402901B2 (en) | 2008-07-22 |
TWI303096B (ja) | 2008-11-11 |
JP4581768B2 (ja) | 2010-11-17 |
KR20060100263A (ko) | 2006-09-20 |
CN100470793C (zh) | 2009-03-18 |
TW200636972A (en) | 2006-10-16 |
CN1835229A (zh) | 2006-09-20 |
US20080138932A1 (en) | 2008-06-12 |
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