JP2004247706A - 電子部品実装構造及びその製造方法 - Google Patents
電子部品実装構造及びその製造方法 Download PDFInfo
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- JP2004247706A JP2004247706A JP2003386398A JP2003386398A JP2004247706A JP 2004247706 A JP2004247706 A JP 2004247706A JP 2003386398 A JP2003386398 A JP 2003386398A JP 2003386398 A JP2003386398 A JP 2003386398A JP 2004247706 A JP2004247706 A JP 2004247706A
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- electronic component
- wiring pattern
- resin film
- insulating film
- semiconductor chip
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Abstract
【解決手段】 配線パターン28aを備えた配線基板24の上に未硬化の第1樹脂膜32aを形成する工程と、接続端子21aを備えた電子部品20を、接続端子21aを上側にして未硬化の第1樹脂膜32aの中に埋め込む工程と、電子部品20を被覆する第2樹脂膜32bを形成する工程と、第1及び第2樹脂膜32a,32bを熱処理して硬化することにより絶縁膜32を得る工程と、配線パターン28a及び接続端子21a上の絶縁膜32にビアホール32xを形成する工程と、ビアホール32xを介して配線パターン28a及び接続端子21aに接続される上側配線パターン28bを形成する工程とを含む。
【選択図】 図4
Description
次に、本発明の第1実施形態の電子部品実装構造の製造方法を説明する。図2〜図4は本発明の第1実施形態の電子部品実装構造の製造方法を示す断面図である。第1実施形態の電子部品実装構造の製造方法は、図2(a)に示すように、まず、ビルドアップ配線基板を製造するためのベース基板24を用意する。このベース基板24は樹脂などの絶縁性材料から構成されている。またベース基板24にはスルーホール24aが設けられていて、このスルーホール24aにはその内面にベース基板24上の第1配線パターン28に繋がるスルーホールめっき層24bが形成され、その孔は樹脂24cで埋め込まれている。
図5及び図6は本発明の第2実施形態の電子部品実装構造の製造方法を示す断面図である。第2実施形態が第1実施形態と異なる点は、半導体チップを第1樹脂膜に埋め込んで実装した後に第2樹脂膜を形成せずに半導体チップ20上に直接第3配線パターンを形成することにある。第2実施形態では、第1実施形態と同様な工程についてはその詳しい説明を省略する。
図7及び図8は本発明の第3実施形態の電子部品実装構造の製造方法を示す断面図である。第3実施形態が第1実施形態と異なる点は、半導体チップをフェイスダウンで樹脂膜の中に埋め込んでフリップチップ実装することにある。第3実施形態において、第1実施形態と同一工程についてはその詳しい説明を省略する。
図9及び図10は本発明の第4実施形態の電子部品実装構造の製造方法を示す断面図である。第4実施形態が第3実施形態と異なる点は、第3実施形態と同様な方法により半導体チップを実装した後に、半導体チップ上に絶縁膜を形成することにある。これにより、配線パターンを半導体チップ上の領域にも引き回しできるようになる。第4実施形態では、第1及び第3実施形態と同一工程についての詳しい説明を省略する。
図11〜図13は本発明の第5実施形態の電子部品実装構造の製造方法を順に示す断面図である。前述した第3及び第4実施形態では、樹脂膜を排斥して半導体チップのバンプを配線パターンに接合するので、半導体チップのバンプと配線パターンとの間に僅かな樹脂が介在するおそれがあり、電気接続の十分な信頼性が得られない場合が想定される。第5実施形態では、そのような不具合を解消することができる。なお、第5実施形態では、第1及び第3実施形態と同一工程についてはその詳しい説明を省略する。
このため、本実施形態では、半導体チップ20bのバンプ23がはんだバンプである場合は、バンプ23をリフロー・硬化させて変形させることによりその隙間が埋め込まれるようにする。その後に、130〜200℃の温度雰囲気で熱処理を行うことにより、第1樹脂膜32aを硬化させる。
Claims (17)
- 配線パターンを備えた配線基板の上に未硬化の第1樹脂膜を形成する工程と、
素子形成面に接続端子を備えた電子部品を、該接続端子を上側にして前記未硬化の第1樹脂膜の中に埋め込む工程と、
前記電子部品を被覆する第2樹脂膜を形成する工程と、
前記第1及び第2樹脂膜を熱処理して硬化させることにより絶縁膜を得る工程と、
前記配線パターン及び接続端子上の前記絶縁膜の所定部にビアホールを形成する工程と、
前記ビアホールを介して前記配線パターン及び前記接続端子に接続される上側配線パターンを前記絶縁膜上に形成する工程とを有することを特徴とする電子部品実装構造の製造方法。 - 配線パターンを備えた配線基板の上に未硬化の樹脂膜を形成する工程と、
素子形成面に接続端子と該接続端子を露出させる開口部をもつパシベーション膜とを備えた電子部品を、該接続端子を上側にして前記未硬化の樹脂膜の中に埋め込む工程と、
前記樹脂膜を熱処理して硬化させることにより絶縁膜を得る工程と、
前記配線パターン上の前記絶縁膜の所定部にビアホールを形成する工程と、
前記ビアホールを介して前記配線パターンに接続されると共に、前記開口部を介して前記接続端子に接続される上側配線パターンを、前記絶縁膜及び前記電子部品上に形成する工程とを有することを特徴とする電子部品実装構造の製造方法。 - 配線パターンを備えた配線基板の上に未硬化の樹脂膜を形成する工程と、
素子形成面に接続端子を備えた電子部品を、該接続端子を下側にして前記未硬化の樹脂膜の中に埋め込むと共に、前記接続端子を前記配線パターンに接合する工程と、
前記樹脂膜を熱処理して硬化させることにより絶縁膜を得る工程と、
前記配線パターン上の前記絶縁膜の所定部にビアホールを形成する工程と、
前記ビアホールを介して前記配線パターンに接続された上側配線パターンを前記絶縁膜上に形成する工程とを有することを特徴とする電子部品実装構造の製造方法。 - 配線パターンを備えた配線基板の上に未硬化の第1樹脂膜を形成する工程と、
素子形成面に接続端子を備えた電子部品を、該接続端子を下側にして前記未硬化の第1樹脂膜の中に埋め込むと共に、前記接続端子を前記配線パターンに接合する工程と、
前記電子部品を被覆する第2樹脂膜を形成する工程と、
前記第1及び第2樹脂膜を熱処理して硬化させることにより絶縁膜を得る工程と、
前記配線パターン上の前記絶縁膜の所定部にビアホールを形成する工程と、
前記ビアホールを介して前記配線パターンに接続される上側配線パターンを前記絶縁膜上に形成する工程とを有することを特徴とする電子部品実装構造の製造方法。 - 前記未硬化の樹脂膜を形成する工程の後であって、前記電子部品の接続端子を前記配線パターンに接合する工程の前に、
前記電子部品の接続端子が接合される前記配線パターン上の樹脂膜の部分に開口部を形成する工程をさらに有し、
前記電子部品の接続端子を前記配線パターンに接合する工程は、前記電子部品の接続端子を前記樹脂膜の開口部に対応させて配置することを含むことを特徴とする請求項3又は4に記載の電子部品実装構造の製造方法。 - 前記電子部品の接続端子は、はんだバンプであり、
前記電子部品の接続端子を前記配線パターンに接合する工程において、
前記はんだバンプをリフロー・硬化して変形させることにより、前記電子部品と前記樹脂膜の開口部の側面との隙間を埋めること特徴とする請求項5に記載の電子部品実装構造。 - 前記電子部品を前記未硬化の樹脂膜に埋め込む工程において、前記電子部品の素子形成面又は背面と前記未硬化の樹脂膜の上面とが略同一の高さになるようにすることを特徴とする請求項1乃至6のいずれか一項に記載の電子部品実装構造の製造方法。
- 前記電子部品を前記未硬化の樹脂膜に埋め込む工程において、前記電子部品の背面と前記配線基板との間に前記樹脂膜が介在するようにすることを特徴とする請求項1又は2に記載の電子部品実装構造の製造方法。
- 前記上側配線パターンを形成する工程において、前記電子部品上には前記上側配線パターンを形成しないことを特徴とする請求項3に記載の電子部品実装構造の製造方法。
- 前記樹脂膜に前記電子部品を埋め込む工程から前記上側配線パターンを形成する工程を所定回数繰り返す工程をさらに有することを特徴とする請求項1乃至9のいずれか一項に記載の電子部品実装構造の製造方法。
- 前記上側配線パターンに上側電子部品をフリップチップ接続する工程をさらに有することを特徴とする請求項1乃至10のいずれか一項に記載の電子部品実装構造の製造方法。
- 前記電子部品は、厚みが150μm程度以下の半導体チップであることを特徴とする請求項1乃至11のいずれか一項に記載の電子部品実装構造の製造方法。
- 配線パターンを備えた配線基板と、
前記配線基板の上に形成された第1絶縁膜と、
素子形成面に接続端子を備えた電子部品の該接続端子が上側になって前記第1絶縁膜の中に埋設されている共に、前記電子部品の背面が前記配線基板に接触しない状態で実装された前記電子部品と、
前記電子部品を被覆する第2絶縁膜と、
前記配線パターン及び前記接続端子上の前記第1及び第2絶縁膜の所定部にそれぞれ形成されたビアホールと、
前記第2絶縁膜上に形成され、前記ビアホールを介して前記配線パターン及び前記接続端子にそれぞれ接続される上側配線パターンとを有することを特徴とする電子部品実装構造。 - 配線パターンを備えた配線基板と、
前記配線基板の上に形成された絶縁膜と、
素子形成面に接続端子と該接続端子を露出させる開口部をもつパシベーション膜とを備えた電子部品が、前記接続端子が上側になって前記絶縁膜の中に埋設されている共に、前記電子部品の背面が前記配線基板に接触しない状態で実装された前記電子部品と、
前記配線パターン上の前記絶縁膜の所定部に形成されたビアホールと、
前記絶縁膜及び前記電子部品上に形成され、前記ビアホールを介して前記配線パターンに接続されると共に、前記開口部を介して前記接続端子に接続される上側配線パターンとを有することを特徴とする電子部品実装構造。 - 前記電子部品の素子形成面と該電子部品が埋設された前記絶縁膜の上面とは、略同一の高さになって平坦化されていることを特徴とする請求項13又は14に記載の電子部品実装構造。
- 前記電子部品は、厚みが150μm程度以下の半導体チップであることを特徴とする請求項13乃至15のいずれか一項に記載の電子部品実装構造。
- 前記絶縁膜は樹脂からなることを特徴とする請求項12乃至16のいずれか一項に記載の電子部品実装構造。
Priority Applications (9)
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JP2003386398A JP4489411B2 (ja) | 2003-01-23 | 2003-11-17 | 電子部品実装構造の製造方法 |
KR1020040001087A KR101046265B1 (ko) | 2003-01-23 | 2004-01-08 | 전자 부품 실장 구조의 제조 방법 |
US10/756,763 US7285862B2 (en) | 2003-01-23 | 2004-01-14 | Electronic parts packaging structure in which a semiconductor chip is mounted on a wiring substrate and buried in an insulation film |
TW093101053A TWI326913B (en) | 2003-01-23 | 2004-01-15 | Electronic parts packaging structure and method of manufacturing the same |
CNA2004100024977A CN1518080A (zh) | 2003-01-23 | 2004-01-20 | 电子元件封装结构及其制造方法 |
EP04250386A EP1441389B1 (en) | 2003-01-23 | 2004-01-23 | Method of manufacturing an electronic parts packaging structure |
EP05015323.8A EP1615264B1 (en) | 2003-01-23 | 2004-01-23 | Method of manufacturing an electronic parts packaging structure |
US11/798,814 US7498200B2 (en) | 2003-01-23 | 2007-05-17 | Electronic-parts-packaging structure in which a semiconductor chip is mounted on a wiring substrate and buried in an insulation film |
US11/798,813 US7573135B2 (en) | 2003-01-23 | 2007-05-17 | Electronic parts packaging structure in which a semiconductor chip is mounted on a wiring substrate and buried in an insulation film |
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JP2003386398A JP4489411B2 (ja) | 2003-01-23 | 2003-11-17 | 電子部品実装構造の製造方法 |
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EP (2) | EP1441389B1 (ja) |
JP (1) | JP4489411B2 (ja) |
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Also Published As
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EP1441389A3 (en) | 2004-08-04 |
KR101046265B1 (ko) | 2011-07-05 |
EP1615264B1 (en) | 2014-01-08 |
US7285862B2 (en) | 2007-10-23 |
KR20040067882A (ko) | 2004-07-30 |
US7573135B2 (en) | 2009-08-11 |
US7498200B2 (en) | 2009-03-03 |
US20070224731A1 (en) | 2007-09-27 |
US20070222062A1 (en) | 2007-09-27 |
US20040159933A1 (en) | 2004-08-19 |
JP4489411B2 (ja) | 2010-06-23 |
CN1518080A (zh) | 2004-08-04 |
TWI326913B (en) | 2010-07-01 |
TW200416996A (en) | 2004-09-01 |
EP1615264A3 (en) | 2007-10-10 |
EP1441389A2 (en) | 2004-07-28 |
EP1615264A2 (en) | 2006-01-11 |
EP1441389B1 (en) | 2012-01-04 |
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