HK1018719A1 - Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment - Google Patents

Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment

Info

Publication number
HK1018719A1
HK1018719A1 HK99103769A HK99103769A HK1018719A1 HK 1018719 A1 HK1018719 A1 HK 1018719A1 HK 99103769 A HK99103769 A HK 99103769A HK 99103769 A HK99103769 A HK 99103769A HK 1018719 A1 HK1018719 A1 HK 1018719A1
Authority
HK
Hong Kong
Prior art keywords
mounting
manufacturing
circuit board
semiconductor device
electronic component
Prior art date
Application number
HK99103769A
Other languages
English (en)
Inventor
Nobuaki Hashimoto
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of HK1018719A1 publication Critical patent/HK1018719A1/xx

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Classifications

    • HELECTRICITY
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    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
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    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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    • H01L23/3157Partial encapsulation or coating
    • H01L23/3171Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
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    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
HK99103769A 1996-12-04 1999-08-31 Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment HK1018719A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP33904596 1996-12-04
JP35688096 1996-12-26
JP9144997 1997-03-26
PCT/JP1997/004437 WO1998025297A1 (fr) 1996-12-04 1997-12-04 Element electronique et dispositif a semiconducteur, procede de fabrication et de montage dudit dispositif, plaquette de circuit et materiel electronique

Publications (1)

Publication Number Publication Date
HK1018719A1 true HK1018719A1 (en) 1999-12-30

Family

ID=27306747

Family Applications (1)

Application Number Title Priority Date Filing Date
HK99103769A HK1018719A1 (en) 1996-12-04 1999-08-31 Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment

Country Status (8)

Country Link
US (8) US6475896B1 (zh)
JP (1) JP4895054B2 (zh)
KR (2) KR100549844B1 (zh)
CN (2) CN1519896A (zh)
AU (1) AU5136398A (zh)
HK (1) HK1018719A1 (zh)
TW (1) TW480636B (zh)
WO (1) WO1998025297A1 (zh)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW480636B (en) 1996-12-04 2002-03-21 Seiko Epson Corp Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment
EP1154471B1 (en) * 1998-09-30 2008-07-16 Ibiden Co., Ltd. Semiconductor chip with bump contacts
JP3661444B2 (ja) * 1998-10-28 2005-06-15 株式会社ルネサステクノロジ 半導体装置、半導体ウエハ、半導体モジュールおよび半導体装置の製造方法
US6930390B2 (en) * 1999-01-20 2005-08-16 Sony Chemicals Corp. Flexible printed wiring boards
DE19920593B4 (de) * 1999-05-05 2006-07-13 Assa Abloy Identification Technology Group Ab Chipträger für ein Chipmodul und Verfahren zur Herstellung des Chipmoduls
US6228687B1 (en) * 1999-06-28 2001-05-08 Micron Technology, Inc. Wafer-level package and methods of fabricating
JP4666703B2 (ja) * 1999-10-12 2011-04-06 旭化成イーマテリアルズ株式会社 半導体装置及びその材料
GB2385466A (en) * 1999-11-04 2003-08-20 Nec Corp Flip-chip device having stress absorbing layers and contacts
JP3450238B2 (ja) * 1999-11-04 2003-09-22 Necエレクトロニクス株式会社 半導体装置及びその製造方法
US6406991B2 (en) * 1999-12-27 2002-06-18 Hoya Corporation Method of manufacturing a contact element and a multi-layered wiring substrate, and wafer batch contact board
JP3610887B2 (ja) * 2000-07-03 2005-01-19 富士通株式会社 ウエハレベル半導体装置の製造方法及び半導体装置
JP3440070B2 (ja) * 2000-07-13 2003-08-25 沖電気工業株式会社 ウェハー及びウェハーの製造方法
US6818545B2 (en) * 2001-03-05 2004-11-16 Megic Corporation Low fabrication cost, fine pitch and high reliability solder bump
JP2003152014A (ja) * 2001-11-09 2003-05-23 Shinko Electric Ind Co Ltd 半導体装置の製造方法及び半導体装置
US6646347B2 (en) 2001-11-30 2003-11-11 Motorola, Inc. Semiconductor power device and method of formation
JP2003188313A (ja) * 2001-12-20 2003-07-04 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
US6884662B1 (en) * 2002-01-28 2005-04-26 Taiwan Semiconductor Manufacturing Company Enhanced adhesion strength between mold resin and polyimide
US7423336B2 (en) 2002-04-08 2008-09-09 Micron Technology, Inc. Bond pad rerouting element, rerouted semiconductor devices including the rerouting element, and assemblies including the rerouted semiconductor devices
US7547623B2 (en) 2002-06-25 2009-06-16 Unitive International Limited Methods of forming lead free solder bumps
WO2004001837A2 (en) 2002-06-25 2003-12-31 Unitive International Limited Methods of forming electronic structures including conductive shunt layers and related structures
TW546805B (en) * 2002-07-18 2003-08-11 Advanced Semiconductor Eng Bumping process
JP2004104103A (ja) * 2002-08-21 2004-04-02 Seiko Epson Corp 半導体装置及びその製造方法、回路基板並びに電子機器
US6892925B2 (en) * 2002-09-18 2005-05-17 International Business Machines Corporation Solder hierarchy for lead free solder joint
JP3707481B2 (ja) * 2002-10-15 2005-10-19 セイコーエプソン株式会社 半導体装置の製造方法
JP4247880B2 (ja) * 2002-12-24 2009-04-02 Tdk株式会社 電子部品の製造方法
JP4341249B2 (ja) * 2003-01-15 2009-10-07 セイコーエプソン株式会社 半導体装置の製造方法
TWI225899B (en) * 2003-02-18 2005-01-01 Unitive Semiconductor Taiwan C Etching solution and method for manufacturing conductive bump using the etching solution to selectively remove barrier layer
JP3693056B2 (ja) * 2003-04-21 2005-09-07 セイコーエプソン株式会社 半導体装置及びその製造方法、電子装置及びその製造方法並びに電子機器
JP2004327527A (ja) * 2003-04-22 2004-11-18 Seiko Epson Corp 電子装置及びその製造方法並びに電子機器
JP3666495B2 (ja) * 2003-06-27 2005-06-29 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
US20050082670A1 (en) * 2003-09-11 2005-04-21 Nordson Corporation Method for preapplying a viscous material to strengthen solder connections in microelectronic packaging and microelectronic packages formed thereby
JP3855992B2 (ja) 2003-12-17 2006-12-13 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
JP4010298B2 (ja) 2003-12-17 2007-11-21 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
CN100508148C (zh) * 2004-02-11 2009-07-01 英飞凌科技股份公司 具有接触支撑层的半导体封装以及制造该封装的方法
WO2006069340A2 (en) * 2004-12-21 2006-06-29 Carnegie Mellon University Lithography and associated methods, devices, and systems
JP4240226B2 (ja) * 2005-02-18 2009-03-18 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
JP4038691B2 (ja) * 2005-02-18 2008-01-30 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
US7531426B2 (en) * 2005-08-19 2009-05-12 Honeywell International Inc. Approach to high temperature wafer processing
WO2007052597A1 (ja) * 2005-11-02 2007-05-10 Matsushita Electric Industrial Co., Ltd. 電子部品パッケージ
KR100652443B1 (ko) * 2005-11-17 2006-12-01 삼성전자주식회사 재배선층을 갖는 웨이퍼 레벨 패키지 및 그 형성방법
DE102006003931B3 (de) * 2006-01-26 2007-08-02 Infineon Technologies Ag Halbleiterbauteil mit oberflächenmontierbaren Außenkontakten und Verfahren zur Herstellung desselben
CN100447973C (zh) * 2006-05-12 2008-12-31 联咏科技股份有限公司 芯片结构及其制造工艺
US20090321830A1 (en) * 2006-05-15 2009-12-31 Carnegie Mellon University Integrated circuit device, system, and method of fabrication
US7759765B2 (en) * 2006-07-07 2010-07-20 Semiconductor Energy Laboratory Co., Ltd Semiconductor device mounted with fuse memory
GB2444775B (en) * 2006-12-13 2011-06-08 Cambridge Silicon Radio Ltd Chip mounting
US8034702B2 (en) 2007-08-16 2011-10-11 Micron Technology, Inc. Methods of forming through substrate interconnects
JP5361264B2 (ja) 2008-07-04 2013-12-04 ローム株式会社 半導体装置
US20100096754A1 (en) * 2008-10-17 2010-04-22 Samsung Electronics Co., Ltd. Semiconductor package, semiconductor module, and method for fabricating the semiconductor package
US20100237500A1 (en) * 2009-03-20 2010-09-23 Stats Chippac, Ltd. Semiconductor Substrate and Method of Forming Conformal Solder Wet-Enhancement Layer on Bump-on-Lead Site
US8345435B2 (en) * 2009-08-07 2013-01-01 Semiconductor Energy Laboratory Co., Ltd. Terminal structure and manufacturing method thereof, and electronic device and manufacturing method thereof
US8492892B2 (en) 2010-12-08 2013-07-23 International Business Machines Corporation Solder bump connections
JP2012190854A (ja) * 2011-03-08 2012-10-04 Toshiba Corp 半導体装置及びその配線の形成方法
US8513814B2 (en) 2011-05-02 2013-08-20 International Business Machines Corporation Buffer pad in solder bump connections and methods of manufacture
US9484259B2 (en) * 2011-09-21 2016-11-01 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming protection and support structure for conductive interconnect structure
US8659153B2 (en) * 2012-07-16 2014-02-25 Micron Technology, Inc. Pillar on pad interconnect structures, semiconductor dice and die assemblies including such interconnect structures, and related methods
TWI544593B (zh) * 2013-09-09 2016-08-01 矽品精密工業股份有限公司 半導體裝置及其製法
KR102513997B1 (ko) 2016-02-04 2023-03-24 삼성디스플레이 주식회사 표시 장치
CN109192660A (zh) * 2018-09-12 2019-01-11 三星半导体(中国)研究开发有限公司 柔性封装件
US11158571B2 (en) * 2018-12-20 2021-10-26 Micron Technology, Inc. Devices including conductive interconnect structures, related electronic systems, and related methods
CN113615323B (zh) * 2019-03-20 2024-05-28 大日本印刷株式会社 配线基板和配线基板的制造方法
CN110415966B (zh) * 2019-07-30 2024-03-12 新纳传感系统有限公司 线圈及其制作方法

Family Cites Families (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144871B2 (zh) * 1971-09-25 1976-12-01
JPS528785A (en) 1975-07-10 1977-01-22 Citizen Watch Co Ltd Semiconductor device electrode structure
US4076575A (en) * 1976-06-30 1978-02-28 International Business Machines Corporation Integrated fabrication method of forming connectors through insulative layers
DE2929339A1 (de) 1978-07-24 1980-02-14 Citizen Watch Co Ltd Halbleiteranordnung
JPS5518069A (en) 1978-07-26 1980-02-07 Citizen Watch Co Ltd Protective construction of semiconductor device
JPS59188153A (ja) 1983-04-08 1984-10-25 Hitachi Ltd 多層配線を有する電子回路装置の製造方法
GB8316477D0 (en) * 1983-06-16 1983-07-20 Plessey Co Plc Producing layered structure
JPS61253826A (ja) 1985-05-07 1986-11-11 Hitachi Ltd 半導体装置およびその製造方法
JPH0624205B2 (ja) 1985-06-24 1994-03-30 株式会社日立製作所 半導体装置
FR2604029B1 (fr) * 1986-09-16 1994-08-05 Toshiba Kk Puce de circuit integre possedant des bornes de sortie ameliorees
JPS6372143A (ja) 1986-09-16 1988-04-01 Toshiba Corp 集積回路装置
JPS63229839A (ja) 1987-03-19 1988-09-26 Nec Corp 半導体装置
JPS63307759A (ja) 1987-06-09 1988-12-15 Nec Corp 半導体集積回路
JPS641257A (en) * 1987-06-23 1989-01-05 Fujitsu Ltd Semiconductor device
US4917466A (en) * 1987-08-13 1990-04-17 Shin-Etsu Polymer Co., Ltd. Method for electrically connecting IC chips, a resinous bump-forming composition used therein and a liquid-crystal display unit electrically connected thereby
JPS6461934A (en) * 1987-09-02 1989-03-08 Nippon Denso Co Semiconductor device and manufacture thereof
JPH01108745A (ja) 1987-10-21 1989-04-26 Mitsubishi Electric Corp 半導体装置
JP2630326B2 (ja) 1988-02-02 1997-07-16 富士通株式会社 半導体装置用バンプ形成方法
US5631447A (en) * 1988-02-05 1997-05-20 Raychem Limited Uses of uniaxially electrically conductive articles
JPH01209746A (ja) 1988-02-17 1989-08-23 Nec Corp 半導体装置
JPH0263127A (ja) 1988-08-29 1990-03-02 Seiko Epson Corp 半導体装置
JP3022565B2 (ja) * 1988-09-13 2000-03-21 株式会社日立製作所 半導体装置
JPH02109358A (ja) 1988-10-19 1990-04-23 Hitachi Ltd 半導体の実装構造体
JPH02130828A (ja) 1988-11-11 1990-05-18 Hitachi Ltd 微細配線の形成方法
JPH0320041A (ja) 1989-06-16 1991-01-29 Matsushita Electron Corp 半導体装置
JPH0323928A (ja) 1989-06-22 1991-01-31 Kanto Auto Works Ltd モール貼付装置
DE68927931T2 (de) * 1989-07-26 1997-09-18 Ibm Verfahren zur Herstellung einer Packungsstruktur für einen integrierten Schaltungschip
JPH03198342A (ja) * 1989-12-26 1991-08-29 Nec Corp 半導体装置の製造方法
JPH0410429A (ja) * 1990-04-26 1992-01-14 Matsushita Electron Corp 半導体装置
JPH0428231A (ja) 1990-05-23 1992-01-30 Nec Corp 半導体装置の製造方法
JPH0474427A (ja) 1990-07-16 1992-03-09 Matsushita Electron Corp Mis型半導体装置の製造方法
DE69014871T2 (de) * 1990-07-31 1995-05-24 Ibm Verfahren zur Bildung metallischer Kontaktflächen und Anschlüsse auf Halbleiterchips.
US5128746A (en) 1990-09-27 1992-07-07 Motorola, Inc. Adhesive and encapsulant material with fluxing properties
JPH04155835A (ja) * 1990-10-18 1992-05-28 Mitsubishi Electric Corp 集積回路装置の製造方法
JPH04261049A (ja) * 1991-01-31 1992-09-17 Mitsubishi Electric Corp 半導体装置およびその製造方法
KR920017227A (ko) 1991-02-05 1992-09-26 김광호 반도체장치의 층간콘택 구조 및 그 제조방법
US5111278A (en) * 1991-03-27 1992-05-05 Eichelberger Charles W Three-dimensional multichip module systems
JPH04313256A (ja) 1991-04-10 1992-11-05 Hitachi Ltd 半導体集積回路装置及びその形成方法
JPH04346231A (ja) 1991-05-23 1992-12-02 Canon Inc 半導体装置の製造方法
JP3173045B2 (ja) 1991-07-09 2001-06-04 ヤマハ株式会社 半導体装置
JPH05226416A (ja) 1991-07-09 1993-09-03 Oki Electric Ind Co Ltd フリップチップの実装方法
JPH0555533A (ja) 1991-08-29 1993-03-05 Fujitsu Ltd 半導体集積回路
JP3256946B2 (ja) 1991-09-24 2002-02-18 ソニー株式会社 コンタクト形成方法
JP2731471B2 (ja) 1991-11-05 1998-03-25 アルプス電気株式会社 電気的接続構造
JPH05218136A (ja) * 1992-02-03 1993-08-27 Nec Corp フリップチップ・ボンディング方法
JPH05267474A (ja) 1992-03-18 1993-10-15 Fujitsu Ltd 半導体装置
JPH05291262A (ja) 1992-04-07 1993-11-05 Toshiba Corp バンプ電極の形成方法
JP2865154B2 (ja) 1992-05-08 1999-03-08 日本電気株式会社 固体撮像装置の組み立て方法
US5744382A (en) * 1992-05-13 1998-04-28 Matsushita Electric Industrial Co., Ltd. Method of packaging electronic chip component and method of bonding of electrode thereof
JPH0621061A (ja) 1992-07-03 1994-01-28 Nec Corp 半導体装置
JPH0669211A (ja) 1992-08-22 1994-03-11 Nec Corp 樹脂封止型半導体装置
JPH0677283A (ja) * 1992-08-26 1994-03-18 Kyocera Corp 配線基板へのic素子の実装方法
CA2115947A1 (en) 1993-03-03 1994-09-04 Gregory C. Smith Wafer-like processing after sawing dmds
JPH0730095A (ja) * 1993-06-25 1995-01-31 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP3450038B2 (ja) 1993-12-14 2003-09-22 沖電気工業株式会社 半導体装置及びその製造方法
JP3033662B2 (ja) 1994-04-25 2000-04-17 日本電気株式会社 半導体素子実装用フィルムと半導体素子実装構造
JPH0817860A (ja) * 1994-06-30 1996-01-19 Oki Electric Ind Co Ltd 電子部品の製造方法
MY112145A (en) 1994-07-11 2001-04-30 Ibm Direct attachment of heat sink attached directly to flip chip using flexible epoxy
JPH0831872A (ja) 1994-07-13 1996-02-02 Hitachi Ltd 半導体装置
TW368745B (en) 1994-08-15 1999-09-01 Citizen Watch Co Ltd Semiconductor device with IC chip highly secured
US5659952A (en) 1994-09-20 1997-08-26 Tessera, Inc. Method of fabricating compliant interface for semiconductor chip
JP3142723B2 (ja) 1994-09-21 2001-03-07 シャープ株式会社 半導体装置及びその製造方法
JP2792532B2 (ja) * 1994-09-30 1998-09-03 日本電気株式会社 半導体装置の製造方法及び半導体ウエハー
JP2748870B2 (ja) 1994-12-20 1998-05-13 日本電気株式会社 基板接続方法
JP3259562B2 (ja) 1995-01-27 2002-02-25 富士電機株式会社 バンプ付き半導体装置の製造方法
JP3360461B2 (ja) 1995-01-31 2002-12-24 ソニー株式会社 メタル成膜工程の前処理方法
JPH08250549A (ja) 1995-03-13 1996-09-27 Matsushita Electric Ind Co Ltd 半導体装置とその製造方法
DE69635397T2 (de) * 1995-03-24 2006-05-24 Shinko Electric Industries Co., Ltd. Halbleitervorrichtung mit Chipabmessungen und Herstellungsverfahren
KR100218996B1 (ko) * 1995-03-24 1999-09-01 모기 쥰이찌 반도체장치
JPH08298269A (ja) 1995-04-25 1996-11-12 Toshiba Microelectron Corp 半導体装置及びその製造方法
JPH08297139A (ja) 1995-04-26 1996-11-12 Mitsubishi Electric Corp 半導体加速度センサ
JP3963330B2 (ja) 1995-04-26 2007-08-22 昭和電工株式会社 発光ダイオード
US5614765A (en) * 1995-06-07 1997-03-25 Advanced Micro Devices, Inc. Self aligned via dual damascene
US5696952A (en) * 1995-08-03 1997-12-09 Pontarelli; Mark C. Dynamic speed switching software for power management
US5773359A (en) * 1995-12-26 1998-06-30 Motorola, Inc. Interconnect system and method of fabrication
TW480636B (en) 1996-12-04 2002-03-21 Seiko Epson Corp Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment
US5989939A (en) * 1996-12-13 1999-11-23 Tessera, Inc. Process of manufacturing compliant wirebond packages
JPH10197374A (ja) * 1997-01-14 1998-07-31 Mitsubishi Electric Corp 半導体センサ
US6403882B1 (en) * 1997-06-30 2002-06-11 International Business Machines Corporation Protective cover plate for flip chip assembly backside
JP3768817B2 (ja) * 1997-10-30 2006-04-19 株式会社ルネサステクノロジ 半導体装置およびその製造方法

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US7049686B2 (en) 2006-05-23
KR100549844B1 (ko) 2006-02-06
CN1227721C (zh) 2005-11-16
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US20090181521A1 (en) 2009-07-16
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CN1519896A (zh) 2004-08-11
US8115284B2 (en) 2012-02-14
US20100273311A1 (en) 2010-10-28
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US6730589B2 (en) 2004-05-04
US20030096449A1 (en) 2003-05-22
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US7470979B2 (en) 2008-12-30

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