DE69625713D1 - Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf - Google Patents

Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf

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Publication number
DE69625713D1
DE69625713D1 DE69625713T DE69625713T DE69625713D1 DE 69625713 D1 DE69625713 D1 DE 69625713D1 DE 69625713 T DE69625713 T DE 69625713T DE 69625713 T DE69625713 T DE 69625713T DE 69625713 D1 DE69625713 D1 DE 69625713D1
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Germany
Prior art keywords
thin film
piezoelectric thin
film element
manufacturing
ink jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69625713T
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English (en)
Other versions
DE69625713T2 (de
Inventor
Masato Shimada
Tetsushi Takahashi
Hiroyuki Kamei
Hong Qui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
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Publication date
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Application granted granted Critical
Publication of DE69625713D1 publication Critical patent/DE69625713D1/de
Publication of DE69625713T2 publication Critical patent/DE69625713T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62625—Wet mixtures
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    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
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    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
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    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
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    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
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    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
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    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
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    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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    • H10N30/80—Constructional details
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    • H10N30/8548—Lead-based oxides
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    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
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  • Composite Materials (AREA)
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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
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DE69625713T 1995-09-19 1996-09-18 Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf Expired - Lifetime DE69625713T2 (de)

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JP24037295 1995-09-19
JP32267095 1995-12-12
JP19084896 1996-07-19
JP24535396A JP3890634B2 (ja) 1995-09-19 1996-09-17 圧電体薄膜素子及びインクジェット式記録ヘッド

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DE69625713D1 true DE69625713D1 (de) 2003-02-13
DE69625713T2 DE69625713T2 (de) 2003-08-07

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DE69609915T Expired - Lifetime DE69609915T2 (de) 1995-09-19 1996-09-18 Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf
DE69623349T Expired - Lifetime DE69623349T2 (de) 1995-09-19 1996-09-18 Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf
DE69625713T Expired - Lifetime DE69625713T2 (de) 1995-09-19 1996-09-18 Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf

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DE69623349T Expired - Lifetime DE69623349T2 (de) 1995-09-19 1996-09-18 Piezoelektrisches Dünnschichtelement, Verfahren zum Herstellen und dieses piezoelektrisches Dünnschichtelement verwendender Tintenstrahldruckkopf

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