AU2001290284A1 - Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head - Google Patents

Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head

Info

Publication number
AU2001290284A1
AU2001290284A1 AU2001290284A AU9028401A AU2001290284A1 AU 2001290284 A1 AU2001290284 A1 AU 2001290284A1 AU 2001290284 A AU2001290284 A AU 2001290284A AU 9028401 A AU9028401 A AU 9028401A AU 2001290284 A1 AU2001290284 A1 AU 2001290284A1
Authority
AU
Australia
Prior art keywords
ink
thin film
jet head
piezoelectric
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001290284A
Inventor
Takeshi Kamada
Isaku Kanno
Ryoichi Takayama
Hideo Torii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of AU2001290284A1 publication Critical patent/AU2001290284A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G25/00—Compounds of zirconium
    • C01G25/006—Compounds containing, besides zirconium, two or more other elements, with the exception of oxygen or hydrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/30—Three-dimensional structures
    • C01P2002/34—Three-dimensional structures perovskite-type (ABO3)

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AU2001290284A 2000-10-03 2001-09-26 Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head Abandoned AU2001290284A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-303371 2000-10-03
JP2000303371 2000-10-03
PCT/JP2001/008403 WO2002029129A1 (en) 2000-10-03 2001-09-26 Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head

Publications (1)

Publication Number Publication Date
AU2001290284A1 true AU2001290284A1 (en) 2002-04-15

Family

ID=18784579

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001290284A Abandoned AU2001290284A1 (en) 2000-10-03 2001-09-26 Piezoelectric thin film and method for preparation thereof, and piezoelectric element having the piezoelectric thin film, ink-jet head using the piezoelectric element, and ink-jet recording device having the ink-jet head

Country Status (7)

Country Link
US (1) US7001014B2 (en)
EP (1) EP1338672B1 (en)
JP (1) JP4875827B2 (en)
KR (1) KR100532773B1 (en)
CN (1) CN1239734C (en)
AU (1) AU2001290284A1 (en)
WO (1) WO2002029129A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7061161B2 (en) * 2002-02-15 2006-06-13 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
KR100519764B1 (en) * 2003-03-20 2005-10-07 삼성전자주식회사 Piezoelectric actuator of ink-jet printhead and method for forming threrof
JP2005005689A (en) * 2003-05-20 2005-01-06 Matsushita Electric Ind Co Ltd Piezoelectric element and method for manufacturing same
US7411339B2 (en) * 2003-11-28 2008-08-12 Seiko Epson Corporation Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same
KR101153690B1 (en) * 2006-02-20 2012-06-18 삼성전기주식회사 Piezoelectric actuator of inkjet head and method for forming the same
JP5216319B2 (en) * 2007-12-27 2013-06-19 株式会社アルバック Method for producing lead zirconate titanate sintered body
JP2009181623A (en) * 2008-01-30 2009-08-13 Fujitsu Ltd Magnetic head and manufacturing method thereof
JP2010089470A (en) 2008-10-10 2010-04-22 Seiko Epson Corp Liquid injection head, liquid injection device, and actuator device
JP5344143B2 (en) * 2008-12-11 2013-11-20 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
JP2010143205A (en) * 2008-12-22 2010-07-01 Seiko Epson Corp Liquid jet head and liquid jet apparatus, and actuator apparatus
JP2011187790A (en) * 2010-03-10 2011-09-22 Seiko Epson Corp Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990012691A1 (en) * 1989-04-17 1990-11-01 Domino Printing Sciences Plc Ink jet nozzle/valve, pen and printer
US5235352A (en) 1991-08-16 1993-08-10 Compaq Computer Corporation High density ink jet printhead
JPH0657411A (en) 1992-08-13 1994-03-01 Matsushita Electric Ind Co Ltd Method and device for producing dielectric thin film
JPH06290983A (en) 1993-04-06 1994-10-18 Matsushita Electric Ind Co Ltd Thin dielectric film and manufacture thereof
JP3127672B2 (en) 1993-06-30 2001-01-29 三菱マテリアル株式会社 A sputtering target material capable of forming a ferroelectric thin film having a very small local variation in the Pb content in the thin film
JPH07172996A (en) 1993-12-20 1995-07-11 Matsushita Electric Ind Co Ltd Production of thin film of dielectric material and production device therefor
JP3890634B2 (en) * 1995-09-19 2007-03-07 セイコーエプソン株式会社 Piezoelectric thin film element and ink jet recording head
JPH10209517A (en) 1997-01-17 1998-08-07 Matsushita Electric Ind Co Ltd Piezoelectric element
JP3520403B2 (en) * 1998-01-23 2004-04-19 セイコーエプソン株式会社 Piezoelectric thin film element, actuator, ink jet recording head, and ink jet recording apparatus
JP2000006400A (en) 1998-06-26 2000-01-11 Matsushita Electric Ind Co Ltd Liquid ejector and manufacture thereof
JP3517876B2 (en) * 1998-10-14 2004-04-12 セイコーエプソン株式会社 Ferroelectric thin film element manufacturing method, ink jet recording head, and ink jet printer

Also Published As

Publication number Publication date
KR20030038788A (en) 2003-05-16
WO2002029129A1 (en) 2002-04-11
EP1338672A4 (en) 2009-07-15
JP4875827B2 (en) 2012-02-15
CN1239734C (en) 2006-02-01
US20040004650A1 (en) 2004-01-08
KR100532773B1 (en) 2005-12-01
US7001014B2 (en) 2006-02-21
EP1338672B1 (en) 2012-01-11
EP1338672A1 (en) 2003-08-27
JPWO2002029129A1 (en) 2004-02-12
CN1468321A (en) 2004-01-14

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