DE69517417D1 - Piezoelektrische dünnschichtanordnung, verfahren zur herstellung derselben und einen diese anordnung enthaltenden tintenstrahldruckkopf - Google Patents
Piezoelektrische dünnschichtanordnung, verfahren zur herstellung derselben und einen diese anordnung enthaltenden tintenstrahldruckkopfInfo
- Publication number
- DE69517417D1 DE69517417D1 DE69517417T DE69517417T DE69517417D1 DE 69517417 D1 DE69517417 D1 DE 69517417D1 DE 69517417 T DE69517417 T DE 69517417T DE 69517417 T DE69517417 T DE 69517417T DE 69517417 D1 DE69517417 D1 DE 69517417D1
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- ink
- producing
- print head
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
- H10N30/8554—Lead zirconium titanate based
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32563394 | 1994-12-27 | ||
PCT/JP1995/002721 WO1996020503A1 (en) | 1994-12-27 | 1995-12-27 | Thin-film piezoelectric element, process for preparing the same, and ink jet recording head made by using said element |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69517417D1 true DE69517417D1 (de) | 2000-07-13 |
DE69517417T2 DE69517417T2 (de) | 2000-10-26 |
Family
ID=18179031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69517417T Expired - Lifetime DE69517417T2 (de) | 1994-12-27 | 1995-12-27 | Piezoelektrische dünnschichtanordnung, verfahren zur herstellung derselben und einen diese anordnung enthaltenden tintenstrahldruckkopf |
Country Status (5)
Country | Link |
---|---|
US (1) | US5814923A (de) |
EP (1) | EP0747976B1 (de) |
JP (1) | JP3689913B2 (de) |
DE (1) | DE69517417T2 (de) |
WO (1) | WO1996020503A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3713921B2 (ja) * | 1996-10-24 | 2005-11-09 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
JP3682684B2 (ja) * | 1997-10-20 | 2005-08-10 | セイコーエプソン株式会社 | 圧電体薄膜素子の製造方法 |
EP0991130B1 (de) * | 1998-03-04 | 2007-12-12 | Seiko Epson Corporation | Piezoelektrisches gerät, tintenstrahldruckkopf, verfahren zum herstellen und drucker |
JP2001057449A (ja) * | 1999-06-08 | 2001-02-27 | Matsushita Electric Ind Co Ltd | 薄板圧電素子並びにそれを用いた圧電振動子及び圧電発音体 |
JPWO2002027809A1 (ja) * | 2000-09-27 | 2004-02-05 | 松下電器産業株式会社 | 誘電体薄膜素子、並びにそれを用いたアクチュエータ、インクジェットヘッド及びインクジェット式記録装置 |
WO2002073710A1 (fr) * | 2001-03-12 | 2002-09-19 | Ngk Insulators,Ltd. | Actionneur a films piezo-electriques/electrostrictifs et son procede de fabrication |
US6620237B2 (en) | 2001-11-15 | 2003-09-16 | Spectra, Inc. | Oriented piezoelectric film |
US7419252B2 (en) | 2004-07-13 | 2008-09-02 | Brother Kogyo Kabushiki Kaisha | Ink jet head, piezo-electric actuator, and method of manufacturing them |
EP1616700A1 (de) * | 2004-07-13 | 2006-01-18 | Brother Kogyo Kabushiki Kaisha | Piezoelektrischer Aktor, Tintenstrahlkopf und dazugehöriges Herstellungsverfahren |
JP5123532B2 (ja) * | 2007-01-30 | 2013-01-23 | 太陽誘電株式会社 | マイクロカンチレバー |
DE102007045089A1 (de) * | 2007-09-07 | 2009-03-12 | Epcos Ag | Keramikmaterial, Verfahren zur Herstellung desselben und elektrokeramisches Bauelement umfassend das Keramikmaterial |
JP4276276B2 (ja) * | 2007-09-07 | 2009-06-10 | 富士フイルム株式会社 | 圧電素子の製造方法 |
WO2010001771A1 (ja) * | 2008-07-02 | 2010-01-07 | アルプス電気株式会社 | 高分子アクチュエータ及び高分子アクチュエータ搭載デバイス |
JP5444662B2 (ja) * | 2008-08-25 | 2014-03-19 | ソニー株式会社 | 圧電デバイスの製造方法 |
JP5585209B2 (ja) * | 2009-05-28 | 2014-09-10 | 株式会社リコー | 電気機械変換素子の製造方法、該製造方法により製造した電気機械変換素子、液滴吐出ヘッド及び液滴吐出装置 |
KR101341404B1 (ko) * | 2009-08-20 | 2013-12-13 | 가부시키가이샤 무라타 세이사쿠쇼 | 적층 세라믹 콘덴서의 제조방법 및 적층 세라믹 콘덴서 |
JP2012215518A (ja) * | 2011-04-01 | 2012-11-08 | Rohm Co Ltd | 圧電薄膜構造および角速度検出装置 |
KR101776237B1 (ko) * | 2015-05-21 | 2017-09-11 | 연세대학교 산학협력단 | 코골이 및 수면 무호흡 감지용 패드 |
JP2017080946A (ja) * | 2015-10-26 | 2017-05-18 | セイコーエプソン株式会社 | Memsデバイスの製造方法、memsデバイス、液体噴射ヘッド、および液体噴射装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54105799A (en) * | 1978-02-07 | 1979-08-20 | Toshiba Corp | Compound piezo-electric unit and preparation |
US4565642A (en) * | 1982-07-14 | 1986-01-21 | Hitachi, Ltd. | Piezoelectric substances |
EP0134249A4 (de) * | 1983-01-31 | 1987-06-29 | Nippon Soda Co | Herstellungsverfahren eines dünnschichtdielektrikums. |
JPS63238799A (ja) * | 1986-12-12 | 1988-10-04 | Fuji Electric Co Ltd | 圧電型振動子の製造方法 |
US4862029A (en) * | 1987-02-11 | 1989-08-29 | Tosoh Corporation | Actuator |
JPH0762235B2 (ja) * | 1987-10-05 | 1995-07-05 | 松下電器産業株式会社 | 強誘電体薄膜の製造方法 |
JPH02248089A (ja) * | 1989-03-22 | 1990-10-03 | Toshiba Corp | 電子部品 |
US5032471A (en) * | 1989-03-24 | 1991-07-16 | Mitsubishi Mining And Cement Co. Ltd. | Pyroelectric ceramic composition and multilayered structure therefrom |
US5141903A (en) * | 1989-03-31 | 1992-08-25 | Mitsubishi Mining And Cement Co. Ltd. | Pyroelectric ceramic composition |
JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JPH03112863A (ja) * | 1989-09-28 | 1991-05-14 | Mitsubishi Materials Corp | 焦電性セラミックス焼結組成物 |
JPH07108102B2 (ja) * | 1990-05-01 | 1995-11-15 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータの製造方法 |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
CN1025703C (zh) * | 1990-10-29 | 1994-08-17 | 湖北大学 | 一种大功率压电陶瓷材料 |
JPH06235268A (ja) * | 1991-05-21 | 1994-08-23 | Kiyoshi Tokunaga | 車を横むき出し入れ式駐車場 |
EP0526048B1 (de) * | 1991-07-18 | 1997-11-12 | Ngk Insulators, Ltd. | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
JP3182909B2 (ja) * | 1991-09-25 | 2001-07-03 | セイコーエプソン株式会社 | 強誘電体キャパシタの製造方法及び強誘電体メモリ装置の製造方法 |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5645753A (en) * | 1994-05-19 | 1997-07-08 | Kyocera Corporation | Piezo-electric ceramic composition |
US5825121A (en) * | 1994-07-08 | 1998-10-20 | Seiko Epson Corporation | Thin film piezoelectric device and ink jet recording head comprising the same |
US5658485A (en) * | 1995-10-03 | 1997-08-19 | Lucent Technologies Inc. | Pyrochlore based oxides with high dielectric constant and low temperature coefficient |
-
1995
- 1995-12-27 WO PCT/JP1995/002721 patent/WO1996020503A1/ja active IP Right Grant
- 1995-12-27 JP JP51749896A patent/JP3689913B2/ja not_active Expired - Fee Related
- 1995-12-27 EP EP95942281A patent/EP0747976B1/de not_active Expired - Lifetime
- 1995-12-27 US US08/696,914 patent/US5814923A/en not_active Expired - Lifetime
- 1995-12-27 DE DE69517417T patent/DE69517417T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3689913B2 (ja) | 2005-08-31 |
WO1996020503A1 (en) | 1996-07-04 |
EP0747976A4 (de) | 1999-03-31 |
DE69517417T2 (de) | 2000-10-26 |
EP0747976B1 (de) | 2000-06-07 |
US5814923A (en) | 1998-09-29 |
EP0747976A1 (de) | 1996-12-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |