DE69710411T2 - Tintenstrahldruckkopf und Verfahren zu seiner Herstellung - Google Patents

Tintenstrahldruckkopf und Verfahren zu seiner Herstellung

Info

Publication number
DE69710411T2
DE69710411T2 DE69710411T DE69710411T DE69710411T2 DE 69710411 T2 DE69710411 T2 DE 69710411T2 DE 69710411 T DE69710411 T DE 69710411T DE 69710411 T DE69710411 T DE 69710411T DE 69710411 T2 DE69710411 T2 DE 69710411T2
Authority
DE
Germany
Prior art keywords
manufacture
inkjet printhead
printhead
inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710411T
Other languages
English (en)
Other versions
DE69710411D1 (de
Inventor
Yutaka Furuhata
Yoshinao Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29748096A external-priority patent/JP3424721B2/ja
Priority claimed from JP29783696A external-priority patent/JPH10119294A/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69710411D1 publication Critical patent/DE69710411D1/de
Publication of DE69710411T2 publication Critical patent/DE69710411T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/001—Method or apparatus involving adhesive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49346—Rocket or jet device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69710411T 1996-10-18 1997-10-20 Tintenstrahldruckkopf und Verfahren zu seiner Herstellung Expired - Lifetime DE69710411T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29748096A JP3424721B2 (ja) 1996-10-18 1996-10-18 インクジェット式記録ヘッド、及びその製造方法
JP29783696A JPH10119294A (ja) 1996-10-21 1996-10-21 インクジェット式記録ヘッドの流路基板の製造方法

Publications (2)

Publication Number Publication Date
DE69710411D1 DE69710411D1 (de) 2002-03-21
DE69710411T2 true DE69710411T2 (de) 2002-11-07

Family

ID=26561141

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69727255T Expired - Lifetime DE69727255T2 (de) 1996-10-18 1997-10-20 Tintenstrahldruckkopf und Verfahren zu dessen Herstellung
DE69710411T Expired - Lifetime DE69710411T2 (de) 1996-10-18 1997-10-20 Tintenstrahldruckkopf und Verfahren zu seiner Herstellung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69727255T Expired - Lifetime DE69727255T2 (de) 1996-10-18 1997-10-20 Tintenstrahldruckkopf und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (3) US6290341B1 (de)
EP (2) EP0839654B1 (de)
DE (2) DE69727255T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3327246B2 (ja) * 1999-03-25 2002-09-24 富士ゼロックス株式会社 インクジェット記録ヘッド及びその製造方法
EP1095773B1 (de) * 1999-10-29 2003-07-09 Hewlett-Packard Company, A Delaware Corporation Tintenstrahldruckkopf mit verbesserter Zuverlässigkeit
JP2002248765A (ja) * 2000-12-19 2002-09-03 Fuji Xerox Co Ltd インクジェット式記録ヘッドおよびインクジェット式記録装置
CN1289298C (zh) * 2001-09-06 2006-12-13 株式会社理光 液滴喷射头及其制造方法、微型器件、喷墨头、墨盒以及喷墨打印设备
JP3925469B2 (ja) 2003-06-30 2007-06-06 ブラザー工業株式会社 インクジェットヘッド
US7273267B2 (en) * 2003-09-30 2007-09-25 Fujifilm Corporation Bubble-eliminating liquid filling method, droplet discharging apparatus, and inkjet recording apparatus
US7278722B2 (en) * 2003-11-25 2007-10-09 Brother Kogyo Kabushiki Kaisha Ink cartridge
US7922284B2 (en) * 2006-08-28 2011-04-12 Brother Kogyo Kabushiki Kaisha Liquid-droplet jetting head and liquid-droplet jetting apparatus having the same
JP2008074034A (ja) * 2006-09-25 2008-04-03 Brother Ind Ltd 液体吐出ヘッドおよびその製造方法
JP2014117819A (ja) 2012-12-13 2014-06-30 Sii Printek Inc 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法
JP7415644B2 (ja) * 2020-02-20 2024-01-17 セイコーエプソン株式会社 液体吐出ヘッド及び液体吐出装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK325278A (da) 1977-07-21 1979-01-22 B E Wainwright Taendingssystem
US4216477A (en) * 1978-05-10 1980-08-05 Hitachi, Ltd. Nozzle head of an ink-jet printing apparatus with built-in fluid diodes
US4516140A (en) 1983-12-27 1985-05-07 At&T Teletype Corporation Print head actuator for an ink jet printer
US5131978A (en) * 1990-06-07 1992-07-21 Xerox Corporation Low temperature, single side, multiple step etching process for fabrication of small and large structures
JP3200881B2 (ja) * 1991-09-20 2001-08-20 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP3067354B2 (ja) * 1991-12-10 2000-07-17 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP3108954B2 (ja) 1992-05-08 2000-11-13 セイコーエプソン株式会社 インクジェットヘッドの製造方法、インクジェットヘッド及びインクジェットプリンタ
US5424769A (en) * 1992-06-05 1995-06-13 Seiko Epson Corporation Ink jet recording head
JP3478297B2 (ja) * 1992-06-26 2003-12-15 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH0631914A (ja) * 1992-07-14 1994-02-08 Seiko Epson Corp インクジェットヘッドおよびその製造方法
JP3168713B2 (ja) 1992-08-06 2001-05-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
US5896150A (en) * 1992-11-25 1999-04-20 Seiko Epson Corporation Ink-jet type recording head
JPH06183000A (ja) 1992-12-21 1994-07-05 Ricoh Co Ltd インクジェットヘッド及びその製造方法
JP3186321B2 (ja) 1993-04-14 2001-07-11 セイコーエプソン株式会社 インクジェットヘッド
US5385635A (en) * 1993-11-01 1995-01-31 Xerox Corporation Process for fabricating silicon channel structures with variable cross-sectional areas
JP3326970B2 (ja) 1994-07-20 2002-09-24 セイコーエプソン株式会社 インクジェット式記録ヘッドおよびその製造方法
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP3419420B2 (ja) 1994-04-14 2003-06-23 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3221474B2 (ja) 1994-04-05 2001-10-22 セイコーエプソン株式会社 インクジェット式印字ヘッド
US5748214A (en) * 1994-08-04 1998-05-05 Seiko Epson Corporation Ink jet recording head
JP3570447B2 (ja) * 1994-12-21 2004-09-29 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置
EP0738599B1 (de) 1995-04-19 2002-10-16 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
JP3601239B2 (ja) 1996-04-05 2004-12-15 セイコーエプソン株式会社 インクジェット式記録ヘッド及びそれを用いたインクジェット式記録装置

Also Published As

Publication number Publication date
EP1108545A1 (de) 2001-06-20
DE69727255D1 (de) 2004-02-19
EP0839654A3 (de) 1998-06-10
US6789319B2 (en) 2004-09-14
EP0839654B1 (de) 2002-02-13
EP1108545B1 (de) 2004-01-14
EP0839654A2 (de) 1998-05-06
US7153442B2 (en) 2006-12-26
US6290341B1 (en) 2001-09-18
DE69710411D1 (de) 2002-03-21
US20010040609A1 (en) 2001-11-15
US20050006338A1 (en) 2005-01-13
DE69727255T2 (de) 2004-11-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition