DE69735457D1 - Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und Tintenstrahlaufzeichnungskopf - Google Patents
Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und TintenstrahlaufzeichnungskopfInfo
- Publication number
- DE69735457D1 DE69735457D1 DE69735457T DE69735457T DE69735457D1 DE 69735457 D1 DE69735457 D1 DE 69735457D1 DE 69735457 T DE69735457 T DE 69735457T DE 69735457 T DE69735457 T DE 69735457T DE 69735457 D1 DE69735457 D1 DE 69735457D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- ink jet
- drive device
- piezoelectric element
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29368696 | 1996-11-06 | ||
JP29368696 | 1996-11-06 | ||
JP9302792A JPH10211701A (ja) | 1996-11-06 | 1997-11-05 | 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法 |
JP30279297 | 1997-11-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69735457D1 true DE69735457D1 (de) | 2006-05-11 |
DE69735457T2 DE69735457T2 (de) | 2006-08-24 |
Family
ID=26559525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69735457T Expired - Lifetime DE69735457T2 (de) | 1996-11-06 | 1997-11-06 | Stellglied mit Piezoelektrischem Element, Verfahren zum Herstellen desselben und eines Tintenstrahl-Aufzeichnungskopfes |
Country Status (4)
Country | Link |
---|---|
US (1) | US6142614A (de) |
EP (1) | EP0841165B1 (de) |
JP (1) | JPH10211701A (de) |
DE (1) | DE69735457T2 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0893259B8 (de) * | 1997-07-25 | 2003-03-26 | Seiko Epson Corporation | Tintenstrahldruckkopf und sein Herstellungsverfahren |
JP3868143B2 (ja) * | 1999-04-06 | 2007-01-17 | 松下電器産業株式会社 | 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法 |
JP3208386B2 (ja) * | 1999-09-29 | 2001-09-10 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 圧電センサの取り付け方法、アクチュエータアーム、ディスク装置及び接続検査方法 |
WO2001072519A1 (fr) * | 2000-03-27 | 2001-10-04 | Fujitsu Limited | Tete a jet d'encre a buses multiples et procede de fabrication de celle-ci |
JP3956607B2 (ja) * | 2000-10-26 | 2007-08-08 | ブラザー工業株式会社 | 圧電式インクジェットプリンタヘッド及び圧電式インクジェットプリンタヘッドの製造方法 |
US6536287B2 (en) * | 2001-08-16 | 2003-03-25 | Honeywell International, Inc. | Simplified capacitance pressure sensor |
TW506908B (en) * | 2001-09-06 | 2002-10-21 | Nanodynamics Inc | Piezoelectric ink jet print head and the manufacturing process thereof |
JP2004066496A (ja) * | 2002-08-01 | 2004-03-04 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
JP3997865B2 (ja) * | 2002-08-29 | 2007-10-24 | ブラザー工業株式会社 | インクジェットプリンタヘッド |
JP3925650B2 (ja) | 2003-03-06 | 2007-06-06 | ブラザー工業株式会社 | インクジェットプリンタヘッド |
GB0306746D0 (en) * | 2003-03-24 | 2003-04-30 | Medic To Medic Ltd | A graphical user interface |
US7559631B2 (en) | 2003-09-24 | 2009-07-14 | Seiko Epson Corporation | Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus |
JP4161213B2 (ja) * | 2004-01-23 | 2008-10-08 | ブラザー工業株式会社 | インクジェット記録ヘッドにおける配線基板の接合構造及びその接合方法 |
US20060012646A1 (en) * | 2004-07-13 | 2006-01-19 | Brother Kogyo Kabushiki Kaisha | Piezoelectric actuator, ink jet head, and method of manufacturing them |
EP1616700A1 (de) * | 2004-07-13 | 2006-01-18 | Brother Kogyo Kabushiki Kaisha | Piezoelektrischer Aktor, Tintenstrahlkopf und dazugehöriges Herstellungsverfahren |
US7419252B2 (en) | 2004-07-13 | 2008-09-02 | Brother Kogyo Kabushiki Kaisha | Ink jet head, piezo-electric actuator, and method of manufacturing them |
JP4595418B2 (ja) * | 2004-07-16 | 2010-12-08 | ブラザー工業株式会社 | インクジェットヘッド |
JP4670495B2 (ja) * | 2004-09-06 | 2011-04-13 | Tdk株式会社 | 電子デバイス及びその製造方法 |
JP2006231909A (ja) * | 2005-01-26 | 2006-09-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
ATE488369T1 (de) | 2005-03-22 | 2010-12-15 | Brother Ind Ltd | Piezoelektrischer aktuator, vorrichtung um flüssigkeit zu transportieren, verfahren um piezoelektrischen aktuator herzustellen |
JP5187609B2 (ja) * | 2005-03-22 | 2013-04-24 | ブラザー工業株式会社 | 圧電アクチュエータ、液体移送装置、及び、圧電アクチュエータの製造方法 |
JP4873132B2 (ja) * | 2005-03-24 | 2012-02-08 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法 |
JP4926596B2 (ja) * | 2006-08-08 | 2012-05-09 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
JP2009083464A (ja) * | 2007-09-12 | 2009-04-23 | Fuji Xerox Co Ltd | 液滴吐出ヘッド、及び画像形成装置 |
JP5844026B2 (ja) | 2008-03-21 | 2016-01-13 | 富士フイルム株式会社 | 圧電素子の製造方法 |
JP4897767B2 (ja) * | 2008-10-21 | 2012-03-14 | Tdk株式会社 | 薄膜圧電体素子及びその製造方法並びにそれを用いたヘッドジンバルアセンブリ、及びそのヘッドジンバルアセンブリを用いたハードディスクドライブ |
JP2010137485A (ja) | 2008-12-15 | 2010-06-24 | Seiko Epson Corp | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置並びに液体噴射ヘッドの製造方法 |
KR20120040239A (ko) | 2009-07-10 | 2012-04-26 | 후지필름 디마틱스, 인크. | 조밀 충진을 위한 마이크로일렉트로미케니칼 시스템 젯팅 구조 |
WO2011019324A1 (en) * | 2009-08-14 | 2011-02-17 | Agency For Science, Technology And Research | A piezoelectric sensor and a method of fabricating a piezoelectric sensor |
JP5282753B2 (ja) * | 2010-03-29 | 2013-09-04 | ブラザー工業株式会社 | 圧電アクチュエータ、光スキャナ、光走査型画像表示装置、画像形成装置 |
CN103619599B (zh) * | 2011-06-29 | 2015-11-25 | 惠普发展公司,有限责任合伙企业 | 压电喷墨裸片堆叠 |
JP5410486B2 (ja) * | 2011-09-21 | 2014-02-05 | 富士フイルム株式会社 | 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの異常検知方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6048112B2 (ja) * | 1979-05-02 | 1985-10-25 | ソニー株式会社 | 電気・機械変換素子 |
JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
JP3379106B2 (ja) * | 1992-04-23 | 2003-02-17 | セイコーエプソン株式会社 | 液体噴射ヘッド |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5495137A (en) * | 1993-09-14 | 1996-02-27 | The Whitaker Corporation | Proximity sensor utilizing polymer piezoelectric film with protective metal layer |
EP0757939B1 (de) * | 1994-03-29 | 1998-09-02 | Citizen Watch Co. Ltd. | Tintenstrahlkopf und verfahren zu dessen herstellung |
EP0698490B1 (de) * | 1994-08-25 | 1999-06-16 | Seiko Epson Corporation | Flüssigkeitsstrahlkopf |
JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
US5933167A (en) * | 1995-04-03 | 1999-08-03 | Seiko Epson Corporation | Printer head for ink jet recording |
DE69735143T2 (de) * | 1996-04-10 | 2006-07-20 | Seiko Epson Corp. | Tintenstrahlaufzeichnungskopf |
-
1997
- 1997-11-05 JP JP9302792A patent/JPH10211701A/ja active Pending
- 1997-11-06 DE DE69735457T patent/DE69735457T2/de not_active Expired - Lifetime
- 1997-11-06 US US08/965,419 patent/US6142614A/en not_active Expired - Fee Related
- 1997-11-06 EP EP97119438A patent/EP0841165B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0841165A2 (de) | 1998-05-13 |
JPH10211701A (ja) | 1998-08-11 |
EP0841165A3 (de) | 2000-03-29 |
EP0841165B1 (de) | 2006-03-15 |
US6142614A (en) | 2000-11-07 |
DE69735457T2 (de) | 2006-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |