DE69110441D1 - Thermischer Farbstrahldruckkopf mit Antriebschaltung und Verfahren zur Herstellung derselben. - Google Patents

Thermischer Farbstrahldruckkopf mit Antriebschaltung und Verfahren zur Herstellung derselben.

Info

Publication number
DE69110441D1
DE69110441D1 DE69110441T DE69110441T DE69110441D1 DE 69110441 D1 DE69110441 D1 DE 69110441D1 DE 69110441 T DE69110441 T DE 69110441T DE 69110441 T DE69110441 T DE 69110441T DE 69110441 D1 DE69110441 D1 DE 69110441D1
Authority
DE
Germany
Prior art keywords
making
same
drive circuit
ink jet
thermal ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69110441T
Other languages
English (en)
Other versions
DE69110441T2 (de
Inventor
Ulrich E Hess
Duane A Fasen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE69110441D1 publication Critical patent/DE69110441D1/de
Application granted granted Critical
Publication of DE69110441T2 publication Critical patent/DE69110441T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
DE69110441T 1991-01-03 1991-12-05 Thermischer Farbstrahldruckkopf mit Antriebschaltung und Verfahren zur Herstellung derselben. Expired - Lifetime DE69110441T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/637,387 US5122812A (en) 1991-01-03 1991-01-03 Thermal inkjet printhead having driver circuitry thereon and method for making the same

Publications (2)

Publication Number Publication Date
DE69110441D1 true DE69110441D1 (de) 1995-07-20
DE69110441T2 DE69110441T2 (de) 1995-10-12

Family

ID=24555702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69110441T Expired - Lifetime DE69110441T2 (de) 1991-01-03 1991-12-05 Thermischer Farbstrahldruckkopf mit Antriebschaltung und Verfahren zur Herstellung derselben.

Country Status (5)

Country Link
US (1) US5122812A (de)
EP (1) EP0493897B1 (de)
JP (1) JP3366344B2 (de)
DE (1) DE69110441T2 (de)
HK (1) HK152295A (de)

Families Citing this family (76)

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US5604519A (en) 1992-04-02 1997-02-18 Hewlett-Packard Company Inkjet printhead architecture for high frequency operation
US5648804A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Compact inkjet substrate with centrally located circuitry and edge feed ink channels
US5563642A (en) 1992-04-02 1996-10-08 Hewlett-Packard Company Inkjet printhead architecture for high speed ink firing chamber refill
US5648805A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Inkjet printhead architecture for high speed and high resolution printing
US5874974A (en) * 1992-04-02 1999-02-23 Hewlett-Packard Company Reliable high performance drop generator for an inkjet printhead
US5594481A (en) 1992-04-02 1997-01-14 Hewlett-Packard Company Ink channel structure for inkjet printhead
US5638101A (en) 1992-04-02 1997-06-10 Hewlett-Packard Company High density nozzle array for inkjet printhead
US5455611A (en) * 1992-05-29 1995-10-03 Scitex Digital Printing, Inc. Four inch print head assembly
US5635966A (en) * 1994-01-11 1997-06-03 Hewlett-Packard Company Edge feed ink delivery thermal inkjet printhead structure and method of fabrication
WO1996005061A1 (en) * 1994-08-09 1996-02-22 Encad, Inc. Printer ink cartridge
US5646660A (en) * 1994-08-09 1997-07-08 Encad, Inc. Printer ink cartridge with drive logic integrated circuit
US5610635A (en) * 1994-08-09 1997-03-11 Encad, Inc. Printer ink cartridge with memory storage capacity
US5774148A (en) * 1995-10-19 1998-06-30 Lexmark International, Inc. Printhead with field oxide as thermal barrier in chip
US6758552B1 (en) 1995-12-06 2004-07-06 Hewlett-Packard Development Company Integrated thin-film drive head for thermal ink-jet printer
US6239820B1 (en) 1995-12-06 2001-05-29 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5883650A (en) * 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5790154A (en) * 1995-12-08 1998-08-04 Hitachi Koki Co., Ltd. Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head
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JPH09300623A (ja) * 1996-05-17 1997-11-25 Hitachi Koki Co Ltd インクジェット記録ヘッド及びその装置
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US5710070A (en) * 1996-11-08 1998-01-20 Chartered Semiconductor Manufacturing Pte Ltd. Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology
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US6110754A (en) * 1997-07-15 2000-08-29 Silverbrook Research Pty Ltd Method of manufacture of a thermal elastic rotary impeller ink jet print head
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JP3559701B2 (ja) 1997-12-18 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
US6461812B2 (en) * 1998-09-09 2002-10-08 Agilent Technologies, Inc. Method and multiple reservoir apparatus for fabrication of biomolecular arrays
JP2001071499A (ja) 1998-09-30 2001-03-21 Canon Inc インクジェット記録ヘッドとこれを備えるインクジェット装置およびインクジェット記録方法
US6315384B1 (en) 1999-03-08 2001-11-13 Hewlett-Packard Company Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein
US6336713B1 (en) 1999-07-29 2002-01-08 Hewlett-Packard Company High efficiency printhead containing a novel nitride-based resistor system
US6299294B1 (en) 1999-07-29 2001-10-09 Hewlett-Packard Company High efficiency printhead containing a novel oxynitride-based resistor system
US6299292B1 (en) 1999-08-10 2001-10-09 Lexmark International, Inc. Driver circuit with low side data for matrix inkjet printhead, and method therefor
US6132032A (en) * 1999-08-13 2000-10-17 Hewlett-Packard Company Thin-film print head for thermal ink-jet printers
US6273555B1 (en) 1999-08-16 2001-08-14 Hewlett-Packard Company High efficiency ink delivery printhead having improved thermal characteristics
US6137502A (en) * 1999-08-27 2000-10-24 Lexmark International, Inc. Dual droplet size printhead
US6290331B1 (en) 1999-09-09 2001-09-18 Hewlett-Packard Company High efficiency orifice plate structure and printhead using the same
US6130688A (en) * 1999-09-09 2000-10-10 Hewlett-Packard Company High efficiency orifice plate structure and printhead using the same
US6267471B1 (en) 1999-10-26 2001-07-31 Hewlett-Packard Company High-efficiency polycrystalline silicon resistor system for use in a thermal inkjet printhead
IT1311361B1 (it) * 1999-11-15 2002-03-12 Olivetti Lexikon Spa Testina di stampa monilitica con rete equipotenziale integrata erelativo metodo di fabbricazione.
US6427597B1 (en) 2000-01-27 2002-08-06 Patrice M. Aurenty Method of controlling image resolution on a substrate
TW514596B (en) 2000-02-28 2002-12-21 Hewlett Packard Co Glass-fiber thermal inkjet print head
US6398346B1 (en) 2000-03-29 2002-06-04 Lexmark International, Inc. Dual-configurable print head addressing
US6431677B1 (en) 2000-06-08 2002-08-13 Lexmark International, Inc Print head drive scheme
US6412919B1 (en) * 2000-09-05 2002-07-02 Hewlett-Packard Company Transistor drop ejectors in ink-jet print heads
TWI232807B (en) * 2001-01-19 2005-05-21 Benq Corp Microinject head with driving circuitry and the manufacturing method thereof
US6520628B2 (en) * 2001-01-30 2003-02-18 Hewlett-Packard Company Fluid ejection device with substrate having a fluid firing device and a fluid reservoir on a first surface thereof
TW480566B (en) * 2001-02-15 2002-03-21 Microjet Technology Co Ltd Method for manufacture ink jet printhead chip
CN100354317C (zh) * 2001-03-13 2007-12-12 索尼公司 电解质水溶液吸收体及其制备方法
US6883894B2 (en) * 2001-03-19 2005-04-26 Hewlett-Packard Development Company, L.P. Printhead with looped gate transistor structures
CN1165428C (zh) * 2001-04-03 2004-09-08 明基电通股份有限公司 具有驱动电路的微喷射头
JP3503611B2 (ja) * 2001-04-13 2004-03-08 ソニー株式会社 プリンタヘッド、プリンタ及びプリンタヘッドの製造方法
US6534850B2 (en) 2001-04-16 2003-03-18 Hewlett-Packard Company Electronic device sealed under vacuum containing a getter and method of operation
US7160806B2 (en) * 2001-08-16 2007-01-09 Hewlett-Packard Development Company, L.P. Thermal inkjet printhead processing with silicon etching
TW510858B (en) * 2001-11-08 2002-11-21 Benq Corp Fluid injection head structure and method thereof
TW552201B (en) * 2001-11-08 2003-09-11 Benq Corp Fluid injection head structure and method thereof
KR100452850B1 (ko) * 2002-10-17 2004-10-14 삼성전자주식회사 잉크젯 프린터의 프린트 헤드 및 그 제조방법
US6938993B2 (en) * 2002-10-31 2005-09-06 Benq Corporation Fluid injection head structure
TW580435B (en) * 2003-06-16 2004-03-21 Benq Corp Method for fabricating a monolithic fluid eject device
KR100560717B1 (ko) * 2004-03-11 2006-03-13 삼성전자주식회사 잉크젯 헤드 기판, 잉크젯 헤드 및 잉크젯 헤드 기판의제조방법
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
US7150516B2 (en) * 2004-09-28 2006-12-19 Hewlett-Packard Development Company, L.P. Integrated circuit and method for manufacturing
US7344226B2 (en) * 2005-04-04 2008-03-18 Silverbrook Research Pty Ltd Method of hydrophobically coating a printhead
US7328976B2 (en) * 2005-04-04 2008-02-12 Silverbrook Research Pty Ltd. Hydrophobically coated printhead
TWI250938B (en) * 2005-04-25 2006-03-11 Int United Technology Co Ltd Inkjet printhead chip
JP4640221B2 (ja) * 2006-03-10 2011-03-02 セイコーエプソン株式会社 インクカートリッジ及びプリンタ
US8651604B2 (en) * 2007-07-31 2014-02-18 Hewlett-Packard Development Company, L.P. Printheads
TWI332904B (en) * 2007-11-29 2010-11-11 Internat United Technology Company Ltd Thermal inkjet printhead chip structure and manufacture method thereof
CN102802958B (zh) * 2009-06-29 2015-11-25 录象射流技术公司 具有耐溶剂性的热喷墨印刷头
CN103660574A (zh) * 2012-09-20 2014-03-26 研能科技股份有限公司 喷墨头芯片的结构
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Also Published As

Publication number Publication date
HK152295A (en) 1995-09-29
EP0493897B1 (de) 1995-06-14
DE69110441T2 (de) 1995-10-12
JPH04296565A (ja) 1992-10-20
EP0493897A3 (en) 1992-10-14
EP0493897A2 (de) 1992-07-08
JP3366344B2 (ja) 2003-01-14
US5122812A (en) 1992-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE