DE3782700D1 - Verfahren zur herstellung von thermischen tintenstrahl-druckkoepfen und damit hergestellter duennfilmwiderstands-druckkopf. - Google Patents

Verfahren zur herstellung von thermischen tintenstrahl-druckkoepfen und damit hergestellter duennfilmwiderstands-druckkopf.

Info

Publication number
DE3782700D1
DE3782700D1 DE8787110583T DE3782700T DE3782700D1 DE 3782700 D1 DE3782700 D1 DE 3782700D1 DE 8787110583 T DE8787110583 T DE 8787110583T DE 3782700 T DE3782700 T DE 3782700T DE 3782700 D1 DE3782700 D1 DE 3782700D1
Authority
DE
Germany
Prior art keywords
thin film
thermal ink
film resistance
head manufactured
producing thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787110583T
Other languages
English (en)
Other versions
DE3782700T2 (de
Inventor
John L Stoffel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25415615&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3782700(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE3782700D1 publication Critical patent/DE3782700D1/de
Publication of DE3782700T2 publication Critical patent/DE3782700T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE8787110583T 1986-08-28 1987-07-22 Verfahren zur herstellung von thermischen tintenstrahl-druckkoepfen und damit hergestellter duennfilmwiderstands-druckkopf. Expired - Fee Related DE3782700T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/902,287 US4862197A (en) 1986-08-28 1986-08-28 Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby

Publications (2)

Publication Number Publication Date
DE3782700D1 true DE3782700D1 (de) 1992-12-24
DE3782700T2 DE3782700T2 (de) 1993-06-03

Family

ID=25415615

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787110583T Expired - Fee Related DE3782700T2 (de) 1986-08-28 1987-07-22 Verfahren zur herstellung von thermischen tintenstrahl-druckkoepfen und damit hergestellter duennfilmwiderstands-druckkopf.

Country Status (6)

Country Link
US (1) US4862197A (de)
EP (1) EP0258606B1 (de)
JP (1) JP2960065B2 (de)
CA (1) CA1277774C (de)
DE (1) DE3782700T2 (de)
HK (1) HK128393A (de)

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DE68917790T2 (de) * 1988-06-03 1995-01-05 Canon Kk Aufzeichnungskopf mit Flüssigkeitsemission, Substrat hierfür sowie Aufzeichnungsgerät mit Flüssigkeitsemission unter Verwendung dieses Kopfes.
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US5570119A (en) * 1988-07-26 1996-10-29 Canon Kabushiki Kaisha Multilayer device having integral functional element for use with an ink jet recording apparatus, and recording apparatus
JP2840271B2 (ja) * 1989-01-27 1998-12-24 キヤノン株式会社 記録ヘッド
US4999650A (en) * 1989-12-18 1991-03-12 Eastman Kodak Company Bubble jet print head having improved multiplex actuation construction
JP2771008B2 (ja) * 1990-02-28 1998-07-02 キヤノン株式会社 記録装置及び記録ヘッド
US5045870A (en) * 1990-04-02 1991-09-03 International Business Machines Corporation Thermal ink drop on demand devices on a single chip with vertical integration of driver device
US5187500A (en) * 1990-09-05 1993-02-16 Hewlett-Packard Company Control of energy to thermal inkjet heating elements
JPH0590221A (ja) * 1991-02-20 1993-04-09 Canon Inc 珪素化合物膜のエツチング方法及び該方法を利用した物品の形成方法
EP0525787B1 (de) * 1991-08-01 1996-10-16 Canon Kabushiki Kaisha Aufzeichnungskopfherstellungsverfahren
US5317346A (en) * 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
US5686948A (en) * 1992-11-12 1997-11-11 Graphic Utilities, Inc. Method for refilling ink jet cartridges
AU5604694A (en) * 1992-11-12 1994-06-08 Graphic Utilities, Inc. Method for refilling ink jet cartridges
EP0616394A1 (de) * 1993-03-16 1994-09-21 Hewlett-Packard Company Verfahren und Vorrichtung für die Herstellung von elektrisch zusammengeschalteten Schaltungen
DE69405435T2 (de) * 1993-03-16 1998-01-22 Hewlett Packard Co Verfahren und Vorrichtung für die Herstellung von elektrisch zusammengeschalteten Schaltungen
US5295839A (en) * 1993-03-16 1994-03-22 Hewlett-Packard Company Method and system for interconnectingly engaging circuits
US5949461A (en) * 1994-02-18 1999-09-07 Nu-Kote Imaging International, Inc. Ink refill bottle
US6070969A (en) 1994-03-23 2000-06-06 Hewlett-Packard Company Thermal inkjet printhead having a preferred nucleation site
US5635968A (en) * 1994-04-29 1997-06-03 Hewlett-Packard Company Thermal inkjet printer printhead with offset heater resistors
US6758552B1 (en) 1995-12-06 2004-07-06 Hewlett-Packard Development Company Integrated thin-film drive head for thermal ink-jet printer
US5883650A (en) * 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US6239820B1 (en) 1995-12-06 2001-05-29 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5790154A (en) * 1995-12-08 1998-08-04 Hitachi Koki Co., Ltd. Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head
US6113216A (en) 1996-08-09 2000-09-05 Hewlett-Packard Company Wide array thermal ink-jet print head
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
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US6030071A (en) * 1997-07-03 2000-02-29 Lexmark International, Inc. Printhead having heating element conductors arranged in a matrix
US6120135A (en) * 1997-07-03 2000-09-19 Lexmark International, Inc. Printhead having heating element conductors arranged in spaced apart planes and including heating elements having a substantially constant cross-sectional area in the direction of current flow
US6123410A (en) 1997-10-28 2000-09-26 Hewlett-Packard Company Scalable wide-array inkjet printhead and method for fabricating same
TW468271B (en) * 1999-03-26 2001-12-11 United Microelectronics Corp Thin film resistor used in a semiconductor chip and its manufacturing method
US6260952B1 (en) * 1999-04-22 2001-07-17 Hewlett-Packard Company Apparatus and method for routing power and ground lines in a ink-jet printhead
US6132032A (en) * 1999-08-13 2000-10-17 Hewlett-Packard Company Thin-film print head for thermal ink-jet printers
US6280019B1 (en) 1999-08-30 2001-08-28 Hewlett-Packard Company Segmented resistor inkjet drop generator with current crowding reduction
US6139131A (en) 1999-08-30 2000-10-31 Hewlett-Packard Company High drop generator density printhead
US6318846B1 (en) 1999-08-30 2001-11-20 Hewlett-Packard Company Redundant input signal paths for an inkjet print head
US6582062B1 (en) 1999-10-18 2003-06-24 Hewlett-Packard Development Company, L.P. Large thermal ink jet nozzle array printhead
US6331044B2 (en) * 1999-10-27 2001-12-18 Hewlett-Packard Company Corrosion resistant thermal ink jet print cartridge and method of manufacturing same
JP2001138521A (ja) * 1999-11-11 2001-05-22 Canon Inc インクジェット記録ヘッドおよび該記録ヘッドを用いたインクジェット記録装置
US6482574B1 (en) 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
US6481831B1 (en) 2000-07-07 2002-11-19 Hewlett-Packard Company Fluid ejection device and method of fabricating
US6648732B2 (en) 2001-01-30 2003-11-18 Hewlett-Packard Development Company, L.P. Thin film coating of a slotted substrate and techniques for forming slotted substrates
US20020158945A1 (en) 2001-04-30 2002-10-31 Miller Richard Todd Heating element of a printhead having resistive layer over conductive layer
US7101021B2 (en) * 2001-07-30 2006-09-05 Seiko Epson Corporation Connection apparatus for circuit board, ink jet type recording apparatus using the same, IC chip and ink cartridge having IC chip
US6856007B2 (en) 2001-08-28 2005-02-15 Tessera, Inc. High-frequency chip packages
US7025894B2 (en) * 2001-10-16 2006-04-11 Hewlett-Packard Development Company, L.P. Fluid-ejection devices and a deposition method for layers thereof
US6747684B2 (en) * 2002-04-10 2004-06-08 Hewlett-Packard Development Company, L.P. Laser triggered inkjet firing
US6704996B2 (en) 2002-04-30 2004-03-16 Lexmark International, Inc. Method for making ink jet printheads
US6540334B1 (en) 2002-04-30 2003-04-01 Lexmark International, Inc. Method for making ink jet printheads
US6799819B2 (en) 2002-06-07 2004-10-05 Hewlett-Packard Development Company, L.P. Photosensor activation of an ejection element of a fluid ejection device
US6705701B2 (en) 2002-06-07 2004-03-16 Hewlett-Packard Development Company, L.P. Fluid ejection and scanning system with photosensor activation of ejection elements
US7104623B2 (en) * 2002-06-07 2006-09-12 Hewlett-Packard Development Company, L.P. Fluid ejection system with photosensor activation of ejection element
US7083250B2 (en) * 2002-06-07 2006-08-01 Hewlett-Packard Development Company, L.P. Fluid ejection and scanning assembly with photosensor activation of ejection elements
US6786575B2 (en) * 2002-12-17 2004-09-07 Lexmark International, Inc. Ink jet heater chip and method therefor
US6794753B2 (en) * 2002-12-27 2004-09-21 Lexmark International, Inc. Diffusion barrier and method therefor
US6972480B2 (en) 2003-06-16 2005-12-06 Shellcase Ltd. Methods and apparatus for packaging integrated circuit devices
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JP2005067164A (ja) * 2003-08-28 2005-03-17 Sony Corp 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの製造方法
US20050095835A1 (en) 2003-09-26 2005-05-05 Tessera, Inc. Structure and method of making capped chips having vertical interconnects
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US7080896B2 (en) * 2004-01-20 2006-07-25 Lexmark International, Inc. Micro-fluid ejection device having high resistance heater film
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US8143095B2 (en) 2005-03-22 2012-03-27 Tessera, Inc. Sequential fabrication of vertical conductive interconnects in capped chips
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EP2237957B1 (de) * 2008-01-28 2014-03-12 Hewlett-Packard Development Company, L.P. Laterale-bipolar-flächentransistorschaltung mit gemeinsamer basis für einen tintenstrahlkopf
US11214064B2 (en) 2018-04-02 2022-01-04 Hewlett-Packard Development Company, L.P. Adhering layers of fluidic dies

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JPS57211248A (en) * 1981-06-22 1982-12-25 Hitachi Ltd Semiconductor integrated circuit device
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US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture

Also Published As

Publication number Publication date
EP0258606A2 (de) 1988-03-09
JP2960065B2 (ja) 1999-10-06
US4862197A (en) 1989-08-29
EP0258606B1 (de) 1992-11-19
CA1277774C (en) 1990-12-11
HK128393A (en) 1993-11-26
EP0258606A3 (en) 1989-07-26
DE3782700T2 (de) 1993-06-03
JPS6359541A (ja) 1988-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8339 Ceased/non-payment of the annual fee