US6481831B1 - Fluid ejection device and method of fabricating - Google Patents
Fluid ejection device and method of fabricating Download PDFInfo
- Publication number
- US6481831B1 US6481831B1 US09/611,810 US61181000A US6481831B1 US 6481831 B1 US6481831 B1 US 6481831B1 US 61181000 A US61181000 A US 61181000A US 6481831 B1 US6481831 B1 US 6481831B1
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- United States
- Prior art keywords
- layer
- resistive
- dielectric
- conductors
- fabricated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000012530 fluid Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 239000004020 conductor Substances 0.000 claims abstract description 74
- 239000003989 dielectric material Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000002161 passivation Methods 0.000 claims abstract description 30
- 238000010304 firing Methods 0.000 claims description 21
- 229910052802 copper Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound 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CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
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- 229910052715 tantalum Inorganic materials 0.000 description 3
- -1 tantalum aluminum Chemical compound 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound 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[W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N Silicon carbide Chemical compound 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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/1626—Production of nozzles manufacturing processes etching
- B41J2/1629—Production of nozzles manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/1626—Production of nozzles manufacturing processes etching
- B41J2/1628—Production of nozzles manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/1631—Production of nozzles manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/1632—Production of nozzles manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/164—Production of nozzles manufacturing processes thin film formation
- B41J2/1642—Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Production of nozzles manufacturing processes
- B41J2/164—Production of nozzles manufacturing processes thin film formation
- B41J2/1646—Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
Abstract
Description
Claims (28)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/611,810 US6481831B1 (en) | 2000-07-07 | 2000-07-07 | Fluid ejection device and method of fabricating |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/611,810 US6481831B1 (en) | 2000-07-07 | 2000-07-07 | Fluid ejection device and method of fabricating |
DE2001613926 DE60113926T2 (en) | 2000-07-07 | 2001-06-19 | Inkjet printer and associated manufacturing method |
EP20010305328 EP1170129B1 (en) | 2000-07-07 | 2001-06-19 | Inkjet printhead and method of fabricating an inkjet printhead |
JP2001205523A JP2002079679A (en) | 2000-07-07 | 2001-07-06 | Ink jet printing head and method of fabricating the same |
Publications (1)
Publication Number | Publication Date |
---|---|
US6481831B1 true US6481831B1 (en) | 2002-11-19 |
Family
ID=24450490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/611,810 Expired - Fee Related US6481831B1 (en) | 2000-07-07 | 2000-07-07 | Fluid ejection device and method of fabricating |
Country Status (4)
Country | Link |
---|---|
US (1) | US6481831B1 (en) |
EP (1) | EP1170129B1 (en) |
JP (1) | JP2002079679A (en) |
DE (1) | DE60113926T2 (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040017420A1 (en) * | 2002-04-10 | 2004-01-29 | Takaaki Miyamoto | Liquid dispenser and printer |
US20050230785A1 (en) * | 2004-04-14 | 2005-10-20 | International Business Machines Corporation | Resistor tuning |
US20050243141A1 (en) * | 2004-04-29 | 2005-11-03 | Hewlett-Packard Development Company, L.P. | Fluid ejection device and manufacturing method |
US20050243142A1 (en) * | 2004-04-29 | 2005-11-03 | Shaarawi Mohammed S | Microfluidic architecture |
US20060232634A1 (en) * | 2001-10-31 | 2006-10-19 | Connors William B | Circuit routing scheme for an ink jet printhead that has increased reisitance to corrosion |
US20080147495A1 (en) * | 2006-12-19 | 2008-06-19 | General Electric Company | System and method for providing promotions |
US20080147496A1 (en) * | 2006-12-19 | 2008-06-19 | General Electric Company | System and method for providing promotions |
US20090025634A1 (en) * | 2007-07-26 | 2009-01-29 | Chung Bradley D | Heating element |
US20090027456A1 (en) * | 2007-07-26 | 2009-01-29 | Chung Bradley D | Heating element |
US20110084997A1 (en) * | 2009-10-08 | 2011-04-14 | Chien-Hua Chen | Determining a healthy fluid ejection nozzle |
US20120091121A1 (en) * | 2010-10-19 | 2012-04-19 | Zachary Justin Reitmeier | Heater stack for inkjet printheads |
US20180102318A1 (en) * | 2016-10-12 | 2018-04-12 | Globalfoundries Inc. | Compound resistor structure for semiconductor device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005067164A (en) * | 2003-08-28 | 2005-03-17 | Sony Corp | Liquid ejection head, liquid ejector, and process for manufacturing liquid ejection head |
KR100517515B1 (en) * | 2004-01-20 | 2005-09-28 | 삼성전자주식회사 | Method for manufacturing monolithic inkjet printhead |
GB2413306A (en) * | 2004-04-23 | 2005-10-26 | Hewlett Packard Development Co | Ink cartridge having terminals and conductive tracks applied directly thereon. |
KR20090008022A (en) * | 2007-07-16 | 2009-01-21 | 삼성전자주식회사 | Inkjet print head and manufacturing method thereof |
WO2015116050A1 (en) * | 2014-01-29 | 2015-08-06 | Hewlett-Packard Development Company, L.P. | Thermal ink jet printhead |
CN110291646A (en) * | 2016-12-15 | 2019-09-27 | 格里菲斯大学 | SiC schottky diode |
Citations (18)
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US4513298A (en) | 1983-05-25 | 1985-04-23 | Hewlett-Packard Company | Thermal ink jet printhead |
US4535343A (en) | 1983-10-31 | 1985-08-13 | Hewlett-Packard Company | Thermal ink jet printhead with self-passivating elements |
US4602421A (en) | 1985-04-24 | 1986-07-29 | The United States Of America As Represented By The Secretary Of The Air Force | Low noise polycrystalline semiconductor resistors by hydrogen passivation |
US4862197A (en) | 1986-08-28 | 1989-08-29 | Hewlett-Packard Co. | Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby |
US5075250A (en) * | 1991-01-02 | 1991-12-24 | Xerox Corporation | Method of fabricating a monolithic integrated circuit chip for a thermal ink jet printhead |
US5159353A (en) | 1991-07-02 | 1992-10-27 | Hewlett-Packard Company | Thermal inkjet printhead structure and method for making the same |
US5159430A (en) | 1991-07-24 | 1992-10-27 | Micron Technology, Inc. | Vertically integrated oxygen-implanted polysilicon resistor |
US5232865A (en) | 1991-07-24 | 1993-08-03 | Micron Technology, Inc. | Method of fabricating vertically integrated oxygen-implanted polysilicon resistor |
EP0603821A2 (en) | 1992-12-22 | 1994-06-29 | Canon Kabushiki Kaisha | Ink-jet printhead, production method thereof and printing apparatus with the ink-jet printhead |
US5330930A (en) | 1992-12-31 | 1994-07-19 | Chartered Semiconductor Manufacturing Pte Ltd. | Formation of vertical polysilicon resistor having a nitride sidewall for small static RAM cell |
US5364743A (en) * | 1990-12-21 | 1994-11-15 | Xerox Corporation | Process for fabrication of bubble jet using positive resist image reversal for lift off of passivation layer |
EP0674995A2 (en) | 1994-03-29 | 1995-10-04 | Canon Kabushiki Kaisha | Substrate for ink jet head, ink jet head, ink jet pen, and ink jet apparatus |
US5500553A (en) | 1992-08-12 | 1996-03-19 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having polysilicon resistors with a specific resistance ratio resistant to manufacturing processes |
US5744846A (en) | 1995-12-06 | 1998-04-28 | Micron Technology, Inc. | SRAM cell employing substantially vertically elongated pull-up resistors and methods of making, and resistor constructions and methods of making |
US5870121A (en) | 1996-11-08 | 1999-02-09 | Chartered Semiconductor Manufacturing, Ltd. | Ti/titanium nitride and ti/tungsten nitride thin film resistors for thermal ink jet technology |
US5883650A (en) | 1995-12-06 | 1999-03-16 | Hewlett-Packard Company | Thin-film printhead device for an ink-jet printer |
US6008082A (en) | 1995-09-14 | 1999-12-28 | Micron Technology, Inc. | Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry |
US6079811A (en) | 1997-01-24 | 2000-06-27 | Lexmark International, Inc. | Ink jet printhead having a unitary actuator with a plurality of active sections |
-
2000
- 2000-07-07 US US09/611,810 patent/US6481831B1/en not_active Expired - Fee Related
-
2001
- 2001-06-19 EP EP20010305328 patent/EP1170129B1/en not_active Expired - Fee Related
- 2001-06-19 DE DE2001613926 patent/DE60113926T2/en active Active
- 2001-07-06 JP JP2001205523A patent/JP2002079679A/en active Pending
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US4513298A (en) | 1983-05-25 | 1985-04-23 | Hewlett-Packard Company | Thermal ink jet printhead |
US4535343A (en) | 1983-10-31 | 1985-08-13 | Hewlett-Packard Company | Thermal ink jet printhead with self-passivating elements |
US4602421A (en) | 1985-04-24 | 1986-07-29 | The United States Of America As Represented By The Secretary Of The Air Force | Low noise polycrystalline semiconductor resistors by hydrogen passivation |
US4862197A (en) | 1986-08-28 | 1989-08-29 | Hewlett-Packard Co. | Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby |
US5364743A (en) * | 1990-12-21 | 1994-11-15 | Xerox Corporation | Process for fabrication of bubble jet using positive resist image reversal for lift off of passivation layer |
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Also Published As
Publication number | Publication date |
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EP1170129A3 (en) | 2002-01-30 |
EP1170129B1 (en) | 2005-10-12 |
JP2002079679A (en) | 2002-03-19 |
EP1170129A2 (en) | 2002-01-09 |
DE60113926D1 (en) | 2006-02-23 |
DE60113926T2 (en) | 2006-07-20 |
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