DE69418782D1 - Tintenstrahlkopf und Verfahren zur Herstellung - Google Patents

Tintenstrahlkopf und Verfahren zur Herstellung

Info

Publication number
DE69418782D1
DE69418782D1 DE69418782T DE69418782T DE69418782D1 DE 69418782 D1 DE69418782 D1 DE 69418782D1 DE 69418782 T DE69418782 T DE 69418782T DE 69418782 T DE69418782 T DE 69418782T DE 69418782 D1 DE69418782 D1 DE 69418782D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
jet head
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69418782T
Other languages
English (en)
Other versions
DE69418782T2 (de
Inventor
Hirotsugu Matoba
Susumu Hirata
Yorishige Ishii
Tetsuya Inui
Kenji Ohta
Shingo Abe
Zenjiro Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17342193A external-priority patent/JP3241874B2/ja
Priority claimed from JP27827193A external-priority patent/JP3062518B2/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69418782D1 publication Critical patent/DE69418782D1/de
Application granted granted Critical
Publication of DE69418782T2 publication Critical patent/DE69418782T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14346Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14387Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69418782T 1993-07-13 1994-07-11 Tintenstrahlkopf und Verfahren zur Herstellung Expired - Fee Related DE69418782T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17342193A JP3241874B2 (ja) 1993-07-13 1993-07-13 インクジェットヘッドおよびその製造方法
JP27827193A JP3062518B2 (ja) 1993-11-08 1993-11-08 インクジェットヘッドおよびその製造方法

Publications (2)

Publication Number Publication Date
DE69418782D1 true DE69418782D1 (de) 1999-07-08
DE69418782T2 DE69418782T2 (de) 1999-11-18

Family

ID=26495400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69418782T Expired - Fee Related DE69418782T2 (de) 1993-07-13 1994-07-11 Tintenstrahlkopf und Verfahren zur Herstellung

Country Status (3)

Country Link
US (1) US5666141A (de)
EP (1) EP0634273B1 (de)
DE (1) DE69418782T2 (de)

Families Citing this family (138)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6439702B1 (en) 1993-08-25 2002-08-27 Aprion Digital Ltd. Inkjet print head
JPH07285221A (ja) * 1994-04-19 1995-10-31 Sharp Corp インクジェットヘッド
DE19516997C2 (de) * 1994-05-10 1998-02-26 Sharp Kk Tintenstrahlkopf und Verfahren zu dessen Herstellung
JPH07314673A (ja) * 1994-05-27 1995-12-05 Sharp Corp インクジェットヘッド
JPH08276572A (ja) * 1995-04-07 1996-10-22 Sharp Corp インクジェットプリンター、及び、インクジェットプリンターの調整方法
JPH08336965A (ja) * 1995-06-14 1996-12-24 Sharp Corp インクジェットヘッド
JPH0985946A (ja) * 1995-09-25 1997-03-31 Sharp Corp インクジェットヘッド及びその製造方法
JP3240366B2 (ja) * 1995-10-26 2001-12-17 シャープ株式会社 サーマルヘッドとその製造方法
US5812163A (en) * 1996-02-13 1998-09-22 Hewlett-Packard Company Ink jet printer firing assembly with flexible film expeller
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US20100277531A1 (en) * 1997-07-15 2010-11-04 Silverbrook Research Pty Ltd Printer having processor for high volume printing
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US6834939B2 (en) * 2002-11-23 2004-12-28 Silverbrook Research Pty Ltd Micro-electromechanical device that incorporates covering formations for actuators of the device
US7022250B2 (en) * 1997-07-15 2006-04-04 Silverbrook Research Pty Ltd Method of fabricating an ink jet printhead chip with differential expansion actuators
US6648453B2 (en) * 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7008046B2 (en) * 1997-07-15 2006-03-07 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US6986613B2 (en) * 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd Keyboard
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US7465030B2 (en) * 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US6513908B2 (en) * 1997-07-15 2003-02-04 Silverbrook Research Pty Ltd Pusher actuation in a printhead chip for an inkjet printhead
US7131715B2 (en) * 1997-07-15 2006-11-07 Silverbrook Research Pty Ltd Printhead chip that incorporates micro-mechanical lever mechanisms
US6485123B2 (en) * 1997-07-15 2002-11-26 Silverbrook Research Pty Ltd Shutter ink jet
AUPP398798A0 (en) * 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6746105B2 (en) 1997-07-15 2004-06-08 Silverbrook Research Pty. Ltd. Thermally actuated ink jet printing mechanism having a series of thermal actuator units
AUPP653898A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46F)
US7784902B2 (en) * 1997-07-15 2010-08-31 Silverbrook Research Pty Ltd Printhead integrated circuit with more than 10000 nozzles
US6927786B2 (en) * 1997-07-15 2005-08-09 Silverbrook Research Pty Ltd Ink jet nozzle with thermally operable linear expansion actuation mechanism
US6672706B2 (en) 1997-07-15 2004-01-06 Silverbrook Research Pty Ltd Wide format pagewidth inkjet printer
AU2005239722B2 (en) * 1997-07-15 2007-05-03 Zamtec Limited Ink jet nozzle having two fluid ejection apertures and a moveable paddle vane
US6679584B2 (en) 1997-07-15 2004-01-20 Silverbrook Research Pty Ltd. High volume pagewidth printing
US6916082B2 (en) * 1997-07-15 2005-07-12 Silverbrook Research Pty Ltd Printing mechanism for a wide format pagewidth inkjet printer
US6540332B2 (en) * 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
US6712453B2 (en) * 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
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US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US6857724B2 (en) * 1997-07-15 2005-02-22 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
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US7246881B2 (en) * 1997-07-15 2007-07-24 Silverbrook Research Pty Ltd Printhead assembly arrangement for a wide format pagewidth inkjet printer
US6247792B1 (en) * 1997-07-15 2001-06-19 Silverbrook Research Pty Ltd PTFE surface shooting shuttered oscillating pressure ink jet printing mechanism
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US7044584B2 (en) * 1997-07-15 2006-05-16 Silverbrook Research Pty Ltd Wide format pagewidth inkjet printer
AUPO803797A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ27)
US7753463B2 (en) * 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Processing of images for high volume pagewidth printing
US7207654B2 (en) * 1997-07-15 2007-04-24 Silverbrook Research Pty Ltd Ink jet with narrow chamber
US7434915B2 (en) * 1997-07-15 2008-10-14 Silverbrook Research Pty Ltd Inkjet printhead chip with a side-by-side nozzle arrangement layout
US6488359B2 (en) * 1997-07-15 2002-12-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates through-chip ink ejection nozzle arrangements
US6527374B2 (en) * 1997-07-15 2003-03-04 Silverbrook Research Pty Ltd Translation to rotation conversion in an inkjet printhead
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ATE386638T1 (de) * 1997-07-15 2008-03-15 Silverbrook Res Pty Ltd Tintenstrahldüse mit geschlitzter seitenwand und beweglichem flügel
US7401901B2 (en) * 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead having nozzle plate supported by encapsulated photoresist
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US7246884B2 (en) * 1997-07-15 2007-07-24 Silverbrook Research Pty Ltd Inkjet printhead having enclosed inkjet actuators
US6582059B2 (en) * 1997-07-15 2003-06-24 Silverbrook Research Pty Ltd Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
US7004566B2 (en) * 1997-07-15 2006-02-28 Silverbrook Research Pty Ltd Inkjet printhead chip that incorporates micro-mechanical lever mechanisms
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US7381340B2 (en) * 1997-07-15 2008-06-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates an etch stop layer
US6213589B1 (en) 1997-07-15 2001-04-10 Silverbrook Research Pty Ltd. Planar thermoelastic bend actuator ink jet printing mechanism
US7287836B2 (en) * 1997-07-15 2007-10-30 Sil;Verbrook Research Pty Ltd Ink jet printhead with circular cross section chamber
US7468139B2 (en) * 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7011390B2 (en) * 1997-07-15 2006-03-14 Silverbrook Research Pty Ltd Printing mechanism having wide format printing zone
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US5666141A (en) 1997-09-09
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EP0634273B1 (de) 1999-06-02
EP0634273A2 (de) 1995-01-18

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