DE69718410D1 - Tintenstrahlkopf und Verfahren zu dessen Herstellung - Google Patents

Tintenstrahlkopf und Verfahren zu dessen Herstellung

Info

Publication number
DE69718410D1
DE69718410D1 DE69718410T DE69718410T DE69718410D1 DE 69718410 D1 DE69718410 D1 DE 69718410D1 DE 69718410 T DE69718410 T DE 69718410T DE 69718410 T DE69718410 T DE 69718410T DE 69718410 D1 DE69718410 D1 DE 69718410D1
Authority
DE
Germany
Prior art keywords
manufacturing
same
ink jet
jet head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69718410T
Other languages
English (en)
Other versions
DE69718410T2 (de
Inventor
Tsutomu Hashizume
Tetsushi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69718410D1 publication Critical patent/DE69718410D1/de
Publication of DE69718410T2 publication Critical patent/DE69718410T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69718410T 1996-10-24 1997-10-24 Tintenstrahlkopf und Verfahren zu dessen Herstellung Expired - Lifetime DE69718410T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28272496 1996-10-24
JP3248197 1997-02-17
JP29128597A JP3713921B2 (ja) 1996-10-24 1997-10-23 インクジェット式記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69718410D1 true DE69718410D1 (de) 2003-02-20
DE69718410T2 DE69718410T2 (de) 2003-07-31

Family

ID=27287722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718410T Expired - Lifetime DE69718410T2 (de) 1996-10-24 1997-10-24 Tintenstrahlkopf und Verfahren zu dessen Herstellung

Country Status (4)

Country Link
US (1) US6260960B1 (de)
EP (1) EP0838336B1 (de)
JP (1) JP3713921B2 (de)
DE (1) DE69718410T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
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WO1999065689A1 (fr) * 1998-06-18 1999-12-23 Matsushita Electric Industrial Co., Ltd. Dispositif de projection de fluide et son procede de fabrication
JP3868143B2 (ja) 1999-04-06 2007-01-17 松下電器産業株式会社 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法
KR100370638B1 (ko) * 1999-07-13 2003-02-05 삼성전기주식회사 무진동판 압전/전왜 마이크로 액츄에이터 및 그 제조방법
ATE483586T1 (de) 1999-08-04 2010-10-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen
JP2002103618A (ja) 2000-01-17 2002-04-09 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
US20060050109A1 (en) * 2000-01-31 2006-03-09 Le Hue P Low bonding temperature and pressure ultrasonic bonding process for making a microfluid device
JP2001347672A (ja) * 2000-06-07 2001-12-18 Fuji Photo Film Co Ltd インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法ならびにインクジェットプリンタ
JP2002086725A (ja) * 2000-07-11 2002-03-26 Matsushita Electric Ind Co Ltd インクジェットヘッド、その製造方法及びインクジェット式記録装置
US6778724B2 (en) * 2000-11-28 2004-08-17 The Regents Of The University Of California Optical switching and sorting of biological samples and microparticles transported in a micro-fluidic device, including integrated bio-chip devices
JP3661775B2 (ja) 2001-02-14 2005-06-22 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
KR100438836B1 (ko) * 2001-12-18 2004-07-05 삼성전자주식회사 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법
CN100337825C (zh) * 2002-12-10 2007-09-19 松下电器产业株式会社 喷墨头的制造方法及喷墨式记录装置
JP2004320127A (ja) * 2003-04-11 2004-11-11 Tdk Corp 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品
KR100909100B1 (ko) 2003-09-24 2009-07-23 세이코 엡슨 가부시키가이샤 액체 분사 헤드와 그 제조 방법 및 액체 분사 장치
JP4591019B2 (ja) * 2004-05-24 2010-12-01 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP5070674B2 (ja) * 2004-06-14 2012-11-14 富士ゼロックス株式会社 インクジェット記録ヘッド、及びインクジェット記録装置
JP4654458B2 (ja) * 2004-12-24 2011-03-23 リコープリンティングシステムズ株式会社 シリコン部材の陽極接合法及びこれを用いたインクジェットヘッド製造方法並びにインクジェットヘッド及びこれを用いたインクジェット記録装置
US8383436B2 (en) * 2005-01-24 2013-02-26 Panasonic Corporation Manufacturing method for semiconductor chips, and semiconductor chip
US7788776B2 (en) * 2005-03-28 2010-09-07 Brother Kogyo Kabushiki Kaisha Method of producing piezoelectric actuator
JP4182360B2 (ja) 2006-06-05 2008-11-19 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP4986216B2 (ja) * 2006-09-22 2012-07-25 富士フイルム株式会社 液体吐出ヘッドの製造方法及び画像形成装置
JP4221611B2 (ja) * 2006-10-31 2009-02-12 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
KR101301157B1 (ko) * 2007-11-09 2013-09-03 삼성전자주식회사 다단계 기판 식각 방법 및 이를 이용하여 제조된테라헤르츠 발진기
JP6158822B2 (ja) 2011-11-30 2017-07-05 オセ−テクノロジーズ ビーブイ インクジェットプリントヘッド及びその製造方法
CN103252997B (zh) * 2012-02-16 2015-12-16 珠海纳思达珠海赛纳打印科技股份有限公司 一种液体喷头及其制造方法
JP6115206B2 (ja) * 2013-03-13 2017-04-19 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子及びその製造方法
JP6263871B2 (ja) * 2013-06-25 2018-01-24 セイコーエプソン株式会社 流路ユニット、液体噴射ヘッド、液体噴射装置
JP2015164149A (ja) * 2014-02-28 2015-09-10 株式会社リコー 分極処理前基板、アクチュエータ基板、アクチュエータ基板の製造方法、液滴吐出ヘッド及び画像形成装置
KR102117471B1 (ko) * 2015-01-12 2020-06-01 삼성전기주식회사 음향 공진기 및 그 제조 방법
JP6973051B2 (ja) * 2017-12-26 2021-11-24 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
CN110526204B (zh) * 2019-08-02 2023-01-24 大连理工大学 采用多步腐蚀减小压电喷墨打印头铜微电极侧蚀量的方法

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JPS58143535A (ja) * 1982-02-22 1983-08-26 Hitachi Ltd 半導体装置の製造方法
JPS58217368A (ja) * 1982-06-11 1983-12-17 Ricoh Co Ltd 液体噴射装置のノズル構造体の製造方法
DE3717294C2 (de) * 1986-06-10 1995-01-26 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
JPS6331172A (ja) * 1986-07-24 1988-02-09 Nec Corp 半導体装置の製造方法
JPH0748485B2 (ja) * 1987-02-23 1995-05-24 日本電装株式会社 エツチング方法
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JP3161635B2 (ja) * 1991-10-17 2001-04-25 ソニー株式会社 インクジェットプリントヘッド及びインクジェットプリンタ
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DE69510284T2 (de) 1994-08-25 1999-10-14 Seiko Epson Corp. Flüssigkeitsstrahlkopf
JPH08164605A (ja) * 1994-12-14 1996-06-25 Sharp Corp インクジェットヘッドおよびその製造方法
US5814923A (en) * 1994-12-27 1998-09-29 Seiko Epson Corporation Piezoelectric thin-film device, process for producing the same, and ink jet recording head using said device
JPH08191103A (ja) * 1995-01-10 1996-07-23 Nippondenso Co Ltd 半導体装置の製造方法
DE69600167T2 (de) * 1995-04-03 1998-10-22 Seiko Epson Corp Tintenstrahldruckkopf und dessen Herstellungsverfahren
DE69624282T2 (de) 1995-04-19 2003-07-03 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
DE69718410T2 (de) 2003-07-31
JP3713921B2 (ja) 2005-11-09
EP0838336B1 (de) 2003-01-15
US6260960B1 (en) 2001-07-17
EP0838336A2 (de) 1998-04-29
JPH10286960A (ja) 1998-10-27
EP0838336A3 (de) 1999-04-21

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Legal Events

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