WO2021039253A1 - 組成物、膜、光学フィルタ及びその製造方法、固体撮像素子、赤外線センサ、並びに、センサモジュール - Google Patents
組成物、膜、光学フィルタ及びその製造方法、固体撮像素子、赤外線センサ、並びに、センサモジュール Download PDFInfo
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0033—Blends of pigments; Mixtured crystals; Solid solutions
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0033—Blends of pigments; Mixtured crystals; Solid solutions
- C09B67/0034—Mixtures of two or more pigments or dyes of the same type
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/006—Preparation of organic pigments
- C09B67/0066—Aqueous dispersions of pigments containing only dispersing agents
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0071—Process features in the making of dyestuff preparations; Dehydrating agents; Dispersing agents; Dustfree compositions
- C09B67/0084—Dispersions of dyes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0071—Process features in the making of dyestuff preparations; Dehydrating agents; Dispersing agents; Dustfree compositions
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- C09B67/0085—Non common dispersing agents
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
Definitions
- the present disclosure relates to a composition, a film, an optical filter and a method for manufacturing the same, a solid-state image sensor, an infrared sensor, and a sensor module.
- an infrared cut filter, an infrared transmission filter and the like containing a pigment having absorption in the infrared region are known.
- a composition for obtaining an optical filter as described above for example, in Patent Document 1, a near-infrared dye having a specific structure having a squarylium skeleton, a basic resin-type dispersant, and an organic solvent are contained.
- the basic resin type dispersant includes an A block having a tertiary amino group and a quaternary ammonium base in the side chain and a B block having no tertiary amino group and a quaternary ammonium base.
- a near-infrared absorbing composition containing an organic solvent having a boiling point of 120 to 210 ° C. at 760 mmHg and a solubility parameter of 9.0 to 13.0 is disclosed.
- An object to be solved by one embodiment of the present disclosure is to provide a composition having excellent moisture resistance of the film to be formed and excellent dispersion stability of the pigment.
- Another object to be solved by another embodiment of the present disclosure is to provide a film, an optical filter and a method for manufacturing the same, a solid-state image sensor, an infrared sensor, and a sensor module using the above composition. ..
- the means for solving the above problems include the following aspects.
- R 1 is a substituent represented by -COR 11 , -SO 2 R 11 , or -PO (R 11 ) 2 having a total carbon number of 10 or less, and R 11 is independent of each other.
- Equation (2) -L-NH-R 2
- L represents -CO-, -SO 2- , or -PO (R 21 )-
- R 21 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R 2 represents -COR 22 , -SO 2 R 22 , or -PO (R 22 ) 2
- R 22 each independently represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms.
- Equation (3) -N + (R 3 ) 3 X -
- R 3 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 4, X - represents a counter anion.
- Equation (4) -L-N + ( R 4) 3 X -
- L represents -CO-, -SO 2- , or -PO (R 42 )-
- R 42 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R represents. 4 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 4
- X - represents a counter anion.
- ⁇ 6> The composition according to any one of ⁇ 1> to ⁇ 5>, wherein the dispersant has a basic group as an adsorptive group.
- the pigment contains a pigment having absorption in the infrared region.
- the pigment and the pigment derivative have the same pigment skeleton.
- the pigment skeleton is a squarylium pigment skeleton or a croconium pigment skeleton.
- the pigment contains a chromatic pigment.
- composition according to any one of ⁇ 1> to ⁇ 10> further comprising a polymerizable compound and a polymerization initiator.
- ⁇ 12> A film made of the composition according to ⁇ 11> or obtained by curing the above composition.
- ⁇ 13> An optical filter having the film according to ⁇ 12>.
- ⁇ 14> The optical filter according to ⁇ 13>, which is an infrared cut filter or an infrared transmission filter.
- ⁇ 16> An infrared sensor having the film according to ⁇ 12>.
- a composition having excellent moisture resistance of the formed film and excellent dispersion stability of the pigment there is provided a film using the above composition, an optical filter and a method for manufacturing the same, a solid-state image sensor, an infrared sensor, and a sensor module are provided.
- total solid content refers to the total mass of the components excluding the solvent from the total composition of the composition.
- solid content is a component excluding the solvent as described above, and may be, for example, a solid or a liquid at 25 ° C.
- substitution or non-substitution includes those having no substituent as well as those having a substituent.
- alkyl group includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- the term "exposure” as used herein includes not only exposure using light but also drawing using particle beams such as an electron beam and an ion beam. Further, examples of the light used for exposure generally include an emission line spectrum of a mercury lamp, far ultraviolet rays typified by an excimer laser, extreme ultraviolet rays (EUV light), X-rays, active rays such as electron beams, or radiation.
- EUV light extreme ultraviolet rays
- active rays such as electron beams, or radiation.
- (meth) acrylate” represents both acrylate and methacrylate, or either
- (meth) acrylic represents both acrylic and methacrylic, or either, and “(meth) acrylate”.
- Acryloyl "represents both acryloyl and / or methacryloyl.
- Me in the chemical formula is a methyl group
- Et is an ethyl group
- Pr is a propyl group
- Bu is a butyl group
- Ac is an acetyl group
- Bn is a benzyl group
- Ph is a phenyl group.
- the term "process” is included in this term not only as an independent process but also as long as the desired action of the process is achieved even if it cannot be clearly distinguished from other processes. ..
- “% by mass” and “% by weight” are synonymous, and “parts by mass” and “parts by weight” are synonymous.
- a combination of two or more preferred embodiments is a more preferred embodiment.
- the transmittance in the present disclosure is the transmittance at 25 ° C. unless otherwise specified.
- the weight average molecular weight and the number average molecular weight are defined as polystyrene-equivalent values measured by gel permeation chromatography (GPC).
- GPC gel permeation chromatography
- composition is a pigment derivative having at least one group selected from the group consisting of a pigment and a group represented by any of the following formulas (1) to (4) (hereinafter, specific pigment).
- a dispersant hereinafter, also referred to as a specific dispersant
- R 1 is a substituent represented by -COR 11 , -SO 2 R 11 , or -PO (R 11 ) 2 having a total carbon number of 10 or less, and R 11 is independent of each other.
- R 11 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms.
- Equation (2) -L-NH-R 2
- L represents -CO-, -SO 2- , or -PO (R 21 )-
- R 21 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R 2 represents -COR 22 , -SO 2 R 22 , or -PO (R 22 ) 2
- R 22 each independently represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms.
- Equation (3) -N + (R 3 ) 3 X -
- R 3 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 3, X - represents a counter anion.
- Equation (4) -L-N + ( R 4) 3 X -
- L represents -CO-, -SO 2- , or -PO (R 42 )-
- R 42 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R represents. 4 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 4
- X - represents a counter anion.
- compositions containing pigments, pigment derivatives, dispersants, and solvents are known.
- a dispersant used in combination with a pigment derivative a multipoint terminal type or a surface adsorption type, for example, adsorption sites with a pigment derivative by a block copolymer as described in Patent Document 1 are unevenly distributed. Dispersants have been preferred.
- a pigment derivative a pigment derivative having an adsorption site with a dispersant at an intermediate portion of the molecular chain instead of the terminal portion of the molecular chain has been studied.
- the present invention investigated a dispersant to be combined with a pigment derivative having an adsorption site with a dispersant in the middle of the molecular chain.
- a dispersant in which the adsorption site with the pigment derivative is not unevenly distributed that is, adsorption
- a composition having a structural unit having a sex group and a structural unit having a steric repulsive group and having an excellent dispersion stability of the pigment can be obtained by using a dispersant which is a random copolymer or an alternating copolymer. I found.
- the composition according to the present disclosure includes a pigment, a specific pigment derivative having at least one group selected from the group consisting of groups represented by any of the above formulas (1) to (4), and a specific pigment derivative. It has a structural unit having an adsorptive group and a structural unit having a steric repulsive group, and contains a specific dispersant which is a random copolymer or an alternating copolymer, and a solvent.
- the specific pigment derivative and the specific dispersant the specific dispersant is efficiently adsorbed on the specific pigment derivative, and steric repulsion is likely to occur between the specific pigment derivatives. As a result, the specific pigment derivative is produced.
- the adsorbed pigment can be stably dispersed.
- the composition according to the present disclosure is a curable composition and a film is formed by the curable composition, it is possible to maintain a state in which the dispersion stability of the pigment is high even in the film. As a result, when a part of the formed film is removed by development or the like, it is presumed that the generation of residue due to the aggregation of the pigment is reduced.
- the moisture resistance of the formed film decreases depending on the type of the pigment derivative (for example, a pigment derivative having a pigment skeleton having absorption up to the infrared region).
- the moisture resistance of the film is lowered means that the transmittance of light at a certain wavelength of the film (for example, a wavelength of 700 nm to 1000 nm) is lowered after the moisture resistance test than before the moisture resistance test under high humidity. Means that. It is considered that the reason why the moisture resistance of the film is lowered is that the pigment derivatives associate in the film to form foreign substances during the moisture resistance test. The mechanism by which foreign matter is formed is presumed as follows.
- pigment derivatives have a structure in which an adsorptive group such as an acid group or a basic group is introduced into the pigment skeleton and the adsorptive group is bonded to the terminal portion of the molecular chain. Since such a pigment derivative contains a dye skeleton having a ⁇ -conjugated system, association is likely to occur. In particular, the longer the absorption wavelength is on the long wave side, the wider the ⁇ -conjugated system expands to form a ⁇ -conjugated surface. Therefore, it is easy to develop high association.
- an adsorptive group such as an acid group or a basic group
- the adsorptive group of the pigment derivative exhibits hydrophilicity
- water is coordinated with the hydrophilic adsorptive group during the moisture resistance test, and the water-coordinated adsorptive group repels the hydrophobic ⁇ -conjugated surface.
- the composition according to the present disclosure uses a specific pigment derivative having at least one group selected from the group consisting of the groups represented by any of the above formulas (1) to (4).
- the groups represented by the formulas (1) to (4) have a hydrophilic portion but do not exist at the terminal portion, and are organic at the terminal portion adjacent to the hydrophilic portion. Hydrophobic sites such as groups are bound.
- the specific pigment derivative having such a structure the coordination of water to the hydrophilic part is suppressed during the moisture resistance test, the association between the ⁇ -conjugated surfaces as described above is not induced, and a foreign substance is formed. It is considered difficult. Therefore, according to the composition according to the present disclosure, it is presumed that foreign substances derived from the specific pigment derivative are less likely to be formed in the film, and as a result, the decrease in moisture resistance is suppressed.
- the composition according to the present disclosure contains a specific pigment derivative having at least one group selected from the group consisting of groups represented by any of the formulas (1) to (4).
- the specific pigment derivative is a compound in which the above group is bonded to the pigment skeleton.
- the specific pigment derivative preferably has a group represented by the following formula (2) from the viewpoint of enhancing the dispersion stability of the pigment.
- R 1 is a substituent represented by -COR 11 , -SO 2 R 11 , or -PO (R 11 ) 2 having a total carbon number of 10 or less, and R 11 is independent of each other.
- R 11 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms.
- R 1 is preferably ⁇ SO 2 R 11.
- R 11 is preferably a monovalent organic group having 1 or more carbon atoms, and particularly preferably an organic group having 1 or more carbon atoms containing a fluorine atom.
- the group represented by the formula (1) is a strong acid, so that the pigment is dispersed. It is easy to improve the properties, and the presence of fluorine can inhibit the coordination of water, so that the formation of foreign substances can be suppressed and the moisture resistance of the formed film can be improved.
- Specific examples of the group represented by the formula (1) include, for example, -NH-SO 2 CH 3 , -NH-SO 2 CF 3 , -NH-SO 2 C 2 F 5 , -NH-SO 2 C 4 F. 9 , -NH-SO 2 CH 2 CF 3 , -NH-SO 2 CF 2 CH 3 can be mentioned.
- Equation (2) -L-NH-R 2
- L represents -CO-, -SO 2- , or -PO (R 21 )-
- R 21 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R 2 represents -COR 22 , -SO 2 R 22 , or -PO (R 22 ) 2
- R 22 each independently represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms.
- L is preferably ⁇ CO ⁇ .
- R 2 is preferably ⁇ SO 2 R 22.
- R 22 is preferably a monovalent organic group having 1 or more carbon atoms, and particularly preferably an organic group having 1 or more carbon atoms containing a fluorine atom.
- the group represented by the formula (2) is a strong acid, so that the pigment is dispersed. It is easy to improve the properties, and the presence of fluorine can inhibit the coordination of water, so that the formation of foreign substances can be suppressed and the moisture resistance of the formed film can be improved.
- L represents -CO-
- R 2 represents -SO 2 R 22
- R 22 is a monovalent organic group having 1 or more carbon atoms.
- L in the formula (2) represents -CO-
- R 2 represents -SO 2 R 22
- R 22 is a monovalent organic containing a fluorine atom and having 1 or more carbon atoms. It is more preferable to represent a group.
- R 22 examples include an alkyl group having 1 to 10 carbon atoms and an alkyl fluoride group having 1 to 10 carbon atoms. Among them, an alkyl fluoride group having 1 to 8 carbon atoms is preferable, and an alkyl group having 1 or 2 carbon atoms is preferable. Alkyl fluoride groups are particularly preferred.
- the above alkyl group and fluorinated alkyl group may have an ether bond.
- the above alkyl group and fluorinated alkyl group are preferably linear. Further, the above-mentioned alkyl fluoride group is preferably a perfluoroalkyl group.
- the R 22 is particularly preferably a trifluoromethyl group.
- Specific examples of the group represented by the formula (2) include, for example, -CO-NH-SO 2 CH 3 , -CO-NH-SO 2 CF 3 , -CO-NH-SO 2 C 2 F 5 , -CO. Examples thereof include -NH-SO 2 C 4 F 9 , -CO-NH-SO 2 CH 2 CF 3 , and -CO-NH-SO 2 CF 2 CH 3.
- R 3 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 4,
- X - represents a counter anion.
- examples of the monovalent organic group represented by R 3 include an alkyl group, and a linear alkyl group is particularly preferable. In the formula (3), it is preferably two are alkyl groups of the three R 3, is preferably a two at least one of alkyl group having 3 or more carbon atoms of the alkyl group.
- examples of the counter anion represented by X ⁇ include halogen ions, boron halide ions, phosphorus halogenated ions and the like, and among them, halogen ions (for example, Cl ⁇ , I ⁇ ) and boron halide. ion (e.g., BF 4 -), halogenated phosphorus (e.g., PF 6 -) is preferred.
- the group represented by the formula (3) is, for example, -N + H (CH 3) (C 3 H 7) Cl -, -N + H (C 2 H 5) (C 6 H 13) I -, -N + H (C 8 H 17) 2 BF 4 -, -N + H (C 5 H 10) 2 PF 6 - , and the like.
- the alkyl groups in the above specific examples may be independently linear or branched chains. For example, if the alkyl group in the above specific example is a straight chain, the dispersibility of the pigment tends to be improved, and if the alkyl group in the above specific example is a branched chain, the moisture resistance of the formed film tends to be excellent. There is.
- L represents -CO-, -SO 2- , or -PO (R 42 )-
- R 42 represents a hydrogen atom or a monovalent organic group having 1 or more carbon atoms
- R 4 each independently represent a hydrogen atom or a monovalent organic group having 1 or more carbon atoms or three of at least one alkyl group having 3 or more carbon atoms of R 5
- X - represents a counter anion.
- L is preferably ⁇ CO ⁇ .
- the monovalent organic group represented by R 4 include an alkyl group, especially linear alkyl group. In the formula (4), it is preferably two are alkyl groups of the three R 4, is preferably a two at least one of alkyl group having 3 or more carbon atoms of the alkyl group.
- examples of the counter anion represented by X ⁇ include halogen ions, boron halide ions, phosphorus halogenated ions and the like, and among them, halogen ions (for example, Cl ⁇ , I ⁇ ) and boron halide. ion (e.g., BF 4 -), halogenated phosphorus (e.g., PF 6 -) is preferred.
- alkyl groups in the above specific examples may be independently linear or branched chains.
- the alkyl group in the above specific example is a straight chain, the dispersibility of the pigment tends to be improved, and if the alkyl group in the above specific example is a branched chain, the moisture resistance of the formed film tends to be excellent. There is.
- Examples of the dye skeleton to which the above specific functional group is bonded include the following. That is, as the pigment skeleton of the specific pigment derivative, a pigment skeleton derived from a pigment compound having absorption in the infrared region is preferable, and among them, a pigment skeleton derived from a pigment compound having absorption in the near infrared region is preferable. More preferred. In particular, it is preferable that the pigment skeleton of the specific pigment derivative and the pigment skeleton of the pigment have the same pigment skeleton.
- the pigment skeleton include squarylium pigment skeleton, croconium pigment skeleton, pyrolopyrrolop pigment skeleton, diketopyrrolopyrrole pigment skeleton, quinacridone pigment skeleton, anthraquinone pigment skeleton, dianthraquinone pigment skeleton, benzoisoindole pigment skeleton, and thiazine indigo.
- Pigment skeleton, azo pigment skeleton, quinophthalone pigment skeleton, phthalocyanine pigment skeleton, naphthalocyanine pigment skeleton, dioxazine pigment skeleton, perylene pigment skeleton, perinone pigment skeleton, benzoimidazolone pigment skeleton, benzothiazole pigment skeleton, benzoimidazole pigment skeleton, and benzo Oxazole pigment skeleton and the like are included.
- the pigment skeleton of the specific pigment derivative is preferably a pyrolopyrrole pigment skeleton, a phthalocyanine pigment skeleton, a squarylium pigment skeleton, or a croconium pigment skeleton, and a squarylium pigment skeleton or a croconium pigment skeleton is particularly preferable from the viewpoint of production suitability.
- Examples of the specific pigment derivative include a compound represented by the formula (B1).
- P represents a dye skeleton
- L represents a single bond or a linking group
- X is represented by a specific functional group (that is, any of the above formulas (1) to (4). Group)
- m represents an integer of 1 or more
- n represents an integer of 1 or more
- a plurality of L and X may be different from each other, and when n is 2 or more, they may be different from each other.
- the plurality of Xs may be different from each other.
- the pigment skeleton represented by P corresponds to the above pigment skeleton, and corresponds to the above pigment skeleton, squarylium pigment skeleton, croconium pigment skeleton, pyrolopyrrolop pigment skeleton, diketopyrrolopyrrole pigment skeleton, quinacridone pigment skeleton, anthraquinone pigment skeleton, dianthraquinone pigment.
- Skeleton benzoisoindole pigment skeleton, thiadinindigo pigment skeleton, azo pigment skeleton, quinophthalone pigment skeleton, phthalocyanine pigment skeleton, naphthalocyanine pigment skeleton, dioxazine pigment skeleton, perylene pigment skeleton, perinone pigment skeleton, benzoimidazolone pigment skeleton, benzo At least one selected from the thiazole pigment skeleton, the benzoimidazole pigment skeleton, and the benzoxazole pigment skeleton is preferable.
- a pyrolopyrrolop pigment skeleton, a diketopyrrolopyrrole pigment skeleton, a phthalocyanine pigment skeleton, a squarylium pigment skeleton, or a croconium pigment skeleton is preferable, and a squarylium pigment skeleton or a croconium pigment skeleton is particularly preferable from the viewpoint of production suitability.
- the linking group represented by L includes 1 to 100 carbon atoms, 0 to 10 nitrogen atoms, 0 to 50 oxygen atoms, 1 to 200 hydrogen atoms, and 0 to 0 to.
- a group consisting of 20 sulfur atoms is preferable, and a group containing an ether bond and an alkylene group is preferable.
- the linking group represented by L may be unsubstituted or may further have a substituent. Examples of the substituent include the following Substituent T.
- Substituents T include halogen atom, cyano group, nitro group, alkyl group, alkenyl group, alkynyl group, aryl group, heteroaryl group, -ORt 1 , -CORt 1 , -COORt 1 , -OCORt 1 , -NRt 1 Rt 2 , -NHCORt 1 , -CONRT 1 Rt 2 , -NHCONRT 1 Rt 2 , -NHCOORt 1 , -SRt 1 , -SO 2 Rt 1 , -SO 2 ORt 1 , -NHSO 2 Rt 1 , or -SO 2 NRt 1 Rt 2 is mentioned.
- Rt 1 and Rt 2 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a heteroaryl group. Rt 1 and Rt 2 may be combined to form a ring.
- the group represented by the formula (2) is particularly preferable.
- the specific pigment derivative is preferably a compound having a maximum absorption wavelength in the wavelength range of 700 nm to 1,200 nm, preferably a compound having a maximum absorption wavelength in the wavelength range of 700 nm to 1,100 nm, and has a wavelength of 700 nm to 1 It is preferably a compound having a maximum absorption wavelength in the range of 000 nm.
- a pigment derivative having a maximum absorption wavelength in the above wavelength range can easily spread the ⁇ plane closer to the pigment, improve the adsorptivity to the pigment, and can easily obtain more excellent dispersion stability.
- the specific pigment derivative is preferably a compound containing an aromatic ring, and more preferably a compound containing a structure in which two or more aromatic rings are condensed. Further, the specific pigment derivative is preferably a compound having a ⁇ -conjugated plane, and more preferably a compound having a ⁇ -conjugated plane having the same structure as the ⁇ -conjugated plane contained in the pigment.
- the number of ⁇ electrons contained in the ⁇ -conjugated plane of the specific pigment derivative is preferably 8 to 100.
- the upper limit is preferably 90 or less, and more preferably 80 or less.
- the lower limit of the number of ⁇ electrons is preferably 10 or more, and more preferably 12 or more.
- the specific pigment derivative is preferably a compound having a ⁇ -conjugated plane including a partial structure represented by the following formula (SQ) or the following formula (CR) (that is, a squarylium dye skeleton or a croconium dye skeleton).
- a 1 and A 2 each independently represent an aromatic ring group, X represents a specific functional group, and are bound to at least one of A 1 and A 2.
- n is an integer of 1 to 4.
- a 3 and A 4 each independently represent an aromatic ring group, X represents a specific functional group, and are bound to at least one of A 3 and A 4.
- n is an integer of 1 to 4.
- the aromatic ring group represented by A 1 , A 2 , A 3 and A 4 includes an aryl group and a heteroaryl group.
- the aromatic ring constituting the aromatic ring group represented by A 1 , A 2 , A 3 and A 4 may be a monocyclic ring or a condensed ring. May be.
- Specific examples of the aromatic ring include a benzene ring, a naphthalene ring, a pentalene ring, an inden ring, an azulene ring, a heptalene ring, an indacene ring, a perylene ring, a pentacene ring, an acenaphthene ring, a phenanthrene ring, an anthracene ring, a naphthalene ring, and a chrysene ring.
- Triphenylene ring Fluorene ring, biphenyl ring, pyrrole ring, furan ring, thiophene ring, imidazole ring, oxazole ring, thiazole ring, pyridine ring, pyrazine ring, pyrimidine ring, pyridazine ring, indridin ring, indole ring, benzofuran ring, Benzothiophene ring, isobenzofuran ring, quinolidine ring, quinoline ring, phthalazine ring, naphthylidine ring, quinoxalin ring, quinoxazoline ring, isoquinoline ring, carbazole ring, phenanthrene ring, aclysin ring, phenanthrene ring, thianthrene ring, chromium ring, xanthene ring.
- Examples thereof include a ring, a phenoxatiin ring, a phenothiazine ring, and a phenazine ring, and a benzene ring or a naphthalene ring is preferable.
- These aromatic rings may be unsubstituted or have a substituent.
- the substituent the above-mentioned Substituent T can be mentioned.
- the plurality of substituents T When a plurality of substituents T are introduced into the aromatic ring, the plurality of substituents T may be bonded to each other to form a ring.
- R1 represents a ring structure
- a 11 is -O- or -NR 51 - represents
- R 46 ⁇ R 51 each independently represent a hydrogen atom or a substituent
- R 47 R 48 may be bonded to each other to form a ring
- * represents a bond.
- the ring structure represented by X 11 may be a monocyclic ring or a condensed ring.
- a specific functional group represented by X is bonded to the ring structure represented by X 11.
- a 11 is -NR 51 - are preferred.
- the cations in the formula (SQ) and the formula (CR) are delocalized and exist as follows, respectively.
- the examples shown below show the same squarylium pigment skeleton or croconium pigment skeleton except that the notation positions of the resonance structures of cations and anions are different.
- Specific examples of the specific pigment derivative include compounds having the following structures.
- CuPc indicates phthalocyanine copper (II).
- Me represents a methyl group and Ph represents a phenyl group.
- specific pigment derivative among the specific examples of compound A described in paragraph 0067 of International Publication No. 2018/230387, those having a specific functional group can also be used, and these contents are incorporated in the present specification. Is done.
- the method for synthesizing the specific pigment derivative is not particularly limited, but for example, the same method as the synthesis example described in paragraphs 0281 to 0292 of International Publication No. 2018/230387 can be used.
- the specific pigment derivative may be used alone or in combination of two or more.
- the content of the specific pigment derivative in the composition according to the present disclosure is preferably 1% by mass to 30% by mass, more preferably 5% by mass to 30% by mass, and 10% by mass to 30% by mass with respect to the total amount of all pigments. % Is more preferable.
- the composition according to the present disclosure contains a pigment.
- the pigment include a white pigment, a black pigment, a chromatic pigment, and a near-infrared absorbing pigment.
- the pigment is an infrared absorbing pigment having absorption in the infrared region.
- the pigment is a near-infrared absorbing pigment having absorption in the near-infrared region.
- the “near infrared region” refers to a region having a wavelength of more than 700 nm and 2,500 nm or less, and the “near infrared region” refers to an infrared ray having a wavelength of more than 700 nm and 2,500 nm or less.
- the pigment means a dye that is insoluble in a solvent.
- insoluble in a solvent means that the solubility of the target substance in 100 mg of the solvent at 25 ° C. is 0.1 g or less.
- examples of the solvent include propylene glycol monomethyl ether acetate and water, and any solvent having the above-mentioned solubility is a pigment. It is preferable that the pigment skeleton of the pigment and the pigment skeleton of the specific pigment derivative have the same pigment skeleton.
- the pigment in the present disclosure is a near-infrared absorbing pigment
- the pigment has a maximum absorption wavelength in the wavelength range of more than 700 nm and 1800 nm or less.
- the ratio A 1 / A 2 between the absorbance A 2 in the absorbance A 1 and the maximum absorption wavelength at a wavelength 500nm may be preferably 0.08 or less, 0.04 or less More preferred.
- Near-infrared absorbing pigments include squarylium compounds, croconium compounds, pyrolopyrrole compounds, phthalocyanine compounds, cyanine compounds, naphthalocyanine compounds, quaterylene compounds, merocyanine compounds, oxonor compounds, iminium compounds, dithiol compounds, triarylmethane compounds, pyromethene compounds, Examples thereof include azomethine compounds, anthraquinone compounds, dibenzofuranone compounds, metal oxides, and metal boroides.
- a squarylium compound, a croconium compound, a pyrolopyrrole compound, or a phthalocyanine compound is preferable, and a squarylium compound or a croconium compound is particularly preferable from the viewpoint of production suitability.
- the squarylium compound is not particularly limited as long as it is a compound corresponding to a pigment having a squarylium pigment skeleton.
- a specific functional group represented by X from a compound represented by the formula (SQ) in a specific pigment derivative may be used. Those excluded are mentioned as preferable ones.
- the squarylium compound include the following compounds. Further, as the squarylium compound, refer to the compounds described in paragraphs 0044 to 0049 of JP2011-208101A, the compounds described in paragraphs 0060 to 0061 of Patent No. 6065169A, and paragraphs 0040 of International Publication No. 2016/181987. The compound described, the compound described in International Publication No. 2013/133099, the compound described in International Publication No. 2014/088063, the compound described in JP-A-2014-126642, and the compound described in JP-A-2016-146619. Compounds, compounds described in JP-A-2015-176046, compounds described in JP-A-2017-25311, compounds described in International Publication No.
- the croconium compound is not particularly limited as long as it is a compound corresponding to a pigment having a croconium pigment skeleton.
- a specific functional group represented by X from a compound represented by the formula (CR) in a specific pigment derivative may be used. Those excluded are mentioned as preferable ones.
- croconium compound examples include the following compounds.
- Examples of the croconium compound include compounds described in paragraphs 0049 of JP2007-271745, JP2007-31644A, JP2007-169315, and the like, and the contents thereof are described in the present specification. Incorporated into the book.
- the pyrrolopyrrole compound is not particularly limited as long as it is a compound corresponding to a pigment having a pyrolopyrrolop pigment skeleton.
- the pyrrolopyrrole compound is preferably a compound represented by the formula (PP).
- R 1a and R 1b each independently represent an alkyl group, an aryl group, or a heteroaryl group
- R 2 and R 3 each independently represent a hydrogen atom or a substituent
- R. 2 and R 3 may be bonded to each other to form a ring
- R 4 each independently represent a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, -BR 4A R 4B, or a metal atom
- R 4 may be covalently or coordinated with at least one selected from R 1a , R 1b , and R 3
- R 4A and R 4B each independently represent a substituent.
- R 1a and R 1b are each independently preferably an aryl group or a heteroaryl group, and more preferably an aryl group. Further, the alkyl group, aryl group, and heteroaryl group represented by R 1a and R 1b may have a substituent or may be unsubstituted. Examples of the substituent include the above-mentioned Substituent T.
- R 2 and R 3 each independently represent a hydrogen atom or substituent.
- substituent include the above-mentioned Substituent T.
- At least one of R 2 and R 3 is preferably an electron-attracting group, and is preferably a cyano group, a carboxy group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a carbamoyl group, an alkylcarbonyl group, an arylcarbonyl group, or an alkyl. It is more preferably a sulfonyl group or an arylsulfonyl group, and even more preferably a cyano group.
- R 2 preferably represents an electron-attracting group (preferably a cyano group) and R 3 preferably represents a heteroaryl group.
- the heteroaryl group is preferably a 5-membered ring or a 6-membered ring.
- the heteroaryl group is preferably a monocyclic ring or a condensed ring, preferably a monocyclic ring or a condensed ring having a condensed number of 2 to 8, and more preferably a monocyclic ring or a condensed ring having a condensed number of 2 to 4.
- the number of heteroatoms constituting the heteroaryl group is preferably 1 to 3, more preferably 1 to 2.
- hetero atom examples include a nitrogen atom, an oxygen atom, and a sulfur atom.
- the heteroaryl group preferably has one or more nitrogen atoms.
- Two R 2 together in the formula (PP) may be the same or may be different.
- two R 3 together in the formula (PP) may be the same or may be different.
- R 4 is preferably a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group or a group represented by -BR 4A R 4B, and is preferably a hydrogen atom, an alkyl group, an aryl group or -BR. more preferably a group represented by 4A R 4B, and more preferably a group represented by -BR 4A R 4B.
- R 4A and R 4B As the substituent represented by R 4A and R 4B , a halogen atom, an alkyl group, an alkoxy group, an aryl group, or a heteroaryl group is preferable, an alkyl group, an aryl group, or a heteroaryl group is more preferable, and an aryl group is preferable. Especially preferable. These groups may further have a substituent.
- Two R 4 together in the formula (PP) may be the same or may be different.
- R 4A and R 4B may be combined with each other to form a ring.
- Specific examples of the compound represented by the formula (PP) include the following compounds.
- Me represents a methyl group and Ph represents a phenyl group.
- Examples of the pyrrolopyrrole compound include the compounds described in paragraphs 0048 to 0058 of JP2009-263614, paragraphs 0037 to 0052 of JP2011-68831, and paragraphs 0052 to of International Publication No. 2017/146902. Examples include the compounds described in 0053, the contents of which are incorporated herein.
- the pigment in the present disclosure may be a white pigment, a black pigment, or a chromatic pigment, and preferably contains a chromatic pigment as a part or all of the pigment.
- the white pigment includes not only pure white pigment but also a light gray pigment (for example, grayish white, light gray, etc.) close to white.
- the pigment is preferably an organic pigment.
- the chromatic pigment for example, one having a maximum absorption wavelength in the wavelength range of 400 nm to 700 nm is more preferable.
- chromatic pigment examples include red pigment, green pigment, blue pigment, yellow pigment, purple pigment, orange pigment and the like.
- 2013/098836 Directly linked quinophthalone dimer
- 231,232 metalhine-based
- 233 quinoline-based
- yellow pigment described in C. I. Pigment Orange 2,5,13,16,17: 1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73, etc. (The above is orange pigment), C. I.
- a green pigment halogenation having an average number of halogen atoms in one molecule of 10 to 14, an average number of bromine atoms of 8 to 12, and an average number of chlorine atoms of 2 to 5.
- Zinc phthalocyanine pigments can also be used. Specific examples include the compounds described in International Publication No. 2015/118720. Further, as the green pigment, the compound described in Chinese Patent Application No. 106909027, the phthalocyanine compound having a phosphoric acid ester described in International Publication No. 2012/10395 as a ligand, and the like can also be used. Further, as the green pigment, the green pigment described in JP-A-2018-180023 may be used.
- an aluminum phthalocyanine compound having a phosphorus atom can also be used. Specific examples include the compounds described in paragraphs 0022 to 0030 of JP2012-247591A and paragraphs 0047 of JP2011-157478A.
- the yellow pigment the quinophthalone compounds described in paragraphs 0011 to 0034 of JP2013-54339, the quinophthalone compounds described in paragraphs 0013 to 0058 of JP2014-26228, and JP-A-2019-8014.
- the above-mentioned yellow pigment and the like can also be used.
- the compound described in JP-A-2018-062644 can also be used. This compound can also be used as a pigment derivative other than the specific pigment derivative.
- C.I. I. Pigment Yellow 129 may be added at.
- red pigment a diketopyrrolopyrrole compound in which at least one bromine atom is substituted in the structure described in JP-A-2017-201384, a diketopyrrolopyrrole compound described in paragraphs 0016 to 0022 of Patent No. 6248838, international It is also possible to use the diketopyrrolopyrrole compound described in Publication No. 2012/102399, the diketopyrrolopyrrole compound described in International Publication No. 2012/117956, the naphthol azo compound described in JP2012-229344A, and the like. ..
- red pigment a compound having a structure in which an aromatic ring group having an oxygen atom, a sulfur atom or a nitrogen atom bonded to the aromatic ring is bonded to a diketopyrrolopyrrole skeleton can also be used. it can.
- White pigments include titanium oxide, strontium titanate, barium titanate, zinc oxide, magnesium oxide, zirconium oxide, aluminum oxide, barium sulfate, silica, talc, mica, aluminum hydroxide, calcium silicate, aluminum silicate, hollow. Examples include resin particles and zinc sulfide.
- the white pigment is preferably particles having a titanium atom, and more preferably titanium oxide. Further, the white pigment is preferably particles having a refractive index of 2.10 or more with respect to light having a wavelength of 589 nm. The above-mentioned refractive index is preferably 2.10 to 3.00, and more preferably 2.50 to 2.75.
- titanium oxide described in "Titanium Oxide Physical Properties and Applied Technology, by Manabu Kiyono, pp. 13-45, published on June 25, 1991, published by Gihodo Publishing" can also be used.
- the white pigment not only those composed of a single inorganic substance but also particles compounded with other materials may be used. For example, particles having vacancies or other materials inside, particles in which a large number of inorganic particles are attached to core particles, core particles composed of core particles composed of polymer particles, and shell composite particles composed of a shell layer composed of inorganic nanoparticles are used. Is preferable.
- the core and shell composite particles composed of the core particles composed of the polymer particles and the shell layer composed of the inorganic nanoparticles for example, the description in paragraphs 0012 to 0042 of JP2015-047520 can be referred to. The contents are incorporated herein by reference.
- Hollow inorganic particles can also be used as the white pigment.
- Hollow inorganic particles are inorganic particles having a structure having cavities inside, and are inorganic particles having cavities surrounded by an outer shell.
- Examples of the hollow inorganic particles include the hollow inorganic particles described in JP-A-2011-075786, International Publication No. 2013/061621, JP-A-2015-164881, and the like, and the contents thereof are incorporated in the present specification. Is done.
- the black pigment is not particularly limited, and known ones can be used.
- examples of the black pigment include carbon black, titanium black, graphite and the like, with carbon black or titanium black being preferable, and titanium black being more preferable.
- Titanium black is black particles containing a titanium atom, and low-order titanium oxide or titanium oxynitride is preferable.
- the surface of titanium black can be modified as needed for the purpose of improving dispersibility and suppressing cohesiveness.
- Examples of the black pigment include Color Index (CI) Pigment Black 1, 7 and the like.
- Titanium black preferably has a small primary particle size and an average primary particle size of each particle. Specifically, the average primary particle size is preferably 10 nm to 45 nm. Titanium black can also be used as a dispersion. For example, a dispersion containing titanium black particles and silica particles and having a content ratio of Si atoms and Ti atoms in the dispersion adjusted to a range of 0.20 to 0.50 can be mentioned. Regarding the above dispersion, the description in paragraphs 0020 to 0105 of JP2012-169556A can be referred to, and the content thereof is incorporated in the present specification.
- titanium black products examples include titanium black 10S, 12S, 13R, 13M, 13M-C, 13RN, 13MT (trade name: manufactured by Mitsubishi Materials Corporation), Tilak D (Tilak) D ( Product name: Ako Kasei Co., Ltd.) and the like.
- the average primary particle size of the pigment in the present disclosure is preferably 1 nm to 200 nm, more preferably 5 nm to 180 nm or less, further preferably 10 nm to 150 nm, and particularly preferably 10 nm to 100 nm or less.
- the primary particle size of the pigment can be determined from a photograph obtained by observing the primary particles of the pigment with a transmission electron microscope. Specifically, the projected area of the primary particles of the pigment is obtained, and the corresponding circle-equivalent diameter is calculated as the primary particle diameter of the pigment.
- the average primary particle size in the present disclosure is an arithmetic mean value of the primary particle size for the primary particles of 400 pigments. Further, the primary particles of the pigment refer to independent particles without aggregation.
- composition according to the present disclosure may contain one kind of pigment alone, or may contain two or more kinds of pigments.
- the content of the pigment in the composition according to the present disclosure may be appropriately determined according to the purpose of use, use and the like of the composition according to the present disclosure.
- the content of the pigment is, for example, preferably 5% by mass to 80% by mass, and 10% by mass to 70% by mass, based on the total solid content of the composition, from the viewpoint of exhibiting the functions required for the pigment. Is more preferable.
- the composition according to the present disclosure contains a specific dispersant having a structural unit having an adsorptive group and a structural unit having a steric repulsive group and being a random copolymer or an alternating copolymer.
- the specific dispersant is preferably a random copolymer.
- the adsorptive group include an acid group, a basic group, a group containing a heterocycle, a group containing a dye skeleton, and the like, and the acid group is considered to have a large interaction and good dispersion.
- a basic group is preferable, and a basic group is particularly preferable.
- the steric repulsive group may be a group having a large steric hindrance, and for example, a polyester resin structure, an acrylic resin structure, a polyalkylene glycol structure, or the like is preferable, and a polyester resin structure is more preferable.
- the polyester resin structure is not particularly limited, but a linear polyester resin structure is preferable, and a polycaprolactone structure or a polyvalerolactone structure is more preferable.
- the steric repulsive group is preferably a group having a total carbon number of 20 or more, more preferably a group having a total carbon number of 30 or more, and a group having a total carbon number of 50 or more.
- the total number of carbon atoms is 50 to 200.
- a multi-point adsorption type dispersant in which a structural unit having an adsorptive group and a structural unit having a steric repulsive group are separated, and a surface adsorption type in which the adsorptive group is planar like an oligoimine derivative. The dispersant is not included in the specific dispersant.
- the content of the structural unit having an adsorptive group is preferably 5 mol% to 95 mol%, preferably 10 mol% to 90 mol%, based on the total mass of the specific dispersant. Is more preferable, and 15 mol% to 85 mol% is further preferable.
- the content of the structural unit having a steric repulsive group is preferably 5 mol% to 95 mol%, preferably 10 mol% to 90 mol%, based on the total mass of the specific dispersant. More preferably, it is more preferably 15 mol% to 85 mol%.
- the specific dispersant preferably has a basic group as an adsorptive group.
- the basic group is preferably a group containing a nitrogen atom, and more specifically, a primary amino group, a secondary amino group, a tertiary amino group, a quaternary ammonium base, or the like. Is more preferable.
- the specific dispersant having a basic group for example, a random copolymer or an alternating copolymer having a tertiary amino group as a basic group is preferable.
- the specific dispersant having a basic group is preferably a random copolymer or an alternating copolymer having at least a structural unit having a tertiary amino group and a structural unit having a steric repulsive group. Further, the specific dispersant having a basic group may have a quaternary ammonium base as a basic group in addition to the tertiary amino group.
- Examples of the monomer for obtaining the above-mentioned structural unit having a tertiary amino group include an ethylenically unsaturated compound having a tertiary amino group. Specific examples thereof include dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate, dimethylaminopropyl (meth) acrylate, diethylaminopropyl (meth) acrylate, and dimethylaminopropyl (meth) acrylamide.
- Examples of the monomer (that is, the monomer having a quaternary ammonium base) for obtaining the structural unit having the quaternary ammonium base include an ethylenically unsaturated compound having a quaternary ammonium base.
- an ethylenically unsaturated compound having a quaternary ammonium base examples include an ethylenically unsaturated compound having a quaternary ammonium base.
- Examples thereof include bromide, (meth) acryloyloxyethyl benzyl dimethylammonium chloride, and (meth) acryloyloxyethyl benzyl diethylammonium chloride.
- Examples of the ethylenically unsaturated compound having a tertiary amino group and the ethylenically unsaturated compound having a quaternary ammonium base include those described in Paragraphs 0150 to 0170 of International Publication No. 2018/230486. The content is incorporated herein by reference.
- the structural unit having a steric repulsive group may be one introduced by using a monomer having a steric repulsive group (so-called macromonomer), or a monomer having no steric repulsive group. It may be introduced by binding a steric repulsive group to the structural unit obtained in use by a polymer reaction.
- Examples of the structural unit having a steric repulsive group include the following structures.
- n, a, and b each independently represent an integer of 1 or more.
- the dispersant having a basic group may further contain a structural unit having an acid group.
- the acid group include a carboxy group (carboxylic acid group), a sulfonamide group, a phosphonic acid group, a sulfonic acid group, a phenolic hydroxyl group, a sulfonylimide group and the like.
- the carboxy group is particularly preferable.
- a preferable specific example of the structural unit having an acid group is, for example, the structure shown below.
- the above R represents a hydrogen atom or a methyl group.
- the specific dispersant may be a dispersant having an acid group as an adsorptive group.
- the dispersant having an acid group include a random copolymer or an alternating copolymer containing a structural unit having an acid group and a structural unit having a steric repulsive group.
- the structural unit having an acid group include the same structural units having an acid group used in the specific dispersant having a basic group.
- examples of the structural unit having a steric repulsive group include the same structural unit having a steric repulsive group used in the specific dispersant having a basic group.
- Specific examples of the specific dispersant include compounds having the following structures (the numerical values added to each structural unit of the main chain are molar ratios). All of the compounds having the following structures may be random copolymers or alternating copolymers.
- the specific dispersant may further have a reactive group, such as a cyclic ether (epoxy, oxetane), an ethylenically unsaturated bond, which exhibits a reactive group by heat and / or light. More specifically, the specific dispersant may have a structural unit having the above-mentioned reactive group in addition to the structural unit having an adsorptive group and the structural unit having a steric repulsive group.
- a reactive group such as a cyclic ether (epoxy, oxetane), an ethylenically unsaturated bond, which exhibits a reactive group by heat and / or light.
- the specific dispersant may have a structural unit having the above-mentioned reactive group in addition to the structural unit having an adsorptive group and the structural unit having a steric repulsive group.
- a known method capable of synthesizing a random copolymer or an alternating copolymer may be used, and there is no particular limitation. Further, confirmation that the copolymer is a random copolymer or an alternating copolymer can be performed by using nuclear magnetic resonance (NMR).
- NMR nuclear magnetic resonance
- the weight average molecular weight of the specific dispersant is preferably 2500 to 200,000, more preferably 5000 to 150,000, and even more preferably 7500 to 100,000.
- the specific dispersant may be used alone or in combination of two or more.
- the content of the specific dispersant in the composition according to the present disclosure may be appropriately set according to the type and content of the pigment and the pigment derivative.
- the content of the specific dispersant is preferably 5% by mass to 200% by mass, more preferably 10% by mass to 150% by mass, and 15% by mass with respect to the total amount of the pigment and the pigment derivative. It is more preferably% to 100% by mass.
- the curable composition in the present disclosure preferably contains a solvent.
- a solvent such as ethyl acetate, -n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, alkyl esters, methyl lactate, etc.
- Ethyl lactate methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, and methyl 3-oxypropionate and ethyl 3-oxypropionate.
- 3-Oxypropionic acid alkyl esters such as (eg, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate), and methyl 2-oxypropionate.
- 2-Oxypropionate alkyl esters such as ethyl 2-oxypropionate, and propyl 2-oxypropionate (eg, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, 2, -Methyl ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-oxy-2-methylpropionate, ethyl 2-oxy-2-methylpropionate, methyl 2-methoxy-2-methylpropionate, 2-ethoxy- 2-Methyl propionate), as well as methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl 2-oxobutate, ethyl 2-oxobutate, etc .;
- Ethers such as diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol methyl.
- methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclopentanone, cyclohexanone, ethylcarbi Tall acetate, butyl carbitol acetate, propylene glycol monomethyl ether, propylene glycol methyl ether acetate and the like are suitable.
- the solvent may be used alone or in combination of two or more.
- an organic solvent having a low metal content it is preferable to use an organic solvent having a low metal content, and the metal content of the organic solvent is preferably, for example, 10 ppb or less. If necessary, a ppt-level organic solvent may be used, and such an organic solvent is provided by, for example, Toyo Gosei Co., Ltd. (The Chemical Daily, November 13, 2015).
- Examples of the method for removing impurities such as metals from the organic solvent include distillation (molecular distillation, thin film distillation, etc.) and filtration using a filter.
- the filter pore diameter of the filter used for filtration is preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less, and even more preferably 3 ⁇ m or less.
- the filter material is preferably polytetrafluoroethylene, polyethylene or nylon.
- the organic solvent may contain isomers (compounds having the same number of atoms but different structures). Further, only one kind of isomer may be contained, or a plurality of kinds may be contained.
- the content of peroxide in the organic solvent is preferably 0.8 mmol / L or less, and more preferably substantially free of peroxide.
- the solvent may be used alone or in combination of two or more.
- the content of the solvent in the composition according to the present disclosure may be appropriately determined based on the amount of solid content determined according to the purpose of use, use, etc. of the composition according to the present disclosure.
- the composition according to the present disclosure may be a pigment dispersion liquid containing a pigment, a specific pigment derivative, a specific dispersant, and a solvent, or may contain other components other than these components.
- the composition according to the present disclosure is preferably a composition from which a film can be obtained, and preferably a curable composition from which a cured film can be finally obtained by curing.
- the composition according to the present disclosure is preferably a curable composition capable of forming a pattern of a cured film by pattern exposure and developing and removing an unexposed portion, for example. That is, the composition according to the present disclosure is preferably a negative type curable composition.
- composition according to the present disclosure is a negative type curable composition
- the composition further contains a polymerization initiator and a polymerizable compound in addition to the pigment, the specific pigment derivative, the specific dispersant, and the solvent described above. ..
- the composition according to the present disclosure may contain a pigment derivative other than the specific pigment derivative described above and a dispersant other than the specific dispersant as long as the effect of the composition according to the present disclosure is not impaired. ..
- a specific dispersant and a dispersant other than the specific dispersant may be used in combination.
- the content of the specific dispersant is based on the total amount of the specific dispersant and the dispersant other than the specific dispersant. , 30% by mass or more and less than 100% by mass, more preferably 40% by mass or more and less than 100% by mass, and further preferably 50% by mass or more and less than 100% by mass.
- the composition according to the present disclosure includes, for example, a photoacid generator and an acid in addition to the pigment, the specific pigment derivative, the specific dispersant, and the solvent.
- examples thereof include a polymer having a structural unit having a group in which the group is protected by an acid-degradable group, and a polymer having a structural unit having a crosslinkable group.
- each component contained in the embodiment in which the composition according to the present disclosure is a positive type composition each component described in International Publication No. 2014/003111 can be mentioned, and the preferred embodiment is also the same.
- the composition according to the present disclosure is a so-called curable composition containing a polymerizable compound and a polymerization initiator in addition to a pigment, a specific pigment derivative, a specific dispersant, and a solvent. Is preferable. Since the above-mentioned curable composition contains the composition according to the present disclosure, it is possible to maintain a state in which the dispersion stability of the pigment is high even in the film formed from the curable composition. As a result, according to the above-mentioned curable composition, when a part of the formed film is developed and removed, a residue due to agglutination of the pigment is less likely to be generated, and the development residue is reduced.
- the composition according to the present disclosure is a negative type curable composition will be described in detail.
- the content of the pigment in the curable composition in the present disclosure is preferably 1% by mass to 80% by mass, and 5% by mass to 75% by mass, based on the total solid content of the curable composition. Is more preferable, and 10% by mass to 70% by mass is further preferable. When the content of the pigment is within the above range, the function of the pigment is sufficiently exhibited.
- the content of the specific pigment derivative in the curable composition in the present disclosure is preferably 0.1% by mass to 30% by mass, and 1% by mass to 20% by mass, based on the total solid content of the curable composition. It is more preferably%, and further preferably 3% by mass to 15% by mass. When the content of the specific pigment derivative is within the above range, the dispersion stability of the pigment is excellent.
- the content of the specific dispersant in the curable composition in the present disclosure is preferably 0.2% by mass to 30% by mass, and 1% by mass to 20% by mass, based on the total solid content of the curable composition. It is more preferably%, and further preferably 5% by mass to 15% by mass. When the content of the specific dispersant is within the above range, the dispersion stability of the pigment is excellent.
- the solid content of the curable composition in the present disclosure varies depending on the coating method and the like, but is preferably 1% by mass or more and less than 100% by mass, and more preferably 5% by mass to 50% by mass. More preferably, 10% by mass to 30% by mass. That is, in the curable composition in the present disclosure, a solvent may be used so that the solid content is within the above range.
- the curable composition in the present disclosure preferably contains a polymerizable compound.
- a polymerizable compound an ethylenically unsaturated compound is more preferable, and a compound having a terminal ethylenically unsaturated group is particularly preferable.
- known compounds can be used without particular limitation.
- Polymerizable compounds have chemical forms such as, for example, monomers, prepolymers, ie dimers, trimers, and oligomers, or mixtures thereof, and copolymers thereof, but by molecular weight or weight average. It means that the molecular weight (Mw) is less than 2,000.
- Examples of the polymerizable compound include unsaturated carboxylic acids (eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), esters thereof, and amides thereof, and preferred examples thereof. Esters of unsaturated carboxylic acid and aliphatic polyhydric alcohol compound, and amides of unsaturated carboxylic acid and aliphatic polyvalent amine compound are used. Examples of polymerizable compounds include addition reactions of unsaturated carboxylic acid esters or amides having nucleophilic substituents such as hydroxy groups, amino groups and mercapto groups with monofunctional or polyfunctional isocyanates or epoxys.
- unsaturated carboxylic acids eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- a dehydration condensation reaction product of an unsaturated carboxylic acid ester having a nucleophilic substituent such as a hydroxy group, an amino group, or a mercapto group, or an amide and a monofunctional or polyfunctional carboxylic acid is also preferable.
- polymerizable compounds include esters of unsaturated carboxylic acids having polyelectron substituents such as isocyanate groups and epoxy groups, or amides and monofunctional or polyfunctional alcohols, amines and thiols.
- the monomer of the ester of the aliphatic polyhydric alcohol compound and the unsaturated carboxylic acid include ethylene glycol diacrylate, triethylene glycol diacrylate, 1,3-butanediol diacrylate, and tetramethylene glycol as acrylic acid esters.
- the monomer of the ester of the aliphatic polyhydric alcohol compound and the unsaturated carboxylic acid include tetramethylene glycol dimethacrylate, triethylene glycol dimethacrylate, neopentyl glycol dimethacrylate, and trimethylolpropantri as the methacrylic acid ester.
- a urethane-based addition-polymerizable compound produced by using an addition reaction of an isocyanate group and a hydroxy group is also suitable, and specific examples thereof include, for example, Japanese Patent Publication No. 48-41708.
- CH 2 C (R) COOCH 2 CH (R') OH (I) (However, R and R'indicate H or CH 3 )
- urethane acrylates as described in JP-A No. 51-37193, Tokusho 2-32933, Tokuhei 2-16765, Tokukou Sho 58-49860, Tokukou Sho 56-17654, Tokukou Urethane compounds having an ethylene oxide-based skeleton described in Kosho 62-39417 and Tokusho 62-39418 are also suitable. Further, by using addition-polymerizable compounds having an amino structure or a sulfide structure in the molecule, which are described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238, A composition having a very high photosensitive speed can be obtained.
- examples of the polymerizable compound include the compounds described in paragraphs 0178 to 0190 of JP-A-2007-277514. Further, as the polymerizable compound, the epoxy compound described in JP-A-2015-187211 may be used.
- the polymerizable compound may be used alone or in combination of two or more.
- the content of the polymerizable compound in the curable composition in the present disclosure is preferably 1% by mass to 90% by mass, and 5% by mass to 80% by mass, based on the total solid content of the curable composition. Is more preferable, and 10% by mass to 70% by mass is further preferable. When the content of the polymerizable compound is within the above range, the curable composition is excellent in curability.
- the curable composition in the present disclosure preferably contains a polymerization initiator.
- a photopolymerization initiator is particularly preferable.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate the polymerization of the polymerizable compound, and can be appropriately selected from known photopolymerization initiators.
- a compound having photosensitivity to light rays in the ultraviolet region to the visible region is preferable.
- the photopolymerization initiator may be a compound that produces an active radical by causing some action with the photoexcited sensitizer.
- the photopolymerization initiator is particularly preferably a photoradical polymerization initiator.
- the photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, compounds having a triazine skeleton, compounds having an oxadiazole skeleton, etc.), acylphosphine compounds, hexaarylbiimidazole, oxime compounds, organic peroxides, and the like.
- halogenated hydrocarbon derivatives for example, compounds having a triazine skeleton, compounds having an oxadiazole skeleton, etc.
- acylphosphine compounds examples include hexaarylbiimidazole, oxime compounds, organic peroxides, and the like.
- oxime compounds examples include thio compounds, ketone compounds, aromatic onium salts, ⁇ -hydroxyketone compounds and ⁇ -aminoketone compounds.
- the photopolymerization initiator includes trihalomethyltriazine compound, benzyldimethylketal compound, ⁇ -hydroxyketone compound, ⁇ -aminoketone compound, acylphosphine compound, phosphine oxide compound, metallocene compound, oxime compound, and triarylimidazole.
- Dimer, onium compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds, cyclopentadiene-benzene-iron complexes, halomethyloxaziazole compounds and 3-aryl substituted coumarin compounds are preferred, oxime compounds, ⁇ -hydroxyketone compounds, ⁇ - A compound selected from an aminoketone compound and an acylphosphine compound is more preferable, and an oxime compound is further preferable.
- the descriptions in paragraphs 0065 to 0111 of JP-A-2014-130173 and paragraphs 0274 to 0306 of JP-A-2013-29760 can be referred to, and these contents are incorporated in the present disclosure.
- ⁇ -hydroxyketone compounds include DAROCUR 1173, IRGACURE 500, and IGM Resins B. manufactured by BASF. V. Examples include Omnirad 184 (formerly IRGACURE 184), Omnirad 2959 (formerly IRGACURE 2959), and Omnirad 127 (formerly IRGACURE-127). Examples of commercially available ⁇ -aminoketone compounds include IGM Resins B.I. V. Examples thereof include Omnirad 907 (former IRGACURE-907), Omnirad 369 (former IRGACURE 369), Omnirad 379 (former IRGACURE 379), and Omnirad 379 (former IRGACURE-379EG). Examples of commercially available acylphosphine compounds include IGM Resins B.I. V. Examples thereof include Omnirad 819 (formerly IRGACURE 819) manufactured by BASF and Omnirad TPO H (formerly IRGACURE TPO) manufactured by BASF.
- Examples of the oxime compound include the compounds described in JP-A-2001-233842, the compounds described in JP-A-2000-80068, and the compounds described in JP-A-2006-342166.
- 2-acetoxyimino-1-phenylpropane-1-one 2-benzoyloxyimino-1-phenylpropane-1-one, 3- (4-toluenesulfonyloxy) iminobutane-2-one, and 2-ethoxy Examples thereof include carbonyloxyimino-1-phenylpropane-1-one.
- IRGACURE OXE01, IRGACURE OXE02, IRGACURE OXE03, and IRGACURE OXE04 manufactured by BASF are also preferably used.
- oxime compounds include TRONLY TR-PBG-304, TRONLY TR-PBG-309, and TRONLY TR-PBG-manufactured by Changshu Powerful Electronic New Materials Co., Ltd. 305, ADEKA Arkuru's NCI-930 and ADEKA PUTMER N-1919 (corresponding to Photopolymerization Initiator 2 of JP2012-14052A) manufactured by ADEKA Corporation.
- 2009-221114 which contains a triazine skeleton and an oxime skeleton in the same molecule, and has a maximum absorption at 405 nm and has good sensitivity to a g-ray light source.
- the compound described in 1 and the like may be used.
- an oxime compound having a fluorene ring can also be used.
- Specific examples of the oxime compound having a fluorene ring include the compounds described in JP-A-2014-137466, the contents of which are incorporated in the present disclosure.
- an oxime compound having a benzofuran skeleton can also be used as the photopolymerization initiator.
- Specific examples of the oxime compound having a benzofuran skeleton include compounds OE-01 to OE-75 described in International Publication No. 2015/036910.
- an oxime compound having a skeleton in which at least one benzene ring of the carbazole ring is a naphthalene ring can also be used.
- Specific examples of this oxime compound include the compounds described in International Publication No. 2013/083505.
- an oxime compound having a fluorine atom can also be used as the photopolymerization initiator.
- Specific examples of the oxime compound having a fluorine atom are described in the compounds described in JP-A-2010-262028, compounds 24, 36-40 described in JP-A-2014-500852, and JP-A-2013-164471.
- an oxime compound having a nitro group can be used as the photopolymerization initiator.
- the oxime compound having a nitro group is also preferably a dimer.
- Specific examples of the oxime compound having a nitro group include the compounds described in paragraphs 0031 to 0047 of JP2013-114249A, paragraphs 0008 to 0012 and 0070 to 0079 of JP2014-137466, and Patent No. 4223071. Examples thereof include the compounds described in paragraphs 0007 to 0025 of the publication, ADEKA ARKULS NCI-831 (manufactured by ADEKA Corporation) and the like.
- the oxime compound is preferably a compound having a maximum absorption wavelength in the wavelength region of 350 nm to 500 nm, and more preferably a compound having a maximum absorption wavelength in the wavelength region of 360 nm to 480 nm.
- the oxime compound is preferably a compound having a large absorbance at wavelengths of 365 nm and 405 nm.
- the molar extinction coefficient of the oxime compound at a wavelength of 365 nm or 405 nm is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and 5,000 to 200, from the viewpoint of sensitivity. It is particularly preferably 000.
- the molar extinction coefficient of a compound can be measured using a known method. For example, it is preferable to measure at a concentration of 0.01 g / L using an ethyl acetate solvent with an ultraviolet-visible spectrophotometer (Cary-5 spectrophotometer manufactured by Varian).
- a bifunctional or trifunctional or higher functional photopolymerization initiator may be used as the photopolymerization initiator.
- Specific examples of such a photopolymerization initiator include paragraphs 0417 to 0412 of JP-A-2010-527339, JP-A-2011-524436, International Publication No. 2015/004565, and JP-A-2016-532675.
- Dimers of oxime compounds described in paragraphs 0039 to 0055 of WO 2017/033680, compounds (E) and compounds (G) described in JP2013-522445, WO 2016 Examples thereof include Cmpd1 to 7 described in No. 034963.
- the polymerization initiator may be used alone or in combination of two or more.
- the content of the polymerization initiator in the curable composition in the present disclosure is preferably 0.1% by mass to 50% by mass, more preferably 0% by mass, based on the total solid content of the curable composition. It is 5% by mass to 30% by mass, particularly preferably 1% by mass to 20% by mass. When the content of the polymerization initiator is in the above range, good sensitivity and pattern forming property can be obtained.
- the curable composition in the present disclosure may contain other components other than the components described above.
- other components include binder resins, polymerization inhibitors, solvents, sensitizers, co-sensitizers, and other additives.
- the curable composition in the present disclosure preferably contains a binder resin from the viewpoint of film forming property.
- the binder resin is a component that does not correspond to the above-mentioned specific dispersant.
- Specific examples of the binder resin include acrylic resin, en-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, polyimide resin, and polyamideimide.
- examples thereof include resins, polyolefin resins, cyclic olefin resins, polyester resins, styrene resins, siloxane resins, urethane resins, and epoxy resins. Above all, it is preferable to contain an acrylic resin.
- a norbornene resin can be preferably used from the viewpoint of improving heat resistance.
- Examples of commercially available norbornene resins include the ARTON series manufactured by JSR Corporation (for example, ARTON F4520).
- Examples of commercially available polyimide resins include Neoprim (registered trademark) series (for example, C3450) manufactured by Mitsubishi Gas Chemical Company, Inc.
- binder resin examples include the resin described in Examples of International Publication No. 2016/08864, the resin described in JP-A-2017-57265, and the resin described in JP-A-2017-32685.
- the resin described in Japanese Patent Application Laid-Open No. 2017-075248 and the resin described in JP-A-2017-66240 can also be used, and the contents thereof are incorporated in the present specification.
- a resin having a fluorene skeleton can also be preferably used.
- the description of US Patent Application Publication No. 2017/0102610 can be taken into consideration, which is incorporated herein by reference.
- the weight average molecular weight (Mw) of the binder resin is preferably 2,000 to 2,000,000.
- the upper limit is more preferably 1,000,000 or less, still more preferably 500,000 or less.
- the lower limit is more preferably 3,000 or more, and even more preferably 5,000 or more.
- one type of binder resin may be used alone, or two or more types may be used in combination.
- the content of the binder resin polymer is preferably 10% by mass to 80% by mass, preferably 15% by mass to 60% by mass, based on the total solid content of the curable composition. Is more preferable.
- the curable composition in the present disclosure preferably contains a polymerization inhibitor from the viewpoint of storage stability.
- the polymerization inhibitor is not particularly limited, and a known polymerization inhibitor can be used.
- examples of the polymerization inhibitor include hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4'-thiobis (3-methyl-6-t-butylphenol), and the like.
- the polymerization inhibitor may be used alone or in combination of two or more.
- the content of the polymerization inhibitor in the curable composition in the present disclosure is preferably 0.1 ppm to 1,000 ppm with respect to the total solid content of the curable composition from the viewpoint of storage stability, and is 1 ppm. It is more preferably about 500 ppm, and particularly preferably 1 ppm to 100 ppm.
- ppm ppm
- ppb ppb
- ppt ppt
- the curable composition in the present disclosure may contain a sensitizer for the purpose of improving the generation efficiency of polymerization initiator species such as radicals and cations of the polymerization initiator and lengthening the photosensitive wavelength.
- a sensitizer for the purpose of improving the generation efficiency of polymerization initiator species such as radicals and cations of the polymerization initiator and lengthening the photosensitive wavelength.
- the sensitizer those that sensitize the above-mentioned photopolymerization initiator by an electron transfer mechanism or an energy transfer mechanism are preferable.
- sensitizer examples include those belonging to the compounds listed below and having an absorption wavelength in the wavelength region of a wavelength of 300 nm to 450 nm.
- preferable sensitizers include those belonging to the following compounds and having an absorption wavelength in the wavelength range of 330 nm to 450 nm.
- polynuclear aromatics eg, phenanthrene, anthracene, pyrene, perylene, triphenylene, 9,10-dialkoxyanthracene
- xanthenes eg, fluoressein, eosin, erythrosin, rhodamine B, rosebenzene
- thioxanthones examples include those belonging to the compounds listed below and having an absorption wavelength in the wavelength region of a wavelength of 300 nm to 450 nm.
- preferable sensitizers include those belonging to the following compounds and having an absorption wavelength in the wavelength range of 330 nm to 450 nm.
- the sensitizer may be used alone or in combination of two or more.
- the content of the sensitizer is 0, based on the total solid content of the curable composition, from the viewpoint of light absorption efficiency to a deep part and initial decomposition efficiency. It is preferably 1% by mass to 20% by mass, more preferably 0.5% by mass to 15% by mass.
- the curable composition in the present disclosure may contain a cosensitizer.
- the co-sensitizer has an action of further improving the sensitivity of the sensitizing dye or the initiator to active radiation, or suppressing the polymerization inhibition of the polymerizable compound by oxygen.
- examples of the co-sensitizer include the compounds described in paragraphs 0233 to 0241 of JP-A-2007-277514.
- the cosensitizer may be used alone or in combination of two or more.
- the content of the co-sensitizer is the total solid content of the curable composition from the viewpoint of improving the curing rate by balancing the polymerization growth rate and the chain transfer.
- the range of 0.1% by mass to 30% by mass is preferable, the range of 0.5% by mass to 25% by mass is more preferable, and the range of 1% by mass to 20% by mass is further preferable.
- the curable composition in the present disclosure contains various additives such as a surfactant, a colorant other than a near-infrared absorbing pigment, an adhesion accelerator, an antioxidant, an ultraviolet absorber, and an anti-aggregation agent, if necessary. can do.
- Examples of other components include the compounds described in paragraphs 0238 to 0249 of JP-A-2007-277514.
- the curable composition in the present disclosure can be prepared by mixing each of the above-mentioned components. Further, it is preferable to filter with a filter for the purpose of removing foreign substances and reducing defects.
- the filter can be used without particular limitation as long as it has been conventionally used for filtration purposes and the like.
- fluororesins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon (eg, nylon-6, nylon-6,6), and polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultra-high).
- PTFE polytetrafluoroethylene
- nylon eg, nylon-6, nylon-6,6)
- polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultra-high).
- PP polypropylene
- polypropylene including high-density polypropylene
- nylon is preferable.
- the pore size of the filter is preferably 0.01 ⁇ m to 7.0 ⁇ m, more preferably 0.01 ⁇ m to 3.0 ⁇ m, and even more preferably 0.05 ⁇ m to 0.5 ⁇ m. Within this range, it is possible to reliably remove fine foreign substances that hinder the preparation of uniform and smooth compositions in the subsequent step.
- SBP type series (SBP008, etc.) and TPR type series (TPR002, TPR002, manufactured by Loki Techno Co., Ltd.) (TPR005, etc.), SHPX type series (SHPX003, etc.) filter cartridges can be used.
- filters different filters may be combined. At that time, the filtration with the first filter may be performed only once or twice or more. Further, first filters having different pore diameters within the above-mentioned range may be combined.
- the nominal value of the filter manufacturer can be referred to.
- a commercially available filter for example, it can be selected from various filters provided by Nippon Paul Co., Ltd. (DFA4201NIEY, etc.), Advantech Toyo Co., Ltd., Entegris Japan Co., Ltd., Kits Micro Filter Co., Ltd., and the like. ..
- the curable composition in the present disclosure can be liquid, for example, a film can be easily produced by applying the curable composition in the present disclosure to a substrate or the like and drying it.
- the viscosity of the curable composition in the present disclosure at 25 ° C. is preferably 1 mPa ⁇ s to 100 mPa ⁇ s from the viewpoint of coatability when a film is formed by coating.
- the lower limit is more preferably 2 mPa ⁇ s or more, and further preferably 3 mPa ⁇ s or more.
- the upper limit is more preferably 50 mPa ⁇ s or less, further preferably 30 mPa ⁇ s or less, and particularly preferably 15 mPa ⁇ s or less.
- the viscosity in the present disclosure shall be measured at 25 ° C. using a viscometer (trade name: VISCOMETER TV-22) manufactured by Toki Sangyo Co., Ltd.
- the use of the curable composition in the present disclosure is not particularly limited.
- it can be preferably used for forming an infrared cut filter or the like.
- it is preferably used as an infrared cut filter on the light receiving side of the solid-state image sensor (for example, for an infrared cut filter for a wafer level lens), an infrared cut filter on the back surface side of the solid-state image sensor (opposite the light receiving side), and the like.
- it can.
- it can be preferably used as an infrared cut filter on the light receiving side of the solid-state image sensor.
- an infrared transmission filter capable of transmitting infrared rays having a specific wavelength or higher can be formed.
- an infrared transmission filter that shields light from a wavelength of 400 nm to 850 nm and can transmit a part of infrared rays having a wavelength of 850 nm or more.
- the curable composition in the present disclosure is preferably stored in a storage container.
- a storage container a multi-layer bottle in which the inner wall of the container is composed of 6 types of 6-layer resin or a bottle in which 6 types of resin is composed of 7 layers may be used for the purpose of preventing impurities from being mixed into the raw materials and compositions. preferable. Examples of these containers include the containers described in JP-A-2015-123351.
- the film according to the present disclosure comprises the curable composition according to the present disclosure (a composition further containing a polymerizable compound and a polymerization initiator in addition to a pigment, a specific pigment derivative, a specific dispersant, and a solvent) or is cured according to the present disclosure.
- the curable composition in the present disclosure contains a solvent, it is preferable to dry the composition.
- the film according to the present disclosure can be preferably used as an infrared cut filter. It can also be used as a heat ray shielding filter and an infrared ray transmitting filter.
- the film according to the present disclosure may be used by being laminated on a support, or may be used by peeling from the support.
- the film according to the present disclosure may have a pattern or may be a film having no pattern (flat film).
- drying at least a part of the solvent may be removed, and it is not necessary to completely remove the solvent, and the amount of the solvent removed can be set as desired. Further, the above-mentioned curing may be performed as long as the hardness of the film is improved, but curing by polymerization is preferable.
- the thickness of the film according to the present disclosure can be appropriately adjusted according to the purpose.
- the thickness of the film is preferably 20 ⁇ m or less, more preferably 10 ⁇ m or less, and even more preferably 5 ⁇ m or less.
- the lower limit of the film thickness is preferably 0.1 ⁇ m or more, more preferably 0.2 ⁇ m or more, and even more preferably 0.3 ⁇ m or more.
- the film according to the present disclosure preferably has a maximum absorption wavelength in the wavelength range of 650 nm to 1,500 nm, more preferably has a maximum absorption wavelength in the wavelength range of 680 nm to 1,300 nm, and has a wavelength range of 700 nm to 850 nm. It is more preferable to have a maximum absorption wavelength.
- the film according to the present disclosure preferably satisfies at least one of the following (1) to (4), and the above (1) to (4). It is more preferable that all the conditions are satisfied.
- the transmittance at a wavelength of 400 nm is preferably 70% or more, more preferably 80% or more, further preferably 85% or more, and particularly preferably 90% or more.
- the transmittance at a wavelength of 500 nm is preferably 70% or more, more preferably 80% or more, further preferably 90% or more, and particularly preferably 95% or more.
- the transmittance at a wavelength of 600 nm is preferably 70% or more, more preferably 80% or more, further preferably 90% or more, and particularly preferably 95% or more.
- the transmittance at a wavelength of 650 nm is preferably 70% or more, more preferably 80% or more, further preferably 90% or more, and particularly preferably 95% or more.
- the maximum value of the transmittance at a wavelength of 450 to 800 nm is 20% or less, and the minimum value of the transmittance at a wavelength of 900 to 1200 nm is 70% or more.
- the maximum value of the transmittance at a wavelength of 450 to 850 nm is 20% or less, and the minimum value of the transmittance at a wavelength of 950 to 1200 nm is 70% or more.
- the maximum value of the transmittance at a wavelength of 450 to 950 nm is 20% or less, and the minimum value of the transmittance at a wavelength of 1050 to 1200 nm is 70% or more.
- the maximum value of the transmittance at a wavelength of 450 to 1050 nm is 20% or less, and the minimum value of the transmittance at a wavelength of 1150 to 1200 nm is 70% or more.
- the film according to the present disclosure can also be used in combination with a color filter containing a chromatic colorant.
- the color filter can be produced by using a coloring composition containing a chromatic colorant.
- the chromatic colorant include conventionally known chromatic colorants.
- the coloring composition may further contain a resin, a polymerizable compound, a polymerization initiator, a surfactant, a solvent, a polymerization inhibitor, an ultraviolet absorber and the like.
- the above-mentioned components may be appropriately used.
- the color filter is arranged on the optical path of the film according to the present disclosure.
- the film and the color filter according to the present disclosure can be laminated and used as a laminated body.
- the film and the color filter according to the present disclosure may or may not be adjacent to each other in the thickness direction.
- the film according to the present disclosure may be formed on a support different from the support on which the color filter is formed.
- Other members for example, a microlens, a flattening layer, etc. constituting the solid-state image sensor may be interposed between the film and the color filter according to the disclosure.
- the infrared cut filter means a filter that transmits light having a wavelength in the visible region (visible light) and blocks at least a part of light having a wavelength in the near infrared region (infrared light).
- the infrared cut filter may transmit all the light having a wavelength in the visible region, and among the light having a wavelength in the visible region, the light having a specific wavelength region is passed through and the light having a specific wavelength region is blocked. It may be a thing.
- the color filter means a filter that passes light in a specific wavelength region and blocks light in a specific wavelength region among light having a wavelength in the visible region.
- the infrared transmission filter means a filter that blocks visible light and transmits at least a part of infrared rays.
- the film according to the present disclosure can be used for solid-state imaging devices such as CCD (charge-coupled device) and CMOS (complementary metal oxide semiconductor), and various devices such as infrared sensors and image display devices.
- CCD charge-coupled device
- CMOS complementary metal oxide semiconductor
- ⁇ Membrane manufacturing method> Next, a method for producing a film according to the present disclosure will be described.
- the film according to the present disclosure can be produced through a step of applying the composition according to the present disclosure.
- the composition is applied on a support.
- the support include a substrate made of a material such as silicon, non-alkali glass, soda glass, Pyrex (registered trademark) glass, and quartz glass.
- An organic film, an inorganic film, or the like may be formed on these substrates.
- the material of the organic film include the above-mentioned resin.
- a substrate made of the above-mentioned resin can also be used.
- the support may be formed with a charge-coupled device (CCD), a complementary metal oxide film semiconductor (CMOS), a transparent conductive film, or the like.
- CCD charge-coupled device
- CMOS complementary metal oxide film semiconductor
- the support may be formed with a black matrix that isolates each pixel. Further, if necessary, the support may be provided with an undercoat layer for improving the adhesion with the upper layer, preventing the diffusion of substances, or flattening the surface of the support such as a substrate.
- a glass substrate is used as the support, it is preferable to form an inorganic film on the glass substrate or to dealkalinate the glass substrate before use. According to this aspect, it is easy to manufacture a film in which the generation of foreign substances is further suppressed.
- a known method can be used as a method for applying the composition.
- a dropping method drop casting
- a slit coating method for example, a spray method; a roll coating method; a rotary coating method (spin coating); a casting coating method; a slit and spin method; a pre-wet method (for example, JP-A-2009-145395).
- Methods described in the publication Inkjet (for example, on-demand method, piezo method, thermal method), ejection system printing such as nozzle jet, flexographic printing, screen printing, gravure printing, reverse offset printing, metal mask printing, etc.
- Various printing methods; transfer method using a mold or the like; nanoimprint method and the like can be mentioned.
- the application method for inkjet is not particularly limited, and for example, the method shown in "Expandable / Usable Inkjet-Infinite Possibilities Seen in Patents-, Issued in February 2005, Sumi Betechno Research" (especially from page 115). (Page 133), and the methods described in JP-A-2003-262716, JP-A-2003-185831, JP-A-2003-261827, JP-A-2012-126830, JP-A-2006-169325, and the like. Can be mentioned.
- the composition layer formed by applying the composition may be dried (prebaked). Prebaking may not be required if the pattern is formed by a low temperature process.
- the prebaking temperature is preferably 150 ° C. or lower, more preferably 120 ° C. or lower, and even more preferably 110 ° C. or lower.
- the lower limit is, for example, preferably 50 ° C. or higher, and more preferably 80 ° C. or higher.
- the prebaking time is preferably 10 seconds to 3,000 seconds, more preferably 40 seconds to 2,500 seconds, and even more preferably 80 seconds to 220 seconds. Drying can be performed on a hot plate, an oven, or the like.
- the film manufacturing method according to the present disclosure may further include a step of forming a pattern.
- the pattern forming method include a pattern forming method using a photolithography method and a pattern forming method using a dry etching method.
- the film according to the present disclosure is used as a flat film, it is not necessary to perform the step of forming the pattern.
- the process of forming the pattern will be described in detail.
- the pattern forming method in the photolithography method includes a step of exposing the composition layer formed by applying the composition according to the present disclosure in a pattern (exposure step) and developing and removing the composition layer of the unexposed portion. It is preferable to include a step of forming a pattern (development step). If necessary, a step of baking the developed pattern (post-baking step) may be provided. Hereinafter, each step will be described.
- the composition layer is exposed in a pattern.
- the composition layer can be pattern-exposed by exposing the composition layer through a mask having a predetermined mask pattern using an exposure device such as a stepper.
- the exposed portion can be cured.
- the radiation (light) that can be used for exposure ultraviolet rays such as g-ray and i-line are preferable, and i-ray is more preferable.
- Irradiation dose (exposure dose) for example, preferably 0.03J / cm 2 ⁇ 2.5J / cm 2, more preferably 0.05J / cm 2 ⁇ 1.0J / cm 2, 0.08J / cm 2 ⁇ 0.5 J / cm 2 is particularly preferable.
- the oxygen concentration at the time of exposure can be appropriately selected, and in addition to the operation in the atmosphere, for example, in a low oxygen atmosphere having an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, substantially anoxic). ), Or in a high oxygen atmosphere where the oxygen concentration exceeds 21% by volume (for example, 22% by volume, 30% by volume, 50% by volume).
- the exposure intensity is can be set appropriately, preferably 1,000W / m 2 ⁇ 100,000W / m 2 ( e.g., 5,000W / m 2, 15,000W / m 2, 35,000W / It can be selected from the range of m 2).
- Oxygen concentration and exposure illuminance may appropriately combined conditions, for example, illuminance 10,000 W / m 2 at an oxygen concentration of 10 vol%, oxygen concentration of 35 vol% can be such illuminance 20,000W / m 2.
- the composition layer in the unexposed portion of the composition layer after exposure is developed and removed to form a pattern.
- the development and removal of the composition layer in the unexposed portion can be performed using a developing solution.
- the composition layer of the unexposed portion in the exposure step is eluted in the developing solution, and only the photocured portion remains on the support.
- the developing solution an alkaline developing solution that does not damage the underlying solid-state image sensor or circuit is desirable.
- the temperature of the developing solution is preferably, for example, 20 ° C to 30 ° C.
- the development time is preferably 20 seconds to 180 seconds. Further, in order to improve the residue removability, the steps of shaking off the developing solution every 60 seconds and further supplying a new developing solution may be repeated several times.
- alkaline agent used in the developing solution examples include aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxyamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, and tetrapropylammonium hydroxide.
- Organic alkalinity such as tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis (2-hydroxyethyl) ammonium hydroxide, choline, pyrrol, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene.
- Examples thereof include compounds and inorganic alkaline compounds such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium silicate and sodium metasilicate.
- an alkaline aqueous solution obtained by diluting these alkaline agents with pure water is preferably used.
- the concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001% by mass to 10% by mass, more preferably 0.01% by mass to 1% by mass.
- the surfactant include conventionally known surfactants used in a developing solution, and nonionic surfactants are preferable.
- the developer may be once produced as a concentrated solution and diluted to a concentration required for use.
- the dilution ratio is not particularly limited, but can be set in the range of, for example, 1.5 by 100 times.
- a developer composed of such an alkaline aqueous solution it is preferable to wash (rinse) it with pure water after development.
- post-baking is a post-development heat treatment to complete the curing of the film.
- the post-baking temperature is preferably, for example, 100 ° C. to 240 ° C. From the viewpoint of film curing, 200 ° C. to 230 ° C. is more preferable.
- the post-bake temperature is preferably 150 ° C. or lower, more preferably 120 ° C. or lower. Preferably, 100 ° C. or lower is more preferable, and 90 ° C.
- Post-baking should be performed on the developed film in a continuous or batch manner using a heating means such as a hot plate, a convection oven (hot air circulation dryer), or a high-frequency heater so that the above conditions are met. Can be done. Further, when the pattern is formed by the low temperature process, post-baking may not be performed, and a step of re-exposure (post-exposure step) may be added.
- a heating means such as a hot plate, a convection oven (hot air circulation dryer), or a high-frequency heater so that the above conditions are met. Can be done. Further, when the pattern is formed by the low temperature process, post-baking may not be performed, and a step of re-exposure (post-exposure step) may be added.
- the composition layer formed by applying the composition on a support or the like is cured to form a cured product layer, and then a photoresist layer patterned on the cured product layer is formed. Then, using the patterned photoresist layer as a mask, the cured product layer can be dry-etched with an etching gas.
- the description in paragraphs 0010 to 0067 of JP2013-64993A can be referred to, and this content is incorporated in the present specification.
- the optical filter according to the present disclosure has a film according to the present disclosure.
- the optical filter according to the present disclosure can be preferably used as an infrared cut filter or an infrared transmission filter, and can be more preferably used as an infrared cut filter.
- a mode having a film according to the present disclosure and a pixel selected from the group consisting of red, green, blue, magenta, yellow, cyan, black and colorless is also a preferable mode of the optical filter according to the present disclosure.
- the infrared cut filter according to the present disclosure has a film according to the present disclosure.
- the infrared cut filter according to the present disclosure may be a filter that cuts only infrared rays having a wavelength of a part of the infrared region, or a filter that cuts the entire infrared region.
- Examples of the filter that cuts only infrared rays having a wavelength of a part of the infrared region include a near-infrared ray cut filter.
- Examples of near-infrared rays include infrared rays having a wavelength of 750 nm to 2,500 nm.
- the infrared cut filter according to the present disclosure is preferably a filter that cuts infrared rays in the wavelength range of 750 nm to 1,000 nm, and more preferably a filter that cuts infrared rays in the wavelength range of 750 nm to 1,200 nm. It is preferable that the filter cuts infrared rays having a wavelength of 750 nm to 1,500 nm.
- the infrared cut filter according to the present disclosure may further have a copper-containing layer, a dielectric multilayer film, an ultraviolet absorbing layer, and the like.
- the infrared cut filter according to the present disclosure further has at least a copper-containing layer or a dielectric multilayer film, it is easy to obtain an infrared cut filter having a wide viewing angle and excellent infrared shielding property. Further, the infrared cut filter according to the present disclosure can be made into an infrared cut filter having excellent ultraviolet shielding property by further having an ultraviolet absorbing layer.
- the ultraviolet absorbing layer for example, the absorbing layers described in paragraphs 0040 to 0070 and 0119 to 0145 of International Publication No. 2015/09960 can be referred to, and the contents thereof are incorporated in the present specification.
- the description in paragraphs 0255 to 0259 of JP2014-413318A can be referred to, and the contents thereof are incorporated in the present specification.
- a glass base material made of copper-containing glass (copper-containing glass base material) or a layer containing a copper complex (copper complex-containing layer) can also be used.
- the copper-containing glass base material include copper-containing phosphate glass and copper-containing fluoride glass.
- commercially available copper-containing glass include NF-50 (manufactured by AGC Techno Glass Co., Ltd.), BG-60, BG-61 (all manufactured by Schott AG), CD5000 (manufactured by HOYA Corporation), and the like.
- the infrared cut filter according to the present disclosure can be used in various devices such as a solid-state image sensor such as a CCD (charge-coupled device) and CMOS (complementary metal oxide semiconductor), an infrared sensor, and an image display device.
- a solid-state image sensor such as a CCD (charge-coupled device) and CMOS (complementary metal oxide semiconductor)
- CMOS complementary metal oxide semiconductor
- the infrared cut filter according to the present disclosure is at least selected from the group consisting of film pixels (patterns) obtained by using the composition according to the present disclosure, red, green, blue, magenta, yellow, cyan, black and colorless.
- a mode having one type of pixel (pattern) is also a preferred mode.
- the method for producing the optical filter according to the present disclosure is not particularly limited, but a step of applying the composition according to the present disclosure on a support to form a composition layer and exposing the composition layer in a pattern. It is preferable that the method includes a step of forming a pattern by developing and removing an unexposed portion. Further, as a method for producing an optical filter according to the present disclosure, a step of applying the composition according to the present disclosure on a support to form a composition layer and curing to form a layer, a photoresist on the layer.
- the method includes a step of forming a layer, a step of patterning the photoresist layer by exposure and development to obtain a resist pattern, and a step of dry etching the layer using the resist pattern as an etching mask. ..
- a step in the method for manufacturing an optical filter according to the present disclosure each step in the method for manufacturing a film according to the present disclosure can be referred to.
- the solid-state image sensor according to the present disclosure has a film according to the present disclosure.
- the configuration of the solid-state image sensor is not particularly limited as long as it has a film according to the present disclosure and functions as a solid-state image sensor. For example, the following configuration can be mentioned.
- the photodiodes On the support, there are a plurality of photodiodes forming the light receiving area of the solid-state image sensor and a transfer electrode formed of polysilicon or the like, and the photodiode and the transfer electrode are made of tungsten or the like in which only the light receiving portion of the photodiode is opened. It has a light-shielding film to be formed, and has a device protective film formed of silicon nitride or the like formed so as to cover the entire surface of the light-shielding film and the photodiode light-receiving part on the light-shielding film. It is a configuration having a membrane according to the above.
- a structure having a light collecting means for example, a microlens or the like; the same applies hereinafter
- the color filter used in the solid-state image sensor may have a structure in which a film forming each pixel is embedded in a space partitioned by a partition wall, for example, in a grid pattern.
- the partition wall in this case preferably has a lower refractive index than each pixel. Examples of the image pickup apparatus having such a structure include the apparatus described in JP-A-2012-227478 and JP-A-2014-179757.
- the image display device has a film according to the present disclosure.
- the image display device include a liquid crystal display device and an organic electroluminescence (organic EL) display device.
- organic EL organic electroluminescence
- the liquid crystal display device is described in, for example, “Next Generation Liquid Crystal Display Technology (edited by Tatsuo Uchida, published by Kogyo Chosakai Co., Ltd. in 1994)”.
- the liquid crystal display device applicable to the present disclosure is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the above-mentioned "next-generation liquid crystal display technology".
- the image display device may have a white organic EL element.
- the white organic EL element preferably has a tandem structure.
- Japanese Patent Application Laid-Open No. 2003-45676 supervised by Akiyoshi Mikami, "Forefront of Organic EL Technology Development-High Brightness, High Precision, Long Life, Know-how Collection-", Technical Information Association, It is described on pages 326 to 328, 2008 and the like.
- the spectrum of white light emitted by the organic EL element preferably has a strong maximum emission peak in the blue region (430 nm to 485 nm), the green region (530 nm to 580 nm), and the yellow region (580 nm to 620 nm). In addition to these emission peaks, those having a maximum emission peak in the red region (650 nm to 700 nm) are more preferable.
- the infrared sensor according to the present disclosure has a film according to the present disclosure.
- the configuration of the infrared sensor is not particularly limited as long as it functions as an infrared sensor.
- an embodiment of the infrared sensor according to the present disclosure will be described with reference to the drawings.
- reference numeral 110 is a solid-state image sensor.
- the image pickup region provided on the solid-state image pickup device 110 includes an infrared cut filter 111 and an infrared transmission filter 114. Further, a color filter 112 is laminated on the infrared cut filter 111.
- a microlens 115 is arranged on the incident light h ⁇ side of the color filter 112 and the infrared transmission filter 114.
- a flattening layer 116 is formed so as to cover the microlens 115.
- the infrared cut filter 111 can be formed by using the composition according to the present disclosure.
- the spectral characteristics of the infrared cut filter 111 are selected according to the emission wavelength of the infrared light emitting diode (infrared LED) used.
- the color filter 112 is a color filter on which pixels that transmit and absorb light of a specific wavelength in the visible region are formed, and is not particularly limited, and a conventionally known color filter for pixel formation can be used.
- a color filter in which red (R), green (G), and blue (B) pixels are formed is used.
- R red
- G green
- B blue
- the description in paragraphs 0214 to 0263 of JP2014-43556A can be referred to, and this content is incorporated in the present specification.
- the characteristics of the infrared transmission filter 114 are selected according to the emission wavelength of the infrared LED used.
- the infrared transmittance filter 114 preferably has a maximum value of the light transmittance in the film thickness direction in the wavelength range of 400 nm to 650 nm of 30% or less. It is more preferably% or less, further preferably 10% or less, and particularly preferably 0.1% or less. It is preferable that the transmittance satisfies the above conditions in the entire range of the wavelength range of 400 nm to 650 nm.
- the infrared transmittance filter 114 preferably has a minimum value of the light transmittance in the film thickness direction in the wavelength range of 800 nm or more (preferably 800 nm to 1,300 nm) of 70% or more, preferably 80% or more. More preferably, it is more preferably 90% or more.
- the above-mentioned transmittance preferably satisfies the above condition in a part of the wavelength range of 800 nm or more, and more preferably the above-mentioned condition at a wavelength corresponding to the emission wavelength of the infrared LED.
- the film thickness of the infrared transmission filter 114 is preferably 100 ⁇ m or less, more preferably 15 ⁇ m or less, further preferably 5 ⁇ m or less, and particularly preferably 1 ⁇ m or less.
- the lower limit is preferably 0.1 ⁇ m.
- the film thickness is measured by using a stylus type surface shape measuring device (DEKTAK150 manufactured by ULVAC) on the dried substrate having the film.
- the spectral characteristics of the film are values obtained by measuring the transmittance in the wavelength range of 300 nm to 1,300 nm using an ultraviolet-visible near-infrared spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Corporation).
- the infrared transmittance filter 114 has a maximum value of the light transmittance in the film thickness direction in the wavelength range of 450 nm to 650 nm of 20% or less, and the film.
- the transmittance of light having a wavelength of 835 nm in the thickness direction of the film is 20% or less, and the minimum value of the transmittance of light in the thickness direction of the film in the wavelength range of 1,000 nm to 1,300 nm is 70% or more. Is preferable.
- an infrared cut filter (another infrared cut filter) different from the infrared cut filter 111 may be further arranged on the flattening layer 116.
- examples of other infrared cut filters include those having a copper-containing layer or at least a dielectric multilayer film. These details include those described above.
- a dual bandpass filter may be used as another infrared cut filter.
- the absorption wavelengths of the infrared transmission filter and the infrared cut filter used in the present disclosure are appropriately combined and used according to the light source used and the like.
- the sensor module according to the present disclosure includes a photoelectric conversion element and an optical filter according to the present disclosure.
- the sensor module according to the present disclosure includes a photoelectric conversion element and an optical filter according to the present disclosure, and is not particularly limited as long as it has a configuration that functions as a sensor module.
- the sensor module according to the present disclosure preferably further includes a lens, a circuit for processing information obtained from the photoelectric conversion element, and the like, in addition to the photoelectric conversion element and the optical filter.
- Applications of the sensor module according to the present disclosure include biometric authentication, surveillance, mobile, automobile, agriculture, medical care, distance measurement, gesture recognition, augmented reality, virtual reality and the like.
- the sensor module according to the present disclosure may be a camera module having a solid-state image sensor and an optical filter according to the present disclosure. Further, it is preferable that the camera module further includes a lens and a circuit for processing an image pickup obtained from the solid-state image sensor, in addition to the solid-state image sensor and the optical filter.
- the solid-state image sensor used in the camera module in the present disclosure may be the solid-state image sensor according to the present disclosure or a known solid-state image sensor. Further, as the lens used in the camera module in the present disclosure and the circuit for processing the image pickup obtained from the solid-state image sensor, known ones can be used.
- the camera modules described in JP-A-2016-6476 or JP-A-2014-197190 can be referred to, and the contents thereof are incorporated in the present specification.
- the curable composition in the present disclosure can also be used for paints, inkjet inks, security inks and the like. Further, the curable composition in the present disclosure can also be used as a heat shield material, a heat storage material, or a photothermal conversion material.
- the molecular weight is the weight average molecular weight (Mw), and the ratio of the constituent units is the molar percentage, except for those specified specifically.
- Mw weight average molecular weight
- the weight average molecular weight (Mw) is a value measured as a polystyrene-equivalent value by a gel permeation chromatography (GPC) method.
- the raw materials listed in Tables 2 to 8 below, including the obtained pigment dispersion, are mixed in the amounts (parts by mass) shown in Tables 2 to 8 below to form a nylon filter with a pore size of 0.45 ⁇ m (Nippon Pole).
- a curable composition was prepared by filtering using (manufactured by Co., Ltd.).
- the raw materials shown in Table 10 below, including the obtained pigment dispersion, are mixed in the amounts (parts by mass) shown in Table 10 below to form a nylon filter with a pore size of 0.45 ⁇ m (manufactured by Nippon Pole Co., Ltd.). Filtered using to prepare a curable composition.
- the pigments P-2, P-10, P-11, P-12, and P-16 were synthesized according to the synthesis method described in International Publication No. 2017/146902.
- the above pigments P-13, P-14, and P-15 were synthesized according to the following synthesis method.
- Pigment P-14 was synthesized according to the following scheme.
- the precipitated crystals were separated by filtration and washed with 251 parts by mass of methanol. 1021 parts by mass of methanol was added to the obtained crystals, and the mixture was heated under reflux for 30 minutes, allowed to cool until the temperature reached 30 ° C., and the crystals were filtered twice. The obtained crystals were air-dried at 50 ° C. for 12 hours to obtain 101 parts by mass of compound P-14-b.
- the mixture was stirred for 30 minutes, the precipitated crystals were filtered off, and washed with 55 parts by mass of methanol. 112 parts by mass of methanol was added to the obtained crystals, the mixture was heated under reflux for 30 minutes, allowed to cool until the temperature reached 30 ° C., and the crystals were separated by filtration twice. The obtained crystals were air-dried at 50 ° C. for 12 hours to obtain 20.9 parts by mass of pigment P-14.
- the ⁇ max of the pigment P-14 was 780 nm in chloroform, the molar extinction coefficient was 238994 L / (mol ⁇ cm), and the gram extinction coefficient was 212 L / (g ⁇ cm).
- the high performance liquid chromatography (HPLC) purity of Pigment P-14 was 97.2%.
- the solubility of the pigment P-14 in propylene glycol monomethyl ether acetate (PGMEA) was 0.75 mg / L.
- the 5% weight loss temperature of the pigment P-14 was 385 ° C.
- the crystal transition temperature of the pigment P-14 was 400 ° C. or higher.
- the peak position of the powder X-ray diffraction spectrum of the pigment P-14 has a diffraction angle of 2 ⁇ of 8.0 °, 9.1 °, 9.5 °, 10.7 °, 11.1 °, 12.6 °. 13.5 °, 13.9 °, 14.3 °, 16.1 °, 16.9 °, 17.5 °, 18.2 °, 19.0 °, 19.5 °, 19.9 °, 20.5 °, 20.8 °, 21.7 °, 22.3 °, 22.8 °, 23.4 °, 23.9 °, 24.5 °, 25.1 °, 25.4 °,
- the full width at half maximum of the peak of 8.0 °, which has the maximum peak intensity of 25.7 °, 26.4 °, 27.5 °, 27.9 °, 28.4 °, and 29.2 °, is 0. It was 18 °.
- y is the intensity
- A is the peak height
- x is 2 ⁇
- x0 is the peak position
- w is the peak width (half width)
- h is the baseline.
- Pigments P-13 and P-15 were synthesized in the same manner as in the synthesis of pigment P-14. Since the molecular weights of the synthesized pigments P-13 and P-15 by matrix-assisted laser desorption / ionization mass spectrometry (MALDI-MS) were the same as the theoretical values, they were identified as the target compounds.
- MALDI-MS matrix-assisted laser desorption / ionization mass spectrometry
- the ⁇ max of the pigment P-13 was 780 nm in chloroform.
- the solubility of pigment P-13 in PGMEA was 0.17 mg / L.
- the 5% weight loss temperature of the pigment P-13 was 396 ° C.
- the crystal transition temperature of the pigment P-13 was 400 ° C. or higher.
- the peak positions of the powder X-ray diffraction spectrum of the pigment P-13 have diffraction angles 2 ⁇ of 8.1 °, 9.2 °, 10.2 °, 10.7 °, 12.5 °, 12.7 °, and 13.
- the ⁇ max of the pigment P-15 was 780 nm in chloroform.
- the solubility of pigment P-15 in PGMEA was 0.75 mg / L.
- the 5% weight loss temperature of the pigment P-15 was 400 ° C. or higher.
- the crystal transition temperature of the pigment P-15 was 265 ° C.
- the peak positions of the powder X-ray diffraction spectrum of the pigment P-15 have diffraction angles 2 ⁇ of 5.3 °, 7.5 °, 9.1 °, 10.8 °, 11.2 °, 12.5 °, 12 .7 °, 13.8 °, 15.0 °, 15.3 °, 16.0 °, 16.3 °, 16.7 °, 18.0 °, 18.5 °, 19.2 °, 19 .4 °, 20.5 °, 20.7 °, 21.0 °, 21.5 °, 22.1 °, 22.5 °, 22.9 °, 23.4 °, 24.1 °, 24 6.6 °, 25.0 °, 25.3 °, 25.9 °, 27.1 °, 27.5 °, 27.9 °, 28.6 °, 29.6 °, with maximum peak intensity
- the full width at half maximum of the peak of 7.5 ° was 0.27 °. All of these physical characteristics were measured using the same method as the pigment P
- the pigment derivative Syn-6 described above was synthesized according to the synthesis method described in International Publication No. 2018/230387.
- the above pigment derivative Syn-13 was synthesized according to the following synthesis method.
- a mixed solution of 95 parts by mass of acetonitrile and 480 parts by mass of ion-exchanged water was added to the obtained crystals, and the mixture was stirred at room temperature for 1 hour.
- the crystals were separated by filtration and washed in the order of 95 parts by mass of acetonitrile, 480 parts by mass of ion-exchanged water, and 474 parts by mass of acetonitrile.
- the obtained crystals were air-dried at 80 ° C. for 12 hours to obtain 15.7 parts by mass of compound Syn-13-b.
- the total amount of the obtained compound Syn-13-b was stirred in 403 parts by mass of acetic acid, and 42 parts by mass of a 25% by mass hydrogen bromide / acetic acid solution was added at room temperature. After stirring at an internal temperature of 55 to 60 ° C. for 3 hours, the mixture was allowed to cool to an internal temperature of 25 ° C. The precipitated crystals were separated by filtration and washed with 279 parts by mass of acetonitrile. The total amount of the obtained crystals was stirred in 236 parts by mass of tetrahydrofuran at room temperature for 1 hour, and then 398 parts by mass of ion-exchanged water was added dropwise while maintaining an internal temperature of 20 to 30 ° C.
- the total amount of the obtained crystals was stirred in a mixed solution of 73 parts by mass of methanol and 178 parts by mass of distilled water at room temperature for 30 minutes.
- the crystals were separated by filtration and washed with 132 parts by mass of distilled water.
- the obtained crystals were air-dried at 50 ° C. for 10 hours to obtain 13.6 parts by mass of compound Syn-13-d.
- the total amount of the obtained compound Syn-13-d was stirred in 94 parts by mass of tetrahydrofuran and cooled to an internal temperature of 3 ° C. After dropping 65 parts by mass of trifluoroacetic acid over 30 minutes while maintaining the internal temperature of 5 ° C. or lower, the mixture was stirred at an internal temperature of 0 to 10 ° C. for 30 minutes. While maintaining the internal temperature of 5 ° C. or lower, 69 parts by mass of acetic acid was added, and the mixture was stirred at an internal temperature of 0 to 10 ° C. for 30 minutes. While maintaining the internal temperature of 5 ° C.
- the precipitated crystals were separated by filtration and washed in the order of a mixed solution of 69 parts by mass of acetic acid and 48 parts by mass of diisopropyl ether, and 96 parts by mass of diisopropyl ether.
- the total amount of the obtained crystals was stirred in a mixture of 59 parts by mass of tetrahydrofuran and 239 parts by mass of diisopropyl ether at room temperature for 30 minutes, the crystals were filtered off, and the crystals were washed with 96 parts by mass of diisopropyl ether.
- the obtained crystals were air-dried at 80 ° C. for 15 hours to obtain 10.9 parts by mass of the pigment derivative Syn-13.
- the ⁇ max of the pigment derivative Syn-13 was 783 nm in dimethyl sulfoxide, the molar extinction coefficient was 193319 L / (mol ⁇ cm), and the gram extinction coefficient was 136 L / (g ⁇ cm).
- the high performance liquid chromatography (HPLC) purity of the pigment derivative Syn-13 was 91.5%.
- the solubility of the pigment derivative Syn-13 in propylene glycol monomethyl ether acetate (PGMEA) was 323 mg / L.
- the 5% weight loss temperature of the pigment derivative Syn-13 was 252 ° C. All of these physical properties were measured using the same method as the pigment P-14, except for the measurement of HPLC purity shown below.
- -Dispersant- Dispersants D-1 to D-7 Compounds having the following structure (the numerical value added to each structural unit of the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units).
- Resin B-5 EPICLON N-695 (cresol novolac type epoxy resin, weight average molecular weight: 3,600), DIC Corporation resin
- B-6 EHPE3150 (epoxy resin, 2,2-bis (hydroxymethyl)- 1,2-Epoxy-4- (2-oxylanyl) cyclohexane adduct of 1-butanol, weight average molecular weight: 2,300), manufactured by Dicell Corporation
- NK ester A-TMPT trimethylolpropane triacrylate, manufactured by Shin Nakamura Chemical Industry Co., Ltd.
- M-2 Aronix (registered trademark) M-350 (trimethylolpropane EO-modified (n ⁇ 1) triacrylate, manufactured by Toagosei Co., Ltd.)
- M-3 NK ester A-TMMT (pentaerythritol tetraacrylate, manufactured by Shin Nakamura Chemical Industry Co., Ltd.)
- M-4 Aronix (registered trademark) M-403 (dipentaerythritol penta and hexaacrylate, manufactured by Toagosei Co., Ltd.)
- M-5 Aronix (registered trademark) M-510 (polybasic acid-modified acrylic oligomer, manufactured by Toagosei Co., Ltd.)
- -Additive- A-1 (ultraviolet absorber): 4,4'-Biz (diethylamino) benzophenone, manufactured by Sigma-Aldrich A-2 (anticolorant, antioxidant): Irganox 1010, manufactured by BASF A-3 (epoxy curing agent) ): Denacol EX-611, manufactured by Nagase ChemteX Corporation A-4 (adhesion aid, silane coupling agent): KBM-502, manufactured by Shin-Etsu Chemical Co., Ltd.
- -Surfactant- Su-1 Compounds having the following structures (62% and 38% are molar ratios indicating the proportions of the constituent units of the main chain, respectively, and the numerical values added to the side chains are the number of repeating units.
- Su-2 Futergent FTX-218, manufactured by Neos Co., Ltd.
- Su-3 Megafuck (registered trademark) F-554 (fluorine-containing group / lipophilic group-containing oligomer)
- Su-4 KF-6001 (both-terminal carbinol-modified polydimethylsiloxane) manufactured by DIC Corporation, Shin-Etsu Chemical Made by Kogyo Co., Ltd.
- -Polymerization inhibitor- In-1 p-methoxyphenol, manufactured by Sanritsu Chemie Co., Ltd.
- In-2 1,4-benzoquinone, manufactured by Tokyo Chemical Industry Co., Ltd.
- -solvent- S-1 Propylene glycol monomethyl ether acetate (PGMEA), manufactured by Tokyo Chemical Industry Co., Ltd.
- S-2 Propylene glycol monomethyl ether, manufactured by Tokyo Chemical Industry Co., Ltd.
- S-3 Cyclopentanone, manufactured by Tokyo Chemical Industry Co., Ltd. Made
- the transmittance of light having a wavelength of 400 to 1300 nm was measured for the obtained film. Next, this membrane was placed in an incubator at 85 ° C. and 95% humidity and stored for 6 months for a humidity resistance test. For the film after the moisture resistance test, the transmittance of light at each wavelength of 400 to 1300 nm was measured. The transmittance of the film was measured using a spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Corporation). The maximum value ( ⁇ T) of the change in transmittance at a wavelength in the wavelength range of 700 to 1000 nm before and after the moisture resistance test was measured, used as an index of moisture resistance reliability, and evaluated according to the following criteria.
- the thickening rate of the curable composition is 5% or less 4: The thickening rate of the curable composition exceeds 5% and is 7.5% or less 3: The thickening rate of the curable composition Is more than 7.5% and less than 10% 2: The thickening rate of the curable composition is more than 10% and less than 20% 1: The thickening rate of the curable composition is 20% Over
- the curable composition was applied onto a silicon wafer using a spin coater (manufactured by Mikasa Sports Co., Ltd.) so that the film thickness after post-baking was 1.0 ⁇ m to form a coating film. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.) , exposure was performed at an exposure amount of 1000 mJ / cm 2 through a mask having a Bayer pattern of 1 ⁇ m square. Then, paddle development was carried out at 23 ° C.
- TMAH tetramethylammonium hydroxide
- the average value of the number of residues having a diameter of 50 nm to 200 nm at 10 unexposed portions was more than 1 and 5 or less.
- 2 The average number of residues having a diameter of 50 nm to 200 nm was more than 5 at 10 unexposed portions.
- 1 At 10 locations of the unexposed portion, a residue having a diameter of more than 200 nm was present, or the unexposed portion was hardly dissolved.
- Each curable composition was applied onto a glass substrate using a spin coater (manufactured by Mikasa Sports Co., Ltd.) so that the film thickness after prebaking was 2.0 ⁇ m to form a coating film.
- a spin coater manufactured by Mikasa Sports Co., Ltd.
- the entire surface was exposed at 1000 mJ / cm 2 using an i-line stepper exposure device FPA-3000i5 + (manufactured by Canon Inc.). After the exposure, the film was again heated (post-baked) at 200 ° C. for 300 seconds using a hot plate to obtain a film.
- the transmittance of light having a wavelength of 400 to 1300 nm was measured using a spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Corporation), and the average value of the transmittance of 400 to 700 nm was T1%.
- the maximum absorption wavelength W1 existing in the longest wave was obtained. From the obtained values, the absorption band of the membrane was evaluated according to the following criteria.
- IR region means having absorption in the visible to IR region, W1> 700 nm and T1% ⁇ 50% "IR region”: refers to having absorption only in the IR region, W1> 700 nm and T1%> 50% "Visible region”: Refers to having absorption in the visible region, W1 ⁇ 700 nm.
- Example A Using the composition of Example 38 or 39, a 2 ⁇ m square dot punching pattern (infrared cut filter) is formed by the following method, and any of the compositions of Examples 1 to 10, 15 to 37, and 40 to 81. A 2 ⁇ m square pattern (infrared transmission filter) was formed by the following method using an object.
- a pattern was prepared by the following method using the curable composition of Example 38 or 39.
- the curable composition was applied onto a silicon wafer by a spin coating method so that the film thickness after film formation was 1.0 ⁇ m. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes.
- FPA-3000i5 + manufactured by Canon Inc.
- exposure was performed at 1,000 mJ / cm 2 through a mask with a dot removal pattern of 2 ⁇ m square.
- paddle development was carried out at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). Then, it was rinsed with a spin shower and further washed with pure water.
- TMAH tetramethylammonium hydroxide
- the Red composition was applied onto the pattern of the infrared cut filter by a spin coating method so that the film thickness after film formation was 1.0 ⁇ m. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.), exposure was performed at 1,000 mJ / cm 2 through a mask with a 2 ⁇ m square dot pattern. Then, paddle development was carried out at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). Then, it was rinsed with a spin shower and further washed with pure water.
- TMAH tetramethylammonium hydroxide
- the Red composition was then patterned on the infrared cut filter pattern by heating at 200 ° C. for 5 minutes using a hot plate.
- the Green composition and the Blue composition were sequentially patterned to form red, green, and blue coloring patterns (Bayer patterns).
- the Bayer pattern is one red element, two green elements, and one blue element, as disclosed in US Pat. No. 3,971,065. It is a pattern in which a 2 ⁇ 2 array of color filter elements having an element is repeated. In this embodiment, one red element, one green element, and one blue element are repeated.
- a Bayer pattern was formed by repeating a 2 ⁇ 2 array of an element and a filter element having one infrared transmission filter element.
- the composition for forming an infrared transmission filter (the composition of any of Examples 1 to 10, 15 to 37, and 40 to 81) is applied onto the film on which the pattern is formed, and the film thickness after film formation is 2. It was applied by a spin coating method so as to have a thickness of 0 ⁇ m. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.), exposure was performed at 1,000 mJ / cm 2 through a mask with a 2 ⁇ m square dot pattern. Then, paddle development was carried out at 23 ° C.
- FPA-3000i5 + manufactured by Canon Inc.
- TMAH tetramethylammonium hydroxide
- the obtained solid-state image sensor was irradiated with infrared rays by an infrared light emitting diode (infrared LED) in a low illuminance environment (0.001 lux), and an image was captured to evaluate the image performance.
- infrared LED infrared light emitting diode
- a low illuminance environment 0.001 lux
- the Red composition, Green composition, and Blue composition used for the above patterning are as follows.
- Red pigment dispersion 51.7 parts by mass Resin 1 (40% by mass PGMEA solution): 0.6 parts by mass Polymerizable compound 2: 0.6 parts by mass Photopolymerization initiator 1: 0.3 parts by mass Surfactant 1 : 4.2 parts by mass PGMEA: 42.6 parts by mass
- Green pigment dispersion 73.7 parts by mass Resin 1 (40% by mass PGMEA solution): 0.3 parts by mass Polymerizable compound 1: 1.2 parts by mass Photopolymerization initiator 1: 0.6 parts by mass Surface active agent 1 : 4.2 parts by mass UV absorber (UV-503, manufactured by Daito Kagaku Co., Ltd.): 0.5 parts by mass PGMEA: 19.5 parts by mass
- Blue pigment dispersion 44.9 parts by mass Resin 1 (40% by mass PGMEA solution): 2.1 parts by mass Polymerizable compound 1: 1.5 parts by mass Polymerizable compound 2: 0.7 parts by mass Photoinitiator 1 : 0.8 parts by mass Surfactant 1: 4.2 parts by mass PGMEA: 45.8 parts by mass
- the raw materials used for the Red composition, the Green composition, and the Blue composition are as follows.
- a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3. This dispersion treatment was repeated 10 times to obtain a Red pigment dispersion.
- -Green pigment dispersion C. I. Pigment Green 36 at 6.4 parts by mass
- C.I. I. A mixed solution consisting of 5.3 parts by mass of Pigment Yellow 150, 5.2 parts by mass of a dispersant (Disperbyk-161, manufactured by BYK Chemie), and 83.1 parts by mass of PGMEA, bead mill (zirconia beads 0.3 mm diameter).
- a pigment dispersion was prepared by mixing and dispersing for 3 hours. After that, a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3. This dispersion treatment was repeated 10 times to obtain a Green pigment dispersion.
- -Polymerizable compound 1 KAYARAD DPHA (mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate, manufactured by Nippon Kayaku Co., Ltd.)
- -Polymerizable compound 2 The following structure
- 110 Solid-state image sensor
- 111 Infrared cut filter
- 112 Color filter
- 114 Infrared transmission filter
- 115 Microlens
- 116 Flattening layer
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Abstract
Description
上記のような光学フィルタを得るための組成物としては、例えば、特許文献1にて、スクアリリウム骨格を有する特定構造の近赤外線吸収色素、塩基性樹脂型分散剤及び有機溶剤を含有してなる近赤外線吸収性組成物であって、塩基性樹脂型分散剤が、側鎖に3級アミノ基及び4級アンモニウム塩基を有するAブロックと、3級アミノ基及び4級アンモニウム塩基を有しないBブロックとからなるブロック共重合体である塩基性樹脂型分散剤を含み、上記塩基性樹脂型分散剤の固形分におけるアミン価が10~200mgKOH/gであり、4級アンモニウム塩価が10~90mgKOH/gであり、有機溶剤が、760mmHgにおける沸点が120~210℃であり、溶解度パラメータが9.0~13.0である有機溶剤を含む近赤外線吸収性組成物が開示されている。
また、本開示の別の一実施形態が解決しようとする課題は、上記組成物を用いた膜、光学フィルタ及びその製造方法、固体撮像素子、赤外線センサ、並びに、センサモジュールを提供することである。
下記式(1)~式(4)のいずれかで表される基よりなる群から選択される少なくとも1種の基を有する顔料誘導体と、
吸着性基を有する構成単位及び立体反発性基を有する構成単位を有し、ランダム共重合体又は交互共重合体である分散剤と、
溶剤と、
を含む組成物。
式(1) -NH-R1
式(1)中、R1は、-COR11、-SO2R11、又は-PO(R11)2で表される総炭素数が10以下の置換基であり、R11は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(2) -L-NH-R2
式(2)中、Lは、-CO-、-SO2-、又は-PO(R21)-を表し、R21は、水素原子又は炭素数1以上の1価の有機基を表し、R2は、-COR22、-SO2R22、又は-PO(R22)2を表し、R22は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(3) -N+(R3)3 X-
式(3)中、R3は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR4のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
式(4) -L-N+(R4)3 X-
式(4)中、Lは、-CO-、-SO2-、又は-PO(R42)-を表し、R42は、水素原子又は炭素数1以上の1価の有機基を表し、R4は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR4のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
<4> 上記式(2)中のLが-CO-を表し、R2が-SO2R22を表し、R22がフッ素原子を含み且つ炭素数1以上の1価の有機基を表す、<2>又は<3>に記載の組成物。
<5> 上記分散剤がランダム共重合体である、<1>~<4>のいずれか1つに記載の組成物。
<7> 上記顔料が赤外領域に吸収を有する顔料を含む、<1>~<6>のいずれか1つに記載の組成物。
<8> 上記顔料と上記顔料誘導体とは同じ色素骨格を有する、<1>~<7>のいずれか1つに記載の組成物。
<9> 上記色素骨格がスクアリリウム色素骨格又はクロコニウム色素骨格である、<8>に記載の組成物。
<10> 上記顔料が有彩色顔料を含む、<1>~<9>のいずれか1つに記載の組成物。
<12> <11>に記載の組成物からなる又は上記組成物を硬化してなる膜。
<13> <12>に記載の膜を有する光学フィルタ。
<14> 赤外線カットフィルタ又は赤外線透過フィルタである、<13>に記載の光学フィルタ。
<15> <12>に記載の膜を有する固体撮像素子。
<16> <12>に記載の膜を有する赤外線センサ。
<17> <11>に記載の組成物を支持体上に適用して組成物層を形成する工程と、
上記組成物層をパターン状に露光する工程と、
上記組成物層の未露光部を現像除去してパターンを形成する工程と、を含む
光学フィルタの製造方法。
<18> <11>に記載の組成物を支持体上に適用して組成物層を形成し、硬化して硬化物層を形成する工程、
上記硬化物層上にフォトレジスト層を形成する工程、
露光及び現像することにより上記フォトレジスト層をパターニングしてレジストパターンを得る工程、並びに、
上記レジストパターンをエッチングマスクとして上記層をドライエッチングする工程を含む
光学フィルタの製造方法。
<19> 光電変換素子と、<13>又は<14>に記載の光学フィルタと、を有するセンサモジュール。
本開示の別の一実施形態によれば、上記組成物を用いた膜、光学フィルタ及びその製造方法、固体撮像素子、赤外線センサ、並びに、センサモジュールが提供される。
本明細書において「全固形分」とは、組成物の全組成から溶剤を除いた成分の総質量をいう。また、「固形分」とは、上述のように、溶剤を除いた成分であり、例えば、25℃において固体であっても、液体であってもよい。
本明細書における基(原子団)の表記において、置換及び無置換を記していない表記は、置換基を有さないものと共に置換基を有するものをも包含するものである。例えば、「アルキル基」とは、置換基を有さないアルキル基(無置換アルキル基)のみならず、置換基を有するアルキル基(置換アルキル基)をも包含するものである。
本明細書において「露光」とは、特に断らない限り、光を用いた露光のみならず、電子線、イオンビーム等の粒子線を用いた描画も含む。また、露光に用いられる光としては、一般的に、水銀灯の輝線スペクトル、エキシマレーザに代表される遠紫外線、極紫外線(EUV光)、X線、電子線等の活性光線又は放射線が挙げられる。
本明細書において、「(メタ)アクリレート」は、アクリレート及びメタクリレートの双方、又は、いずれかを表し、「(メタ)アクリル」は、アクリル及びメタクリルの双方、又は、いずれかを表し、「(メタ)アクリロイル」は、アクリロイル及びメタクリロイルの双方、又は、いずれかを表す。
本明細書において、化学式中のMeはメチル基を、Etはエチル基を、Prはプロピル基を、Buはブチル基を、Acはアセチル基を、Bnはベンジル基を、Phはフェニル基をそれぞれ示す。
本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の作用が達成されれば、本用語に含まれる。
また、本開示において、「質量%」と「重量%」とは同義であり、「質量部」と「重量部」とは同義である。
更に、本開示において、2以上の好ましい態様の組み合わせは、より好ましい態様である。
また、本開示における透過率は、特に断りのない限り、25℃における透過率である。
本明細書において、重量平均分子量及び数平均分子量は、ゲルパーミエーションクロマトグラフィ(GPC)により測定したポリスチレン換算値として定義される。
本開示において、樹脂における「構成単位」の含有量をモル比で規定する場合、「構成単位」は「モノマー単位」と同義であるものとする。但し、本開示における「モノマー単位」は、高分子反応等により重合後に修飾されていてもよい。
本開示に係る組成物は、顔料と、下記式(1)~式(4)のいずれかで表される基よりなる群から選択される少なくとも1種の基を有する顔料誘導体(以下、特定顔料誘導体ともいう)と、吸着性基を有する構成単位及び立体反発性基を有する構成単位を有し、ランダム共重合体又は交互共重合体である分散剤(以下、特定分散剤ともいう)と、溶剤と、を含む。
式(1) -NH-R1
式(1)中、R1は、-COR11、-SO2R11、又は-PO(R11)2で表される総炭素数が10以下の置換基であり、R11は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(2) -L-NH-R2
式(2)中、Lは、-CO-、-SO2-、又は-PO(R21)-を表し、R21は、水素原子又は炭素数1以上の1価の有機基を表し、R2は、-COR22、-SO2R22、又は-PO(R22)2を表し、R22は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(3) -N+(R3)3 X-
式(3)中、R3は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR3のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
式(4) -L-N+(R4)3 X-
式(4)中、Lは、-CO-、-SO2-、又は-PO(R42)-を表し、R42は、水素原子又は炭素数1以上の1価の有機基を表し、R4は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR4のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
従来、顔料誘導体と組み合わせて用いられる分散剤としては、多点末端型又は面吸着型と呼ばれる、例えば、特許文献1に記載のようなブロック共重合体による顔料誘導体との吸着部位が偏在化した分散剤が好ましいとされていた。
一方で、顔料誘導体としては、分子鎖の末端部ではなく、分子鎖の中間部に分散剤との吸着部位を有する顔料誘導体が検討されてきている。
分子鎖の中間部に分散剤との吸着部位を有する顔料誘導体の場合、顔料誘導体との吸着部位が偏在化した分散剤を組み合わせると、ある一定の顔料分散性は得られるものの、目的とする分散安定性には満たなかった。
そこで、本発明が、分子鎖の中間部に分散剤との吸着部位を有する顔料誘導体と組み合わせる分散剤について検討を行ったところ、顔料誘導体との吸着部位が偏在化していない分散剤、即ち、吸着性基を有する構成単位及び立体反発性基を有する構成単位を有し、ランダム共重合体又は交互共重合体である分散剤を用いることで、顔料の分散安定性に優れる組成物が得られることを見出した。
特定顔料誘導体と特定分散剤とを組み合わせることで、特定分散剤が特定顔料誘導体に効率よく吸着し、且つ、特定顔料誘導体間で立体反発が生じやすくなることから、結果的に、特定顔料誘導体が吸着している顔料が安定的に分散しうるものと推測される。
また、本開示に係る組成物が硬化性組成物であって、その硬化性組成物により膜が形成された場合、膜中においても、顔料の分散安定性が高い状態を保つことができる。その結果、形成された膜の一部を現像等により除去する際には、顔料の凝集に由来する残渣の発生が低減するものと推測される。
ここで、「膜の耐湿性が低下する」とは、膜のある波長(例えば、波長700nm~1000nm)の光の透過率が、高湿下での耐湿試験前よりも耐湿試験後で低下することを意味する。
膜の耐湿性が低下する理由としては、耐湿試験時に、膜中にて顔料誘導体が会合し、異物を形成するためと考えられる。
異物が形成される機序としては、以下のように推測される。
従来の顔料誘導体は、色素骨格に酸基、塩基性基等の吸着性基が導入されており、分子鎖の末端部に吸着性基が結合した構造を有する。このような顔料誘導体は、π共役系を有する色素骨格を含むことから会合性が発現しやすく、特に、吸収波長が長波側に存在するほどπ共役系が大きく広がり、π共役面を形成することから、高い会合性を発現しやすい。そして、顔料誘導体が有する吸着性基は親水性を示すため、耐湿試験時には親水性の吸着性基に水が配位し、水が配位した吸着性基と疎水性のπ共役面とが反発することで、π共役面同士の会合が誘起されて、異物が形成されると推測される。
よって、本開示に係る組成物によれば、膜中にて特定顔料誘導体に由来する異物が形成されにくく、その結果、耐湿性の低下が抑制されるものと推測される。
本開示に係る組成物は、式(1)~式(4)のいずれかで表される基よりなる群から選択される少なくとも1種の基を有する特定顔料誘導体を含む。
特定顔料誘導体は、色素骨格に上記の基が結合した化合物である。
まず、特定顔料誘導体が有する、式(1)~式(4)で表される基について説明する。以下、式(1)~式(4)で表される基を総じて、特定官能基ともいう。
特定顔料誘導体は、顔料の分散安定性を高める観点から、下記式(2)で表される基を有することが好ましい。
式(1)中、R1は、-COR11、-SO2R11、又は-PO(R11)2で表される総炭素数が10以下の置換基であり、R11は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(2)中、Lは、-CO-、-SO2-、又は-PO(R21)-を表し、R21は、水素原子又は炭素数1以上の1価の有機基を表し、R2は、-COR22、-SO2R22、又は-PO(R22)2を表し、R22は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(2)中、R2は-SO2R22であることが好ましい。ここで、R22は、炭素数1以上の1価の有機基であることが好ましく、特に、フッ素原子を含む炭素数1以上の有機基であることが好ましい。R2が-SO2R22で表され、R22がフッ素原子を含む炭素数1以上の有機基であると、式(2)で表される基は、強酸であることから、顔料の分散性を向上させやすく、また、フッ素の存在により水の配位が阻害できるため、異物の形成が抑えられ、形成された膜の耐湿性等を高めることができる。
即ち、顔料の分散安定性を高める観点から、式(2)中、Lは-CO-を表し、R2は-SO2R22を表し、R22が炭素数1以上の1価の有機基を表すことが好ましく、更に、式(2)中のLが-CO-を表し、R2が-SO2R22を表し、R22がフッ素原子を含み且つ炭素数1以上の1価の有機基を表すことがより好ましい。
上記のアルキル基及びフッ化アルキル基は、エーテル結合を有していてもよい。
上記のアルキル基及びフッ化アルキル基は、直鎖状であることが好ましい。
また、上記のフッ化アルキル基は、パーフルオロアルキル基であることが好ましい。
R22としては、特に、トリフルオロメチル基であることが特に好ましい。
式(3)中、R3は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR4のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
式(3)中、3つのR3のうち2つがアルキル基であることが好ましく、2つのアルキル基のうち少なくとも一方が炭素数3以上のアルキル基であることが好ましい。
式(3)中、X-で表される対アニオンとしては、ハロゲンイオン、ハロゲン化ホウ素イオン、ハロゲン化リンイオン等が挙げられ、中でも、ハロゲンイオン(例えば、Cl-、I-)、ハロゲン化ホウ素イオン(例えば、BF4 -)、ハロゲン化リンイオン(例えば、PF6 -)が好ましい。
ここで、上記具体例中のアルキル基は、各々独立に、直鎖であってもよいし、分岐鎖であってもよい。例えば、上記具体例中のアルキル基が直鎖であれば顔料の分散性を高める傾向があり、また、上記具体例中のアルキル基が分岐鎖であれば形成される膜の耐湿性が優れる傾向がある。
式(4)中、Lは、-CO-、-SO2-、又は-PO(R42)-を表し、R42は、水素原子又は炭素数1以上の1価の有機基を表し、R4は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR5のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
式(4)中、R4で表される1価の有機基としては、アルキル基が挙げられ、特に直鎖状のアルキル基が好ましい。
式(4)中、3つのR4のうち2つがアルキル基であることが好ましく、2つのアルキル基のうち少なくとも一方が炭素数3以上のアルキル基であることが好ましい。
式(4)中、X-で表される対アニオンとしては、ハロゲンイオン、ハロゲン化ホウ素イオン、ハロゲン化リンイオン等が挙げられ、中でも、ハロゲンイオン(例えば、Cl-、I-)、ハロゲン化ホウ素イオン(例えば、BF4 -)、ハロゲン化リンイオン(例えば、PF6 -)が好ましい。
ここで、上記具体例中のアルキル基は、各々独立に、直鎖であってもよいし、分岐鎖であってもよい。例えば、上記具体例中のアルキル基が直鎖であれば顔料の分散性を高める傾向があり、また、上記具体例中のアルキル基が分岐鎖であれば形成される膜の耐湿性が優れる傾向がある。
上記の特定官能基が結合する色素骨格としては、以下のものが挙げられる。
即ち、特定顔料誘導体が有する色素骨格としては、赤外領域に吸収を有する色素化合物に由来する色素骨格が好ましく、中でも、近赤外領域に吸収を有する色素化合物に由来する色素骨格であることがより好ましい。
特に、特定顔料誘導体における色素骨格と顔料の色素骨格とが同じ色素骨格を有することが好ましい。
中でも、特定顔料誘導体が有する色素骨格は、ピロロピロール色素骨格、フタロシアニン色素骨格、スクアリリウム色素骨格、又はクロコニウム色素骨格が好ましく、製造適性の観点から、スクアリリウム色素骨格又はクロコニウム色素骨格が特に好ましい。
Lで表される連結基は、無置換であってもよく、置換基を更に有していてもよい。
置換基としては、下記の置換基Tが挙げられる。
置換基Tとしては、ハロゲン原子、シアノ基、ニトロ基、アルキル基、アルケニル基、アルキニル基、アリール基、ヘテロアリール基、-ORt1、-CORt1、-COORt1、-OCORt1、-NRt1Rt2、-NHCORt1、-CONRt1Rt2、-NHCONRt1Rt2、-NHCOORt1、-SRt1、-SO2Rt1、-SO2ORt1、-NHSO2Rt1、又は-SO2NRt1Rt2が挙げられる。Rt1及びRt2は、各々独立に、水素原子、アルキル基、アルケニル基、アルキニル基、アリール基、又はヘテロアリール基を表す。Rt1とRt2が結合して環を形成してもよい。
上記波長の範囲に極大吸収波長を有する顔料誘導体は、π平面の広がりが顔料と近づけやすくでき、顔料への吸着性が向上し、より優れた分散安定性が得られやすい。
更に、特定顔料誘導体はπ共役平面を有する化合物であることも好ましく、顔料に含まれるπ共役平面と同一の構造のπ共役平面を有する化合物であることもより好ましい。ここで、特定顔料誘導体のπ共役平面に含まれるπ電子の数は8個~100個であることが好ましい。上限は、90個以下であることが好ましく、80個以下であることがより好ましい。π電子の数の下限は10個以上であることが好ましく、12個以上であることがより好ましい。
式(CR)中、A3及びA4は、各々独立に、芳香族環基を表し、Xは特定官能基を表し、A3及びA4の少なとも一つに結合する。nは1~4の整数である。
ここで、A1、A2、A3、及びA4で表される芳香族環基は、アリール基及びヘテロアリール基が含まれる。
芳香族環の具体例としては、ベンゼン環、ナフタレン環、ペンタレン環、インデン環、アズレン環、ヘプタレン環、インダセン環、ペリレン環、ペンタセン環、アセナフテン環、フェナントレン環、アントラセン環、ナフタセン環、クリセン環、トリフェニレン環、フルオレン環、ビフェニル環、ピロール環、フラン環、チオフェン環、イミダゾール環、オキサゾール環、チアゾール環、ピリジン環、ピラジン環、ピリミジン環、ピリダジン環、インドリジン環、インドール環、ベンゾフラン環、ベンゾチオフェン環、イソベンゾフラン環、キノリジン環、キノリン環、フタラジン環、ナフチリジン環、キノキサリン環、キノキサゾリン環、イソキノリン環、カルバゾール環、フェナントリジン環、アクリジン環、フェナントロリン環、チアントレン環、クロメン環、キサンテン環、フェノキサチイン環、フェノチアジン環、及び、フェナジン環が挙げられ、ベンゼン環又はナフタレン環が好ましい。
これらの芳香族環は、無置換であってもよく、置換基を有していてもよい。ここで、置換基としては、既述の置換基Tが挙げられる。
なお、芳香族環に置換基Tが複数導入されている場合、複数の置換基Tが互いに結合して環を形成してもよい。
式(R1)中、A11は-NR51-が好ましい。
以下の具体例中、「CuPc」は、フタロシアニン銅(II)を示す。また、以下の具体例中、Meはメチル基を表し、Phはフェニル基を表す。
また、特定顔料誘導体としては、国際公開第2018/230387号の段落0067に記載の化合物Aの具体例のうち、特定官能基を有するものを用いることもでき、これらの内容は本明細書に組み込まれる。
本開示に係る組成物は、顔料を含む。
顔料は、白色顔料、黒色顔料、有彩色顔料、近赤外線吸収顔料が挙げられる。
本開示においては、顔料が、赤外領域に吸収を有する赤外線吸収顔料であることが好ましい例の1つである。中でも、顔料が、近赤外領域に吸収を有する近赤外線吸収顔料であることがより好ましい例の1つである。
本開示において、「近赤外領域」は、波長700nm超え2,500nm以下の領域を指し、「近赤外線」は、波長700nm超え2,500nm以下の赤外線を指す。
なお、本開示において、顔料とは、溶剤に不溶の色素を意味する。ここで、溶剤に不溶とは、25℃における対象物質の溶剤100mgに対する溶解度が0.1g以下であることを指す。ここで溶剤としては、プロピレングリコールモノメチルエーテルアセテ-ト又は水が挙げられ、いずれの溶剤であっても上記の溶解度であるものが顔料である。
なお、顔料における色素骨格と特定顔料誘導体の色素骨格とが同じ色素骨格を有することが好ましい。
中でも、近赤外線吸収顔料としては、スクアリリウム化合物、クロコニウム化合物、ピロロピロール化合物、又はフタロシアニン化合物が好ましく、製造適性の観点から、スクアリリウム化合物又はクロコニウム化合物が特に好ましい。
スクアリリウム化合物としては、特に制限はなく、スクアリリウム色素骨格を有する顔料に相当する化合物であればよく、例えば、特定顔料誘導体における式(SQ)で表される化合物からXで表される特定官能基を除いたものが好ましいものとして挙げられる。
また、スクアリリウム化合物としては、特開2011-208101号公報の段落0044~0049に記載の化合物、特許第6065169号公報の段落0060~0061に記載の化合物、国際公開第2016/181987号の段落0040に記載の化合物、国際公開第2013/133099号に記載の化合物、国際公開第2014/088063号に記載の化合物、特開2014-126642号公報に記載の化合物、特開2016-146619号公報に記載の化合物、特開2015-176046号公報に記載の化合物、特開2017-25311号公報に記載の化合物、国際公開第2016/154782号に記載の化合物、特許第5884953号公報に記載の化合物、特許第6036689号公報に記載の化合物、特許第5810604号公報に記載の化合物、特開2017-068120号公報に記載の化合物などが挙げられ、これらの内容は本明細書に組み込まれる。
クロコニウム化合物としては、特に制限はなく、クロコニウム色素骨格を有する顔料に相当する化合物であればよく、例えば、特定顔料誘導体における式(CR)で表される化合物からXで表される特定官能基を除いたものが好ましいものとして挙げられる。
また、クロコニウム化合物としては、例えば、特開2007-271745号公報の段落0049、特開2007-31644号公報、特開2007-169315号公報等に記載の化合物が挙げられ、これらの内容は本明細書に組み込まれる。
ピロロピロール化合物としては、特に制限はなく、ピロロピロール色素骨格を有する顔料に相当する化合物であればよい。
ピロロピロール化合物としては、式(PP)で表される化合物であることが好ましい。
置換基としては、既述の置換基Tが挙げられる。
以下の構造式中、Meはメチル基を表し、Phはフェニル基を表す。また、ピロロピロール化合物としては、特開2009-263614号公報の段落0048~0058に記載の化合物、特開2011-68731号公報の段落0037~0052、及び国際公開第2017/146092号の段落0052~0053に記載の化合物などが挙げられ、これらの内容は本明細書に組み込まれる。
なお、本開示において、白色顔料は純白色のみならず、白に近い明るい灰色(例えば灰白色、薄灰色など)の顔料などを含む。また、顔料は、有機顔料であることが好ましい。
有彩色顔料としては、例えば、波長400nm~700nmの範囲に極大吸収波長を有するものがより好ましい。
C.I.Pigment Orange 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等(以上、オレンジ色顔料)、
C.I.Pigment Red 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279,294(キサンテン系、Organo Ultramarine、Bluish Red),295(モノアゾ系),296(ジアゾ系)等(以上、赤色顔料)、
C.I.Pigment Green 7,10,36,37,58,59,62,63等(以上、緑色顔料)、
C.I.Pigment Violet 1,19,23,27,32,37,42,60(トリアリールメタン系),61(キサンテン系)等(以上、紫色顔料)、
C.I.Pigment Blue 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,29,60,64,66,79,80,87(モノアゾ系),88(メチン系)等(以上、青色顔料)が挙げられる。
また、緑色顔料としては、特開2018-180023号公報に記載の緑色顔料を使用してもよい。
また、特許第6443711号公報に記載されている顔料、を用いることもできる。
また、黄色顔料として、特開2018-062644号公報に記載の化合物を用いることもできる。この化合物は、特定顔料誘導体以外の顔料誘導体としても使用可能である。
更に、特開2018-155881号公報に記載されているように、C.I.Pigment Yellow 129をで添加してもよい。
例えば、黒色顔料としては、カーボンブラック、チタンブラック、グラファイト等が挙げられ、カーボンブラック又はチタンブラックが好ましく、チタンブラックがより好ましい。チタンブラックとは、チタン原子を含有する黒色粒子であり、低次酸化チタンや酸窒化チタンが好ましい。チタンブラックは、分散性向上、凝集性抑制などの目的で必要に応じ、表面を修飾することが可能である。例えば、酸化珪素、酸化チタン、酸化ゲルマニウム、酸化アルミニウム、酸化マグネシウム、又は酸化ジルコニウムでチタンブラックの表面を被覆することが可能である。
また、特開2007-302836号公報に表されるような撥水性物質での処理も可能である。黒色顔料として、カラーインデックス(C.I.)Pigment Black 1,7等が挙げられる。
顔料の一次粒子径は、顔料の一次粒子を透過型電子顕微鏡により観察し、得られた写真から求めることができる。具体的には、顔料の一次粒子の投影面積を求め、それに対応する円相当径を顔料の一次粒子径として算出する。また、本開示における平均一次粒子径は、400個の顔料の一次粒子についての一次粒子径の算術平均値とする。また、顔料の一次粒子とは、凝集のない独立した粒子をいう。
顔料の含有量は、例えば、顔料に求められる機能を発現する観点から、例えば、組成物の全固形分に対し、5質量%~80質量%であることが好ましく、10質量%~70質量%であることがより好ましい。
本開示に係る組成物は、吸着性基を有する構成単位及び立体反発性基を有する構成単位を有し且つランダム共重合体又は交互共重合体である特定分散剤を含む。
特に、特定分散剤はランダム共重合体であることが好ましい。
ここで、吸着性基としては、例えば、酸基、塩基性基、複素環を含む基、色素骨格を含む基等が挙げられ、相互作用が大きく分散が良好であるとの観点から、酸基又は塩基性基が好ましく、塩基性基が特に好ましい。
また、立体反発性基としては、立体障害の大きな基であればよく、例えば、ポリエステル樹脂構造、アクリル樹脂構造、ポリアルキレングリコール構造等が好ましく、ポリエステル樹脂構造が更に好ましい。
上記のポリエステル樹脂構造としては、特に制限はないが、直鎖状のポリエステル樹脂構造であることが好ましく、ポリカプロラクトン構造、又は、ポリバレロラクトン構造であることがより好ましい。
立体反発性基は、炭素数の総計が20以上である基であることが好ましく、炭素数の総計が30以上の基であることがより好ましく、炭素数の総計が50以上の基であることが更に好ましく、炭素数の総計が50~200の基であることが特に好ましい。
なお、吸着性基を有する構成単位と立体反発性基を有する構成単位とが分かれている多点吸着型の分散剤、また、オリゴイミン誘導体のように吸着性基が平面状である面吸着型の分散剤は特定分散剤に含まれない。
特定分散剤において、立体反発性基を有する構成単位の含有量は、特定分散剤の全質量に対して、5モル%~95モル%であることが好ましく、10モル%~90モル%であることがより好ましく、15モル%~85モル%であることが更に好ましい。
塩基性基としては、窒素原子を含む基であることが好ましく、より具体的には、第1級アミノ基、第2級アミノ基、第3級アミノ基、第4級アンモニウム塩基等であることがより好ましい。
塩基性基を有する特定分散剤としては、例えば、塩基性基として第3級アミノ基を有するランダム共重合体又は交互共重合体であることが好ましい。即ち、塩基性基を有する特定分散剤としては、第3級アミノ基を有する構成単位と立体反発性基を有する構成単位とを少なくとも有するランダム共重合体又は交互共重合体であることが好ましい。
また、塩基性基を有する特定分散剤は、塩基性基として、第3級アミノ基の他に、第4級アンモニウム塩基を有していてもよい。
上記の第4級アンモニウム塩基を有する構成単位を得るために単量体(即ち、第4級アンモニウム塩基を有する単量体)としては、第4級アンモニウム塩基を有するエチレン性不飽和化合物が挙げられ、具体的には、(メタ)アクリロイルアミノプロピルトリメチルアンモニウムクロライド、(メタ)アクリロイルオキシエチルトリメチルアンモニウムクロライド、(メタ)アクリロイルオキシエチルトリエチルアンモニウムクロライド、(メタ)アクリロイルオキシエチル(4-ベンゾイルベンジル)ジメチルアンモニウムブロマイド、(メタ)アクリロイルオキシエチルベンジルジメチルアンモニウムクロライド、(メタ)アクリロイルオキシエチルベンジルジエチルアンモニウムクロライド等が挙げられる。
第3級アミノ基を有するエチレン性不飽和化合物及び第4級アンモニウム塩基を有するエチレン性不飽和化合物については、国際公開第2018/230486号の段落0150~0170に記載されたものも挙げられ、この内容は本明細書に組み込まれる。
酸基としては、カルボキシ基(カルボン酸基)、スルホンアミド基、ホスホン酸基、スルホン酸基、フェノール性水酸基、スルホニルイミド基等が例示される。中でも、カルボキシ基が特に好ましい。
酸基を有する分散剤としては、例えば、酸基を有する構成単位と立体反発性基を有する構成単位とを含むランダム共重合体又は交互共重合体が挙げられる。
酸基を有する構成単位としては、上記塩基性基を有する特定分散剤に用いられる酸基を有する構成単位と同様のものが挙げられる。
また、立体反発性基を有する構成単位としては、上記塩基性基を有する特定分散剤に用いられる立体反発性基を有する構成単位と同様のものが挙げられる。
下記構造の化合物は、いずれも、ランダム共重合体であってもよいし、交互共重合体であってもよい。
より具体的には、特定分散剤は、吸着性基を有する構成単位及び立体反発性基を有する構成単位の他に、上記の反応性基を有する構成単位を有していてもよい。
また、ランダム共重合体又は交互共重合体であることの確認は、核磁気共鳴(NMR)を用いて行うことができる。
例えば、特定分散剤の含有量は、顔料と顔料誘導体との総量に対して、5質量%~200質量%であることが好ましく、10質量%~150質量%であることがより好ましく、15質量%~100質量%であることが更に好ましい。
本開示における硬化性組成物は、溶剤を含んでいることが好ましい。
溶剤としては、エステル類、例えば、酢酸エチル、酢酸-n-ブチル、酢酸イソブチル、ギ酸アミル、酢酸イソアミル、酢酸イソブチル、プロピオン酸ブチル、酪酸イソプロピル、酪酸エチル、酪酸ブチル、アルキルエステル類、乳酸メチル、乳酸エチル、オキシ酢酸メチル、オキシ酢酸エチル、オキシ酢酸ブチル、メトキシ酢酸メチル、メトキシ酢酸エチル、メトキシ酢酸ブチル、エトキシ酢酸メチル、エトキシ酢酸エチル、並びに、3-オキシプロピオン酸メチル及び3-オキシプロピオン酸エチルなどの3-オキシプロピオン酸アルキルエステル類(例えば、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル)、並びに、2-オキシプロピオン酸メチル、2-オキシプロピオン酸エチル、及び2-オキシプロピオン酸プロピルなどの2-オキシプロピオン酸アルキルエステル類(例えば、2-メトキシプロピオン酸メチル、2-メトキシプロピオン酸エチル、2-メトキシプロピオン酸プロピル、2-エトキシプロピオン酸メチル、2-エトキシプロピオン酸エチル、2-オキシ-2-メチルプロピオン酸メチル、2-オキシ-2-メチルプロピオン酸エチル、2-メトキシ-2-メチルプロピオン酸メチル、2-エトキシ-2-メチルプロピオン酸エチル)、並びに、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸プロピル、アセト酢酸メチル、アセト酢酸エチル、2-オキソブタン酸メチル、2-オキソブタン酸エチル等;
ケトン類、例えば、メチルエチルケトン、シクロペンタノン、シクロヘキサノン、2-ヘプタノン、3-ヘプタノン等;
芳香族炭化水素類、例えば、トルエン、キシレン等が挙げられる。
ただし、有機溶剤としての芳香族炭化水素類(ベンゼン、トルエン、キシレン、エチルベンゼン等)は、環境面等の理由により低減したほうがよい場合がある(例えば、有機溶剤の全質量に対して、50ppm以下とすることもでき、10ppm以下とすることもでき、1質量ppm以下とすることもできる。)。
溶剤は、単独で用いる以外に2種以上を組み合わせて用いてもよい。
本開示に係る組成物は、顔料、特定顔料誘導体、特定分散剤、及び溶剤を含む顔料分散液であってもよいし、これらの成分以外のその他の成分を含んでいてもよい。
本開示に係る組成物は、膜が得られる組成物であることが好ましく、最終的に硬化することにより硬化膜が得られる硬化性組成物であることが好ましい。
また、本開示に係る組成物は、例えば、パターン露光により硬化膜のパターンを形成し、未露光部を現像除去することができる硬化性組成物であることが好ましい。すなわち、本開示に係る組成物はネガ型の硬化性組成物であることが好ましい。
本開示に係る組成物がネガ型の硬化性組成物の場合、既述の、顔料、特定顔料誘導体、特定分散剤、及び溶剤以外に、更に、重合開始剤及び重合性化合物を含む態様が好ましい。
例えば、本開示に係る組成物は、特定分散剤と特定分散剤以外の分散剤とを併用してもよい。本開示に係る組成物において、特定分散剤と特定分散剤以外の分散剤とを併用する場合、特定分散剤の含有量は、特定分散剤と特定分散剤以外の分散剤との総量に対して、30質量%以上100質量%未満であることが好ましく、40質量%以上100質量%未満であることがより好ましく、50質量%以上100質量%未満であることが更に好ましい。
本開示に係る組成物がポジ型の組成物である態様において含まれる各成分については、国際公開第2014/003111号に記載の各成分が挙げられ、好ましい態様も同様である。
本開示に係る組成物は、既述のように、顔料、特定顔料誘導体、特定分散剤、及び溶剤に加え、更に、重合性化合物及び重合開始剤を含む、所謂、硬化性組成物であることが好ましい。
上記の硬化性組成物は本開示に係る組成物を含むことから、硬化性組成物から形成された膜中においても、顔料の分散安定性が高い状態を保つことができる。その結果、上記の硬化性組成物によれば、形成された膜の一部を現像除去する際に、顔料の凝集に由来する残渣が生じにくく、現像残渣が低減される。
以下、本開示に係る組成物がネガ型の硬化性組成物である場合について詳細に記載する。
顔料の含有量が上記範囲内であると、顔料による機能が十分に発現する。
特定顔料誘導体の含有量が上記範囲内であると、顔料の分散安定性に優れる。
特定分散剤の含有量が上記範囲内であると、顔料の分散安定性に優れる。
即ち、本開示における硬化性組成物では、固形分量が上記の範囲となるよう溶剤を用いればよい。
本開示における硬化性組成物は、重合性化合物を含むことが好ましい。
重合性化合物としては、エチレン性不飽和化合物であることがより好ましく、末端エチレン性不飽和基を有する化合物であることが特に好ましい。
このような化合物群としては、公知のものを特に限定なく用いることができる。
重合性化合物は、例えば、モノマー、プレポリマー、即ち、2量体、3量体、及びオリゴマー、又はそれらの混合物、並びに、それらの共重合体などの化学的形態をもつが、分子量又は重量平均分子量(Mw)が2,000未満であるものと指す。
重合性化合物の例としては、ヒドロキシ基、アミノ基、メルカプト基等の求核性置換基を有する不飽和カルボン酸のエステル類或いはアミド類と単官能若しくは多官能イソシアネート類或いはエポキシ類との付加反応物、及び、ヒドロキシ基、アミノ基、メルカプト基等の求核性置換基を有する不飽和カルボン酸のエステル類或いはアミド類と単官能若しくは多官能のカルボン酸との脱水縮合反応物等も好適に使用される。
また、重合性化合物の例としては、イソシアネート基、エポキシ基等の親電子性置換基を有する不飽和カルボン酸のエステル類或いはアミド類と単官能若しくは多官能の、アルコール類、アミン類、チオール類との付加反応物、更に、ハロゲン原子、トシルオキシ基等の脱離性置換基を有する不飽和カルボン酸のエステル類或いはアミド類と単官能若しくは多官能の、アルコール類、アミン類、チオール類との置換反応物も好適である。
また、重合性化合物の更に別の例としては、上記の不飽和カルボン酸の代わりに、不飽和ホスホン酸、スチレン、ビニルエーテル等に置き換えた化合物群が挙げられる。
(ただし、R及びR’は、H又はCH3を示す。)
また、重合性化合物としては、特開2015-187211号公報に記載のエポキシ化合物を用いてもよい。
本開示における硬化性組成物は、重合開始剤を含むことが好ましい。
重合開始剤としては、特に、光重合開始剤であることが好ましい。
光重合開始剤としては、重合性化合物の重合を開始する能力を有する限り、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視領域の光線に対して感光性を有する化合物が好ましい。また、光重合開始剤は、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する化合物であってもよい。中でも、光重合開始剤は光ラジカル重合開始剤であることが特に好ましい。
α-アミノケトン化合物の市販品としては、IGM Resins B.V.社の、Omnirad 907(旧IRGACURE-907)、Omnirad 369(旧IRGACURE 369)、Omnirad 379(旧IRGACURE 379)、及び、Omnirad 379(旧IRGACURE-379EG)などが挙げられる。
アシルホスフィン化合物の市販品としては、IGM Resins B.V.社の、Omnirad 819(旧IRGACURE 819)、BASF社製の、Omnirad TPO H(旧IRGACURE TPO)などが挙げられる。
オキシム化合物の市販品としては、BASF社製の、IRGACURE OXE01、IRGACURE OXE02、IRGACURE OXE03、IRGACURE OXE04も好適に用いられる。
また、オキシム化合物の市販品としては、常州強力電子新材料有限公司(CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO.,LTD)製の、TRONLY TR-PBG-304、TRONLY TR-PBG-309、TRONLY TR-PBG-305、(株)ADEKA製の、アデカアークルズNCI-930、アデカオプトマーN-1919(特開2012-14052号公報の光重合開始剤2に該当)が挙げられる。
重合開始剤の含有量が上記の範囲であることで、良好な感度とパターン形成性が得られる。
本開示における硬化性組成物は、既述の成分以外の、その他の成分を含んでいてもよい。
その他の成分としては、バインダー樹脂、重合禁止剤、溶剤、増感剤、共増感剤、その他の添加剤等が挙げられる。
本開示における硬化性組成物は、膜形成性の観点から、バインダー樹脂を含むことが好ましい。
バインダー樹脂は、既述の特定分散剤に該当しない成分である。
バインダー樹脂の具体例としては、アクリル樹脂、エン・チオール樹脂、ポリカーボネート樹脂、ポリエーテル樹脂、ポリアリレート樹脂、ポリスルホン樹脂、ポリエーテルスルホン樹脂、ポリフェニレン樹脂、ポリアリーレンエーテルホスフィンオキシド樹脂、ポリイミド樹脂、ポリアミドイミド樹脂、ポリオレフィン樹脂、環状オレフィン樹脂、ポリエステル樹脂、スチレン樹脂、シロキサン樹脂、ウレタン樹脂、エポキシ樹脂などが挙げられる。中でも、アクリル樹脂を含むことが好ましい。
ノルボルネン樹脂の市販品としては、例えば、JSR(株)製のARTONシリーズ(例えば、ARTON F4520)などが挙げられる。ポリイミド樹脂の市販品としては、三菱ガス化学(株)製のネオプリム(登録商標)シリーズ(例えば、C3450)などが挙げられる。
また、バインダー樹脂として、フルオレン骨格を有する樹脂を好ましく用いることもできる。フルオレン骨格を有する樹脂については、米国特許出願公開第2017/0102610号明細書の記載を参酌でき、この内容は本明細書に組み込まれる。
本開示における硬化性組成物は、保存安定性の観点から、重合禁止剤を含むことが好ましい。
重合禁止剤としては、特に限定されず、公知の重合禁止剤を用いることができる。
重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-t-ブチル-p-クレゾール、ピロガロール、t-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-t-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン塩(アンモニウム塩、第一セリウム塩等)、2,2,6,6-テトラメチルピペリジン-1-オキシル等が挙げられる。なお、重合禁止剤は、酸化防止剤として機能することもある。
ここで、「ppm」、後述する「ppb」、及び「ppt」は、いずれも、質量基準である。
本開示における硬化性組成物は、重合開始剤のラジカル、カチオン等の重合開始種の発生効率の向上、感光波長の長波長化の目的で、増感剤を含有していてもよい。
増感剤としては、上記した光重合開始剤に対し、電子移動機構又はエネルギー移動機構で増感させるものが好ましい。
好ましい増感剤の例としては、以下の化合物類に属しており、かつ波長330nm~波長450nm域に吸収波長を有するものを挙げることができる。
例えば、多核芳香族類(例えば、フェナントレン、アントラセン、ピレン、ペリレン、トリフェニレン、9,10-ジアルコキシアントラセン)、キサンテン類(例えば、フルオレッセイン、エオシン、エリスロシン、ローダミンB、ローズベンガル)、チオキサントン類(イソプロピルチオキサントン、ジエチルチオキサントン、クロロチオキサントン)、シアニン類(例えばチアカルボシアニン、オキサカルボシアニン)、メロシアニン類(例えば、メロシアニン、カルボメロシアニン)、フタロシアニン類、チアジン類(例えば、チオニン、メチレンブルー、トルイジンブルー)、アクリジン類(例えば、アクリジンオレンジ、クロロフラビン、アクリフラビン)、アントラキノン類(例えば、アントラキノン)、スクアリリウム類(例えば、スクアリリウム)、アクリジンオレンジ、クマリン類(例えば、7-ジエチルアミノ-4-メチルクマリン)、ケトクマリン、フェノチアジン類、フェナジン類、スチリルベンゼン類、アゾ化合物、ジフェニルメタン、トリフェニルメタン、ジスチリルベンゼン類、カルバゾール類、ポルフィリン、スピロ化合物、キナクリドン、インジゴ、スチリル、ピリリウム化合物、ピロメテン化合物、ピラゾロトリアゾール化合物、ベンゾチアゾール化合物、バルビツール酸誘導体、チオバルビツール酸誘導体、アセトフェノン、ベンゾフェノン、ミヒラーズケトンなどの芳香族ケトン化合物、N-アリールオキサゾリジノンなどのヘテロ環化合物などが挙げられる。等が挙げられ、更に欧州特許第568,993号明細書、米国特許第4,508,811号明細書、同5,227,227号明細書、特開2001-125255号公報、特開平11-271969号公報等に記載の化合物などが挙げられる。
本開示における硬化性組成物が増感剤を含む場合、増感剤の含有量は、深部への光吸収効率と開始分解効率の観点から、硬化性組成物の全固形分に対し、0.1質量%~20質量%であることが好ましく、0.5質量%~15質量%がより好ましい。
本開示における硬化性組成物は、共増感剤を含有してもよい。
共増感剤は、増感色素や開始剤の活性放射線に対する感度を一層向上させる、或いは酸素による重合性化合物の重合阻害を抑制する等の作用を有する。
本開示における硬化性組成物が共増感剤を含む場合、共増感剤の含有量は、重合成長速度と連鎖移動のバランスによる硬化速度の向上の観点から、硬化性組成物の全固形分に対し、0.1質量%~30質量%の範囲が好ましく、0.5質量%~25質量%の範囲がより好ましく、1質量%~20質量%の範囲が更に好ましい。
本開示における硬化性組成物には、必要に応じて、界面活性剤、近赤外線吸収顔料以外の着色剤、密着促進剤、酸化防止剤、紫外線吸収剤、凝集防止剤などの各種添加物を含有することができる。
本開示における硬化性組成物は、上述した各成分を混合することによって調製することができる。また、異物の除去や欠陥の低減などの目的で、フィルタでろ過することが好ましい。フィルタとしては、従来からろ過用途等に用いられているものであれば特に限定されることなく用いることができる。例えば、ポリテトラフルオロエチレン(PTFE)等のフッ素樹脂、ナイロン(例えば、ナイロン-6、ナイロン-6,6)等のポリアミド系樹脂、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン樹脂(高密度、超高分子量を含む)等を用いたフィルタが挙げられる。これら素材の中でもポリプロピレン(高密度ポリプロピレンを含む)又はナイロンが好ましい。
フィルタの孔径は、0.01μm~7.0μmが好ましく、0.01μm~3.0μmがより好ましく、0.05μm~0.5μmが更に好ましい。この範囲とすることにより、後工程において均一及び平滑な組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。又はイバ状のろ材を用いることも好ましく、ろ材としては例えばポリプロピレンファイバ、ナイロンファイバ、グラスファイバ等が挙げられ、具体的にはロキテクノ社製のSBPタイプシリーズ(SBP008など)、TPRタイプシリーズ(TPR002、TPR005など)、SHPXタイプシリーズ(SHPX003など)のフィルタカートリッジを用いることができる。
フィルタを使用する際、異なるフィルタを組み合わせてもよい。その際、第1のフィルタでのろ過は、1回のみでもよいし、2回以上行ってもよい。
また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール(株)(DFA4201NIEYなど)、アドバンテック東洋(株)、日本インテグリス(株)又は(株)キッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
本開示における硬化性組成物は、液状とすることができるため、例えば、本開示における硬化性組成物を基材などに付与し、乾燥させることにより膜を容易に製造できる。
本開示における硬化性組成物の25℃における粘度は、塗布により膜を形成する場合は、塗布性の観点から、1mPa・s~100mPa・sであることが好ましい。下限は、2mPa・s以上がより好ましく、3mPa・s以上が更に好ましい。上限は、50mPa・s以下がより好ましく、30mPa・s以下が更に好ましく、15mPa・s以下が特に好ましい。
本開示における粘度は、東機産業(株)製の粘度計(商品名:VISCOMETER TV-22)を使用し、25℃において測定するものとする。
収容容器として、原材料や組成物中への不純物の混入防止を目的に、容器内壁を6種6層の樹脂で構成する多層ボトルや6種の樹脂を7層構造にしたボトルを使用することも好ましい。これらの容器としては、例えば、特開2015-123351号公報に記載の容器が挙げられる。
本開示に係る膜は、本開示における硬化性組成物(顔料、特定顔料誘導体、特定分散剤、及び溶剤に加え、重合性化合物及び重合開始剤を更に含む組成物)からなる又は本開示における硬化性組成物を硬化してなる膜である。
また、本開示における硬化性組成物は溶剤を含むため、乾燥を行うことが好ましい。
本開示に係る膜は、赤外線カットフィルタとして好ましく用いることができる。また、熱線遮蔽フィルタ、赤外線透過フィルタとして用いることもできる。本開示に係る膜は、支持体上に積層して用いてもよく、支持体から剥離して用いてもよい。本開示に係る膜は、パターンを有していてもよく、パターンを有さない膜(平坦膜)であってもよい。
本開示における「乾燥」は、溶剤を少なくとも一部除去すればよく、溶剤を完全に除去する必要はなく、所望に応じて、溶剤の除去量を設定することができる。
また、上記硬化は、膜の硬さが向上していればよいが、重合による硬化が好ましい。
(1)波長400nmでの透過率は70%以上が好ましく、80%以上がより好ましく、85%以上が更に好ましく、90%以上が特に好ましい。
(2)波長500nmでの透過率は70%以上が好ましく、80%以上がより好ましく、90%以上が更に好ましく、95%以上が特に好ましい。
(3)波長600nmでの透過率は70%以上が好ましく、80%以上がより好ましく、90%以上が更に好ましく、95%以上が特に好ましい。
(4)波長650nmでの透過率は70%以上が好ましく、80%以上がより好ましく、90%以上が更に好ましく、95%以上が特に好ましい。
本開示に係る膜を赤外線透過フィルタとして用いる場合は、本開示に係る膜は以下の(5)~(8)のうちの少なくとも1つの条件を満たすことが好ましい。
(5)波長450~800nmにおける透過率の最大値が20%以下であり、波長900~1200nmにおける透過率の最小値が70%以上である。
(6)波長450~850nmにおける透過率の最大値が20%以下であり、波長950~1200nmにおける透過率の最小値が70%以上である。
(7)波長450~950nmにおける透過率の最大値が20%以下であり、波長1050~1200nmにおける透過率の最小値が70%以上である。
(8)波長450~1050nmにおける透過率の最大値が20%以下であり、波長1150~1200nmにおける透過率の最小値が70%以上である。
ここで、カラーフィルタは、有彩色着色剤を含む着色組成物を用いて製造できる。有彩色着色剤としては、従来公知の有彩色着色剤が挙げられる。着色組成物は、有彩色着色剤以外に、樹脂、重合性化合物、重合開始剤、界面活性剤、溶剤、重合禁止剤、紫外線吸収剤などを更に含有することができる。着色組成物に含まれる各成分としては、従来公知の各成分の他、既述の各成分を適宜用いてもよい。
次に、本開示に係る膜の製造方法について説明する。本開示に係る膜は、本開示に係る組成物を塗布する工程を経て製造できる。
プリベーク時間は、10秒~3,000秒が好ましく、40秒~2,500秒がより好ましく、80秒~220秒が更に好ましい。乾燥は、ホットプレート、オーブン等で行うことができる。
フォトリソグラフィ法でのパターン形成方法は、本開示に係る組成物を塗布して形成した組成物層に対しパターン状に露光する工程(露光工程)と、未露光部の組成物層を現像除去してパターンを形成する工程(現像工程)と、を含むことが好ましい。必要に応じて、現像されたパターンをベークする工程(ポストベーク工程)を設けてもよい。以下、各工程について説明する。
露光工程では組成物層をパターン状に露光する。例えば、組成物層に対し、ステッパー等の露光装置を用いて、所定のマスクパターンを有するマスクを介して露光することで、組成物層をパターン露光することができる。これにより、露光部分を硬化することができる。露光に際して用いることができる放射線(光)としては、g線、i線等の紫外線が好ましく、i線がより好ましい。照射量(露光量)は、例えば、0.03J/cm2~2.5J/cm2が好ましく、0.05J/cm2~1.0J/cm2がより好ましく、0.08J/cm2~0.5J/cm2が特に好ましい。露光時における酸素濃度については適宜選択することができ、大気下で行う他に、例えば酸素濃度が19体積%以下の低酸素雰囲気下(例えば、15体積%、5体積%、実質的に無酸素)で露光してもよく、酸素濃度が21体積%を超える高酸素雰囲気下(例えば、22体積%、30体積%、50体積%)で露光してもよい。また、露光照度は適宜設定することが可能であり、好ましくは1,000W/m2~100,000W/m2(例えば、5,000W/m2、15,000W/m2、35,000W/m2)の範囲から選択することができる。酸素濃度と露光照度は適宜条件を組み合わせてよく、例えば、酸素濃度10体積%で照度10,000W/m2、酸素濃度35体積%で照度20,000W/m2などとすることができる。
次に、露光後の組成物層における未露光部の組成物層を現像除去してパターンを形成する。未露光部の組成物層の現像除去は、現像液を用いて行うことができる。これにより、露光工程における未露光部の組成物層が現像液に溶出し、光硬化した部分だけが支持体上に残る。現像液としては、下地の固体撮像素子や回路などにダメージを与えない、アルカリ現像液が望ましい。現像液の温度は、例えば、20℃~30℃が好ましい。現像時間は、20秒~180秒が好ましい。また、残渣除去性を向上するため、現像液を60秒ごとに振り切り、更に新たに現像液を供給する工程を数回繰り返してもよい。
ドライエッチング法でのパターン形成は、組成物を支持体上などに塗布して形成した組成物層を硬化して硬化物層を形成し、次いで、この硬化物層上にパターニングされたフォトレジスト層を形成し、次いで、パターニングされたフォトレジスト層をマスクとして硬化物層に対してエッチングガスを用いてドライエッチングするなどの方法で行うことができる。フォトレジスト層の形成においては、更にプリベーク処理を施すことが好ましい。特に、フォトレジストの形成プロセスとしては、露光後の加熱処理、現像後の加熱処理(ポストベーク処理)を実施する形態が望ましい。ドライエッチング法でのパターン形成については、特開2013-64993号公報の段落0010~0067の記載を参酌でき、この内容は本明細書に組み込まれる。
本開示に係る光学フィルタは、本開示に係る膜を有する。
本開示に係る光学フィルタは、赤外線カットフィルタ又は赤外線透過フィルタとして好ましく用いることができ、赤外線カットフィルタとしてより好ましく用いることができる。
また、本開示に係る膜と、赤、緑、青、マゼンタ、黄、シアン、黒及び無色よりなる群から選ばれる画素とを有する態様も本開示に係る光学フィルタの好ましい態様である。
なお、本開示に係る赤外線カットフィルタは、赤外線領域の一部の波長の赤外線のみをカットするフィルタであっても、赤外線領域の全体をカットするフィルタであってもよい。赤外線領域の一部の波長の赤外線のみをカットするフィルタとしては、例えば、近赤外線カットフィルタが挙げられる。なお、近赤外線としては、波長750nm~2,500nmの赤外線が挙げられる。
また、本開示に係る赤外線カットフィルタは、波長750nm~1,000nmの範囲の赤外線をカットするフィルタであることが好ましく、波長750nm~1,200nmの範囲の赤外線をカットするフィルタであることがより好ましく、波長750nm~1,500nmの赤外線をカットするフィルタであることが更に好ましい。
本開示に係る赤外線カットフィルタは、上記膜の他に、更に、銅を含有する層、誘電体多層膜、紫外線吸収層などを有していてもよい。本開示に係る赤外線カットフィルタが、更に、銅を含有する層、又は、誘電体多層膜を少なくとも有することで、視野角が広く、赤外線遮蔽性に優れた赤外線カットフィルタが得られ易い。また、本開示に係る赤外線カットフィルタが、更に、紫外線吸収層を有することで、紫外線遮蔽性に優れた赤外線カットフィルタとすることができる。紫外線吸収層としては、例えば、国際公開第2015/099060号の段落0040~0070及び0119~0145に記載の吸収層を参酌でき、この内容は本明細書に組み込まれる。誘電体多層膜としては、特開2014-41318号公報の段落0255~0259の記載を参酌でき、この内容は本明細書に組み込まれる。銅を含有する層としては、銅を含有するガラスで構成されたガラス基材(銅含有ガラス基材)や、銅錯体を含む層(銅錯体含有層)を用いることもできる。銅含有ガラス基材としては、銅を含有する燐酸塩ガラス、銅を含有する弗燐酸塩ガラスなどが挙げられる。銅含有ガラスの市販品としては、NF-50(AGCテクノグラス(株)製)、BG-60、BG-61(以上、ショット社製)、CD5000(HOYA(株)製)等が挙げられる。
また、本開示に係る光学フィルタの製造方法としては、本開示に係る組成物を支持体上に適用して組成物層を形成し、硬化して層を形成する工程、上記層上にフォトレジスト層を形成する工程、露光及び現像することにより上記フォトレジスト層をパターニングしてレジストパターンを得る工程、並びに、上記レジストパターンをエッチングマスクとして上記層をドライエッチングする工程を含む方法であることも好ましい。
本開示に係る光学フィルタの製造方法における各工程としては、本開示に係る膜の製造方法における各工程を参照することができる。
本開示に係る固体撮像素子は、本開示に係る膜を有する。固体撮像素子の構成としては、本開示に係る膜を有する構成であり、固体撮像素子として機能する構成であれば特に限定はない。例えば、以下のような構成が挙げられる。
本開示に係る画像表示装置は、本開示に係る膜を有する。画像表示装置としては、液晶表示装置や有機エレクトロルミネッセンス(有機EL)表示装置などが挙げられる。画像表示装置の定義や詳細については、例えば「電子ディスプレイデバイス(佐々木 昭夫著、(株)工業調査会 1990年発行)」、「ディスプレイデバイス(伊吹 順章著、産業図書(株)平成元年発行)」などに記載されている。また、液晶表示装置については、例えば「次世代液晶ディスプレイ技術(内田 龍男編集、(株)工業調査会 1994年発行)」に記載されている。本開示に適用できる液晶表示装置に特に制限はなく、例えば、上記の「次世代液晶ディスプレイ技術」に記載されている色々な方式の液晶表示装置に適用できる。画像表示装置は、白色有機EL素子を有するものであってもよい。白色有機EL素子としては、タンデム構造であることが好ましい。有機EL素子のタンデム構造については、特開2003-45676号公報、三上明義監修、「有機EL技術開発の最前線-高輝度・高精度・長寿命化・ノウハウ集-」、技術情報協会、326~328ページ、2008年などに記載されている。有機EL素子が発光する白色光のスペクトルは、青色領域(430nm~485nm)、緑色領域(530nm~580nm)及び黄色領域(580nm~620nm)に強い極大発光ピークを有するものが好ましい。これらの発光ピークに加え更に赤色領域(650nm~700nm)に極大発光ピークを有するものがより好ましい。
本開示に係る赤外線センサは、本開示に係る膜を有する。赤外線センサの構成としては、赤外線センサとして機能する構成であれば特に限定はない。以下、本開示に係る赤外線センサの一実施形態について、図面を用いて説明する。
赤外線透過フィルタ114の分光特性、膜厚等の測定方法を以下に示す。
膜厚は、膜を有する乾燥後の基板を、触針式表面形状測定器(ULVAC社製DEKTAK150)を用いて測定する。
膜の分光特性は、紫外可視近赤外分光光度計((株)日立ハイテクノロジーズ製U-4100)を用いて、波長300nm~1,300nmの範囲において透過率を測定した値である。
また、本開示に用いられる赤外線透過フィルタ及び赤外線カットフィルタの吸収波長は、使用光源等に合わせて適宜組み合わせて用いられる。
本開示に係るセンサモジュールは、光電変換素子と、本開示に係る光学フィルタと、を有する。
本開示に係るセンサモジュールは、光電変換素子と、本開示に係る光学フィルタと、を備えており、センサモジュールとして機能する構成であれば特に限定はない。例えば、本開示に係るセンサモジュールは、光電変換素子及び光学フィルタの他、レンズ、光電変換素子から得られた情報を処理する回路等を更に有することが好ましい。
本開示に係るセンサモジュールの用途としては、生体認証、監視、モバイル、自動車、農業、医療、距離計測、ジェスチャー認識、拡張現実、仮想現実等が挙げられる。
また、カメラモジュールは、固体撮像素子及び光学フィルタ以外に、レンズ、及び、上記固体撮像素子から得られる撮像を処理する回路を更に有することが好ましい。
本開示におけるカメラモジュールに用いられる固体撮像素子としては、上記本開示に係る固体撮像素子であってもよいし、公知の固体撮像素子であってもよい。
また、本開示におけるカメラモジュールに用いられるレンズ、及び、上記固体撮像素子から得られる撮像を処理する回路としては、公知のものを用いることができる。
カメラモジュールの例としては、特開2016-6476号公報、又は、特開2014-197190号公報に記載のカメラモジュールを参酌でき、これらの内容は本明細書に組み込まれる。
また、本開示における硬化性組成物は、塗料、インクジェットインク、セキュリティインク等にも用いることができる。
更に、本開示における硬化性組成物は、遮熱材料、蓄熱材料、又は、光熱変換材料として用いることもできる。
本実施例において、「%」、「部」とは、特に断りのない限り、それぞれ「質量%」、「質量部」を意味する。なお、高分子化合物において、特別に規定したもの以外は、分子量は重量平均分子量(Mw)であり、構成単位の比率はモル百分率である。
重量平均分子量(Mw)は、ゲル浸透クロマトグラフィー(GPC)法によるポリスチレン換算値として測定した値である。
下記表1に記載の種類の、顔料、顔料誘導体、分散剤、及び溶剤を、それぞれ下記の表1に記載の量(質量部)で混合し、更に直径0.3mmのジルコニアビーズ230質量部を加えて、ペイントシェーカーを用いて5時間分散処理を行い、ビーズをろ過で分離して各顔料分散液を製造した。
下記表9に記載の種類の、顔料、顔料誘導体、分散剤、及び溶剤を、それぞれ下記の表9に記載の量(質量部)で混合し、更に直径0.3mmのジルコニアビーズ230質量部を加えて、ペイントシェーカーを用いて5時間分散処理を行い、ビーズをろ過で分離して各顔料分散液を製造した。
-顔料-
顔料P-1~P-3:下記構造の化合物
顔料P-4:C.I.Pigment Red 254
顔料P-5:C.I.Pigment Blue 15:6
顔料P-6:C.I.Pigment Yellow 139
顔料P-7:C.I.Pigment Violet 23
顔料P-8:イルガフォア BLACK(BASF社製)
顔料P-9:Lumogen Black(BASF社製)
また、上記の顔料P-13、P-14、及びP-15は下記の合成方法に従って合成した。
下記スキームに従い顔料P-14を合成した。
乾燥後の有機層に、4-ヒドロキシベンゾニトリル134質量部、DMAc254質量部、及び炭酸カリウム162質量部を添加し、外接温度120℃で9時間撹拌した。反応終了後、内温25℃まで冷却し、内温25℃以下を維持しつつ10質量%水酸化ナトリウム水溶液800質量部を添加した。添加終了後、室温で15分間撹拌した後、分液操作により有機相を取り出した。有機層を、水455質量部、続いて9質量%食塩水500質量部で洗浄した後、溶媒を減圧留去し、化合物P-14-aを184質量部得た。
1H-NMR(CDCl3):δ0.93(t,3H),1.02(d,3H),1.15-1.55(m,4H),1.97(m,1H),3.81(m,2H),6.63(d,2H),7.56(d,2H)
1H-NMR(DMSO(ジメチルスルホキシド)-d6:ナトリウムメトキシドの28質量%メタノール溶液=95:5(質量比)の混合液) ; δ0.90(t,6H),0.98(d,6H),1.10-1.55(m,8H),1.90(m,2H),3.80(m,4H),6.82(d,4H),8.57(d,4H)
1H-NMR(CDCl3):δ0.90(t,6H),1.08(d,6H),1.20-1.68(m,8H),2.02(m,2H),3.92(m,4H),7.16(d,4H),7.31(t,2H),7.45(t,2H),7.76(d,4H),7.82(dd,4H),13.2(s,2H)
1H-NMR(CDCl3):δ0.97(t,6H),1.05(d,6H),1.20-1.60(m,8H),1.98(m,2H),3.75(m,4H),6.45(s,8H),6.99(d,4H),7.06-7.20(m,14H),7.24(d,8H),7.50(d,2H)
顔料P-14の高速液体クロマトグラフィー(HPLC)純度は97.2%であった。
顔料P-14のプロピレングリコールモノメチルエーテルアセテート(PGMEA)に対する溶解度は0.75mg/Lであった。
顔料P-14の5%重量減少温度は385℃であった。
顔料P-14の結晶転移温度は400℃以上であった。
顔料P-14の粉末X線回折スペクトルのピーク位置は、回折角度2θが、8.0°、9.1°、9.5°、10.7°、11.1°、12.6°、13.5°、13.9°、14.3°、16.1°、16.9°、17.5°、18.2°、19.0°、19.5°、19.9°、20.5°、20.8°、21.7°、22.3°、22.8°、23.4°、23.9°、24.5°、25.1°、25.4°、25.7°、26.4°、27.5°、27.9°、28.4°、29.2°であり、ピーク強度が最大である8.0°のピークの半値全幅は0.18°であった。
測定装置としてAgilent製Cary5000を使用した。測定サンプルを25℃の溶剤に溶解させて、10mm×10mmの石英セルに入れ、350nm~1000nmの吸収スペクトルを測定した。溶液の濃度、及び、吸収スペクトルから、λmax、モル吸光係数、及び、グラム吸光係数を算出した。
以下の条件にて測定し、ピーク面積%を求めた。
・測定装置:Agilent製1260 Infinity II
・カラム:Phenomenex製kinetex5μC18100A(250mm×直径4.60mm)
・溶離液:テトラヒドロフラン(THF)溶液/酢酸アンモニウム20mMイオン交換水=66/34(体積比)
・流量:1.2mL/min
・カラム温度:45℃
・検出波長:254nm
測定装置としてAgilent製Cary5000を使用した。測定サンプルを、25℃の溶剤に添加し、30分間超音波照射したのち、測定サンプルの溶剤に対する溶解度を求めた。
測定装置としてNetzsch製STA2500Regulusを使用した。測定サンプルについて、30℃から400℃まで10℃/分で昇温し、5%重量減少温度を測定した。
測定装置として、リガク製試料水平型強力X線回折装置RINT-TTR IIIを使用し、回折角度2θ=5°~55°、電圧50kV、電流300mA、スキャンスピード4°/min、ステップ間隔0.1、スリット(散乱0.05mm、発散10mm、受光0.15mm)の条件で、粉末X線回折スペクトルを測定した。得られた粉末X線回折スペクトルにおいて、回折角度2θが5~10°の回折強度が最も大きいピークを、ローレンツ関数[y=A/(1+((x-x0)/w)2)+h]にフィッティングして、同ピークの半値全幅を求めた。ここで、yは強度、Aはピーク高さ、xは2θ、x0はピーク位置、wはピーク幅(半値半幅)、hはベースラインである。
顔料P-14の合成と同様の方法にて、顔料P-13及びP-15を合成した。
合成された顔料P-13及びP-15の、マトリックス支援レーザー脱離イオン化質量分析(MALDI-MS)による分子量が理論値と同じであったことから目的化合物であると同定した。
顔料P-13のPGMEAに対する溶解度は0.17mg/Lであった。
顔料P-13の5%重量減少温度は396℃であった。
顔料P-13の結晶転移温度は400℃以上であった。
顔料P-13の粉末X線回折スペクトルのピーク位置は、回折角度2θが8.1°、9.2°、10.2°、10.7°、12.5°、12.7°、13.5°、13.9°、14.5°、16.1°、16.9°、17.1°、18.4°、19.1°、19.6°、19.8°、20.4°、20.9°、21.3°、21.7°、21.9°、22.3°、23.1°、23.7°、24.1°、24.5°、25.1°、25.7°、26.3°、26.7°、27.5°、27.8°、28.1°、28.6°であり、ピーク強度が最大である8.1°のピークの半値全幅は0.18°であった。
これらの物性は、いずれも、顔料P-14と同じ方法を用いて測定した。
顔料P-15のPGMEAに対する溶解度は0.75mg/Lであった。
顔料P-15の5%重量減少温度は400℃以上であった。
顔料P-15の結晶転移温度は265℃であった。
顔料P-15の粉末X線回折スペクトルのピーク位置は、回折角度2θが5.3°、7.5°、9.1°、10.8°、11.2°、12.5°、12.7°、13.8°、15.0°、15.3°、16.0°、16.3°、16.7°、18.0°、18.5°、19.2°、19.4°、20.5°、20.7°、21.0°、21.5°、22.1°、22.5°、22.9°、23.4°、24.1°、24.6°、25.0°、25.3°、25.9°、27.1°、27.5°、27.9°、28.6°、29.6°であり、ピーク強度が最大である7.5°のピークの半値全幅は0.27°であった。
これらの物性は、いずれも、顔料P-14と同じ方法を用いて測定した。
顔料誘導体Syn-1~Syn-13:下記構造の化合物
また、上記の顔料誘導体Syn-13は、下記の合成方法に従って合成した。
下記スキームに従い顔料誘導体Syn-13を合成した。
1H-NMR(DMSO-d6):δ1.13(t,3H),1.62-1.70(m,2H),1.75-1.86(m,2H),2.38(t,2H)3.54(t,2H),3.60(q,2H),5.22(s,2H)
析出した結晶をろ別し、ジイソプロピルエーテル143質量部で洗浄した。得られた結晶全量を酢酸138質量部とジイソプロピルエーテル97質量部との混合液中で攪拌し、室温でトリフルオロ酢酸13質量部を添加し、内温20~30℃で30分間攪拌した。析出した結晶をろ別し、酢酸69質量部とジイソプロピルエーテル48質量部との混合液、ジイソプロピルエーテル96質量部の順で洗浄した。得られた結晶全量をテトラヒドロフラン59質量部とジイソプロピルエーテル239質量部との混合液中で室温30分間攪拌した後、結晶をろ別し、ジイソプロピルエーテル96質量部で洗浄した。得られた結晶を80℃15時間送風乾燥させることで、顔料誘導体Syn-13を10.9質量部得た。
1H-NMR(DMSO-d6):δ1.61-1.77(m,8H),2.30(t,4H),3.93(t,4H),6.36(d,4H),6.46(d,4H),6.90(d,2H),7.08-7.25(m,24H),7.94(d,2H)19F-NMR(DMSO-d6):δ-76.9(6F)
顔料誘導体Syn-13の高速液体クロマトグラフィー(HPLC)純度は91.5%であった。
顔料誘導体Syn-13のプロピレングリコールモノメチルエーテルアセテート(PGMEA)に対する溶解度は323mg/Lであった。
顔料誘導体Syn-13の5%重量減少温度は252℃であった。
これらの物性は、以下に示すHPLC純度の測定以外は、いずれも、顔料P-14と同じ方法を用いて測定した。
以下の条件にて測定し、ピーク面積%を求めた。
・測定装置:Agilent製1260 Infinity II
・カラム:Phenomenex製kinetex5μC18100A(250mm×直径4.60mm)
・溶離液:A液:酢酸アンモニウム20mMのテトラヒドロフラン(THF)/イオン交換水=80/20(体積比)溶液、B液:酢酸アンモニウム20mMのイオン交換水溶液、A液/B液=32/68~100/0(0~15min)、100/0(15~20min)、32/68(20~30min)
・流量:1.2mL/min
・カラム温度:45℃
・検出波長:254nm
分散剤D-1~D-7:下記構造の化合物(主鎖の各構成単位に付記した数値はモル比である。また、側鎖に付記した数値は繰り返し単位の数である。)
樹脂B-1~B-4:下記構造のバインダー樹脂(主鎖の各構成単位に付記した数値はモル比である)
樹脂B-5:EPICLON N-695(クレゾールノボラック型エポキシ樹脂、重量平均分子量:3,600)、DIC(株)製
樹脂B-6:EHPE3150(エポキシ樹脂、2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物、重量平均分子量:2,300)、(株)ダイセル製
M-1:NKエステル A-TMPT(トリメチロールプロパントリアクリレート、新中村化学工業(株)製)
M-2:アロニックス(登録商標) M-350(トリメチロールプロパンEO変性(n≒1)トリアクリレート、東亞合成(株)製)
M-3:NKエステル A-TMMT(ペンタエリスリトールテトラアクリレート、新中村化学工業(株)製)
M-4:アロニックス(登録商標) M-403(ジペンタエリスリトールペンタ及びヘキサアクリレート、東亞合成(株)製)
M-5:アロニックス(登録商標) M-510(多塩基酸変性アクリルオリゴマー、東亞合成(株)製)
I-1(光重合開始剤):Omnirad 907(IGM Resins B.V.社製)
I-2(光重合開始剤):IRGACURE OXE-01、BASF社製
I-3(光重合開始剤):IRGACURE OXE-02、BASF社製
I-4~I-5(光重合開始剤):下記構造の化合物
I-6(光重合開始剤):アデカアークルズ NCI-930、(株)ADEKA製
A-1(紫外線吸収剤):4,4’-Bis(diethylamino)benzophenone、シグマアルドリッチ社製
A-2(着色防止剤、酸化防止剤):Irganox 1010、BASF社製
A-3(エポキシ硬化剤):デナコールEX-611、ナガセケムテックス(株)製
A-4(密着助剤、シランカップリング剤):KBM-502、信越化学工業(株)製
Su-1:下記構造の化合物(62%及び38%は、それぞれ主鎖の構成単位の割合を示すモル比であり、側鎖に付記した数値は繰り返し単位の数である。
Su-2:フタージェント FTX-218、ネオス(株)製)
Su-3:メガファック(登録商標) F-554(含フッ素基・親油性基含有オリゴマー)、DIC(株)製
Su-4:KF-6001(両末端カルビノール変性ポリジメチルシロキサン)、信越化学工業(株)製
In-1:p-メトキシフェノール、三立ケミー(株)製
In-2:1,4-ベンゾキノン、東京化成工業(株)製
S-1:プロピレングリコールモノメチルエーテルアセテート(PGMEA)、東京化成工業(株)製
S-2:プロピレングリコールモノメチルエーテル、東京化成工業(株)製
S-3:シクロペンタノン、東京化成工業(株)製
各硬化性組成物について、以下の評価を行った。
結果を、表2~表8、及び表10に示す。
各硬化性組成物をプリベーク後の膜厚が1.0μmとなるようにスピンコーター(ミカサ(株)製)を用いてガラス基板上に塗布して塗膜を形成した。次いで、ホットプレートを用いて、100℃、120秒間の加熱(プリベーク)を行った後、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を用いて1000mJ/cm2の露光量で全面露光を行った後、再度ホットプレートを用いて200℃、300秒間の加熱(ポストベーク)を行い、膜を得た。
得られた膜について、波長400~1300nmの波長の光の透過率を測定した。次に、この膜を、85℃湿度95%の恒温器に入れて6ヵ月間保管して耐湿試験を行った。耐湿試験後の膜について、波長400~1300nmの各波長の光の透過率を測定した。膜の透過率は、分光光度計((株)日立ハイテクノロジーズ製 U-4100)を用いて測定した。
耐湿試験前後における波長700~1000nmの範囲の波長での透過率変化の最大値(ΔT)を測定し、耐湿信頼性の指標とし、下記の基準にて評価した。
透過率変化(ΔT)=|耐湿試験前の膜の透過率(%)-耐湿試験後の膜の透過率(%)|
-基準-
5:ΔT%<5%
4:5%≦ΔT%<10%
3:10%≦ΔT%<15%
2:15%≦ΔT%<20%
1:20%≦ΔT%
製造直後の硬化性組成物の粘度を測定した。粘度を測定した硬化性組成物を45℃の恒温槽で72時間保管した後、再度、粘度を測定した。なお、粘度は、硬化性組成物の温度を23℃に調整して測定した。
以下の計算式から増粘率を算出し、分散安定性の指標とし、下記の基準にて評価した。
増粘率(%)=((45℃の恒温槽で72時間保管の硬化性組成物の粘度/製造直後の硬化性組成物の粘度)-1)×100
-基準-
5:硬化性組成物の増粘率が5%以下である
4:硬化性組成物の増粘率が5%を超えて、7.5%以下である
3:硬化性組成物の増粘率が7.5%を超えて、10%以下である
2:硬化性組成物の増粘率が10%を超えて、20%以下である
1:硬化性組成物の増粘率が20%を超えている
硬化性組成物を、ポストベーク後の膜厚が1.0μmになるようにスピンコーター(ミカサ(株)製)を用いてシリコンウェハ上に塗布して塗膜を形成した。次いで、ホットプレートを用いて、100℃で2分間加熱した。次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を用い、1000mJ/cm2の露光量にて、1μm四方のBayerパターンを有するマスクを介して露光した。次いで、水酸化テトラメチルアンモニウム(TMAH)0.3質量%水溶液を用い、23℃で60秒間パドル現像を行った。その後、スピンシャワーにてリンスを行い、更に純水にて水洗した。次いで、ホットプレートを用いて、200℃で5分間加熱(ポストベーク)することでパターンを形成した。
パターン間(未露光部分)の任意の10箇所について、走査型電子顕微鏡を用いて残渣を確認及び観測し、以下の基準で現像残渣を評価した。結果を表5に示す。
-基準-
5:未露光部分の10箇所において、残渣が確認されない。
4:未露光部分の10箇所における、直径50nm~200nmのサイズの残渣数の平均値が0個超え1個以下であった。
3:未露光部分の10箇所における、直径50nm~200nmのサイズの残渣数の平均値が1個超え5個以下であった。
2:未露光部分の10箇所において、直径50nm~200nmのサイズの残渣数の平均値が5個超であった。
1:未露光部分の10箇所において、直径200nm超のサイズの残渣が存在するか、又は、未露光部分がほとんど溶解していなかった。
各硬化性組成物をプリベーク後の膜厚が2.0μmとなるようにスピンコーター(ミカサ(株)製)を用いてガラス基板上に塗布して塗膜を形成した。次いで、ホットプレートを用いて、100℃、120秒間の加熱(プリベーク)を行った後、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を用いて1000mJ/cm2の露光量で全面露光を行った後、再度ホットプレートを用いて200℃、300秒間の加熱(ポストベーク)を行い、膜を得た。
得られた膜について、分光光度計((株)日立ハイテクノロジーズ製 U-4100)を用いて、波長400~1300nmの光の透過率を測定し、400~700nmの透過率の平均値T1%と、最も長波に存在する極大吸収波長W1を求めた。
求めた値から、以下の基準にて膜の吸収帯について評価した。
-基準-
「可視~IR域」:可視~IR域に吸収を有することを指し、W1>700nm且つT1%<50%である
「IR域」:IR域にのみ吸収を有することを指し、W1>700nm且つT1%>50%である
「可視域」:可視域に吸収を有することを指し、W1<700nmである
実施例38又は39の組成物を用い、下記手法にて2μm四方のドット抜きパターン(赤外線カットフィルタ)を形成し、また、実施例1~10、15~37、40~81のいずれかの組成物を用いて、下記手法にて2μm四方のパターン(赤外線透過フィルタ)を形成した。
上記硬化性組成物を製膜後の膜厚が1.0μmになるようにシリコンウェハ上にスピンコート法で塗布した。次いで、ホットプレートを用いて、100℃で2分間加熱した。次いで、i線ステッパー露光装置FPA-3000i5+(キヤノン(株)製)を用い、1,000mJ/cm2で2μm四方のドット抜きパターンのマスクを介して露光した。次いで、水酸化テトラメチルアンモニウム(TMAH)0.3質量%水溶液を用い、23℃で60秒間パドル現像を行った。その後、スピンシャワーにてリンスを行い、更に純水にて水洗した。次いで、ホットプレートを用いて、200℃で5分間加熱することで、2μm四方のドット抜きパターン(赤外線カットフィルタ)を形成した。
なお、Bayerパターンとは、米国特許第3,971,065号明細書に開示されているような、一個の赤色(Red)素子と、二個の緑色(Green)素子と、一個の青色(Blue)素子とを有する色フィルタ素子の2×2アレイを繰り返したパターンであるが、本実施例においては、一個の赤色(Red)素子と、一個の緑色(Green)素子と、一個の青色(Blue)素子と、一個の赤外線透過フィルタ素子を有するフィルタ素子の2×2アレイを繰り返したBayerパターンを形成した。
得られた固体撮像素子について、低照度の環境下(0.001ルクス(Lux))で赤外発光ダイオード(赤外LED)により赤外線を照射し、画像の取り込みを行い、画像性能を評価した。いずれの硬化性組成物の組み合わせの場合でも、低照度の環境下であっても画像をはっきりと認識できた。
下記成分を混合し、撹拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)製)でろ過して、Red組成物を調製した。
Red顔料分散液:51.7質量部
樹脂1(40質量%PGMEA溶液):0.6質量部
重合性化合物2:0.6質量部
光重合開始剤1:0.3質量部
界面活性剤1:4.2質量部
PGMEA:42.6質量部
下記成分を混合し、撹拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)製)でろ過して、Green組成物を調製した。
Green顔料分散液:73.7質量部
樹脂1(40質量%PGMEA溶液):0.3質量部
重合性化合物1:1.2質量部
光重合開始剤1:0.6質量部
界面活性剤1:4.2質量部
紫外線吸収剤(UV-503、大東化学(株)製):0.5質量部
PGMEA:19.5質量部
下記成分を混合し、撹拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)製)でろ過して、Blue組成物を調製した。
Blue顔料分散液:44.9質量部
樹脂1(40質量%PGMEA溶液):2.1質量部
重合性化合物1:1.5質量部
重合性化合物2:0.7質量部
光重合開始剤1:0.8質量部
界面活性剤1:4.2質量部
PGMEA:45.8質量部
C.I.Pigment Red 254を9.6質量部、C.I.Pigment Yellow 139を4.3質量部、分散剤(Disperbyk-161、BYKChemie社製)を6.8質量部、PGMEAを79.3質量部とからなる混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間混合及び分散して、顔料分散液を調製した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cm3の圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、Red顔料分散液を得た。
C.I.Pigment Green 36を6.4質量部、C.I.Pigment Yellow 150を5.3質量部、分散剤(Disperbyk-161、BYKChemie社製)を5.2質量部、PGMEAを83.1質量部からなる混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間混合及び分散して、顔料分散液を調製した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cm3の圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、Green顔料分散液を得た。
C.I.Pigment Blue 15:6を9.7質量部、C.I.Pigment Violet 23を2.4質量部、分散剤(Disperbyk-161、BYKChemie社製)を5.5部、PGMEAを82.4部からなる混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間混合及び分散して、顔料分散液を調製した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cm3の圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、Blue顔料分散液を得た。
・重合性化合物2:下記構造
Claims (19)
- 顔料と、
下記式(1)~式(4)のいずれかで表される基よりなる群から選択される少なくとも1種の基を有する顔料誘導体と、
吸着性基を有する構成単位及び立体反発性基を有する構成単位を有し、ランダム共重合体又は交互共重合体である分散剤と、
溶剤と、
を含む組成物。
式(1) -NH-R1
式(1)中、R1は、-COR11、-SO2R11、又は-PO(R11)2で表される総炭素数が10以下の置換基であり、R11は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(2) -L-NH-R2
式(2)中、Lは、-CO-、-SO2-、又は-PO(R21)-を表し、R21は、水素原子又は炭素数1以上の1価の有機基を表し、R2は、-COR22、-SO2R22、又は-PO(R22)2を表し、R22は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表す。
式(3) -N+(R3)3 X-
式(3)中、R3は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR3のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。
式(4) -L-N+(R4)3 X-
式(4)中、Lは、-CO-、-SO2-、又は-PO(R42)-を表し、R42は、水素原子又は炭素数1以上の1価の有機基を表し、R4は、各々独立に、水素原子又は炭素数1以上の1価の有機基を表し、3つのR4のうち少なくとも1つが炭素数3以上のアルキル基であり、X-は対アニオンを表す。 - 前記顔料誘導体が前記式(2)で表される基を有する、請求項1に記載の組成物。
- 前記式(2)中のLが-CO-を表し、R2が-SO2R22を表し、R22が炭素数1以上の1価の有機基を表す、請求項2に記載の組成物。
- 前記式(2)中のLが-CO-を表し、R2が-SO2R22を表し、R22がフッ素原子を含み且つ炭素数1以上の1価の有機基を表す、請求項2又は請求項3に記載の組成物。
- 前記分散剤がランダム共重合体である、請求項1~請求項4のいずれか1項に記載の組成物。
- 前記分散剤が吸着性基として塩基性基を有する、請求項1~請求項5のいずれか1項に記載の組成物。
- 前記顔料が赤外領域に吸収を有する顔料を含む、請求項1~請求項6のいずれか1項に記載の組成物。
- 前記顔料と前記顔料誘導体とは同じ色素骨格を有する、請求項1~請求項7のいずれか1項に記載の組成物。
- 前記色素骨格がスクアリリウム色素骨格又はクロコニウム色素骨格である、請求項8に記載の組成物。
- 前記顔料が有彩色顔料を含む、請求項1~請求項9のいずれか1項に記載の組成物。
- 重合性化合物及び重合開始剤を更に含む、請求項1~請求項10のいずれか1項に記載の組成物。
- 請求項1~請求項11のいずれか1項に記載の組成物からなる又は前記組成物を硬化してなる膜。
- 請求項12に記載の膜を有する光学フィルタ。
- 赤外線カットフィルタ又は赤外線透過フィルタである、請求項13に記載の光学フィルタ。
- 請求項12に記載の膜を有する固体撮像素子。
- 請求項12に記載の膜を有する赤外線センサ。
- 請求項11に記載の組成物を支持体上に適用して組成物層を形成する工程と、
前記組成物層をパターン状に露光する工程と、
前記組成物層の未露光部を現像除去してパターンを形成する工程と、を含む
光学フィルタの製造方法。 - 請求項11に記載の組成物を支持体上に適用して組成物層を形成し、硬化して硬化物層を形成する工程、
前記硬化物層上にフォトレジスト層を形成する工程、
露光及び現像することにより前記フォトレジスト層をパターニングしてレジストパターンを得る工程、並びに、
前記レジストパターンをエッチングマスクとして前記層をドライエッチングする工程を含む
光学フィルタの製造方法。 - 光電変換素子と、請求項13又は請求項14に記載の光学フィルタと、を有するセンサモジュール。
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- 2020-07-29 WO PCT/JP2020/028984 patent/WO2021039253A1/ja unknown
- 2020-07-29 KR KR1020227005173A patent/KR20220035458A/ko not_active Application Discontinuation
- 2020-08-04 TW TW109126346A patent/TW202108705A/zh unknown
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