WO2013099945A1 - 光学部材セット及びこれを用いた固体撮像素子 - Google Patents
光学部材セット及びこれを用いた固体撮像素子 Download PDFInfo
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- WO2013099945A1 WO2013099945A1 PCT/JP2012/083653 JP2012083653W WO2013099945A1 WO 2013099945 A1 WO2013099945 A1 WO 2013099945A1 JP 2012083653 W JP2012083653 W JP 2012083653W WO 2013099945 A1 WO2013099945 A1 WO 2013099945A1
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- 125000004434 sulfur atom Chemical group 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- NMOALOSNPWTWRH-UHFFFAOYSA-N tert-butyl 7,7-dimethyloctaneperoxoate Chemical compound CC(C)(C)CCCCCC(=O)OOC(C)(C)C NMOALOSNPWTWRH-UHFFFAOYSA-N 0.000 description 1
- JZFHXRUVMKEOFG-UHFFFAOYSA-N tert-butyl dodecaneperoxoate Chemical compound CCCCCCCCCCCC(=O)OOC(C)(C)C JZFHXRUVMKEOFG-UHFFFAOYSA-N 0.000 description 1
- BWSZXUOMATYHHI-UHFFFAOYSA-N tert-butyl octaneperoxoate Chemical compound CCCCCCCC(=O)OOC(C)(C)C BWSZXUOMATYHHI-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- YMBCJWGVCUEGHA-UHFFFAOYSA-M tetraethylammonium chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC YMBCJWGVCUEGHA-UHFFFAOYSA-M 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- BCLLLHFGVQKVKL-UHFFFAOYSA-N tetratert-butyl silicate Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BCLLLHFGVQKVKL-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000005000 thioaryl group Chemical group 0.000 description 1
- 125000002813 thiocarbonyl group Chemical group *C(*)=S 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M thiocyanate group Chemical group [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 description 1
- 125000000464 thioxo group Chemical group S=* 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 125000005424 tosyloxy group Chemical group S(=O)(=O)(C1=CC=C(C)C=C1)O* 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003623 transition metal compounds Chemical class 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- URAYPUMNDPQOKB-UHFFFAOYSA-N triacetin Chemical compound CC(=O)OCC(OC(C)=O)COC(C)=O URAYPUMNDPQOKB-UHFFFAOYSA-N 0.000 description 1
- 229960002622 triacetin Drugs 0.000 description 1
- 125000005369 trialkoxysilyl group Chemical group 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- 125000004205 trifluoroethyl group Chemical group [H]C([H])(*)C(F)(F)F 0.000 description 1
- 125000004953 trihalomethyl group Chemical group 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical class OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G81/00—Macromolecular compounds obtained by interreacting polymers in the absence of monomers, e.g. block polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
- G02B1/041—Lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/045—Polysiloxanes containing less than 25 silicon atoms
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Definitions
- the present invention relates to an optical member set and a solid-state imaging device using the same.
- optical devices there are various types of optical devices, and many of them have a structure in which an antireflection low refractive index film is formed on the surface of an optical mechanism.
- the optical mechanism is not limited to a flat surface shape, and includes a brightness enhancement lens and a diffusion lens of a backlight for liquid crystal, a Fresnel lens, a lenticular lens, or a microlens used for a screen of a video projection television.
- the desired geometrical optical performance is obtained mainly by forming a microstructure with a resin material.
- the device is adapted to the surface of these microstructures. A low refractive index film is formed.
- the present inventor in a microlens unit (optical member set) or a solid-state imaging device having a light-transmitting cured film (first optical member) with a thickness that has been developed recently, We focused on the fact that the imaging sensitivity tends to be low due to the thickness.
- the present invention addresses a specific problem in the microlens unit (optical member set) having the light-transmitting cured film (first optical member) having the above thickness, and can achieve a good light receiving sensitivity. It is an object to provide a lens unit (optical member set) and a solid-state imaging device using the lens unit (optical member set).
- An optical member set including a first optical member obtained by curing a curable resin composition and a second optical member coated thereon, wherein the first optical member is refracted.
- the optical member set according to [1] wherein the first optical member has a refractive index of 1.35 to 1.45, and the second optical member has a refractive index of 1.85 to 1.95.
- N represents an integer of 20 to 1000.
- the siloxane resin is a resin obtained by hydrolytic condensation of an alkyltrialkoxysilane represented by the following formula (2).
- the second optical member includes a metal oxide particle (A) having a primary particle diameter of 1 nm to 100 nm and a graft copolymer (B) having a graft chain having 40 to 10,000 atoms excluding hydrogen atoms. ) And a solvent (C), the optical member set according to any one of [1] to [11], which is a photocured product of a dispersion composition.
- the graft copolymer (B) has a repeating unit having a group X having a functional group of pKa14 or less and a side chain Y having 40 to 10,000 atoms, and contains a basic nitrogen atom
- the resin (B1) has a repeating unit represented by the following formula (I-1) and a repeating unit represented by the following formula (I-2), or represented by the following formula (I-1):
- A represents an integer of 1 to 5.
- * represents a connecting portion between repeating units.
- X represents a group having a functional group having a pKa of 14 or less,
- Y represents a side chain having 40 to 10,000 atoms,
- L represents a single bond, an alkylene group, an alkenylene group, an arylene group, a heteroarylene group, an imino group.
- a plurality of convex lenses are employed as the second optical member, the plurality of convex lenses are arranged with their bulging directions substantially in the same direction, and the plurality of convex lenses transmit light from the bulging direction.
- the concave portion formed between the plurality of convex lenses is filled with the light-transmitting cured film with substantially no gap, while the light-transmitting cured film has a convex lens.
- a solid-state imaging device comprising the optical member set according to any one of [1] to [15] and a semiconductor light receiving unit.
- microlens unit optical member set
- solid-state imaging device using the microlens unit according to the present invention have a thick light-transmitting cured film (first optical member), good light receiving sensitivity (high) Reduction of average color density and noise) can be realized.
- a microlens unit which is a preferred embodiment of the present invention has a laminated structure including a light-transmitting cured film and a microlens body coated thereon.
- a lens unit that is incorporated in a solid-state imaging device (optical device) and includes a plurality of convex lenses and a light-transmitting cured film that covers the bulging direction thereof can be cited.
- the light-transmitting cured film is provided with a specific refractive index lower than that of the lower microlens body, thereby realizing high light receiving sensitivity while maintaining the advantage of applying a thick low refractive index layer. can do.
- the optical member set will be described using a microlens unit as an example
- the first optical member will be described using a light-transmitting cured film as an example
- the second optical member will be described using a microlens body as an example.
- the light transmissive cured film (upper layer) in the present invention has a lower refractive index than the microlens body as the lower layer, and the refractive index is 1.25 or more, preferably 1.35 or more, and 1.39. The above is more preferable. By setting it as this lower limit value or more, the sensitivity of the camera module can be improved. From the same viewpoint, the refractive index is 1.45 or less, and preferably 1.43 or less. In the present invention, the refractive index is determined by the method employed in the examples unless otherwise specified.
- the light transmissive cured film (upper layer) is composed of a cured film of a curable resin composition.
- the light transmissive cured film of this embodiment can be formed of a light transmissive cured film forming resin composition containing a curable resin such as a siloxane resin in a solvent. It is preferable to select a siloxane resin or a fluorine-based resin as a constituent component of the upper layer because variations between pixels are reduced. Or it is preferable to use a hollow particle as a component contained in a composition.
- the film thickness of the light transmissive cured film (first optical member) is not particularly limited, but is preferably 0.5 ⁇ m or more, and more preferably 0.6 ⁇ m or more. Although there is no particular upper limit, it is preferably 3.0 ⁇ m or less, more preferably 2.8 ⁇ m or less, further preferably 2.2 ⁇ m or less, and particularly preferably 1.5 ⁇ m or less. By setting the film thickness within this range, it is preferable because it is excellent in durability as a microlens unit and is excellent in adhesion to a cover glass even when used as a solid-state imaging device described later. In particular, in the case of thick coating, it may be more than 1 ⁇ m.
- the light transmissive cured film may be composed of two or more layers. The film thickness here refers to the thickness from the height of the longest point of the lens body.
- siloxane resin composition A siloxane resin is mentioned as a material which comprises the light transmissive cured film in this invention as above-mentioned.
- the siloxane resin can be obtained through the hydrolysis reaction and the condensation reaction using the alkoxysilane raw material described later. More specifically, in the compound, a part or all of alkoxy groups of the alkyltrialkoxysilane are hydrolyzed to be converted into silanol groups, and at least a part of the generated silanol groups is condensed to form Si—O—Si. It can be said that a bond is formed.
- the siloxane resin may be a siloxane resin having any silsesquioxane structure such as a cage type, a ladder type, or a random type.
- the “cage type”, “ladder type”, and “random type” can refer to structures described in, for example, the chemistry and application development of silsesquioxane materials (CMC Publishing).
- the siloxane resin of this embodiment preferably has a silsesquioxane structure represented by the following formula (1). -(R 1 SiO 3/2 ) n -Formula (1)
- R 1 represents an alkyl group having 1 to 3 carbon atoms.
- N represents an integer of 20 to 1000.
- the alkyl group represented by R 1 is not particularly limited as long as the carbon number is within the above range, and examples thereof include a methyl group, an ethyl group, a propyl group, and an isopropyl group. Of these, a methyl group and an ethyl group are preferable, and a methyl group is most preferable.
- the alkyl group represented by R 1 may be an alkyl group having no substituent or an alkyl group having a substituent, but is preferably an alkyl group having no substituent.
- the substituent which the alkyl group represented by R 1 may have is preferably not a halogen atom or a group having an ethylenically unsaturated bond, and an amino group (preferably an amino group having 0 to 20 carbon atoms, For example, amino, N, N-dimethylamino, N, N-diethylamino, N-ethylamino, anilino, etc.), sulfonamide group (preferably a sulfonamide group having 0 to 20 carbon atoms, such as N, N-dimethyl Sulfonamides, N-phenylsulfonamides, etc.), acyloxy groups (preferably acyloxy groups having 1 to 20 carbon atoms such as acetyloxy, benzoyloxy, etc.), carbamoyl groups (preferably carbamoyl groups having 1 to 20 carbon atoms) For example, N, N-dimethylcarbamoyl, N-phenylcarbamoy
- a silicon-containing polymer whose main chain is composed of siloxane bonds is called a polysiloxane or a siloxane resin. Since silicon has four bonds, the basic structural unit of polysiloxane is classified according to the number of organic groups typified by methyl and phenyl groups per silicon atom. It can be divided into two. In the following formula, R is an organic group.
- silsesquioxane means a general term for polysiloxanes whose basic structural units are T units unless otherwise specified. Since silicon in silsesquioxane is bonded to three oxygens and oxygen is bonded to two silicons, the theoretical composition is RSiO 3/2 (the Latin word for three-half is “Sesquix (SESQUI) "). In the present embodiment, it is preferable that R in the formula of the T unit is the R 1 and the silsesquioxane structure site is included at the specific content.
- the siloxane resin of the present embodiment is 65% by mass or more and 100% by mass or less of the entire siloxane resin contained in the cured film, that is, 65% by mass or more and 100% by mass of the entire siloxane resin contained in the resin composition for forming a light transmissive cured film. % Or less is composed of the above silsesquioxane structure. This proportion is preferably 80% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and most preferably 100% by mass (however, 100% by mass). Even in this case, other components such as inevitable impurities may be contained within a range that does not impair the desired effect.
- the siloxane resin of this embodiment may contain the specific polysilsesquioxane structure individually by 1 type, or may contain 2 or more types.
- the siloxane resin of this embodiment is preferably a hydrolytic condensate obtained by hydrolytic condensation of an alkyltrialkoxysilane.
- an alkoxysilane raw material containing an alkyltrialkoxysilane can be used as a starting raw material.
- the alkoxysilane raw material intends the starting raw material comprised from alkoxysilane (silicon compound which has an alkoxy group).
- An alkyltrialkoxysilane is an organosilicon compound in which one alkyl group and three alkoxy groups are bonded to a silicon atom, and can be represented by the following formula (2).
- Formula (2) R 2 Si (OR 3 ) 3 (R 2 represents an alkyl group having 1 to 3 carbon atoms, an alkoxyalkyl group having 1 to 8 carbon atoms, a fluoroalkyl group having 1 to 10 carbon atoms, and R 3 represents an alkyl group.)
- the alkyl group of alkyltrialkoxysilane (R 2 in formula (2)) is not particularly limited as long as it is within the above range, and specifically, methyl group, ethyl group, propyl group, isopropyl group, methoxymethyl group, Methoxypropyl group, ⁇ -glycidoxymethyl group, ⁇ -glycidoxypropyl group, trifluoromethyl group, trifluoroethyl group, trifluoropropyl group, perfluoroethyl group, perfluoropropyl group, tridecafluorooctyl group Etc.
- a methyl group, an ethyl group, a ⁇ -glycidoxypropyl group, a trifluoromethyl group, a trifluoropropyl group, and a tridecafluorooctyl group are preferable, and a methyl group is most preferable.
- the alkoxy group of the alkyltrialkoxysilane is not particularly limited, and examples thereof include a methoxy group and an ethoxy group. More specifically, R 3 in the formula (2) is preferably a linear or branched alkyl group having 1 to 20 carbon atoms. Of these, a carbon number of 1 to 10 is preferable, and a carbon number of 1 to 4 is more preferable. In particular, an ethoxy group in which R 3 in the formula (2) is an ethyl group is preferable because the hydrolysis rate can be easily controlled.
- alkyltrialkoxysilane examples include methyltrimethoxysilane, methyltriethoxysilane, methyltripropoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, propyltrimethoxysilane, propyltriethoxysilane, and ⁇ -glycidoxypropyl.
- alkyltrialkoxysilane examples include trimethoxysilane, trifluoropropyltrimethoxysilane, and tridecafluorooctyltrimethoxysilane.
- methyltriethoxysilane, ethyltriethoxysilane, and trifluoropropyltrimethoxysilane are preferably used, and methyltriethoxysilane is most preferably used.
- alkyl trialkoxysilane only 1 type may be used and 2 or more types may be used together.
- the alkoxysilane raw material is preferably alkyltrialkoxysilane, more preferably 80% by mass or more and 100% by mass or less, and more preferably 95% by mass or more and 100% by mass or less. It is preferable that the content is within the range because the light receiving sensitivity is more effectively improved.
- Tetraalkoxysilane As the alkoxysilane raw material, in addition to the trialkoxysilane, other alkoxysilanes can be used, and tetraalkoxysilane is particularly preferable. By containing tetraalkoxysilane, the crosslink density in the hydrolyzed condensate is increased, which is preferable in terms of further improving the electrical insulation, development resistance, and heat resistance of the film obtained by hardening.
- Tetraalkoxysilane is an organosilicon compound in which four alkoxy groups are bonded to a silicon atom and can be represented by the following formula (3).
- the alkoxy group of tetraalkoxysilane is not particularly limited, and examples thereof include a methoxy group and an ethoxy group. More specifically, R 4 in formula (3) is preferably a linear or branched alkyl group having 1 to 20 carbon atoms. Of these, a carbon number of 1 to 10 is preferable, and a carbon number of 1 to 4 is more preferable. In particular, an ethoxy group in which R 4 in the formula (3) is an ethyl group is preferable because the hydrolysis rate can be easily controlled.
- tetraalkoxysilane examples include tetramethoxysilane, tetraethoxysilane, tetra-n-propoxysilane, tetraisopropoxysilane, tetra-n-butoxysilane, tetraisobutoxysilane, tetra-tert-butoxysilane, and the like. . Of these, tetramethoxysilane and tetraethoxysilane are preferably used. In addition, as tetraalkoxysilane, only 1 type may be used and 2 or more types may be used together.
- the content of tetraalkoxysilane in the alkoxysilane raw material is not particularly limited, but is preferably 35% by mass or less, more preferably 20% by mass or less, from the viewpoint that the heat resistance of the development resistance film of the composition is more excellent. preferable. Although there is no lower limit in particular, in order to obtain the effect of adding tetraalkoxysilane, it is preferably 0.01% by mass or more, and more preferably 0.1% by mass or more.
- a substituent for which substitution / non-substitution is not specified means that the group may have an arbitrary substituent. This is also synonymous for compounds that do not specify substitution / non-substitution.
- Preferred substituents include the following substituent T.
- substituent T examples include the following.
- An alkyl group preferably an alkyl group having 1 to 20 carbon atoms, such as methyl, ethyl, isopropyl, t-butyl, pentyl, heptyl, 1-ethylpentyl, benzyl, 2-ethoxyethyl, 1-carboxymethyl, etc.
- alkenyl A group preferably an alkenyl group having 2 to 20 carbon atoms such as vinyl, allyl, oleyl and the like
- an alkynyl group preferably an alkynyl group having 2 to 20 carbon atoms such as ethynyl, butadiynyl, phenylethynyl and the like
- a cycloalkyl group preferably a cycloalkyl group having 3 to 20 carbon atoms, such as cyclopropyl, cyclopentyl, cyclohexyl, 4-methylcyclohex
- a compound or a substituent when a compound or a substituent includes an alkyl group, an alkenyl group, etc., these may be linear or branched, and may be substituted or unsubstituted. When an aryl group, a heterocyclic group, or the like is included, they may be monocyclic or condensed, and may be substituted or unsubstituted.
- the siloxane resin contained in the resin composition for forming a light transmissive cured film of the present embodiment can be obtained through hydrolysis reaction and condensation reaction using the above-described alkoxysilane raw material.
- hydrolysis reaction and the condensation reaction known methods can be used, and a catalyst such as an acid or a base may be used as necessary.
- the catalyst is not particularly limited as long as the pH is changed.
- the acid for example, nitric acid, oxalic acid, acetic acid, formic acid, hydrochloric acid, etc.
- the alkali for example, Ammonia, triethylamine, ethylenediamine and the like can be mentioned.
- the amount to be used is not particularly limited as long as the siloxane resin satisfies a predetermined molecular weight.
- a solvent may be added to the reaction system for the hydrolysis reaction and the condensation reaction.
- the solvent is not particularly limited as long as the hydrolysis reaction and the condensation reaction can be performed.
- water alcohols such as methanol, ethanol, and propanol
- ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, and ethylene glycol monopropyl ether And esters such as methyl acetate, ethyl acetate, butyl acetate, and propylene glycol monomethyl ether acetate
- ketones such as acetone, methyl ethyl ketone, and methyl isoamyl ketone.
- a solvent different from the solvent containing the siloxane resin described later is preferably used, and an alcohol compound having 1 to 5 carbon atoms or an ether compound having 2 to 6 carbon atoms is more preferably used.
- the conditions (temperature, time, amount of solvent) for the hydrolysis reaction and condensation reaction are appropriately selected according to the type of material used.
- the weight average molecular weight of the siloxane resin used in this embodiment is 1,000 to 50,000. Among these, 2,000 to 45,000 is preferable, 2,500 to 25,000 is more preferable, and 3,000 to 25,000 is particularly preferable. By setting the weight average molecular weight within the above range, it is preferable that the light receiving sensitivity is easily improved. In addition, a weight average molecular weight is a value when it measures using well-known GPC (gel permeation chromatography), and converts into standard polystyrene.
- GPC gel permeation chromatography
- the content of the siloxane resin in the composition of the present embodiment is preferably more than 5% by mass and 50% by mass or less with respect to the total amount of the composition substances. Among these, 10 to 45% by mass is more preferable, and 15 to 40% by mass is particularly preferable.
- the content is not less than the above lower limit value or more than the above lower limit value, it is difficult to generate voids, which is particularly good in improving the light receiving sensitivity.
- the content is less than or equal to the above upper limit value, the film thickness becomes sufficiently thick and does not cause cracks and the like, and is highly practical.
- the resin for forming a light transmissive cured film of the present embodiment preferably contains a surfactant having a polyoxyalkylene structure.
- the polyoxyalkylene structure refers to a structure in which an alkylene group and a divalent oxygen atom are adjacent to each other, and specific examples include an ethylene oxide (EO) structure and a propylene oxide (PO) structure.
- EO ethylene oxide
- PO propylene oxide
- the surfactant having a polyoxyalkylene structure various surfactants such as a fluorosurfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone surfactant as long as they have the polyoxyalkylene structure.
- Surfactants can be used. Among these, nonionic surfactants, anionic surfactants, and silicone surfactants are preferable, nonionic surfactants and anionic surfactants are more preferable, and anionic surfactants are most preferable.
- fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F479, F482, F554, F780, F781 (above DIC Corporation), Florard FC430, FC431, FC171 (above, Sumitomo 3M Limited), Surflon S-382, S-141, S- 145, SC-101, SC-103, SC-104, SC-105, SC-106, SC1068, SC-381, SC-383, S393, KH-40 (above, manufactured by Asahi Glass Co., Ltd.) ), EFtop EF301, EF303, EF351, EF352 (above, manufactured by Gemco), PF636, PF65 , PF6320, PF6520, PF7002 (OMNOVA Co., Ltd.), and the like.
- nonionic surfactant examples include glycerol, trimethylolpropane, trimethylolethane ethoxylate and propoxylate (for example, glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, Polyoxyethylene oleyl ether (Emulgen 404 manufactured by Kao Corporation), polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, ELEBASE manufactured by Aoki Oil & Fat Co., Ltd. Examples include BUB-3.
- anionic surfactants include W004, W005, W017 (manufactured by Yusho Co., Ltd.), EMULSOGEN COL-020, EMULSOGEN COA-070, EMULSOGEN COL-080 manufactured by Clariant Japan Co., Ltd., Daiichi Kogyo Examples include Prisurf A208B manufactured by Pharmaceutical Co., Ltd.
- silicone surfactant examples include “Toray Silicone DC3PA”, “Toray Silicone SH7PA”, “Tore Silicone DC11PA”, “Tore Silicone SH21PA”, “Tore Silicone SH28PA”, “Toray Silicone” manufactured by Toray Dow Corning Co., Ltd.
- examples of the surfactant having a preferred polyoxyalkylene structure of the present embodiment include surfactants represented by the following general formula (4).
- Formula (4) R 5 O (R 6 O) m R 7 (In the above formula, R 5 represents an alkyl group having 1 to 20 carbon atoms, R 6 represents an alkylene group having 1 to 4 carbon atoms, and R 7 represents a hydrogen atom, a carboxyl group, or —PO 3 H 2 . M represents an integer of 1 to 8.)
- R 5 in formula (4) may be a linear or branched alkyl group. Of these, 5 to 20 carbon atoms are preferable, and 12 to 18 carbon atoms are more preferable.
- R 6 in Formula (4) may be a linear or branched alkylene group, and examples thereof include a methylene group, an ethylene group, a propylene group, an isopropylene group, a butylene group, and an isobutylene group. Among them, an ethylene group and an isopropylene group (a group that forms an adjacent O atom and an ethylene oxide structure or a propylene oxide structure) are preferable.
- R 7 in formula (4) is preferably a hydrogen atom or a carboxyl group, and most preferably a carboxyl group.
- the addition amount of the surfactant is not particularly limited, but as its lower limit, it is preferably added in a range of 1 part by mass or more with respect to 100 parts by mass of the curable resin, and 1.5 parts by mass or more. More preferably, it is most preferably 7.5 parts by mass or more. Although an upper limit is not specifically limited, 30 mass parts or less are preferable and 15 mass parts or less are more preferable.
- surfactants may be used together with or separately from the surfactant having the above polyoxyalkylene structure.
- surfactant those commonly used can be used, and among them, a silicone surfactant is preferably used in combination.
- silicone surfactants include polysiloxane type surfactants in which an organic group is introduced into a side chain or a terminal, or a side chain and a terminal.
- examples thereof include a carbinol group, a methacryl group, a polyether group, a mercapto group, a carboxyl group, a phenol group, a silanol group, and a diol group.
- alkoxysilane compound ⁇ an alkylalkoxysilane compound having a specific carbon number
- surfactant having the above polyoxyalkylene structure.
- alkoxysilane compound ⁇ an alkoxysilane compound having an alkyl group having 4 to 12 carbon atoms (more preferably 6 to 10 carbon atoms) is preferably used.
- this is represented by a general formula, it is preferably a compound represented by the following formula (5).
- R 51 is the same group as R 4 .
- R 52 is preferably an alkyl group having 4 to 12 carbon atoms, and more preferably an alkyl group having 6 to 10 carbon atoms.
- n is an integer of 1 to 3.
- the amount of the surfactant used in combination with the surfactant having a polyoxyalkylene structure may be arbitrarily adjusted.
- the surfactant used in combination with 100 parts by mass of the surfactant having a polyoxyalkylene structure is preferably used in an amount of 0.01 to 100 parts by weight, more preferably 1 to 100 parts by weight, and even more preferably 10 to 100 parts by weight.
- the curable resin composition or a cured film obtained by curing the curable resin composition preferably contains hollow particles.
- hollow particles not only hollow structures but also porous fine particles may be used.
- the hollow particle has a structure having a cavity inside and refers to a particle having a cavity surrounded by an outer shell, and the porous particle refers to a porous particle having a large number of cavities.
- hollow particles or porous particles are appropriately referred to as “specific particles”.
- the specific particles may be organic particles or inorganic particles.
- the porosity of the specific particles is preferably 10 to 80%, more preferably 20 to 60%, and most preferably 30 to 60%.
- the porosity of the specific particles is preferably in the above range from the viewpoint of reducing the refractive index and maintaining the durability of the particles.
- hollow particles are more preferable and hollow silica particles are particularly preferable from the viewpoint of easily reducing the refractive index.
- JP-A-2001-233611 As a method for producing hollow particles, for example, the method described in JP-A-2001-233611 can be applied.
- a method for producing porous particles for example, methods described in JP-A Nos. 2003-327424, 2003-335515, 2003-226516, 2003-238140 and the like can be applied.
- the specific particles preferably have an average primary particle diameter of 1 nm to 200 nm, more preferably 10 nm to 100 nm.
- the average primary particle diameter of the specific particles can be determined from the photograph obtained by observing the dispersed particles with a transmission electron microscope. The projected area of the particles is obtained, and the equivalent circle diameter is obtained therefrom, which is the average primary particle diameter.
- the average primary particle diameter in this specification is calculated by measuring the projected area of 300 or more particles and obtaining the equivalent circle diameter.
- the refractive index of the specific particles is preferably 1.10 to 1.40, more preferably 1.15 to 1.35, and most preferably 1.15 to 1.30.
- the refractive index here represents the refractive index of the entire particle, and when the particle is a hollow particle, it does not represent the refractive index of only the outer shell forming the hollow particle.
- the refractive index of the porous particles can be measured with an Abbe refractometer (manufactured by Atago Co., Ltd.) (measurement temperature 25 ° C., wavelength 633 nm).
- the specific particles are preferably hollow or porous inorganic particles from the viewpoint of lowering the refractive index.
- the inorganic low refractive index particles include magnesium fluoride and silica particles, and silica particles are more preferable from the viewpoint of low refractive index properties, dispersion stability, and cost.
- the average primary particle diameter of these inorganic particles is preferably 1 nm to 100 nm, and more preferably 1 nm to 60 nm.
- the crystal system may be either crystalline or amorphous, and may be monodispersed particles or aggregated particles that satisfy a predetermined particle diameter.
- the shape is most preferably a spherical shape, but may be a bead shape, a shape having a major axis / minor axis ratio of 1 or more, or an indefinite shape.
- the specific surface area of the inorganic particles is preferably 10 m 2 / g to 2000 m 2 / g, more preferably 20 m 2 / g to 1800 m 2 / g, and 50 m 2 / g to 1500 m 2 / g. Is most preferred.
- Inorganic particles have a physical surface, such as plasma discharge treatment or corona discharge treatment, in order to stabilize dispersion in the curable resin composition or to increase affinity and binding properties with the binder component.
- Chemical surface treatment with a treatment, a surfactant, a coupling agent, or the like may be performed.
- the use of a coupling agent is particularly preferred.
- an alkoxy metal compound eg, titanium coupling agent, silane coupling agent
- silane coupling treatment is particularly effective.
- the organosilyl group (monoorganosilyl, diorganosilyl, triorganosilyl group) becomes silica particles by the reaction of the silane compound and the silanol group. It binds to the surface.
- the organic group on the surface of the surface-treated silica particles include saturated or unsaturated hydrocarbon groups having 1 to 18 carbon atoms and halogenated hydrocarbon groups having 1 to 18 carbon atoms.
- the above-mentioned coupling agent may be used as a surface treatment agent for inorganic particles in order to perform surface treatment in advance before the preparation of the coating solution for a low refractive index film, or may be added as an additive at the time of preparing the coating solution.
- the inorganic particles are preferably dispersed in the medium in advance before the surface treatment in order to reduce the load of the surface treatment.
- a more preferred embodiment of the specific particles is silica particles.
- Commercially available particles can be preferably used as the specific particles made of silica.
- Julia Catalytic Chemical's through rear series hinder particles, isopropanol (IPA) dispersion, 4-methyl-2-pentanone (MIBK) dispersion, etc., such as through rear 2320
- OSCAL series Nissan Chemical Co., Ltd.
- Snowtex series (porous particles, IPA dispersion, ethylene glycol dispersion, methyl ethyl ketone (MEK) dispersion, dimethylacetamide dispersion, MIBK dispersion, propylene glycol monomethyl acetate dispersion, propylene glycol monomethyl ether dispersion, methanol dispersion, ethyl acetate dispersion, butyl acetate) Dispersion, xylene-n-butanol dispersion, toluene dispersion, etc.
- MEK methyl ethyl ketone
- MIBK-SD-L, MIBK-ST, etc. Sirenax (porous particles) manufactured by Nittetsu Mining Co., Ltd., PL manufactured by Fuso Chemical Industry Co., Ltd. series Porous particles, IPA dispersion, toluene dispersion, propylene glycol monomethyl ether dispersion, methyl ethyl ketone dispersion, etc.
- PL-1-IPA, PL-2L-PGME, etc., Aerosil series manufactured by EVONIK porous particles, propylene glycol acetate dispersion
- Silica particles such as ethylene glycol dispersion, MIBK dispersion, etc.
- silica particles are added to the photosensitive composition as a dispersion containing silica particles and a particle dispersant (details of the particle dispersant will be described later), the content of silica particles in the silica dispersion is 10 % By mass to 50% by mass is preferable, 15% by mass to 40% by mass is more preferable, and 15% by mass to 30% by mass is even more preferable.
- the content of the specific particles with respect to the total solid content in the curable resin composition is preferably 5% by mass to 95% by mass, more preferably 10% by mass to 90% by mass, and 20% by mass to 90% by mass. More preferably, it is mass%.
- the coating amount of the specific particles is preferably 1 mg / m 2 to 100 mg / m 2 , more preferably 5 mg / m 2 to 80 mg / m 2 , and still more preferably. 10 mg / m 2 to 60 mg / m 2 .
- the coating amount of the specific particles is preferably 1 mg / m 2 or more, the effect of lowering the refractive index and the effect of improving scratch resistance can be surely obtained, and when it is 100 mg / m 2 or less, the surface of the cured film has fine irregularities. It is possible to suppress deterioration of the integrated reflectance.
- the curable resin composition or a cured film obtained by curing the curable resin composition preferably contains a fluororesin.
- a fluorine-based siloxane polymer described in JP-A No. 2004-21036 can be mentioned.
- Fluorine-based resin is a resin containing fluorine in a substance molecule.
- polytetrafluoroethylene, polyhexafluoropropylene, tetrafluoroethylene / hexafluoropropylene copolymer, tetrafluoroethylene / perfluoro examples include alkyl vinyl ether copolymers, tetrafluoroethylene / ethylene copolymers, hexafluoropropylene / propylene copolymers, polyvinylidene fluorides, vinylidene fluoride / ethylene copolymers, among which polytetrafluoroethylene, tetra Fluoroethylene / perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene / hexafluoropropylene copolymer, tetrafluoroethylene / ethylene copolymer, and polyvinylidene fluoride are preferred.
- polytetrafluoroethylene and tetrafluoroethylene / ethylene copolymer are preferred, polytetrafluoroethylene is more preferred, and polytetrafluoroethylene-containing mixed powder comprising polytetrafluoroethylene particles and an organic polymer is also preferred.
- the molecular weight of fluororesin such as polytetrafluoroethylene is preferably in the range of 100,000 to 10,000,000, more preferably in the range of 100,000 to 1,000,000, and is particularly effective for extrusion moldability and flame retardancy.
- polytetrafluoroethylene-containing mixed powder composed of polytetrafluoroethylene particles and an organic polymer
- Metal (registered trademark)” A series from Mitsubishi Rayon Co., Ltd.
- METABBRENE (registered trademark)” A-3800 and the like are commercially available.
- polytetrafluoroethylene “Teflon (registered trademark)” 6-J and the like are prone to agglomerate, and when mixed strongly with other resin compositions with a Henschel mixer or the like, agglomeration may occur due to agglomeration.
- a polytetrafluoroethylene-containing mixed powder composed of polytetrafluoroethylene particles and an organic polymer is excellent in handling properties and dispersibility, and is particularly preferably used.
- the polytetrafluoroethylene-containing mixed powder composed of the polytetrafluoroethylene particles and the organic polymer is not limited, but polytetrafluoroethylene disclosed in Japanese Patent Application Laid-Open No. 2000-226523. Examples thereof include polytetrafluoroethylene-containing mixed powder composed of particles and an organic polymer.
- the organic polymer include aromatic vinyl monomers, acrylate monomers, and vinyl cyanide.
- An organic polymer containing 10% by mass or more of a monomer may be a mixture thereof.
- the polytetrafluoroethylene content in the polytetrafluoroethylene-containing mixed powder is 0.1% by mass to 90% by mass. It is preferable that it is mass%.
- fluororesin an amorphous fluororesin, a copolymer oligomer containing a perfluoroalkyl group-containing acrylate or methacrylate, a fluorocoating agent, a fluorosurfactant, a fluorocarbon surface treatment containing an electron beam or an ultraviolet curing component
- fluorine-based surface treatment agent containing an agent and a thermosetting component is also preferable.
- alkyl acrylate or alkyl methacrylate is preferable.
- amorphous fluororesin examples include Lumiflon manufactured by Asahi Glass Co., Ltd. and CYTOP.
- Copolymer oligomers containing perfluoroalkyl group-containing (meth) acrylate and alkyl (meth) acrylate as main components include Nippon Oil & Fats Modiper F Series, Daikin Industries Unidyne, Dainippon Ink & Chemicals Examples thereof include F470 series, F480 series, F110 series, and the like, and block copolymerization is more preferable.
- a fluorine-type coating agent Sumitomo 3M EGC1700 is mentioned.
- fluorosurfactant examples include Megafac F114, F410 series, 440 series, 450, 490 series and the like manufactured by Dainippon Ink and Chemicals, Inc.
- fluorine-based surface treating agent containing an electron beam or an ultraviolet curing component examples include Polyfox PF-3320 manufactured by Omniva Solutions, Cheminox FAMAC-8 manufactured by Unimatec, and EGC1720 manufactured by Sumitomo 3M.
- fluorine-based surface treatment agent containing a thermosetting component examples include EGC1720 manufactured by Sumitomo 3M, NH-10 and NH-15 manufactured by Dainippon Ink and Chemicals, Inc.
- amorphous fluororesins include resins having the following structural formula.
- the fluororesin may be a mixture of a plurality of types of fluorine-containing compounds.
- the addition amount of the fluorine-based resin is not particularly limited, but from the same viewpoint as the siloxane resin, the content is preferably in the same range as the siloxane resin.
- the resin composition for forming a light transmissive cured film of the present embodiment may further contain a curing agent.
- curing agent the hardening
- curing agents can be easily obtained by reacting a metal alkoxide with a chelating agent.
- chelating agents include ⁇ -diketones such as acetylacetone, benzoylacetone, and dibenzoylmethane; ⁇ -keto acid esters such as ethyl acetoacetate and ethyl benzoylacetate.
- the metal group chelate compound include ethyl acetoacetate aluminum diisopropylate, aluminum tris (ethyl acetoacetate), alkyl acetoacetate aluminum diisopropylate, aluminum monoacetylacetate bis (ethyl acetoacetate), aluminum tris
- Aluminum chelate compounds such as (acetylacetonate), ethyl acetoacetate magnesium monoisopropylate, magnesium bis (ethylacetoacetate), alkylacetoacetate magnesium monoisopropylate, magnesium chelate compounds such as magnesium bis (acetylacetonate), zirconium tetra Acetylacetonate, zirconium tributoxyacetylacetonate, di Benzalkonium acetylacetonate bis (ethylacetoacetate), manganese acetylacetonate, cobalt acetylacetonate, copper acetylacetonate, titanium acet
- aluminum tris (acetylacetonate), aluminum tris (ethylacetoacetate), magnesium bis (acetylacetonate), magnesium bis (ethylacetoacetate), and zirconium tetraacetylacetonate are preferred, and storage stability Considering availability, aluminum tris (acetylacetonate) and aluminum tris (ethyl acetoacetate) are particularly preferable.
- the total content of the curing agent is preferably 0.001 to 10 parts by mass, more preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of the total content of the siloxane resin. Particularly preferred is 0.01 to 0.5 parts by mass.
- the resin composition for forming a light transmissive cured film (curable resin composition) of the present embodiment can be configured using an organic solvent.
- the organic solvent is not particularly limited as long as it satisfies the solubility of each component and the applicability of the resin composition for forming a light-transmitting cured film, but in particular, the solubility, applicability, and safety of the binder are improved. It is preferable to select in consideration.
- organic solvents examples include esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, and ethyl lactate.
- Alkyl oxyacetate eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)
- alkyl 3-oxypropionate Esters eg, methyl 3-oxypropionate, ethyl 3-oxypropionate, etc.
- 2- Xylpropionic acid alkyl esters eg, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.
- ethers For example, diethylene glycol dimethyl ether, dipropylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene Glycol mono n-butyl ether, propylene glycol mono tert-butyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc., and ketones
- methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and the like, and aromatic hydrocarbons include, for example, tolulose,
- the solvent to be applied is preferably 50 to 99.9% by mass in the total amount of the light transmissive cured film forming resin composition. More preferably, it is 95% by mass.
- the amount of the compound is equal to or more than the above lower limit value, the coating property is good, which is preferable. In the case where it is not more than the above upper limit value, the coating property is also good, which is preferable.
- the viscosity of the resin composition for forming a light transmissive cured film of the present embodiment is preferably adjusted from the viewpoint of forming a good permeable film having a thickness.
- the specific viscosity range is not particularly limited, but is preferably 1 to 20 cP, more preferably 2 to 15 cP, and particularly preferably 4 to 6 cP. Unless otherwise specified, the viscosity value in this specification is based on the measurement method described later. Measurement method Measured at room temperature (about 25 ° C.) using an E-type viscometer “TV-20 type viscometer / corn plate type TVE-20L” (manufactured by Toki Sangyo). Sampling is the average of the values measured for viscosity 5 times every 100 seconds.
- the composition means that two or more components exist substantially uniformly in a specific composition.
- substantially uniform means that each component may be unevenly distributed within the range where the effects of the invention are exerted.
- the composition is not particularly limited as long as the above definition is satisfied, is not limited to a fluid liquid or a paste, and includes a solid or powder composed of a plurality of components. Furthermore, even when there is a sediment, it means that the composition maintains a dispersion state for a predetermined time by stirring.
- a microlens unit is incorporated in a solid-state imaging device, and includes a microlens body and a light-transmitting cured film that covers the microlens body.
- the term “microlens body” includes the meaning of a microlens array, and may be collectively referred to simply as “lens members” or “lens members”.
- the microlens array is used as a microlens body, it is ideal that the groove, which is the gap between the microlens bodies, is embedded in the light-transmitting cured film without any gap, and no voids are generated. .
- the microlens unit does not generate void-derived noise in the light passing through the unit, and exhibits good quality performance.
- the shape of the microlens body according to the present embodiment is not particularly limited, but a convex lens is preferably used.
- the term “convex lens” refers to a lens including a plano-convex lens, a biconvex lens, a convex meniscus lens, etc., and having a portion bulging in at least one direction unless otherwise specified.
- Specific examples of the shape of the convex lens include a polyhedron shape, a spherical shape, and an aspherical shape (a shape without a spherical aberration formed by a free-form surface).
- Examples of the shape of the polyhedron include a regular polyhedron shape, a semi-regular polyhedron shape, a cylindrical shape, and a cylindrical shape. Further, if there is a light collecting effect, a Fresnel lens or the like is also included in the convex lens in the present invention.
- the refractive index of the microlens body forming the lower layer of the cured film is 1.65 or more, preferably 1.75 or more, more preferably 1.85 or more, and particularly preferably 1.89 or more. By setting it as this lower limit value or more, the sensitivity of the camera module can be improved. From the same viewpoint, the refractive index is further 1.95 or less and preferably 1.93 or less. In the present invention, the refractive index means a value measured by the measurement method shown in the examples below unless otherwise specified.
- the difference between the refractive index of the light transmissive cured film and the microlens body is not particularly limited, but is preferably 0.42 or more, and more preferably 0.45 or more. As an upper limit, it is preferable that it is 0.58 or less, and it is more preferable that it is 0.55 or less.
- the lower layer preferably contains TiO 2 or zirconia, and preferably has the particles or hollow particles. Selecting this as the lower layer is preferable because variations among pixels are reduced.
- the particle diameter of the particles is not particularly limited, but the average particle diameter is 1 nm to 100 nm, preferably 1 nm to 80 nm, and particularly preferably 1 nm to 50 nm.
- the average particle diameter of the metal oxide fine particles refers to a value measured by the measurement method employed in Examples described below unless otherwise specified.
- grain is not specifically limited, What is generally applied to this kind of product can be selected suitably, and can be used.
- the bulging directions are arranged substantially in the same direction.
- the arrangement means that two or more are arranged side by side at a predetermined interval, and the interval may be uniform or different.
- it is two-dimensionally arranged in one plane, and more preferably two-dimensionally arranged at equal intervals.
- the distance between the lenses is usually in the range of 10 to 1,000 nm, and more preferably 100 to 300 nm when densely arranged. In most cases, concave portions are formed between the lenses, and the shape thereof is determined by the shape of the bulging convex lens.
- a concave portion having a cross section in which two V-shaped lines are formed by reverse arcs is formed.
- the height (thickness) of the lens body is not particularly limited, but is preferably 200 to 1500 nm, and practically 200 to 1000 nm.
- the width of the lens body is not particularly limited, but is 70 to 90% of the size of the pixel formed below (specifically, in the case of an image sensor having one pixel of 1.4 ⁇ m ⁇ , 0.98 ⁇ m to 1.26 ⁇ m) is practical.
- the height of the lens body here refers to the height of the longest point of the lens body.
- the embodiment that can be taken by the microlens unit in the present invention is not particularly limited, and can be appropriately selected according to the use and purpose of the microlens unit. Specific examples include the following, but the present invention is not limited to these configurations.
- the term “coating” in this specification includes not only the case where the object is directly in contact with the object, but also covering with another layer.
- First embodiment A mode in which the microlens body is directly coated with a light-transmitting cured film
- Second mode A microlens body is coated with an overcoat layer, and further coated with a light-transmitting cured film
- Third Aspect Aspect in which a layer of a light transmissive cured film is formed between the microlens body and the semiconductor light receiving unit Among the above, the first aspect is preferred. Hereinafter, the manufacturing method is demonstrated in detail about a 1st aspect.
- the resin composition for forming a light transmissive cured film of this embodiment is preferably used as a material for forming an antireflection film or a low refractive index film.
- a method of applying to a workpiece such as a lens body in order to form a cured film is not particularly limited, and any appropriate known application method can be applied. For example, a spin coating method, a dip coating method, a roller blade method, a spray method, or the like can be applied. As needed, it is preferable to heat-treat etc. to the apply
- the coated film is preferably left at 60 to 200 ° C., more preferably 100 to 150 ° C., preferably 1 to 10 minutes, more preferably 1 to 5 minutes.
- the solvent removal may be performed twice or more under different conditions.
- the coated resin composition for forming a light-transmitting cured film is heated to further promote curing.
- the heating temperature is not particularly limited as long as the coating film is cured, but it is usually preferably 150 to 400 ° C. Of these, 150 to 280 ° C. is preferable, and 150 to 240 ° C. is more preferable. If it is the said heating conditions, a coating film will fully harden
- the heating time is not particularly limited, but is preferably 1 to 60 minutes, and more preferably 1 to 30 minutes.
- the heating method is not particularly limited, and heating by a hot plate, oven, furnace, or the like can be applied.
- the atmosphere during heating is not particularly limited, and an inert atmosphere, an oxidizing atmosphere, or the like can be applied.
- the inert atmosphere can be realized by an inert gas such as nitrogen, helium, or argon.
- the oxidizing atmosphere can be realized by a mixed gas of these inert gas and oxidizing gas, or air may be used. Examples of the oxidizing gas include oxygen, carbon monoxide, and oxygen dinitride.
- the heating step can be performed under pressure, normal pressure, reduced pressure, or vacuum.
- the cured film obtained by the heat treatment is mainly composed of organic silicon oxide (SiOC).
- SiOC organic silicon oxide
- an antireflection film As a suitable usage mode of the cured film in the present invention, an antireflection film may be mentioned. In particular, it is suitable as an antireflection film for an optical device using a solid-state imaging device or the like, for example, a microlens for an image sensor, a plasma display panel, a liquid crystal display, organic electroluminescence, or the like.
- the specular average reflectance in the wavelength region of 450 to 650 nm is preferably 3% or less, more preferably 2% or less, and most preferably 1% or less.
- the reflectance is preferably as small as possible, and most preferably 0.
- the haze of the antireflection film is preferably 3% or less, more preferably 1% or less, and most preferably 0.5% or less.
- the reflectance is preferably as small as possible, and most preferably substantially zero.
- a solid-state imaging device includes a microlens unit on a semiconductor light receiving unit, and is incorporated so that a microlens body and a color filter are in contact with each other.
- the light receiving element receives light passing through the light-transmitting cured film, the lens body, and the color filter in this order, and functions as an image sensor.
- the light-transmitting cured film functions as an antireflection film, improves the light collection efficiency of the lens body, and the light collected efficiently by the lens body is detected by the light receiving element through the color filter. .
- the upper and lower sides of the element or unit are not particularly limited, but unless otherwise specified, the light transmissive cured film side is the upper side or the outer side, and the light receiving element side is the lower side or the inner side.
- Examples of solid-state imaging devices to which microlens arrays are applied include those described in Japanese Patent Application Laid-Open No. 2007-119744. Specifically, a transfer electrode is provided between a CCD region and a photoelectric conversion unit formed on the surface of the semiconductor substrate, and a light shielding film is formed thereon via an interlayer film. On the light shielding film, an interlayer insulating film made of BPSG (Boro-Phospho-Silicate Glass), a passivation film, a transparent planarizing film having a low refractive index made of acrylic resin, etc. are laminated. G. B. Are combined to form a color filter. Further, a large number of microlenses are arranged so as to be positioned above the photoelectric conversion portion which is a light receiving region via a protective film.
- BPSG Bo-Phospho-Silicate Glass
- the microlens unit preferably has the following configuration. That is, a plurality of convex lenses are applied as the microlens body, the plurality of convex lenses are arranged with their bulging directions substantially in the same direction, and the plurality of convex lenses are covered from the bulging direction.
- the light-transmitting cured film is covered with the light-transmitting cured film, and the recessed portions formed between the plurality of convex lenses are filled with the light-transmitting cured film substantially without any gaps.
- the opposite side of the lens body is a flat surface.
- the microlens unit is also suitably used for other uses other than for a solid-state imaging device.
- Other applications include, for example, various OA devices, liquid crystal display elements such as liquid crystal televisions, mobile phones, and projectors, and imaging optical systems for on-chip color filters such as facsimiles, electronic copying machines, and solid-state image sensors. These can be used for various applications.
- the metal oxide particles are inorganic particles having a high refractive index, such as titanium (Ti), zirconium (Zr), aluminum (Al), silicon (Si), zinc (Zn) or magnesium ( Mg) oxide particles, and preferably titanium dioxide (TiO 2 ) particles, zirconium dioxide (ZrO 2 ) particles, or silicon dioxide (SiO 2 ) particles. It is more preferable that the The colorless or transparent titanium dioxide particles can be represented by the chemical formula TiO 2 , preferably have a purity of 70% or more, more preferably 80% or more, and further a purity of 85% or more. preferable.
- Low-order titanium oxide, titanium oxynitride and the like represented by the general formula Ti n O 2n-1 are preferably 30% by mass or less, and 20% by mass or less. More preferably, the content is 15% by mass or less.
- the primary particle diameter of the metal oxide particles is preferably 1 nm to 100 nm, more preferably 1 nm to 80 nm, and particularly preferably 1 nm to 50 nm. If the primary particle diameter of the metal oxide particles exceeds 100 nm, the refractive index and the transmittance may decrease. If it is less than 1 nm, the dispersibility and dispersion stability may decrease due to aggregation.
- the average particle diameter of the metal oxide particles is determined by the measurement method employed in the examples described later.
- the refractive index of the metal oxide particles is not particularly limited, but is preferably 1.75 to 2.70, more preferably 1.90 to 2.70 from the viewpoint of obtaining a high refractive index.
- the method for measuring the refractive index is the same as that for the hollow particles.
- the specific surface area of the metal oxide particles is preferably 10 m 2 / g to 400 m 2 / g, more preferably 20 m 2 / g to 200 m 2 / g, and 30 m 2 / g to 150 m 2 / g. Most preferably.
- the shape of the metal oxide particles is not particularly limited. For example, it can be a rice grain shape, a spherical shape, a cubic shape, a spindle shape, or an indefinite shape.
- the metal oxide particles may have been surface-treated with an organic compound.
- organic compounds used for the surface treatment include polyols, alkanolamines, stearic acid, silane coupling agents, and titanate coupling agents. Of these, silane coupling agents are preferred.
- the surface treatment may be carried out by using a single surface treatment agent or a combination of two or more surface treatment agents. It is also preferable that the surface of the metal oxide particles is covered with an oxide such as aluminum, silicon, or zirconia. Thereby, a weather resistance improves more.
- titanium dioxide particles As a metal oxide particle, what is marketed can be used preferably.
- examples of commercially available titanium dioxide particles include TTO series (TTO-51 (A), TTO-51 (C), etc.), TTO-S, and V series (TTO-S-1, TTO-) manufactured by Ishihara Sangyo Co., Ltd. S-2, TTO-V-3, etc.) and MT series (MT-01, MT-05, etc.) manufactured by Teika Corporation.
- zirconium dioxide particles include, for example, UEP (Daiichi Rare Element Chemical Co., Ltd.), PCS (Nippon Denko Co., Ltd.), JS-01, JS-03, JS-04 (Nippon Denko ( And UEP-100 (Daiichi Rare Element Chemical Industries, Ltd.).
- Examples of commercially available silicon dioxide particles include OG502-31 manufactured by Clariant Co.
- the metal oxide particles may be used singly or in combination of two or more.
- the content of the metal oxide particles in the composition is determined from the viewpoint of dispersion stability.
- the amount is preferably 10 to 90% by mass, more preferably 10 to 50% by mass, still more preferably 12 to 40% by mass, and particularly preferably 15 to 35% by mass.
- particularly for high-refractive-index microlenses it is 50% by mass to 90% by mass, more preferably 52% by mass to 85% by mass, and most preferably, based on the total solid content of the dispersion composition. It is 55% by mass to 80% by mass.
- the dispersion composition of this embodiment contains a graft copolymer (hereinafter also referred to as “specific resin”).
- the graft copolymer of this embodiment has a graft chain in which the number of atoms excluding hydrogen atoms is in the range of 40 to 10,000.
- the graft chain in this case means from the base of the main chain of the copolymer (the atom bonded to the main chain in a group branched from the main chain) to the end of the group branched from the main chain.
- the specific resin is a dispersion resin that imparts dispersibility to the metal oxide particles, and has an affinity for the solvent due to the graft chain. Excellent dispersion stability.
- the graft copolymer preferably has 40 to 10,000 atoms, more preferably 100 to 500, and more preferably 150 to 260, excluding hydrogen atoms per graft chain. Further preferred. If this number is too small, the graft chain is short, so that the steric repulsion effect is reduced and the dispersibility and dispersion stability may be lowered. On the other hand, if the amount is too large, the graft chain becomes too long, and the adsorptive power to the metal oxide particles may be reduced, resulting in reduced dispersibility and dispersion stability.
- the number of atoms excluding hydrogen atoms per graft chain is included from the base atom bonded to the polymer chain constituting the main chain to the end of the branch polymer branched from the main chain.
- a poly (meth) acrylic structure, a polyester structure, a polyurethane structure, a polyurea structure, a polyamide structure, a polyether structure, etc. can be used, but the interaction between the graft chain and the solvent is improved.
- a graft chain having a poly (meth) acrylic structure, a polyester structure and a polyether structure is preferable, and a polyester structure and a polyether structure are more preferable.
- the graft copolymer preferably has a structural unit having a graft chain (repeating unit), and can be obtained, for example, by polymerizing a macromonomer having a polymer structure as a graft chain based on a conventional method,
- the structure of such a macromonomer is not particularly limited as long as it has a substituent capable of reacting with the polymer main chain and has a graft chain that satisfies the requirements, but preferably a reactive double bond
- a macromonomer having a functional group can be preferably used.
- AA-6 manufactured by Toagosei Co., Ltd.
- AA-10 manufactured by Toagosei Co., Ltd.
- AB-6 manufactured by Toagosei Co., Ltd.
- AS-6 Toagosei Co., Ltd.
- AA-6 manufactured by Toagosei
- AA-10 manufactured by Toagosei
- AB-6 manufactured by Toagosei
- AS-6 manufactured by Toagosei
- AN-6 Toagosei Co., Ltd.
- Bremer PME-4000 manufactured by NOF Corporation
- the specific resin used in the present embodiment preferably includes at least a structural unit represented by any of the following formulas (1) to (4) as the structural unit having a graft chain.
- X 1 , X 2 , X 3 , X 4 and X 5 each independently represent a hydrogen atom or a monovalent organic group. From the viewpoint of synthesis restrictions, a hydrogen atom or an alkyl group having 1 to 12 carbon atoms is preferable, a hydrogen atom or a methyl group is more preferable, and a methyl group is particularly preferable.
- W 1 , W 2 , W 3 , and W 4 each independently represent an oxygen atom or NH, and particularly preferably an oxygen atom.
- R 3 represents a branched or straight chain alkylene group (the number of carbon atoms is preferably 1 to 10, more preferably 2 or 3, and from the viewpoint of dispersion stability, —CH 2 —CH (CH 3 ) A group represented by — or a group represented by —CH (CH 3 ) —CH 2 — is preferred. Two or more types of R 3 having different structures may be mixed and used in the specific resin.
- Y 1 , Y 2 , Y 3 , and Y 4 are each independently a divalent linking group and are not particularly limited in structure. Specific examples include the following linking groups (Y-1) to (Y-21). In the following structures, A and B represent bonds to the left terminal group and the right terminal group in formulas (1) to (4), respectively. Of the structures shown below, (Y-2) and (Y-13) are more preferred because of the ease of synthesis.
- Z 1 , Z 2 , Z 3 , and Z 4 are each independently a hydrogen atom or a monovalent substituent, and the structure of the substituent is not particularly limited.
- an alkyl group, a hydroxyl group examples include an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group, an arylthioether group, a heteroarylthioether group, and an amino group.
- the monovalent substituents represented by Z 1 to Z 3 are each independently an alkyl group having 5 to 24 carbon atoms or a carbon atom.
- an alkoxy group having 5 to 24 carbon atoms is preferable, and among them, an alkoxy group having a branched alkyl group having 5 to 24 carbon atoms or a cyclic alkyl group having 5 to 24 carbon atoms is particularly preferable.
- the monovalent substituent represented by Z 4 is preferably an alkyl group having 5 to 24 carbon atoms, and among them, each independently a branched alkyl group having 5 to 24 carbon atoms or a cyclic group having 5 to 24 carbon atoms.
- Alkyl groups are preferred.
- n, m, p, and q are each an integer of 1 to 500.
- j and k each independently represents an integer of 2 to 8.
- j and k are preferably integers of 4 to 6, and most preferably 5, from the viewpoint of dispersion stability.
- R 4 represents a hydrogen atom or a monovalent organic group, and is not particularly limited in terms of structure, but is preferably a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, more preferably a hydrogen atom or an alkyl group. is there.
- the alkyl group includes a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms.
- a linear alkyl group having 1 to 20 carbon atoms is more preferable, and a linear alkyl group having 1 to 6 carbon atoms is particularly preferable.
- Two or more types of R 4 having different structures may be mixed and used in the specific resin.
- the structural unit represented by the formula (1) is more preferably a structural unit represented by the following formula (1A) or (2A) from the viewpoint of dispersion stability.
- X 1, Y 1, Z 1 and n are as defined X 1, Y 1, Z 1 and n in Formula (1), and preferred ranges are also the same.
- X 2, Y 2, Z 2 and m are as defined X 2, Y 2, Z 2 and m in the formula (2), and preferred ranges are also the same.
- the specific resin is more preferably one having a structural unit represented by the formula (1A).
- the structural unit (repeating unit) having the graft chain is preferably contained in the range of 10% to 75%, and in the range of 12% to 50%, based on the total mass of the specific resin. More preferably, it is particularly preferably included in the range of 15% to 40%. Within this range, the dispersibility and dispersion stability of the metal oxide particles are high, and the uniformity of the film thickness in the coating film formed using the dispersion composition is further improved.
- the specific resin may be a combination of two or more types of graft copolymers having different structures.
- specific resin is a polymer which has the structural unit (repeating unit) which has an acid group with 25 mass% or more and 90 mass% or less with respect to the total mass of specific resin.
- the content of the structural unit having an acid group is more preferably 50% by mass or more and 80% by mass or less, and most preferably 60% by mass or more and 75% by mass or less with respect to the total mass of the specific resin.
- the content of the structural unit having an acid group is less than 25 masses with respect to the total mass of the specific resin, the adsorptivity to the metal oxide particles of the specific resin is insufficient and the dispersion stability is deteriorated.
- a composition curable composition
- a large-size (for example, 12 inch) wafer it is difficult to form a film having a small film thickness difference between the central portion and the peripheral portion of the wafer.
- the content of the structural unit having an acid group is more than 90% by mass with respect to the total mass of the specific resin, the amount of the graft chain introduced into the specific resin becomes insufficient, resulting in poor dispersion stability.
- the acid value of the specific resin can be suitably adjusted within the following preferable range.
- the acid group can also function as a functional group capable of forming an interaction with the metal oxide particles in addition to the graft chain.
- the acid group examples include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, and the like.
- the carboxylic acid group It is preferably at least one selected from a group, a sulfonic acid group, and a phosphoric acid group, and a carboxylic acid group is particularly preferable.
- the acid group structure is preferably a structure separated by 5 atoms or more from the main chain of the resin structure. Furthermore, as the acid group, a carboxylic acid bonded to an aromatic ring is most preferable.
- the acid value of the specific resin is preferably in the range of 70 mgKOH / g to 350 mgKOH / g, more preferably in the range of 80 mgKOH / g to 300 mgKOH / g, and still more preferably in the range of 100 mgKOH / g to 250 mgKOH / g. It is a range.
- the acid value of the specific resin can be calculated from the average content of acid groups in the specific resin, for example. Moreover, resin which has a desired acid value can be obtained by changing content of the monomer unit containing the acid group which comprises specific resin.
- the specific resin may further have a structural unit (repeating unit) having a functional group capable of interacting with the metal oxide particles other than the graft chain and the acid group.
- a structural unit having a functional group capable of forming an interaction with other metal oxide particles is not particularly limited in terms of structure.
- a structural unit having a basic group or a structural unit having a coordinating group And structural units having a reactive group is not particularly limited in terms of structure.
- the basic group examples include a primary amino group, a secondary amino group, a tertiary amino group, a heterocyclic ring containing an N atom, and an amide group. Particularly preferred is a tertiary amino group having good adsorption power to metal oxide particles and high dispersibility and dispersion stability. As said basic group, these can be used individually by 1 type or in combination of 2 or more types.
- the specific resin may or may not contain a structural unit having a basic group (repeating unit), but when it is contained, the content of the structural unit having a basic group is 0 with respect to the total mass of the specific resin. 0.1 mass% or more and 50 mass% or less, and particularly preferably 0.1 mass% or more and 30 mass% or less.
- Examples of the coordinating group and the reactive group include acetylacetoxy group, trialkoxysilyl group, isocyanate group, acid anhydride residue, acid chloride residue and the like. Particularly preferred is an acetylacetoxy group having good adsorption power to metal oxide particles and high dispersibility and dispersion stability.
- the coordinating group and the reactive group these can be used alone or in combination of two or more.
- the specific resin may or may not contain a structural unit (repeating unit) having a coordinating group or a reactive group, but if included, a structure having a coordinating group or a reactive group.
- the unit content is 0.1% by mass or more and 50% by mass or less, and particularly preferably 0.1% by mass or more and 30% by mass or less with respect to the total mass of the specific resin.
- the specific resin is different from the structural unit having a graft chain and the structural unit having an acid group, and has the following general formula (i) as a structural unit having a functional group capable of interacting with metal oxide particles. It may have at least one repeating unit obtained from the monomer represented by any one of (iii).
- R 1 , R 2 , and R 3 each independently represent a hydrogen atom, a halogen atom (eg, fluorine, chlorine, bromine, etc.), or a carbon atom number of 1 to 6
- An alkyl group (for example, a methyl group, an ethyl group, a propyl group, etc.).
- R 1 , R 2 , and R 3 are more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and most preferably a hydrogen atom or a methyl group.
- R 2 and R 3 are particularly preferably a hydrogen atom.
- X represents an oxygen atom (—O—) or an imino group (—NH—), and is preferably an oxygen atom.
- L is a single bond or a divalent linking group.
- a divalent aliphatic group for example, an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, a substituted alkynylene group
- a divalent aromatic group for example, an arylene group
- Substituted arylene groups divalent heterocyclic groups and their oxygen atoms (—O—), sulfur atoms (—S—), imino groups (—NH—), substituted imino groups (—NR 31 —, R 31 may be a combination with an aliphatic group, aromatic group or heterocyclic group) or a carbonyl group (—CO—).
- the divalent aliphatic group may have a cyclic structure or a branched structure.
- the aliphatic group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
- the aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group.
- the aliphatic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an aromatic group, and a heterocyclic group.
- the number of carbon atoms of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and most preferably 6 to 10.
- the aromatic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an aliphatic group, an aromatic group, and a heterocyclic group.
- the divalent heterocyclic group preferably has a 5-membered or 6-membered ring as a heterocycle.
- Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring.
- the heterocyclic group may have a substituent. Examples of substituents include halogen atoms, hydroxy groups, oxo groups ( ⁇ O), thioxo groups ( ⁇ S), imino groups ( ⁇ NH), substituted imino groups ( ⁇ N—R 32 , where R 32 is a fatty acid Aromatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group.
- L is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure.
- the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
- L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures.
- the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
- the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n —, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
- Z represents a functional group capable of interacting with the metal oxide particles, and is preferably the acid group, basic group, or reactive group described above.
- a carboxylic acid group or a tertiary amino group is more preferable, and a carboxylic acid group is still more preferable.
- Y represents a methine group or a nitrogen atom.
- R 4 , R 5 , and R 6 are each independently a hydrogen atom, a halogen atom (for example, fluorine, chlorine, bromine, etc.), or an alkyl group having 1 to 6 carbon atoms (for example, , Methyl group, ethyl group, propyl group, etc.), Z, or -LZ.
- L and Z are as defined above.
- R 4 , R 5 and R 6 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
- R 1 , R 2 and R 3 are a hydrogen atom or a methyl group
- L is a divalent linking group containing an alkylene group or an oxyalkylene structure.
- a compound in which X is an oxygen atom or imino group and Z is a carboxylic acid group is preferable.
- R 1 is a hydrogen atom or a methyl group
- L is an alkylene group
- Z is a carboxylic acid group
- Y is a methine group. Is preferred.
- a compound in which R 4 , R 5 , and R 6 are a hydrogen atom or a methyl group and Z is a carboxylic acid group is preferable.
- Examples of typical compounds represented by formulas (i) to (iii) include methacrylic acid, crotonic acid, isocrotonic acid, compounds having an addition polymerizable double bond and a hydroxyl group in the molecule (for example, methacrylic acid 2 -Hydroxyethyl) and succinic anhydride reaction product, compound having addition polymerizable double bond and hydroxyl group in the molecule and phthalic anhydride reaction compound, compound having addition polymerizable double bond and hydroxyl group in the molecule And a reaction product of tetrahydroxyphthalic anhydride, a compound having an addition polymerizable double bond and a hydroxyl group in the molecule and trimellitic anhydride, a compound having an addition polymerizable double bond and a hydroxyl group in the molecule, and pyro Reaction with merit acid anhydride, acrylic acid, acrylic acid dimer, acrylic acid oligomer, maleic acid, itaconic acid, fumaric acid, 4-viny
- the specific resin contained in the dispersion composition of metal oxide particles is a structural unit having the graft chain, the acid, in order to improve various performances such as image strength, as long as the effects of the present invention are not impaired.
- the structural unit having a group and a structural unit having a functional group capable of interacting with the metal oxide particle which is different from these structural units, other structural units having various functions, for example, A structural unit having a functional group having an affinity for the dispersion medium used in the dispersion can be included as a structural unit derived from the copolymerization component.
- acrylic esters such as alkyl acrylate (the alkyl group preferably has 1 to 20 carbon atoms), (specifically, for example, benzyl acrylate, 4-biphenyl acrylate, butyl Acrylate, sec-butyl acrylate, t-butyl acrylate, 4-t-butylphenyl acrylate, 4-chlorophenyl acrylate, pentachlorophenyl acrylate, 4-cyanobenzyl acrylate, cyanomethyl acrylate, cyclohexyl acrylate, 2-ethoxyethyl acrylate, ethyl acrylate 2-ethylhexyl acrylate, heptyl acrylate, hexyl acrylate, isobornyl acrylate, isopropyl acrylate, methyl acrylate, 3,5-dimethyl Ruadamantyl acrylate, 2-naphthyl acrylate, ne
- Methacrylic acid esters for example, benzyl methacrylate, 4-biphenyl methacrylate, butyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate, 4-alkyl methacrylate (preferably having 1 to 20 carbon atoms in the alkyl group)) t-butylphenyl methacrylate, 4-chlorophenyl methacrylate, pentachlorophenyl methacrylate, 4-cyanophenyl methacrylate, cyanomethyl methacrylate, cyclohexyl methacrylate, 2-ethoxyethyl methacrylate, ethyl methacrylate, 2-ethylhexyl methacrylate, heptyl methacrylate, hexyl methacrylate, isobol Nyl methacrylate, isopropyl methacrylate, methyl methacrylate, 3,5- Methyl adamantyl meth
- Styrenes such as styrene and alkyl styrene (for example, methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene, cyclohexyl styrene, decyl styrene, benzyl styrene, chloromethyl styrene, Trifluoromethylstyrene, ethoxymethylstyrene, acetoxymethylstyrene, etc.), alkoxystyrene (eg, methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene, etc.), halogen styrene (eg, chlorost
- methacrylic acid esters, acrylamides, methacrylamides and styrenes are preferably used, and benzyl methacrylate, t-butyl methacrylate, 4-t-butylphenyl methacrylate, pentachlorophenyl methacrylate, 4-cyanophenyl methacrylate, cyclohexyl methacrylate, ethyl methacrylate, 2-ethylhexyl methacrylate, isobornyl methacrylate, isopropyl methacrylate, methyl methacrylate, 3,5-dimethyladamantyl methacrylate, 2- Naphthyl methacrylate, neopentyl methacrylate, phenyl methacrylate, tetrahydrofurfuryl methacrylate, 2-hydroxyethyl Methacrylate, 3-hydroxypropyl methacrylate, 2-hydroxypropyl methacrylate, 2-hydroxypropyl methacryl
- Styrene methyl styrene, dimethyl styrene, trimethyl styrene, isopropyl styrene, butyl styrene, cyclohexyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, acetoxymethyl styrene, methoxy styrene, 4-methoxy-3-methyl styrene , Chlorostyrene, dichlorostyrene, trichlorostyrene, tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3 -Trifluoromethylstyrene.
- radical polymerizable compounds can be used singly or in combination of two or more.
- the specific resin may or may not contain the above-mentioned radical polymerizable compound, but when it is contained, the content of the structural unit corresponding to these radical polymerizable compounds is 0.000 relative to the total mass of the specific resin. It is 1 mass% or more and 50 mass% or less, Most preferably, it is 0.1 mass% or more and 30 mass% or less.
- the specific resin can be synthesized by a conventionally known method.
- the solvent used in the synthesis include ethylene dichloride, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, propanol, butanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, 1-methoxy- Examples include 2-propanol, 1-methoxy-2-propyl acetate, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide, toluene, ethyl acetate, methyl lactate, and ethyl lactate. These solvents may be used alone or in combination of two or more.
- the specific resin include the following Exemplified Compounds 1 to 32, but the present invention is not limited to these.
- the numerical value written together with each structural unit represents the content of the structural unit [mass%: described as (wt%)].
- the numerical value written together with the repeating part of the side chain indicates the number of repetitions of the repeating part.
- the weight average molecular weight (polystyrene equivalent value measured by GPC method) of the specific resin is preferably 5,000 or more and 300,000 or less, more preferably 7,000 or more and 100,000 or less. It is especially preferable that it is 000 or more and 50,000 or less.
- the specific resin in the dispersion composition (I), the specific resin can be used alone or in combination of two or more.
- the content of the specific resin with respect to the total solid content of the dispersion composition (I) is preferably in the range of 10 to 50% by mass, more preferably in the range of 11 to 40% by mass, from the viewpoint of dispersibility and dispersion stability.
- the range of ⁇ 30% by mass is more preferable.
- the dispersion composition (I) contains a dispersion resin other than the specific resin (hereinafter may be referred to as “other dispersion resin”) for the purpose of adjusting the dispersibility of the metal oxide particles. May be.
- dispersion resins that can be used in the present invention include polymer dispersants [for example, polyamidoamine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly ( (Meth) acrylate, (meth) acrylic copolymer, naphthalenesulfonic acid formalin condensate], polyoxyethylene alkyl phosphate ester, polyoxyethylene alkylamine, alkanolamine, pigment derivative, and the like.
- Other dispersion resins can be further classified into linear polymers, terminal-modified polymers, graft polymers, and block polymers based on their structures.
- dispersion resins include “Disperbyk-101 (polyamideamine phosphate), 107 (carboxylic acid ester), 110 (copolymer containing an acid group), 130 (polyamide), 161, manufactured by BYK Chemie.
- the dispersion composition (I) may or may not contain other dispersion resin, but when it is contained, the content of the other dispersion resin with respect to the total solid content of the dispersion composition (I) is 1 to 20 masses. % Is preferable, and a range of 1 to 10% by mass is more preferable.
- the solvent can be composed of various organic solvents.
- Organic solvents that can be used here include acetone, methyl ethyl ketone, cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether.
- the manufacturing method of the dispersion composition used normally can be applied.
- it can be produced by mixing metal oxide particles, a graft copolymer, and a solvent, and performing dispersion treatment using a circulation type dispersion device (bead mill) or the like.
- the dispersible composition (I) of the present embodiment includes a polymerizable compound (D) and a polymerization initiator, and includes a curable composition for forming a high refractive index layer by including other components as necessary.
- a composition is preferred.
- the “curable composition” is a form of the “dispersion composition”.
- the content of the oxide particles is 50% by mass to 90% by mass, more preferably 52% by mass to 85% by mass, and most preferably 55% by mass to 80% by mass.
- the dispersion composition is a curable composition for forming a high refractive index layer, it has excellent dispersibility and dispersion stability, and has a very high refractive index, even when applied to a large-size wafer.
- a film typically a transparent film having a small difference in film thickness between the central part and the peripheral part can be formed.
- the present invention also relates to a transparent film formed using the curable composition for forming a high refractive index layer of the present embodiment.
- the composition (I) of the present embodiment is preferably a transparent composition. More specifically, when a cured film having a thickness of 1.0 ⁇ m is formed from the composition, the thickness of the cured film is determined.
- the composition has a light transmittance in the direction of 90% or more over the entire wavelength region of 400 to 700 nm. That is, the transparent film of the present embodiment is a film having a light transmittance of 90% or more over the entire wavelength region of 400 to 700 nm at a film thickness of 1.0 ⁇ m.
- any means can be used.
- the said physical property of the light transmittance can be suitably achieved also by adjusting the particle diameter of a metal oxide particle (A), and the kind and addition amount of a graft copolymer (B).
- the light transmittance is 90% or more over the entire wavelength region of 400 to 700 nm. It is an important factor for developing the characteristics to be achieved.
- the light transmittance is preferably 95% or more, more preferably 99% or more, and most preferably 100% over the entire wavelength region of 400 to 700 nm.
- the curable composition for forming a high refractive index layer of the present embodiment substantially does not contain a colorant (the content of the colorant is 0 mass relative to the total solid content of the composition). %).
- the polymerizable compound is an addition polymerizable compound having a polymerizable group such as at least one ethylenically unsaturated double bond, an epoxy group, or an oxetanyl group. Is selected from compounds having at least 1, preferably 2 or more. Such compounds are widely known in the technical field, and can be used without particular limitation in the present invention. These have chemical forms such as monomers, prepolymers, ie, multimers and oligomers such as dimers and trimers, or mixtures thereof and copolymers thereof.
- Examples of monomers and copolymers thereof include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), and esters and amides thereof.
- unsaturated carboxylic acids for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters and amides thereof examples include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), and esters and amides thereof.
- an ester of an unsaturated carboxylic acid and an aliphatic polyhydric alcohol compound, or an amide of an unsaturated carboxylic acid and an aliphatic polyvalent amine compound is used.
- an addition reaction product of an unsaturated carboxylic acid ester or unsaturated carboxylic acid amide having a nucleophilic substituent such as a hydroxyl group, an amino group or a mercapto group with a monofunctional or polyfunctional isocyanate or epoxy, and A dehydration condensation reaction product with a monofunctional or polyfunctional carboxylic acid is also preferably used.
- a substitution reaction product of an unsaturated carboxylic acid ester or unsaturated carboxylic acid amide having a leaving group such as a halogen group or a tosyloxy group and a monofunctional or polyfunctional alcohol, amine or thiol is also suitable. It is.
- the compounds described in paragraphs 0095 to 0108 of JP-A-2009-288705 can be preferably used in the present invention.
- a first preferred form of the polymerizable compound is a monomer having at least one ethylenically unsaturated double bond (polymerizable monomer) or an oligomer having a polymerizable group (polymerizable oligomer) (hereinafter, polymerizable with a polymerizable monomer).
- the polymerizable oligomers may be collectively referred to as “polymerizable monomers”.
- the polymerizable monomer or the like is preferably a compound having at least one addition-polymerizable ethylene group and having an ethylenically unsaturated group having a boiling point of 100 ° C. or higher under normal pressure.
- Examples include monofunctional acrylates and methacrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethanetri (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanedio
- polymerizable monomers include compounds having a fluorene ring and having two or more functional ethylenic polymerizable groups described in JP 2010-160418 A, JP 2010-129825 A, Patent 4364216, and the like. Polymers can also be used.
- JP-A-10-62986 compounds described in JP-A-10-62986 as general formulas (1) and (2) together with specific examples thereof are compounds that have been (meth) acrylated after addition of ethylene oxide or propylene oxide to the polyfunctional alcohol. Can be used as a polymerizable monomer.
- the polymerizable monomer used in the present invention is preferably a polymerizable monomer represented by the following general formulas (MO-1) to (MO-6). (In the formula, each of n is 0 to 14, and m is 1 to 8. Each of R, T, and Z present in a molecule is the same or different. When T is an oxyalkylene group, the terminal on the carbon atom side is bonded to R. At least one of R is a polymerizable group.)
- n is preferably 0 to 5, more preferably 1 to 3.
- m is preferably 1 to 5, and more preferably 1 to 3.
- R is Is preferred, Is more preferable.
- Specific examples of the radical polymerizable monomer represented by the above general formulas (MO-1) to (MO-6) include compounds described in paragraph numbers 0248 to 0251 of JP-A-2007-2699779 Can be suitably used in the present invention.
- dipentaerythritol triacrylate (KAYARAD D-330 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (as a commercial product, KAYARAD D-320; Nippon Kayaku) Dipentaerythritol penta (meth) acrylate (manufactured by Co., Ltd.) (as a commercial product, KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (as a commercial product, KAYARAD DPHA; Nippon Kayaku Co., Ltd.) Company), and the structure in which these (meth) acryloyl groups are mediated by ethylene glycol and propylene glycol residues, diglycerin EO (ethylene oxide) modified (meth) acrylate (commercially available product
- KAYARAD D-330 as a commercial
- the polymerizable monomer is a polyfunctional monomer and may have an acid group such as a carboxyl group, a sulfonic acid group, or a phosphoric acid group. Therefore, if the ethylenic compound has an unreacted carboxyl group as in the case of a mixture as described above, this can be used as it is.
- a non-aromatic carboxylic acid anhydride may be reacted with the group to introduce an acid group.
- non-aromatic carboxylic acid anhydride examples include tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, alkylated hexahydrophthalic anhydride, succinic anhydride, anhydrous Maleic acid is mentioned.
- the monomer having an acid group is an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- a polyfunctional monomer having an acid group is preferable, and in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol.
- Examples of commercially available products include Aronix series M-305, M-510, and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei Co., Ltd.
- a preferable acid value of the polyfunctional monomer having an acid group is 0.1 to 40 mg-KOH / g, and particularly preferably 5 to 30 mg-KOH / g.
- it is essential that the acid value of the entire polyfunctional monomer is within the above range. It is.
- the polyfunctional monomer which has a caprolactone modified structure is not particularly limited as long as it has a caprolactone-modified structure in the molecule.
- trimethylolethane, ditrimethylolethane, trimethylolpropane, ditrimethylolpropane which is obtained by esterifying polyhydric alcohols such as pentaerythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine, (meth) acrylic acid and ⁇ -caprolactone.
- functional (meth) acrylates Mention may be made of functional (meth) acrylates.
- a polyfunctional monomer having a caprolactone-modified structure represented by the following formula (1) is preferable.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond.
- R 1 represents a hydrogen atom or a methyl group, and “*” represents a bond.
- the polyfunctional monomer which has a caprolactone modified structure can be used individually or in mixture of 2 or more types.
- polymerizable monomer or the like in the present invention is preferably at least one selected from the group of compounds represented by the following general formula (i) or (ii).
- each E independently represents — ((CH 2 ) yCH 2 O) — or — ((CH 2 ) y CH (CH 3 ) O) —,
- Each y independently represents an integer of 0 to 10
- each X independently represents an acryloyl group, a methacryloyl group, a hydrogen atom, or a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 3 or 4
- each m independently represents an integer of 0 to 10
- the total of each m is an integer of 0 to 40. However, when the total of each m is 0, any one of X is a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 5 or 6, each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60. However, when the total of each n is 0, any one of X is a carboxyl group.
- m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4. Further, the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4. The total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- — ((CH 2 ) y CH 2 O) — or — ((CH 2 ) y CH (CH 3 ) O) — in general formula (i) or general formula (ii) is a terminal on the oxygen atom side. Is preferred in which X is bonded to X.
- the compounds represented by the general formula (i) or (ii) may be used alone or in combination of two or more.
- a form in which all six Xs are acryloyl groups is preferable.
- the compound represented by the above general formula (i) or (ii) is a ring-opening skeleton obtained by ring-opening addition reaction of ethylene oxide or propylene oxide with pentaerythritol or dipentaerythritol, which is a conventionally known process. And a step of reacting, for example, (meth) acryloyl chloride with the terminal hydroxyl group of the ring-opening skeleton to introduce a (meth) acryloyl group. Each step is a well-known step, and a person skilled in the art can easily synthesize a compound represented by the general formula (i) or (ii).
- a pentaerythritol derivative and / or a dipentaerythritol derivative is more preferable.
- Specific examples include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplary compounds (a) to (f)”).
- exemplary compounds (a), (f) b), (e) and (f) are preferred.
- Examples of commercially available monomers such as polymerizable monomers represented by the general formulas (i) and (ii) include SR-494, a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartomer, manufactured by Nippon Kayaku Co., Ltd. DPCA-60, which is a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy chains.
- Examples of the polymerizable monomer include urethane acrylates described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, and the like. Urethane compounds having an ethylene oxide skeleton described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418 are also suitable. Furthermore, as polymerizable monomers, addition polymerizable monomers having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are used.
- urethane oligomers UAS-10, UAB-140 (manufactured by Sanyo Kokusaku Pulp), UA-7200 "(manufactured by Shin-Nakamura Chemical Co., Ltd., DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), -306H, UA-306T, UA-306I, AH-600, T-600, AI-600 (manufactured by Kyoeisha) and the like.
- a polyfunctional thiol compound having two or more mercapto (SH) groups in the same molecule is also suitable. Particularly preferred are those represented by the following general formula (I).
- R 1 is an alkyl group
- R 2 is an n-valent aliphatic group that may contain atoms other than carbon
- R 0 is an alkyl group that is not H
- n is 2 to 4.
- polyfunctional thiol compound represented by the general formula (I) is specifically exemplified, 1,4-bis (3-mercaptobutyryloxy) butane [formula (II)] having the following structural formula: 1,3,5-tris (3-mercaptobutyloxyethyl) -1,3,5-triasian-2,4,6 (1H, 3H5H) -trione [formula (III)], and pentaerythritol tetrakis (3 -Mercaptobutyrate) [formula (IV)] and the like.
- These polyfunctional thiols can be used alone or in combination.
- polymerizable monomer or oligomer having two or more epoxy groups or oxetanyl groups in the molecule as the polymerizable monomer.
- a compound having an epoxy group or an oxetanyl group may be used as the polymerizable compound.
- the compound having an epoxy group or oxetanyl group include a polymer having an epoxy group in a side chain, and a polymerizable monomer or oligomer having two or more epoxy groups in the molecule, and a bisphenol A type epoxy resin, Bisphenol F type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, aliphatic epoxy resin and the like can be mentioned. These compounds may be used commercially or obtained by introducing an epoxy group into the side chain of the polymer.
- bisphenol A type epoxy resin JER827, JER828, JER834, JER1001, JER1002, JER1003, JER1055, JER1007, JER1009, JER1010 (above, Japan Epoxy Resin Co., Ltd.), EPICLON860, EPICLON1050, EPICLON1051, EPICLON1055 (manufactured by DIC Corporation), etc.
- bisphenol F type epoxy resin is JER806, JER807, JER4004, JER4005, JER4007, JER4010 (above, Japan Epoxy Resin Co., Ltd.), EPICLON830, EPICLON835.
- EPICLON N-740 EPICLON N-740, EPICLON N -770, EPICLON N-775 (manufactured by DIC Corporation), etc.
- cresol novolac type epoxy resins include EPICLON N-660, EPICLON N-665, EPICLON N-670, EPICLON N-673, EPICLON N -680, EPICLON N-690, EPICLON N-695 (made by DIC Corporation), EOCN-1020 (made by Nippon Kayaku Co., Ltd.), etc.
- ADEKA RESIN EP-4000S, EP-4003S, EP-4010S, EP-4010S, EP-4011S (above, manufactured by ADEKA Corporation), NC-2000, NC-3000, NC-7300, XD-1000, EPPN-501, EPPN-502 (above, manufactured by ADEKA Corporation), JER1031S (manufactured by Japan Epoxy Resin Co., Ltd.) and the like.
- polymer having an oxetanyl group in the side chain and the polymerizable monomer or oligomer having two or more oxetanyl groups in the molecule include Aronoxetane OXT-121, OXT-221, OX-SQ, PNOX ( As described above, Toagosei Co., Ltd.) can be used.
- the introduction reaction includes tertiary amines such as triethylamine and benzylmethylamine, quaternary ammonium salts such as dodecyltrimethylammonium chloride, tetramethylammonium chloride, tetraethylammonium chloride, pyridine,
- the reaction can be carried out in an organic solvent at a reaction temperature of 50 to 150 ° C. for several to several tens of hours using triphenylphosphine as a catalyst.
- the amount of the alicyclic epoxy unsaturated compound introduced is preferably controlled so that the acid value of the obtained polymer is in a range satisfying 5 to 200 KOH ⁇ mg / g.
- the molecular weight is preferably in the range of 500 to 5000000, more preferably 1000 to 500000 on a weight average.
- the epoxy unsaturated compound those having a glycidyl group as an epoxy group such as glycidyl (meth) acrylate and allyl glycidyl ether can be used, but preferred are unsaturated compounds having an alicyclic epoxy group. Examples of such compounds include the following compounds.
- amide monomers of aliphatic polyvalent amine compounds and unsaturated carboxylic acids include methylene bis-acrylamide, methylene bis-methacrylamide, 1,6-hexamethylene bis-acrylamide, 1,6-hexamethylene bis. -Methacrylamide, diethylenetriamine trisacrylamide, xylylene bisacrylamide, xylylene bismethacrylamide and the like.
- examples of other preferable amide monomers include those having a cyclohexylene structure described in JP-B No. 54-21726.
- urethane-based addition polymerizable compounds produced by using an addition reaction of isocyanate and hydroxyl group are also suitable. Specific examples thereof include, for example, one molecule described in JP-B-48-41708.
- a vinylurethane compound containing two or more polymerizable vinyl groups in one molecule obtained by adding a vinyl monomer having a hydroxyl group represented by the following formula (V) to a polyisocyanate compound having two or more isocyanate groups: Etc.
- R 7 and R 8 each independently represent a hydrogen atom or a methyl group.
- urethane acrylates as described in JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, JP-B-58-49860, JP-B-56- Urethane compounds having an ethylene oxide skeleton described in Japanese Patent No. 17654, Japanese Patent Publication No. 62-39417, and Japanese Patent Publication No. 62-39418 are also suitable.
- polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238. Can obtain a curable composition having a very high photosensitive speed.
- polyester acrylates examples include polyester acrylates, epoxy resins and (meth) acrylic acid described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490, and JP-B-52-30490. Mention may be made of polyfunctional acrylates and methacrylates such as epoxy acrylates obtained by reaction. Further, specific unsaturated compounds described in JP-B-46-43946, JP-B-1-40337, JP-B-1-40336, and vinylphosphonic acid compounds described in JP-A-2-25493 are also included. Can be mentioned. In some cases, a structure containing a perfluoroalkyl group described in JP-A-61-22048 is preferably used. Furthermore, the Japan Adhesion Association magazine vol. 20, no. 7, photocurable monomers and oligomers described on pages 300 to 308 (1984) can also be used.
- the details of usage methods can be arbitrarily set according to the final performance design of a curable composition.
- it is selected from the following viewpoints. From the viewpoint of sensitivity, a structure having a large unsaturated group content per molecule is preferable, and in many cases, a bifunctional or higher functionality is preferable.
- those having three or more functionalities are preferable, and further, different functional numbers and different polymerizable groups (for example, acrylic acid ester, methacrylic acid ester, styrene compound, vinyl ether compound, epoxy) It is also effective to adjust both sensitivity and strength by using a combination of a compound based on an oxetane compound or an oxetane compound).
- the selection and use method of the polymerizable compound is also an important factor for the compatibility and dispersibility with other components (for example, polymerization initiator, metal oxide particles, etc.) contained in the curable composition.
- the compatibility may be improved by using a low-purity compound or using two or more kinds of other components in combination.
- a specific structure may be selected for the purpose of improving adhesion to a hard surface such as a substrate.
- the content of the polymerizable compound (D) is preferably in the range of 1% by mass to 50% by mass with respect to the total solid content of the curable composition for forming a high refractive index layer. % Is more preferable, and a range of 5% by mass to 30% by mass is still more preferable. Within this range, the curability is good and preferable without lowering the refractive index.
- the polymerization initiator is a compound that initiates and accelerates the polymerization of the (D) polymerizable compound, and is stable up to 45 ° C., but has a good polymerization initiation ability when heated at high temperatures. It is preferable. Further, the polymerization initiator preferably contains at least one compound having a molecular extinction coefficient of at least about 50 within a range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm). Moreover, a polymerization initiator can be used individually or in combination of 2 or more types.
- organic halogenated compounds for example, organic halogenated compounds, oxydiazole compounds, carbonyl compounds, ketal compounds, benzoin compounds, acridine compounds, organic peroxide compounds, azo compounds, coumarin compounds, azide compounds, metallocene compounds
- examples include hexaarylbiimidazole compounds, organic boric acid compounds, disulfonic acid compounds, oxime ester compounds, onium salt compounds, and acylphosphine (oxide) compounds.
- organic halogenated compound examples include Wakabayashi et al., “Bull. Chem. Soc. Japan” 42, 2924 (1969), US Pat. No. 3,905,815, Japanese Examined Patent Publication No. 46-4605, Japanese Laid-Open Patent Publication No. 48-36281, Japanese Laid-Open Patent Publication No. 55-32070, Japanese Laid-Open Patent Publication No. 60-239736, Japanese Laid-Open Patent Publication No. 61-169835, Japanese Laid-Open Patent Publication No. 61-169837, Japanese Laid-Open Patent Publication No. 62-58241. No.
- an s-triazine derivative in which at least one mono-, di-, or trihalogen-substituted methyl group is bonded to the s-triazine ring specifically, for example, 2,4,6- Tris (monochloromethyl) -s-triazine, 2,4,6-tris (dichloromethyl) -s-triazine, 2,4,6-tris (trichloromethyl) -s-triazine, 2-methyl-4,6- Bis (trichloromethyl) -s-triazine, 2-n-propyl-4,6-bis (trichloromethyl) -s-triazine, 2- ( ⁇ , ⁇ , ⁇ -trichloroethyl) -4,6-bis (trichloro Methyl) -s-triazine, 2-phenyl-4,6-bis (trichloromethyl) -s-triazine, 2- (
- Examples of oxydiazole compounds include 2-trichloromethyl-5-styryl-1,3,4-oxodiazole, 2-trichloromethyl-5- (cyanostyryl) -1,3,4-oxodiazole, 2-trichloromethyl-5- (naphth-1-yl) -1,3,4-oxodiazole, 2-trichloromethyl-5- (4-styryl) styryl-1,3,4-oxodiazole, etc. Can be mentioned.
- carbonyl compounds examples include benzophenone, Michler ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, benzophenone derivatives such as 2-carboxybenzophenone, 2,2-dimethoxy -2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexyl phenyl ketone, ⁇ -hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl- (p-isopropylphenyl) ketone, 1 -Hydroxy-1- (p-dodecylphenyl) ketone, 2-methyl- (4 ′-(methylthio) phenyl) -2-morpholino-1-propanone, 2- (dimethylamino) -2-[(4-methylphenol L) methyl] -1- [4- (4-morpholinyl) phenyl] -1
- ketal compound examples include benzyl methyl ketal and benzyl- ⁇ -methoxyethyl ethyl acetal.
- benzoin compound examples include m-benzoin isopropyl ether, benzoin isobutyl ether, benzoin methyl ether, methyl o-benzoylbenzoate and the like.
- acridine compound examples include 9-phenylacridine, 1,7-bis (9-acridinyl) heptane and the like.
- organic peroxide compound examples include trimethylcyclohexanone peroxide, acetylacetone peroxide, 1,1-bis (tert-butylperoxy) -3,3,5-trimethylcyclohexane, 1,1-bis (tert-butylperoxide).
- Examples of the azo compound include azo compounds described in JP-A-8-108621.
- Examples of coumarin compounds include 3-methyl-5-amino-((s-triazin-2-yl) amino) -3-phenylcoumarin, 3-chloro-5-diethylamino-((s-triazin-2-yl). ) Amino) -3-phenylcoumarin, 3-butyl-5-dimethylamino-((s-triazin-2-yl) amino) -3-phenylcoumarin, and the like.
- azide compound examples include organic azide compounds described in US Pat. No. 2,848,328, US Pat. No. 2,852,379 and US Pat. No. 2,940,853, 2,6-bis (4-azidobenzylidene) -4 -Ethylcyclohexanone (BAC-E) and the like.
- metallocene compound examples include JP-A-59-152396, JP-A-61-151197, JP-A-63-41484, JP-A-2-249, JP-A-2-4705, Various titanocene compounds described in JP-A-5-83588, such as dicyclopentadienyl-Ti-bis-phenyl, dicyclopentadienyl-Ti-bis-2,6-difluorophenyl-1-yl, dicyclopenta Dienyl-Ti-bis-2,4-difluorophenyl-1-yl, dicyclopentadienyl-Ti-bis-2,4,6-trifluorophenyl-1-yl, dicyclopentadienyl-Ti- Bis-2,3,5,6-tetrafluorophenyl-1-yl, dicyclopentadienyl-Ti-bis-2,3,4,5,6-pentafluoro Enyl-1-yl
- a hexaarylbiimidazole compound (rophine dimer compound) is preferable.
- the hexaarylbiimidazole compound include lophine dimers described in JP-B-45-37377 and JP-B-44-86516, JP-B-6-29285, US Pat. No. 3,479,185, and the like.
- organic borate compound examples include JP-A-62-143044, JP-A-62-1050242, JP-A-9-188865, JP-A-9-188686, JP-A-9-188710, JP-A-2000. -131837, Japanese Patent Application Laid-Open No. 2002-107916, Japanese Patent No. 2764769, Japanese Patent Application Laid-Open No. 2001116539, etc., and Kunz, Martin “Rad Tech'98. Proceeding April 19-22, 1998, Chicago”.
- the organic boron iodonium complexes described in JP-A-9-188710, the organic boron phosphonium complexes described in JP-A-9-348710, JP-A-7-128785, JP-A-7-140589, JP-A-7- Specific examples include organoboron transition metal coordination complexes and the like described in JP-A-306527 and JP-A-7-292014.
- Examples of the disulfone compound include compounds described in JP-A Nos. 61-166544 and 2002-328465.
- hydroxyacetophenone compounds As the polymerization initiator, hydroxyacetophenone compounds, aminoacetophenone compounds, and acylphosphine compounds can also be suitably used. More specifically, for example, an aminoacetophenone initiator described in JP-A-10-291969 and an acylphosphine oxide initiator described in Japanese Patent No. 4225898 can also be used.
- hydroxyacetophenone-based initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator commercially available products IRGACURE-907, IRGACURE-369, and IRGACURE-379 (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator a compound described in JP-A-2009-191179 in which an absorption wavelength is matched with a long wave light source such as 365 nm or 405 nm can also be used.
- acylphosphine-based initiator commercially available products such as IRGACURE-819 and DAROCUR-TPO (trade names: both manufactured by BASF) can be used.
- an oxime compound is preferable from the viewpoints of curability, stability over time, and difficulty in coloring during post-heating.
- oxime compounds include J.M. C. S. Perkin II (1979) 1653-1660), J. MoI. C. S. Perkin II (1979) 156-162, Journal of Photopolymer Science and Technology (1995) 202-232, Journal of Applied Polymer. Science (2012) pp. 725-731, compounds described in JP-A 2000-66385, compounds described in JP-A 2000-80068, JP-T 2004-534797, and the like.
- oxime ester compounds other than those described above compounds described in JP-T-2009-519904 in which oxime is linked to carbazole N-position, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, A compound described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039 in which a nitro group is introduced at the dye moiety, a ketoxime compound described in International Patent Publication No. 2009-131189, the triazine skeleton and the oxime skeleton are the same A compound described in US Pat. No. 7,556,910 contained in the molecule, a compound described in Japanese Patent Application Laid-Open No. 2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-line light source, and the like may be used. .
- the cyclic oxime compounds described in JP2007-231000A and JP2007-322744A can also be suitably used.
- the cyclic oxime compounds fused to the carbazole dyes described in JP2010-32985A and JP2010-185072A have high light absorption and high sensitivity. preferable.
- the compounds described in JP-A-2009-242469 having an unsaturated bond at a specific site of the oxime compound can be preferably used because high sensitivity can be achieved by regenerating the active radical from the polymerization inert radical. it can.
- oxime compounds having a specific substituent as disclosed in JP-A-2007-2699779 examples include oxime compounds having a thioaryl group as disclosed in JP-A-2009-191061.
- a compound represented by the following formula (OX) is also preferred, and a compound represented by (OX-1) is more preferred.
- the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
- R and B are as defined in the following formula (OX-1).
- a 1 is preferably —A—SAr of the formula (OX-1) or an alkyl group.
- the alkyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and particularly preferably 1 to 3 carbon atoms.
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by another substituent.
- substituents examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
- the monovalent substituent represented by B represents an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may be bonded to the methylene group via a linking group, and examples of the linking group include a single bond, a carbonyl group, a substituent Y described later, an alkyl group, or a combination thereof. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
- Y, X, and n have the same meanings as Y, X, and n in formula (OX-2) described later, and preferred examples are also the same.
- examples of the divalent organic group represented by A include an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group having 3 to 12 carbon atoms, and an alkynylene group having 2 to 12 carbon atoms. Can be mentioned. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
- a in the formula (OX-1) represents an unsubstituted alkylene group, an alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl) from the viewpoint of increasing sensitivity and suppressing coloration with heating.
- Group) substituted alkylene group, alkenyl group (eg vinyl group, allyl group) alkylene group, aryl group (eg phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl) Group, a phenanthryl group, and a styryl group) are preferable.
- the oxime compound represented by the formula (OX-1) is preferably a compound represented by the following formula (OX-2).
- R and X each independently represent a monovalent substituent
- a and Y each independently represent a divalent organic group
- Ar represents an aryl group
- n represents 0 to (It is an integer of 5.)
- R, A and Ar in the formula (OX-2) have the same meanings as R, A and Ar in the formula (OX-1), and preferred examples are also the same.
- examples of the monovalent substituent represented by X include an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyloxy group, an acyl group, an alkoxycarbonyl group, an amino group, and a heterocyclic ring.
- X in the formula (OX-2) is preferably an alkyl group from the viewpoints of solvent solubility and improvement in absorption efficiency in the long wavelength region.
- n represents an integer of 0 to 5, and an integer of 0 to 2 is preferable.
- examples of the divalent organic group represented by Y include the structures Sub-1 to Sub-11 shown below.
- “*” represents a bonding position between Y and an adjacent carbon atom in the formula (OX-2).
- the structures Sub-1 and Sub-2 are preferable from the viewpoint of increasing sensitivity.
- the oxime compound represented by the formula (OX-2) is preferably a compound represented by the following formula (OX-3).
- R and X each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group
- n is an integer of 0 to 5.
- R, X, A, Ar, and n in formula (OX-3) have the same meanings as R, X, A, Ar, and n in formula (OX-2), respectively, and preferred examples are also the same. is there.
- PIox-1 to (PIox-13) of oxime compounds that can be suitably used are shown below, but the present invention is not limited thereto.
- the oxime compound has a function as a thermal polymerization initiator that is decomposed by heat to start and accelerate polymerization.
- the oxime compound preferably has a maximum absorption wavelength in a wavelength region of 350 nm to 500 nm, more preferably has an absorption wavelength in a wavelength region of 360 nm to 480 nm, and has high absorbance at 365 nm and 455 nm. Particularly preferred.
- the molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, more preferably 5,000 to 200, from the viewpoint of sensitivity. Is particularly preferred. A known method can be used for the molar extinction coefficient of the compound.
- an ultraviolet-visible spectrophotometer (Vary Inc., Carry-5 spectrophotometer) is used with an ethyl acetate solvent. It is preferable to measure at a concentration of / L.
- oxime compound commercially available products such as IRGACURE OXE01 and IRGACURE OXE02 (both manufactured by BASF) can be suitably used.
- onium salt compounds examples include S.I. I. Schlesinger, Photogr. Sci. Eng. , 18, 387 (1974), T.A. S. Bal et al, Polymer, 21, 423 (1980), diazonium salts, US Pat. No. 4,069,055, ammonium salts described in JP-A-4-365049, US Pat. No. 4,069, The phosphonium salts described in the specifications of Nos. 055 and 4,069,056, the specifications of European Patent No. 104,143, and the specifications of JP-A-2-150848 and JP-A-2-296514 And iodonium salts.
- the iodonium salt is a diaryl iodonium salt and is preferably substituted with two or more electron donating groups such as an alkyl group, an alkoxy group, and an aryloxy group from the viewpoint of stability.
- Examples of sulfonium salts include European Patent Nos. 370,693, 390,214, 233,567, 297,443, 297,442, U.S. Pat. Nos. 4,933,377, 4, 760,013, 4,734,444, 2,833,827, German Patent 2,904,626, 3,604,580, 3,604,581
- the sulfonium salt described in the document is mentioned, and from the viewpoint of stability and sensitivity, it is preferably one substituted with an electron withdrawing group.
- the electron withdrawing group preferably has a Hammett value greater than zero.
- Examples of preferable electron withdrawing groups include halogen atoms and carboxylic acid groups.
- sulfonium salts include sulfonium salts in which one substituent of the triarylsulfonium salt has a coumarin structure or an anthraquinone structure and absorbs at 300 nm or more.
- a sulfonium salt in which the triarylsulfonium salt has an allyloxy group or an arylthio group as a substituent and has absorption at 300 nm or more can be mentioned.
- onium salt compounds J. Org. V. Crivello et al, Macromolecules, 10 (6), 1307 (1977), J. MoI. V. Crivello et al, J.A. Polymer Sci. , Polymer Chem. Ed. , 17, 1047 (1979), a selenonium salt described in C.I. S. Wen et al, Teh, Proc. Conf. Rad. Curing ASIA, p478 Tokyo, Oct (1988) and onium salts such as arsonium salts.
- acylphosphine (oxide) compound examples include Irgacure 819, Darocur 4265, and Darocur TPO manufactured by BASF.
- (E) As a polymerization initiator, from the viewpoint of curability, a trihalomethyltriazine compound, a benzyldimethyl ketal compound, an ⁇ -hydroxyketone compound, an ⁇ -aminoketone compound, an acylphosphine compound, a phosphine oxide compound, a metallocene compound Oxime compounds, triallylimidazole dimers, onium compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyloxadiazole compounds, 3- Compounds selected from the group consisting of aryl substituted coumarin compounds are preferred.
- trihalomethyltriazine compounds More preferred are trihalomethyltriazine compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, oxime compounds, triallylimidazole dimers, onium compounds, benzophenone compounds, acetophenone compounds, and trihalo compounds. Most preferred is at least one compound selected from the group consisting of methyltriazine compounds, ⁇ -aminoketone compounds, oxime compounds, triallylimidazole dimers, and benzophenone compounds.
- a curable composition for forming a high refractive index layer is provided on a color filter of a solid-state imaging device to form a microlens, it is particularly less colored during post-heating and has good curability.
- the polymerization initiator (E) it is most preferable to use an oxime compound.
- the content of the (E) polymerization initiator contained in the curable composition for forming a high refractive index layer is 0.1 mass relative to the total solid content of the curable composition. % To 10% by mass, more preferably 0.3% to 8% by mass, and still more preferably 0.5% to 5% by mass. Within this range, good curability can be obtained.
- the curable composition for forming a high refractive index layer may further contain optional components described in detail below, if necessary. Hereinafter, optional components that the curable composition may contain will be described.
- Polymerization inhibitor In order to prevent unnecessary polymerization of a compound having an ethylenically unsaturated double bond that can be polymerized during production or storage of the curable composition, it is preferable to add a polymerization inhibitor.
- Polymerization inhibitors include phenolic hydroxyl group-containing compounds, N-oxide compounds, piperidine 1-oxyl free radical compounds, pyrrolidine 1-oxyl free radical compounds, N-nitrosophenylhydroxylamines, diazonium compounds, and cations Examples include dyes, sulfide group-containing compounds, nitro group-containing compounds, transition metal compounds such as FeCl3 and CuCl2.
- the phenolic hydroxyl group-containing compound is hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4-thiobis (3-methyl-6-t-butylphenol), A compound selected from the group consisting of 2,2′-methylenebis (4-methyl-6-t-butylphenol), phenolic resins, and cresol resins is preferred.
- N-oxide compounds include 5,5-dimethyl-1-pyrroline N-oxide, 4-methylmorpholine N-oxide, pyridine N-oxide, 4-nitropyridine N-oxide, 3-hydroxypyridine N-oxide, picoline A compound selected from the group consisting of acid N-oxide, nicotinic acid N-oxide, and isonicotinic acid N-oxide is preferred.
- Piperidine 1-oxyl free radical compounds include piperidine 1-oxyl free radical, 2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-oxo-2,2,6,6-tetramethylpiperidine 1 -Oxyl free radical, 4-hydroxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-acetamido-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-maleimide A compound selected from the group consisting of -2,2,6,6-tetramethylpiperidine 1-oxyl free radical and 4-phosphonoxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical Is preferred.
- the pyrrolidine 1-oxyl free radical compound is preferably a 3-carboxyproxyl free radical (3-carboxy-2,2,5,5-tetramethylpyrrolidine 1-oxyl free radical).
- N-nitrosophenylhydroxylamines are preferably compounds selected from the group consisting of N-nitrosophenylhydroxylamine cerium salts and N-nitrosophenylhydroxylamine aluminum salts.
- the diazonium compound is selected from the group consisting of 4-diazophenyldimethylamine hydrogen sulfate, 4-diazodiphenylamine tetrafluoroborate, and 3-methoxy-4-diazodiphenylamine hexafluorophosphate Is preferred.
- hydroquinone hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4-thiobis (3-methyl-6-t-) are preferable.
- Butylphenol 2,2'-methylenebis (4-methyl-6-t-butylphenol) phenolic hydroxyl group-containing compound, piperidine 1-oxyl free radical or 2,2,6,6-tetramethylpiperidine 1-oxyl free Radical, 4-oxo-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-hydroxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-acetamido-2, 2,6,6-tetramethylpiperidine 1-oxyl free radical , 4-maleimido-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, and piperidine 1-oxyl free of 4-phosphonoxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical
- a preferable addition amount of the polymerization inhibitor is preferably 0.01 parts by weight or more and 10 parts by weight or less, and more preferably 0.01 parts by weight or more and 8 parts by weight or less with respect to 100 parts by weight of the polymerization initiator (E). It is preferable that it is in the range of 0.05 parts by mass or more and 5 parts by mass or less. By setting it as the said range, the curing reaction suppression in a non-image part and the curing reaction acceleration in an image part are fully performed, and image forming property and a sensitivity become favorable.
- the curable composition for forming a high refractive index layer of the present embodiment preferably further contains a binder polymer from the viewpoint of improving film properties.
- a binder polymer a resin having a carboxyl group monomer alone or copolymerized, a monomer having an acid anhydride alone or copolymerized, and a resin in which an acid anhydride unit is hydrolyzed, half-esterified or half-amidated, Examples include epoxy acrylates obtained by modifying epoxy resins with unsaturated monocarboxylic acids and acid anhydrides.
- Examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, and 4-carboxylstyrene.
- Examples of the monomer having an acid anhydride include maleic anhydride. It is done.
- those obtained by adding a cyclic acid anhydride to a polymer having a hydroxyl group are useful.
- a monomer other than the above-mentioned monomers can be used as the compound to be copolymerized.
- examples of other monomers include the following compounds (1) to (12).
- Vinyl ethers such as ethyl vinyl ether, 2-chloroethyl vinyl ether, hydroxyethyl vinyl ether, propyl vinyl ether, butyl vinyl ether, octyl vinyl ether, and phenyl vinyl ether.
- Vinyl esters such as vinyl acetate, vinyl chloroacetate, vinyl butyrate and vinyl benzoate.
- Styrenes such as styrene, ⁇ -methylstyrene, methylstyrene, chloromethylstyrene, and p-acetoxystyrene.
- Vinyl ketones such as methyl vinyl ketone, ethyl vinyl ketone, propyl vinyl ketone, and phenyl vinyl ketone.
- Olefins such as ethylene, propylene, isobutylene, butadiene, and isoprene.
- N-vinylpyrrolidone (10) N-vinylpyrrolidone, acrylonitrile, methacrylonitrile and the like.
- Unsaturated imides such as maleimide, N-acryloylacrylamide, N-acetylmethacrylamide, N-propionylmethacrylamide, N- (p-chlorobenzoyl) methacrylamide.
- a methacrylic acid monomer having a hetero atom bonded to the ⁇ -position For example, compounds described in JP-A-2002-309057, JP-A-2002-311569 and the like can be mentioned.
- the binder polymer preferably also contains a repeating unit formed by polymerizing a monomer component essentially comprising a compound represented by the following general formula (ED) (hereinafter sometimes referred to as “ether dimer”). .
- ED general formula
- R 1 and R 2 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- the curable composition for high refractive index layer formation of this embodiment can form the cured coating film which was very excellent also in heat resistance and transparency.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 is not particularly limited, Linear or branched alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, t-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; Alicyclic groups such as cyclohexyl, t-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; substituted with alkoxy such as 1-methoxyethy
- ether dimer examples include dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, (N-propyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) ) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (t-butyl) -2, 2 ′-[oxybis (methylene)] bis-2-propenoate, di (t-amyl) -2,2 ′-[oxybis (methylene)] bis-2-prope , Di (stearyl) -2,2,2
- dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2′- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate are preferred.
- These ether dimers may be used alone or in combination of two or more.
- the structure derived from the compound represented by the general formula (ED) may be copolymerized with other monomers.
- ether dimer dimer dimer dimer dimer dimer examples include, for example, a monomer for introducing an acid group, a monomer for introducing a radical polymerizable double bond, and an epoxy group. Monomers and other copolymerizable monomers other than these may be mentioned. Only 1 type may be used for such a monomer and it may use 2 or more types.
- Examples of the monomer for introducing an acid group include monomers having a carboxyl group such as (meth) acrylic acid and itaconic acid, monomers having a phenolic hydroxyl group such as N-hydroxyphenylmaleimide, maleic anhydride, and anhydride. And monomers having a carboxylic anhydride group such as itaconic acid.
- (meth) acrylic acid is particularly preferable.
- the monomer for introducing an acid group may be a monomer that can give an acid group after polymerization, such as a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, Examples thereof include monomers having an epoxy group such as glycidyl (meth) acrylate, and monomers having an isocyanate group such as 2-isocyanatoethyl (meth) acrylate.
- a monomer for introducing a radical polymerizable double bond when using a monomer capable of imparting an acid group after polymerization, it is necessary to perform a treatment for imparting an acid group after polymerization.
- the treatment for adding an acid group after polymerization varies depending on the type of monomer, and examples thereof include the following treatment.
- a treatment of adding an acid anhydride such as succinic anhydride, tetrahydrophthalic anhydride, maleic anhydride or the like can be mentioned.
- a compound having an amino group and an acid group such as N-methylaminobenzoic acid or N-methylaminophenol is added, or, for example, (meth) acrylic
- an acid anhydride such as succinic acid anhydride, tetrahydrophthalic acid anhydride, maleic acid anhydride to the hydroxyl group generated after adding an acid such as an acid
- a monomer having an isocyanate group for example, a treatment of adding a compound having a hydroxyl group and an acid group such as 2-hydroxybutyric acid can be mentioned.
- the content ratio is not particularly limited, In the monomer component, the content is preferably 5 to 70% by mass, more preferably 10 to 60% by mass.
- Examples of the monomer for introducing a radical polymerizable double bond include, for example, monomers having a carboxyl group such as (meth) acrylic acid and itaconic acid; carboxylic acid anhydrides such as maleic anhydride and itaconic anhydride Monomers having a group; monomers having an epoxy group such as glycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, o- (or m-, or p-) vinylbenzyl glycidyl ether; .
- a monomer for introducing a radical polymerizable double bond it is necessary to perform a treatment for imparting a radical polymerizable double bond after polymerization.
- the treatment for imparting a radical polymerizable double bond after polymerization differs depending on the type of monomer that can impart a radical polymerizable double bond to be used, and examples thereof include the following treatment.
- a monomer having a carboxyl group such as (meth) acrylic acid or itaconic acid
- Treatment of adding a compound having an epoxy group such as vinylbenzyl glycidyl ether and a radically polymerizable double bond.
- a treatment for adding a compound having a hydroxyl group and a radical polymerizable double bond such as 2-hydroxyethyl (meth) acrylate Is mentioned.
- a monomer having an epoxy group such as glycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, o- (or m-, or p-) vinylbenzyl glycidyl ether is used, (meth)
- the process which adds the compound which has acid groups, such as acrylic acid, and a radically polymerizable double bond is mentioned.
- the content ratio is particularly limited. However, it is preferably 5 to 70% by mass, more preferably 10 to 60% by mass in the total monomer components.
- Examples of the monomer for introducing an epoxy group include glycidyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, o- (or m-, or p-) vinylbenzyl glycidyl ether, and the like. Can be mentioned.
- the content ratio is not particularly limited, In the monomer component, the content is preferably 5 to 70% by mass, more preferably 10 to 60% by mass.
- copolymerizable monomers include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n (meth) acrylate -Butyl, isobutyl (meth) acrylate, t-butyl (meth) acrylate, methyl 2-ethylhexyl (meth) acrylate, cyclohexyl (meth) acrylate, benzyl (meth) acrylate, 2- (meth) acrylic acid 2- (Meth) acrylic acid esters such as hydroxyethyl; aromatic vinyl compounds such as styrene, vinyltoluene and ⁇ -methylstyrene; N-substituted maleimides such as N-phenylmaleimide and N-cyclohexylmaleimide; butadiene, isoprene and the like Butad
- the content ratio is not particularly limited, but is 95% by mass. The following is preferable, and it is more preferable that it is 85 mass% or less.
- the weight average molecular weight of the polymer obtained by polymerizing the monomer component containing the compound represented by the general formula (ED) is not particularly limited, but is formed by the viscosity of the colored radiation-sensitive composition and the composition. From the viewpoint of the heat resistance of the coating film, it is preferably 2000 to 200000, more preferably 5000 to 100,000, and still more preferably 5000 to 20000.
- the acid value is preferably 30 to 500 mgKOH / g, more preferably 50 It should be ⁇ 400 mg KOH / g.
- a polymer obtained by polymerizing a monomer component containing a compound represented by the general formula (ED) can be easily obtained by polymerizing at least the above-mentioned monomer essentially containing an ether dimer. . At this time, the cyclization reaction of the ether dimer proceeds simultaneously with the polymerization to form a tetrahydropyran ring structure.
- the polymerization method applied to the synthesis of the polymer obtained by polymerizing the monomer component containing the compound represented by the general formula (ED) is not particularly limited, and various conventionally known polymerization methods can be adopted. However, it is particularly preferable to use a solution polymerization method.
- exemplary compounds of a polymer obtained by polymerizing a monomer component containing a compound represented by the general formula (ED) are shown, but the present invention is not limited to these.
- the composition ratio of the exemplary compounds shown below is mol%.
- DM dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate
- BzMA benzyl methacrylate
- MMA methyl methacrylate
- MAA Methacrylic acid
- GMA glycidyl methacrylate
- the molar ratio of DM: BzMA: MMA: MAA: GMA is preferably 5 to 15:40 to 50: 5 to 15: 5 to 15:20 to 30.
- the weight average molecular weight of such a polymer is preferably 9000 to 20000.
- the polymer used in the present invention has a weight average molecular weight (polystyrene conversion value measured by GPC method) of preferably 1000 to 2 ⁇ 10 5 , more preferably 2000 to 1 ⁇ 10 5 , and more preferably 5000 to More preferably, it is 5 ⁇ 10 4 .
- a (meth) acrylic resin having an allyl group, a vinyl ester group, and a carboxyl group in the side chain, and a side chain described in JP-A Nos. 2000-187322 and 2002-62698 are doubled.
- An alkali-soluble resin having a bond and an alkali-soluble resin having an amide group in the side chain described in JP-A No. 2001-242612 are preferable because of excellent balance of film strength, sensitivity, and developability.
- Examples of the above-mentioned polymers include: Dial NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (COOH-containing polyurethane acrylic oligomer. Diamond Shamrock Co.
- Japanese Patent Publication No. 7-12004 Japanese Patent Publication No. 7-120041, Japanese Patent Publication No. 7-120042, Japanese Patent Publication No. 8-12424, Japanese Patent Publication No. 63-287944, Japanese Patent Publication No. 63-287947.
- Urethane binder polymers containing acid groups as described in JP-A-1-271741 and the like, and urethane binders having acid groups and double bonds in side chains as described in JP-A-2002-107918 Since the polymer is very excellent in strength, it is advantageous in terms of film strength.
- Japanese Patent Application Laid-Open No. 2001-318463 is also preferable because of its excellent film strength.
- polyvinyl pyrrolidone, polyethylene oxide, and the like are useful as the water-soluble linear organic polymer.
- alcohol-soluble nylon, polyether of 2,2-bis- (4-hydroxyphenyl) -propane and epichlorohydrin are also useful.
- the weight average molecular weight (polystyrene conversion value measured by GPC method) of the binder polymer that can be used in the curable composition of the present embodiment is preferably 5,000 or more, more preferably 10,000 or more and 300,000 or less.
- the number average molecular weight is preferably 1,000 or more, and more preferably 2,000 or more and 250,000 or less.
- the polydispersity (weight average molecular weight / number average molecular weight) is preferably 1 or more, more preferably 1.1 or more and 10 or less.
- These binder polymers may be any of random polymers, block polymers, graft polymers and the like.
- the binder polymer can be synthesized by a conventionally known method.
- the solvent used in the synthesis include tetrahydrofuran, ethylene dichloride, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, diethylene glycol dimethyl ether, 1-methoxy.
- Examples include -2-propanol, 1-methoxy-2-propyl acetate, N, N-dimethylformamide, N, N-dimethylacetamide, toluene, ethyl acetate, methyl lactate, ethyl lactate, dimethyl sulfoxide, water and the like. These solvents are used alone or in combination of two or more.
- Examples of the radical polymerization initiator used when synthesizing the binder polymer that can be used in the curable composition for forming a high refractive index layer of the present embodiment include known compounds such as an azo initiator and a peroxide initiator. .
- the binder polymer can be used alone or in combination of two or more.
- the curable composition for forming a high refractive index layer of this embodiment may or may not contain a binder polymer, but when it is contained, the content of the binder polymer relative to the total solid content of the curable composition. Is preferably 1% by mass to 40% by mass, more preferably 3% by mass to 30% by mass, and still more preferably 4% by mass to 20% by mass.
- surfactant Various surfactants may be added to the curable composition of this embodiment from the viewpoint of further improving coatability.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
- the same surfactants as used in the above-mentioned “resin composition for forming a light transmissive cured film” can be used.
- the curable composition for forming a high refractive index layer of the present embodiment contains a fluorosurfactant, so that liquid properties (particularly fluidity) when prepared as a coating liquid are further improved.
- the uniformity of coating thickness and liquid-saving properties can be further improved. That is, in the case of forming a film using a coating liquid to which a photosensitive transparent composition containing a fluorosurfactant is applied, by reducing the interfacial tension between the coated surface and the coating liquid, The wettability is improved, and the coating property to the coated surface is improved. For this reason, even when a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
- the fluorine content in the fluorosurfactant is preferably 3% by mass to 40% by mass, more preferably 5% by mass to 30% by mass, and particularly preferably 7% by mass to 25% by mass.
- a fluorine-based surfactant having a fluorine content in this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in a curable composition. Only one type of surfactant may be used, or two or more types may be combined.
- the curable composition may or may not contain a surfactant.
- the addition amount of the surfactant is 0.001% by mass to 2% with respect to the total mass of the curable composition. It is preferably 0.0% by mass, more preferably 0.005% by mass to 1.0% by mass.
- additives such as a plasticizer and a sensitizer may be added to the curable composition for forming a high refractive index layer.
- plasticizers include dioctyl phthalate, didodecyl phthalate, triethylene glycol dicaprylate, dimethyl glycol phthalate, tricresyl phosphate, dioctyl adipate, dibutyl sebacate, and triacetyl glycerin. , 10% by mass or less can be added with respect to the total mass of the polymerizable compound and the binder polymer.
- the curable composition for forming a high refractive index layer of the present embodiment may contain an ultraviolet absorber.
- an ultraviolet absorber a compound represented by the following general formula (I) which is a conjugated diene compound is particularly preferable.
- R 1 and R 2 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and R 1 and R 2 May be the same as or different from each other, but do not represent a hydrogen atom at the same time.
- R 3 and R 4 represent an electron withdrawing group.
- the electron withdrawing group is an electron withdrawing group having a Hammett's substituent constant ⁇ p value (hereinafter, simply referred to as “ ⁇ p value”) of 0.20 or more and 1.0 or less. Preferably, it is an electron withdrawing group having a ⁇ p value of 0.30 or more and 0.8 or less.
- ⁇ p value Hammett's substituent constant
- Hammett's rule was found in 1935 by L. L. in order to quantitatively discuss the effect of substituents on the reaction or equilibrium of benzene derivatives. P. A rule of thumb proposed by Hammett, which is widely accepted today.
- Substituent constants determined by Hammett's rule include a ⁇ p value and a ⁇ m value, and these values are described in many general books. A. Dean's “Lange's Handbook of Chemistry”, 12th edition, 1979 (Mc Graw-Hill) and “Area of Chemistry”, 122, 96-103, 1979 (Nanedo), Chemical Reviews, 91, 165-195, detailed in 1991. In the present invention, it does not mean that the values known in the literature described in these documents are limited to only certain substituents, but within the range when measured based on Hammett's law even if the value is unknown. Of course, it is included as long as it is included.
- the electron withdrawing group having a ⁇ p value of 0.20 or more and 1.0 or less include an acyl group, an acyloxy group, a carbamoyl group, an alkyloxycarbonyl group, an aryloxycarbonyl group, a cyano group, a nitro group, Dialkylphosphono group, diarylphosphono group, diarylphosphinyl group, alkylsulfinyl group, arylsulfinyl group, alkylsulfonyl group, arylsulfonyl group, sulfonyloxy group, acylthio group, sulfamoyl group, thiocyanate group, thiocarbonyl group, at least An alkyl group substituted with two or more halogen atoms, an alkoxy group substituted with at least two halogen atoms, an aryloxy group substituted with at least two halogen atoms, or at least two hal
- the ultraviolet absorbers represented by the general formula (I) are disclosed in JP-B 44-29620, JP-A 53-128333, JP-A 61-169831, JP-A 63-53543, and JP-A 63-53544. Can be synthesized by the methods described in JP-A 63-56651 and other publications, and WO 2009/123109 pamphlet. Specifically, the exemplified compound (1) can be synthesized by the method described in paragraph No. 0040 of WO2009 / 123109 pamphlet.
- the curable composition of this embodiment may or may not contain an ultraviolet absorber, but when it is contained, the content of the ultraviolet absorber is 0.1 mass relative to the total solid content of the composition. % To 10% by mass is preferable, 0.1% to 5% by mass is more preferable, and 0.1% to 3% by mass is particularly preferable.
- the lower layer (high refractive index layer) may be a dispersion composition II described below.
- Dispersion composition II refers to a dispersion composition containing metal oxide particles (A) having a primary particle diameter of 1 nm to 100 nm, a specific dispersion resin (B), and a solvent (C).
- the components other than the specific dispersion resin (B) are the same as those of the dispersion composition I.
- Specific dispersion resin B As the dispersant for dispersing the high refractive index particles, it is preferable to use an oligoimine-based dispersant containing a nitrogen atom in at least one of the main chain and the side chain.
- the oligoimine-based dispersant has a repeating unit having a partial structure X having a functional group of pKa14 or less and a side chain containing a side chain Y having 40 to 10,000 atoms, and has a main chain and a side chain.
- a dispersion resin having a basic nitrogen atom in at least one hereinafter referred to as “specific dispersion resin (B)” as appropriate) is preferred.
- the basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom.
- the specific resin (B), the partial structure X, etc. and may have a partial structure W paired is preferably the partial structure W is a structure having a pK b 14 or less nitrogen atoms, pK b It is more preferable to contain a structure having 10 or less nitrogen atoms.
- the base strength pK b means a pK b at a water temperature 25 ° C., is one of the index for quantitatively indicating the strength of the base, is synonymous with basicity constants.
- the details of the preferable range of the partial structure X are the same as those of the partial structure X described later.
- the details of the preferred range of the side chain Y are the same as those of the side chain Y described later.
- the W preferably has a structure in which the linking part of the side chain Y is dissociated to become an ion binding site.
- x, y, and z each represent a polymerization molar ratio of repeating units, and x is preferably 5 to 50, y is 5 to 60, and z is preferably 10 to 90.
- l represents the number of linked polyester chains, and is an integer capable of forming a side chain having 40 to 10,000 atoms. l is preferably 5 to 100,000, more preferably 20 to 20,000, 40 to More preferably, it is 2,000.
- the repeating unit whose copolymerization ratio is defined by x in the formula is the partial structure X
- the repeating unit whose copolymerization ratio is defined by z in the formula is the partial structure Y.
- the specific dispersion resin (B) includes (i) a poly (lower alkyleneimine) -based repeating unit, a polyallylamine-based repeating unit, a polydiallylamine-based repeating unit, a metaxylenediamine-epichlorohydrin polycondensate-based repeating unit, and a polyvinylamine-based repeating unit.
- a dispersion resin having a side chain (ii) including a side chain Y having 40 to 10,000 atoms (hereinafter, appropriately referred to as “specific dispersion resin (B1)”) is particularly preferable.
- the specific dispersion resin (B1) has the repeating unit (i). Thereby, the adsorption
- the poly (lower alkyleneimine) may be a chain or a network.
- the lower alkylene imine means an alkylene imine containing an alkylene chain having 1 to 5 carbon atoms.
- the repeating unit (i) preferably forms a main chain portion in the specific dispersion resin.
- the number average molecular weight of the main chain portion is preferably 100 to 10,000, more preferably 200 to 5,000. Is more preferable, and 300 to 2,000 is most preferable.
- the number average molecular weight of the main chain portion can be measured by a polystyrene conversion value by GPC method.
- the specific dispersion resin (B1) includes a repeating unit represented by the following formula (I-1) and a repeating unit represented by the formula (I-2), or a repeating unit represented by the formula (I-1) And a dispersion resin containing a repeating unit represented by the formula (I-2a).
- R 1 and R 2 each independently represents a hydrogen atom, a halogen atom or an alkyl group (preferably having 1 to 6 carbon atoms).
- a independently represents an integer of 1 to 5; * Represents a connecting part between repeating units.
- R 8 and R 9 are the same groups as R 1 .
- L is a single bond, an alkylene group (preferably having 1 to 6 carbon atoms), an alkenylene group (preferably having 2 to 6 carbon atoms), an arylene group (preferably having 6 to 24 carbon atoms), a heteroarylene group (having 1 to 6 carbon atoms).
- an imino group preferably having a carbon number of 0 to 6
- an ether group preferably having a carbon number of 0 to 6
- a thioether group preferably having a carbonyl group, or a combination group thereof.
- a single bond or —CR 5 R 6 —NR 7 — is preferable.
- R 5 R 6 each independently represents a hydrogen atom, a halogen atom, or an alkyl group (preferably having 1 to 6 carbon atoms).
- R 7 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.
- L a is a structural site ring structure formed together with CR 8 CR 9 and N, it is preferable together with the carbon atom of CR 8 CR 9 is a structural site that form a non-aromatic heterocyclic ring having 3 to 7 carbon atoms . More preferably, it is a structural part that forms a 5- to 7-membered non-aromatic heterocyclic ring by combining the carbon atom and N (nitrogen atom) of CR 8 CR 9 , and more preferably forms a 5-membered non-aromatic heterocyclic ring It is particularly preferred that it is a structural site that forms pyrrolidine. However, the structural site may further have a substituent such as an alkyl group.
- X represents a group having a functional group of pKa14 or less.
- Y represents a side chain having 40 to 10,000 atoms.
- the specific dispersion resin (B1) preferably further has a repeating unit represented by the formula (I-3), the formula (I-4) or the formula (I-5) as a copolymerization component.
- the specific dispersion resin (B1) includes such a repeating unit, the dispersion performance can be further improved.
- R 1 , R 2 , R 8 , R 9 , L, La, and a are as defined in the formulas (I-1), (I-2), and (I-2a).
- Ya represents a side chain having 40 to 10,000 atoms having an anionic group.
- the repeating unit represented by the formula (I-3) is reacted by adding an oligomer or polymer having a group that reacts with an amine to form a salt to a resin having a primary or secondary amino group in the main chain.
- Ya is preferably represented by the following formula (III-2).
- R 1 and R 2 are particularly preferably hydrogen atoms.
- a is preferably 2 from the viewpoint of obtaining raw materials.
- the specific dispersion resin (B1) may further contain a lower alkyleneimine containing a primary or tertiary amino group as a repeating unit.
- the group shown by said X, Y, or Ya may couple
- Resins containing both a repeating unit having a group represented by X and a repeating unit having Y bonded to such a main chain structure are also included in the specific dispersion resin (B1).
- the repeating unit represented by the formula (I-1) is preferably contained in an amount of 1 to 80 mol% in all repeating units contained in the specific dispersion resin (B1) from the viewpoint of storage stability and developability. Most preferably, it is contained in an amount of ⁇ 50 mol%.
- the repeating unit represented by the formula (I-2) is preferably contained in an amount of 10 to 90 mol% in all repeating units contained in the specific dispersion resin (B1), and 30 to 70 Most preferably, it is contained in mol%.
- the content ratio [(I-1) :( I-2)] of the repeating unit (I-1) and the repeating unit (I-2) is 10 in molar ratio.
- the range is preferably 1: 1 to 1: 100, and more preferably 1: 1 to 1:10.
- the repeating unit represented by the formula (I-3) used in combination is optionally contained in an amount of 0.5 to 20 mol% from the viewpoint of the effect among all the repeating units contained in the specific dispersion resin (B1).
- the content is preferably 1 to 10 mol%, most preferably.
- Partial structure X The partial structure X in each of the above formulas has a functional group having a pKa of 14 or less at a water temperature of 25 ° C.
- pKa has the definition described in Chemical Handbook (II) (4th revised edition, 1993, edited by The Chemical Society of Japan, Maruzen Co., Ltd.).
- the “functional group of pKa14 or less” is not particularly limited as long as the physical properties satisfy this condition, and examples thereof include those having a pKa satisfying the above range with known functional groups.
- the following functional groups are preferred, and those having a pKa of 11 or less are particularly preferred. Although there is no particular lower limit, it is practical that it is -5 or more.
- partial structure X examples include, for example, a carboxylic acid group (pKa: about 3 to 5), a sulfonic acid (pKa: about ⁇ 3 to ⁇ 2), —COCH 2 CO— (pKa: about 8 to 10), —COCH 2 CN (pKa: about 8 to 11), —CONHCO—, phenolic hydroxyl group, —R F CH 2 OH or — (R F ) 2 CHOH (R F represents a perfluoroalkylene group or a perfluoroalkyl group.
- PKa About 9 to 11
- sulfonamide groups pKa: about 9 to 11
- carboxylic acid groups pKa: about 3 to 5
- sulfonic acid groups pKa: about -3 to -2
- —COCH 2 CO— pKa: about 8 to 10.
- the partial structure X is preferably directly bonded to the basic nitrogen atom in the repeating unit having the basic nitrogen atom.
- the partial structures X may be linked not only by a covalent bond but also in a form in which a salt is formed by ionic bonding.
- the partial structure X those having a structure represented by the following formula (V-1), formula (V-2) or formula (V-3) are particularly preferable.
- U represents a single bond or a divalent linking group.
- d and e each independently represents 0 or 1;
- Q represents an acyl group or an alkoxycarbonyl group.
- Examples of the divalent linking group represented by U include alkylene (more specifically, for example, —CH 2 —, —CH 2 CH 2 —, —CH 2 CHMe— (Me is a methyl group), — (CH 2 ) 5 —, —CH 2 CH (n—C 10 H 21 ) —, etc.), an oxygen-containing alkylene (more specifically, for example, —CH 2 OCH 2 —, —CH 2 CH 2 OCH 2 CH 2-, etc.), arylene groups (eg, phenylene, tolylene, biphenylene, naphthylene, furylene, pyrrolylene, etc.), alkyleneoxy (eg, ethyleneoxy, propyleneoxy, phenyleneoxy, etc.), etc.
- alkylene more specifically, for example, —CH 2 —, —CH 2 CH 2 —, —CH 2 CHMe— (Me is a methyl group), — (CH 2 ) 5 —, —CH 2
- An alkylene group having 1 to 30 carbon atoms or an arylene group having 6 to 20 carbon atoms is preferable, and an alkylene group having 1 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms is most preferable.
- d is preferably 1, and e is preferably 0.
- Q represents an acyl group or an alkoxycarbonyl group.
- acyl group in Q an acyl group having 1 to 30 carbon atoms (eg, formyl, acetyl, n-propanoyl, benzoyl, etc.) is preferable, and acetyl is particularly preferable.
- alkoxycarbonyl group in Q Q is particularly preferably an acyl group, and an acetyl group is preferable from the viewpoint of ease of production and availability of a raw material (precursor X a of X).
- the partial structure X is preferably bonded to the basic nitrogen atom in the repeating unit having a basic nitrogen atom. Thereby, the dispersibility and dispersion stability of titanium dioxide particles are dramatically improved. Partial structure X is also considered to contribute to dispersion stability by imparting solvent solubility and suppressing resin precipitation over time. Furthermore, since the partial structure X contains a functional group of pKa14 or less, it also functions as an alkali-soluble group. Thereby, developability is improved, and it is considered that both dispersibility, dispersion stability, and developability can be achieved.
- the content of the functional group of pKa14 or less in the partial structure X is not particularly limited, but is preferably 0.01 to 5 mmol, particularly 0.05 to 1 mmol, with respect to 1 g of the specific dispersion resin (B1). preferable. From the viewpoint of developability, it is preferable that the acid value of the specific dispersion resin (B1) is contained in an amount of about 5 to 50 mgKOH / g. ⁇ Side chain Y Examples of Y include known polymer chains such as polyester, polyamide, polyimide, and poly (meth) acrylate that can be connected to the main chain portion of the specific dispersion resin (B1). The binding site with the specific dispersion resin (B1) in Y is preferably the terminal of the side chain Y.
- Y is at least one selected from a poly (lower alkyleneimine) -based repeating unit, a polyallylamine-based repeating unit, a polydiallylamine-based repeating unit, a metaxylenediamine-epichlorohydrin polycondensate-based repeating unit, and a polyvinylamine-based repeating unit. It is preferably bonded to the nitrogen atom of the repeating unit having a nitrogen atom.
- the bonding mode between the main chain portion such as a repeating unit having a nitrogen atom and Y is a covalent bond, an ionic bond, or a mixture of a covalent bond and an ionic bond.
- Y is preferably ionically bonded to the nitrogen atom of the repeating unit having the basic nitrogen atom as an amide bond or carboxylate.
- the number of atoms of the side chain Y is preferably 50 to 5,000, more preferably 60 to 3,000, from the viewpoints of dispersibility, dispersion stability, and developability.
- the number average molecular weight of Y can be measured by the polystyrene conversion value by GPC method. At this time, it is practical to measure the molecular weight of Y before being incorporated into the resin.
- the number average molecular weight of Y is particularly preferably 1,000 to 50,000, and most preferably 1,000 to 30,000 from the viewpoints of dispersibility, dispersion stability, and developability.
- the molecular weight of Y can be specified from the polymer compound used as the raw material for Y, and the measurement method conforms to the measurement conditions by GPC described later. It is preferable that two or more side chain structures represented by Y are connected to the main chain in one molecule of the resin, and more preferably five or more are connected.
- Y preferably has a structure represented by the formula (III-1).
- Z is a polymer or oligomer having a polyester chain as a partial structure, and represents a residue obtained by removing a carboxyl group from a polyester having a free carboxylic acid represented by HO—CO—Z.
- Ya is preferably the formula (III-2).
- Z has the same meaning as Z in formula (III-1).
- a polyester having a carboxyl group at one end is obtained by polycondensation of a carboxylic acid and a lactone, polycondensation of a hydroxy group-containing carboxylic acid, a polyhydric alcohol and a divalent carboxylic acid (or a cyclic acid anhydride). It can be obtained by condensation or the like.
- Z is preferably-(L B ) nB -Z B.
- Z B represents a hydrogen atom or a monovalent organic group.
- Z B is an organic group, an alkyl group (preferably having 1 to 30 carbon atoms), an aryl group, a heterocyclic group, or the like is preferable.
- Z B may further have a substituent, and examples of the substituent include an aryl group having 6 to 24 carbon atoms and a heterocyclic group having 3 to 24 carbon atoms.
- L B is an alkylene group (having 1 to 6 carbon atoms is preferred), an alkenylene group (2 to 6 carbon atoms is preferred), an arylene group (6 to 24 carbon atoms is preferred), a heteroarylene group (having 1 to 6 carbon atoms Preferred), an imino group (preferably having a carbon number of 0 to 6), an ether group, a thioether group, a carbonyl group, or a combination thereof.
- an alkylene group preferably having 1 to 6 carbon atoms
- an ether group, a carbonyl group, or a linking group relating to a combination thereof is preferable.
- the alkylene group may be branched or linear.
- the alkylene group may have a substituent, and preferred substituents include an alkyl group (preferably 1 to 6 carbon atoms), an acyl group (preferably 2 to 6 carbon atoms), an alkoxy group (preferably 1 to 6 carbon atoms). Or an alkoxycarbonyl group (preferably having 2 to 8 carbon atoms).
- nB is an integer of 5 to 100,000. nB number of L B may have a different structure, respectively.
- p and q represent the number of linked polyester chains, and each independently represents 5 to 100,000.
- R a represents a hydrogen atom or an alkoxycarbonyl group.
- a method of reacting a resin having a primary or secondary amino group with a precursor x of a partial structure X and a precursor y of Y (2) a portion It can be produced by a method of polymerization of a monomer containing a structure corresponding to the structure X and a macromonomer containing Y.
- a resin having a primary or secondary amino group in the main chain is synthesized, and then a precursor X of X and a precursor y of Y are reacted with the resin to polymerize nitrogen atoms existing in the main chain. It is preferable to produce by introducing by reaction.
- JP2009-203462A for details of the manufacturing method, reference can be made to JP2009-203462A.
- the molecular weight of the specific dispersion resin B is preferably 3,000 to 100,000 in terms of weight average molecular weight, and if the 5,000 to 55,000 weight average molecular weight is in the above range, The effects of the plurality of introduced adsorption sites are sufficiently exhibited, and performance with excellent adsorptivity to the surface of the titanium dioxide particles can be exhibited.
- GPC was measured using HLC-8020GPC (manufactured by Tosoh Corporation) and columns as TSKgel SuperHZM-H, TSKgel SuperHZ4000, TSKgel SuperHZ200 (manufactured by Tosoh Corporation).
- the carrier may be selected as appropriate, but tetrahydrofuran is used as long as it can be dissolved.
- the dispersant for high refractive index particles can be used alone or in combination of two or more.
- the content of the specific resin (B) with respect to the total solid content of the dispersion composition (II) is preferably in the range of 10 to 50% by mass, more preferably in the range of 11 to 40% by mass from the viewpoint of dispersibility and dispersion stability.
- the range of 12 to 30% by mass is more preferable.
- the curable composition of the present embodiment is preferably filtered with a filter for the purpose of removing foreign substances and reducing defects. If it is conventionally used for the filtration use etc., it can use without being specifically limited.
- fluorine resin such as PTFE (polytetrafluoroethylene), polyamide resin such as nylon-6 and nylon-6,6, polyolefin resin such as polyethylene and polypropylene (PP) (including high density and ultra high molecular weight), etc. Filter.
- polypropylene including high density polypropylene
- the pore size of the filter is suitably about 0.01 to 7.0 ⁇ m, preferably about 0.01 to 2.5 ⁇ m, more preferably about 0.01 to 1.5 ⁇ m.
- the filtering by the first filter may be performed only once or may be performed twice or more.
- the second and subsequent pore sizes are larger than the pore size of the first filtering.
- the pore diameter here can refer to the nominal value of the filter manufacturer.
- a filter As a commercially available filter, for example, it can be selected from various filters provided by Nippon Pole Co., Ltd., Advantech Toyo Co., Ltd., Japan Entegris Co., Ltd. (formerly Japan Microlith Co., Ltd.) or KITZ Micro Filter Co., Ltd. .
- the second filter a filter formed of the same material as the first filter described above can be used.
- the pore size of the second filter is suitably about 0.5 to 7.0 ⁇ m, preferably about 2.5 to 7.0 ⁇ m, more preferably about 4.5 to 6.0 ⁇ m. By setting it within this range, the component particles contained in the mixed solution remain mixed and mixed in the mixed solution, and foreign matters that hinder the preparation of a uniform and smooth curable composition in the subsequent step are removed. Can be removed.
- the filtering by the first filter may be performed only with the dispersion, and the second filtering may be performed after mixing other components.
- siloxane curable composition [Preparation of siloxane curable composition] The following components were blended to prepare siloxane curable composition A-1. In addition, the components shown in Table A below were blended to prepare siloxane curable compositions A-2 and Ac1.
- Siloxane Hydrolysis condensate S-1 20 parts
- Solvent propylene glycol monomethyl ether acetate (PGMEA) 62 parts
- Solvent ethyl 3-ethoxypropionate (EEP) 16 parts
- the siloxane curable composition A-1 was applied on a 4-inch silicon wafer, and pre-baked (100 ° C. for 2 minutes) and post-baked (230 ° C. for 10 minutes) to prepare a cured film.
- hollow particle curable composition The following components were blended to prepare a hollow particle-containing siloxane curable composition A-3. Further, the components shown in Table A below were blended to prepare curable compositions A-4, A-5, and Ac2 .
- Hollow particles Through rear 2320 (manufactured by JGC Catalysts and Chemicals) 55 parts Curing resin: Cyclomer P ACA230AA (abbreviation: 230AA) (Daicel Chemical Co., Ltd.) ...
- the surfactant (Megafac) is composed of a compound containing a perfluoroalkyl group and having an ethylene oxide chain.
- a cured film was prepared in the same manner as A-1 and the like, and the refractive index was measured in the same manner as described above.
- ⁇ Lens body forming composition> [Preparation of titanium dioxide dispersion (dispersion composition)] Using a NPM manufactured by Shinmaru Enterprises Co., Ltd. as a circulation type dispersion device (bead mill), a mixture treatment having the following composition was subjected to a dispersion treatment as follows to obtain a titanium dioxide dispersion as a dispersion composition. . ⁇ Composition ⁇ ⁇ Titanium dioxide (TTO-51 (C) manufactured by Ishihara Sangyo Co., Ltd.): 150.0 parts ⁇ The following dispersion resin 1 (solid content 20% PGMEA solution): 165.0 parts ⁇ Propylene glycol monomethyl ether acetate: 142.5 Part
- the dispersing device was operated under the following conditions. ⁇ Bead diameter: ⁇ 0.05mm ⁇ Bead filling rate: 60% by volume ⁇ Peripheral speed: 10m / sec ⁇ Pump supply amount: 30Kg / hour ⁇ Cooling water: Tap water ⁇ Bead mill annular passage volume: 1.0L ⁇ Amount of liquid mixture to be dispersed: 10kg
- the average particle size was measured at 30 minute intervals (one pass time). The average particle diameter decreased with the dispersion time (pass number), but the amount of change gradually decreased. Dispersion was terminated when the average particle size change when the dispersion time was extended by 30 minutes became 5 nm or less. The average particle size of the titanium dioxide particles in this dispersion was 40 nm.
- the average particle diameter of titanium dioxide or the like in this example is obtained by diluting a mixed liquid or dispersion containing titanium dioxide 80 times with propylene glycol monomethyl ether acetate, and subjecting the obtained diluted liquid to a dynamic light scattering method. The value obtained by using and measuring. This measurement was performed using Microtrack UPA-EX150 manufactured by Nikkiso Co., Ltd.
- Titanium Dioxide-Containing Curable Composition B-1 -Titanium dioxide dispersion prepared above (dispersion composition)-80.5 parts-Solvent: propylene glycol monomethyl ether acetate-15 parts-Polymerizable compound: KAYARAD DPHA (Nippon Kayaku Co., Ltd.) ...
- Polymerization initiator IRGACURE OXE-01 (manufactured by BASF) 0.10 parts Polymer A: benzyl methacrylate / methacrylic acid copolymer (Co (Polymerization ratio: 80/20 (wt%), weight average molecular weight: 12,000) (Manufactured by FFFC) ⁇ 0.5 parts ⁇ Surfactant: MegaFuck F-781 (manufactured by DIC Corporation) ⁇ 0.30 parts
- the titanium dioxide-containing curable composition was applied onto a silicon wafer, and pre-baked (100 ° C. for 2 minutes) and post-baked (230 ° C. for 10 minutes) to prepare a cured film B-1.
- the component ratio in the curable composition to be used was changed to the following composition ratio, and various titanium dioxide-containing curable compositions were prepared in the same manner as the titanium dioxide-containing curable composition B-1.
- the refractive index measurement result of each cured film is also described.
- the measuring method of the refractive index is the same as the measuring method of the low refractive index layer (Table A).
- the sample B-4 was prepared in the same manner as the B-1 composition except that the titanium oxide was changed to zirconium oxide (PCS manufactured by Nippon Denko Co., Ltd.).
- a light shielding film made of tungsten having an opening only in the light receiving portion of the photodiode is formed, and the entire surface of the formed light shielding film and the photodiode light receiving portion (opening in the light shielding film)
- a device protective layer made of silicon nitride is formed so as to cover the substrate.
- the length of one side is 1 A color filter having only a green pixel of 4 ⁇ m was prepared.
- the curable compositions B-1 to B-6 and B-c1 described in the examples of the present invention prepared as described above were applied to a dry film thickness of 1.5 ⁇ m, and then 100 ° C. And heated on a hot plate for 2 minutes, and then heated on a hot plate at 230 ° C. for 10 minutes to be cured.
- HPR-204ESZ-9-5 mPa ⁇ s (resist solution manufactured by FFEM, FUJIFILM Electronics Materials Co., Ltd.) is applied on this to a dry film thickness of 0.5 ⁇ m, and heated at 90 ° C. for 1 minute. And heated.
- This coating film is 300 mJ / cm by an i-line stepper (product name: FPA-3000i5 +, manufactured by Canon Inc.) through a mask having many square patterns each having a side of 1.15 ⁇ m and a gap between patterns of 0.35 ⁇ m. 2 for exposure.
- the mask was arranged so that a large number of square patterns in the mask were at positions corresponding to the green pixels of the color filter.
- the substrate obtained as described above was subjected to a dry etching process using a dry etching apparatus (manufactured by Hitachi High-Technologies: U-621) under the following conditions, and a transparent film coating film having a high refractive index was micronized.
- ⁇ RF power 800W ⁇
- Antenna bias 100W ⁇
- Photoresist etching rate 140 nm / min.
- the curable compositions A-1 to A-10, Ac1, and Ac2 were applied so as to have a film thickness of 0.7 ⁇ m, and then heated on a hot plate at 230 ° C. for 10 minutes to obtain.
- the sensor was assembled as a camera module to produce an image sensor.
- Layer A Light transmissive cured film (low refractive index layer)
- B layer Microlens body (high refractive index layer)
- a high average color density (high sensitivity) can be achieved even in a microlens unit having a thick light-transmitting cured film.
- this method may increase noise.
- this noise can be reduced, and the light receiving sensitivity for digitization can be increased without variation.
- Example 2 [Influence by thickness] About the set of said tests 101 and 110, the thing from which the thickness of an upper layer and a lower layer differs was produced variously and the test was done (Table 2). As a result, it was found that good performance was realized even when the thickness was changed.
- Example 3 A curable composition was prepared and evaluated in the same manner as in A-1, except that 1 part of ECT-7 (manufactured by Nikko Chemicals Co., Ltd.) was used instead of Emulsogen COL-020. As a result, the average dye density and the relative dye density were also good.
- ECT-7 is a surfactant having a polyoxyalkylene structure, and has a structure of R—O— (EO) 7 —COOH (R ⁇ C 13 alkyl group).
- Example 4 Example 1 except that 1 part of ECT-7 (manufactured by Nikko Chemicals) and 0.02 part of KF6001 (manufactured by Shin-Etsu Silicone) were used in place of Emulsogen COL-020 in (Composition) of A-1.
- a coating composition was prepared and evaluated in the same manner as described above. As a result, the average dye density and the relative dye density were also good.
- Example 5 (Titanium dioxide-less high refractive index material composition)
- the following composition was prepared.
- pre-baking 100 ° C. for 2 min
- post-baking 230 ° C. for 10 min
- Solvent Propylene glycol monomethyl ether acetate 15 parts
- Cyclohexanone 30 parts
- Resin Ultra-high refractive index coating material UR202 made by Nissan Chemical Industries, Ltd.
- Curing accelerator SB-A (Mitsubishi Gas Chemical) .... 5 parts epoxy resin: 157S65 (Mitsubishi Chemical Corporation) ... 17.5 parts
- Surfactant MegaFuck F-781 (DIC) ... 0.5 parts
- the siloxane curable composition A-1 was used in the same manner, and the titanium dioxide-less high refractive index material composition C-1 (Nissan Chemical) was used instead of the titanium dioxide-containing composition B-1.
- a test body 201 was prepared in the same manner as the test body 101 except that an ultrahigh refractive index coating material UR202 (containing a refractive index of 1.76) manufactured by Kogyo Co., Ltd. was used.
- UR202 ultrahigh refractive index coating material manufactured by Kogyo Co., Ltd.
- ⁇ Siloxane curable composition A-20> (Synthesis of hydrolysis condensate) Hydrolysis / condensation reaction was performed using methyltriethoxysilane. The solvent used at this time was ethanol. The obtained hydrolysis condensate had a weight average molecular weight of about 10,000. The weight average molecular weight was confirmed by GPC according to the procedure described above. Components of the following composition were mixed with a stirrer to prepare composition A-20. The refractive index of the cured film formed of the composition A-20 was 1.30.
- composition Hydrolyzed condensate (methyltriethoxysilane) 5 parts propylene glycol monomethyl ether acetate (PGMEA) 5 parts EMULSOGEN-COL-020 (anionic surfactant, manufactured by Clariant Co., Ltd.) ... 2 parts Thruria 2320 (20% by mass dispersion of hollow silica manufactured by JGC Catalysts & Chemicals) ... 88 parts
- Example 6 The titanium dioxide-less high refractive index material composition C-1 (containing an ultrahigh refractive index coating material UR202 manufactured by Nissan Chemical Industries, Ltd.) of the test body 201 was used as an ultrahigh refractive index coating material UR202 manufactured by Nissan Chemical Industries, Ltd., and thioepoxy resin LPH1101 ( A test body 301 was obtained in the same manner as the test body 201 except that it was changed to Mitsubishi Gas Chemical Co., Ltd. For the test body 301, as with the test body 101, variations in average color density and relative color density were evaluated and confirmed to be good results.
- test 301 a siloxane curable composition A-1 was prepared A-2 ⁇ A-10 and A-20 was changed to in the same manner as the test body 201 specimens 302-3 11.
- specimens 302-3 11 in the same manner as the test body 101, to evaluate the variation of the average color density and the relative color density, it was confirmed that a good result.
- Example 7 The ultrahigh refractive index coating material UR202 manufactured by Nissan Chemical Industries, Ltd., which is the titanium dioxide-less high refractive index material composition (containing the ultrahigh refractive index coating material UR202 manufactured by Nissan Chemical Industries, Ltd.) of the test body 201, is used as an episulfide resin MR-174 (Mitsui).
- the test body 401 was obtained in the same manner as the test body 201 except that it was changed to “Chemical Co., Ltd.”. For the test body 401, as in the case of the test body 101, the variation in the average color density and the relative color density was evaluated, and it was confirmed that the results were good.
- test 401 a siloxane curable composition A-1 was prepared A-2 ⁇ A-1 0 ⁇ beauty was changed to A-20 in the same manner as the test body 401 specimens 402-4 11.
- specimens 402-4 11 in the same manner as the test body 101, to evaluate the variation of the average color density and the relative color density, it was confirmed that a good result.
- Example 8 The titanium dioxide-less high refractive index material composition (containing the ultra high refractive index coating material UR202 manufactured by Nissan Chemical Industries, Ltd.) of the test body 201 was used as the thiourethane resin MR-7 ( A specimen 501 was obtained in the same manner as the specimen 201 except that it was changed to Mitsui Chemicals. The test body 501 was evaluated for variation in average color density and relative color density in the same manner as the test body 101, and it was confirmed that the test body 501 had good results. In test 501, a siloxane curable composition A-1 was prepared A-2 ⁇ A-1 0 ⁇ beauty A-20 was changed to in the same manner as the test body 501 specimens 502-5 11. For specimens 502-5 11, in the same manner as the test body 101, to evaluate the variation of the average color density and the relative color density was confirmed to be good results.
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Abstract
Description
〔1〕硬化性樹脂組成物を硬化させてなる第1の光学部材と、これに被覆された第2の光学部材とを有してなる光学部材セットであって、第1の光学部材は屈折率1.25~1.45であり、第2の光学部材は屈折率1.65~1.95である光学部材セット。
〔2〕第1の光学部材は屈折率1.35~1.45であり、第2の光学部材は屈折率1.85~1.95である〔1〕に記載の光学部材セット。
〔3〕第1の光学部材が、シロキサン樹脂およびフッ素系樹脂の少なくともいずれかを含有する〔1〕または〔2〕に記載の光学部材セット。
〔4〕第1の光学部材が、さらに中空粒子を含有する〔1〕~〔3〕のいずれか1項に記載の光学部材セット。
〔5〕第2の光学部材がチタニアまたはジルコニアを含有する〔1〕~〔4〕のいずれか1項に記載の光学部材セット。
〔6〕第1の光学部材が膜状であり、その膜厚が0.5μm~3.0μmである〔1〕~〔5〕のいずれか1項に記載の光学部材セット。
〔7〕第1の光学部材の厚さが500nm~2800nmであり、第2の光学部材の厚さが200nm~1500nmである〔1〕~〔6〕のいずれか1項に記載の光学部材セット。
〔8〕第1の光学部材の屈折率と第2の光学部材の屈折率との差が0.45~0.55である〔1〕~〔7〕のいずれか1項に記載の光学部材セット。
〔9〕シロキサン樹脂の65質量%以上100質量%以下が下記式(1)で表されるシルセスキオキサン構造で構成されている〔2〕~〔8〕のいずれか1項に記載の光学部材セット。
-(R1SiO3/2)n- 式(1)
(上記式(1)中、R1は炭素数1~3のアルキル基を表す。nは20~1000の整数を表す。)
〔10〕第1の光学部材が、さらに界面活性剤を含有する〔1〕~〔9〕のいずれか1項に記載の光学部材セット。
〔11〕シロキサン樹脂が下記式(2)で表されるアルキルトリアルコキシシランを加水分解縮合し得られた樹脂である〔2〕~〔10〕のいずれか1項に記載の光学部材セット。
R2Si(OR3)3 式(2)
(R2は炭素数1~3のアルキル基を表し、R3はアルキル基を表す。)
〔12〕第2の光学部材が、一次粒子径が1nm~100nmである金属酸化物粒子(A)と、水素原子を除いた原子数が40~10000のグラフト鎖を有するグラフト共重合体(B)と、溶媒(C)とを含有する分散組成物の光硬化物である〔1〕~〔11〕のいずれか1項に記載の光学部材セット。
〔13〕グラフト共重合体(B)が、pKa14以下の官能基を有する基Xを有する繰り返し単位と、原子数40~10,000の側鎖Yとを有し、かつ塩基性窒素原子を含有する樹脂(B1)である〔12〕に記載の光学部材セット。
〔14〕樹脂(B1)が、下記式(I-1)で表される繰り返し単位及び下記式(I-2)で表される繰り返し単位を有する、あるいは下記式(I-1)で表される繰り返し単位及び下記式(I-2a)で表される繰り返し単位を有する〔13〕に記載の光学部材セット。
〔15〕第2の光学部材として複数の凸レンズが採用され、複数の凸レンズはその膨出方向を実質的に同一方向にむけて配列されており、かつ複数の凸レンズはその膨出方向から光透過性硬化膜をなす第1の光学部材により被覆されており、複数の凸レンズ間に形成された凹部には実質的に隙間無く光透過性硬化膜が充填され、一方、光透過性硬化膜において凸レンズの反対側は平坦面とされている〔1〕~〔14〕のいずれか1項に記載の光学部材セット。
〔16〕〔1〕~〔15〕のいずれか1項に記載の光学部材セットと、半導体受光ユニットとを備えた固体撮像素子。
(上層)
本発明における光透過性硬化膜(上層)は下層となるマイクロレンズ体より低い屈折率を有し、その屈折率が1.25以上であり、1.35以上であることが好ましく、1.39以上がより好ましい。この下限値以上とすることで、カメラモジュールの感度を向上することができる。同様の観点から、当該屈折率は、1.45以下であり、1.43以下であることが好ましい。なお、本発明において屈折率は特に断らない限り、実施例で採用した方法によるものとする。
本発明における光透過性硬化膜を構成する材料として、上記のとおり、シロキサン樹脂が挙げられる。シロキサン樹脂は後述するアルコキシシラン原料を用いて、加水分解反応および縮合反応を介して得ることができる。より具体的には、該化合物は、アルキルトリアルコキシシランの一部または全部のアルコキシ基が加水分解してシラノール基に変換し、生成したシラノール基の少なくとも一部が縮合してSi-O-Si結合を形成したものということができる。シロキサン樹脂はかご型、はしご型、又はランダム型等のいずれのシルセスキオキサン構造を有するシロキサン樹脂であってもよい。なお、前記「かご型」、「はしご型」、及び「ランダム型」は、例えばシルセスキオキサン材料の化学と応用展開(シーエムシー出版)等に記載されている構造を参照することができる。
本実施形態のシロキサン樹脂は下記式(1)で表されるシルセスキオキサン構造を有することが好ましい。
-(R1SiO3/2)n- 式(1)
(上記式(1)中、R1は炭素数1~3のアルキル基を表す。nは20~1000の整数を表す。)
上記R1が示すアルキル基は上記炭素数の範囲であれば特に制限されないが、例えばメチル基、エチル基、プロピル基、イソプロピル基などが挙げられる。中でもメチル基、エチル基が好ましく、最も好ましいのはメチル基である。また、R1が示すアルキル基は置換基を有さないアルキル基でも置換基を有するアルキル基でもよいが、置換基を有さないアルキル基であることが好ましい。
本実施形態において加水分解縮合物を製造するために、出発原料として、アルキルトリアルコキシシランを含むアルコキシシラン原料を使用することができる。なお、アルコキシシラン原料とは、アルコキシシラン(アルコキシ基を有するケイ素化合物)から構成される出発原料を意図する。原料としてアルキルトリアルコキシシランを使用することにより、得られる加水分解縮合物の構造がよりフレキシブルとなり、さらに有機成分の存在により基板に対する濡れ性を高めることができる。
式(2):R2Si(OR3)3
(R2は炭素数1~3のアルキル基、炭素数1~8のアルコキシアルキル基、炭素数1~10のフルオロアルキル基、を表し、R3はアルキル基を表す。)
アルコキシシラン原料としては上記のトリアルコキシシラン以外に、他のアルコキシシランを使用することができ、なかでもテトラアルコキシシランが好ましい。テトラアルコキシシランを含むことにより、加水分解縮合物中の架橋密度が増加し、硬膜して得られる皮膜の電気的絶縁性、耐現像性、耐熱性がより向上する点で好ましい。
式(3):Si(OR4)4
(R4は、それぞれ独立にアルキル基を表す。)
なお、テトラアルコキシシランとしては、1種のみを使用してもよいし、2種以上を併用してもよい。
アルキル基(好ましくは炭素原子数1~20のアルキル基、例えばメチル、エチル、イソプロピル、t-ブチル、ペンチル、ヘプチル、1-エチルペンチル、ベンジル、2-エトキシエチル、1-カルボキシメチル等)、アルケニル基(好ましくは炭素原子数2~20のアルケニル基、例えば、ビニル、アリル、オレイル等)、アルキニル基(好ましくは炭素原子数2~20のアルキニル基、例えば、エチニル、ブタジイニル、フェニルエチニル等)、シクロアルキル基(好ましくは炭素原子数3~20のシクロアルキル基、例えば、シクロプロピル、シクロペンチル、シクロヘキシル、4-メチルシクロヘキシル等)、アリール基(好ましくは炭素原子数6~26のアリール基、例えば、フェニル、1-ナフチル、4-メトキシフェニル、2-クロロフェニル、3-メチルフェニル等)、ヘテロ環基(好ましくは炭素原子数2~20のヘテロ環基、例えば、2-ピリジル、4-ピリジル、2-イミダゾリル、2-ベンゾイミダゾリル、2-チアゾリル、2-オキサゾリル等)、アルコキシ基(好ましくは炭素原子数1~20のアルコキシ基、例えば、メトキシ、エトキシ、イソプロピルオキシ、ベンジルオキシ等)、アリールオキシ基(好ましくは炭素原子数6~26のアリールオキシ基、例えば、フェノキシ、1-ナフチルオキシ、3-メチルフェノキシ、4-メトキシフェノキシ等)、アルコキシカルボニル基(好ましくは炭素原子数2~20のアルコキシカルボニル基、例えば、エトキシカルボニル、2-エチルヘキシルオキシカルボニル等)、アミノ基(好ましくは炭素原子数0~20のアミノ基、例えば、アミノ、N,N-ジメチルアミノ、N,N-ジエチルアミノ、N-エチルアミノ、アニリノ等)、スルホンアミド基(好ましくは炭素原子数0~20のスルホンアミド基、例えば、N,N-ジメチルスルホンアミド、N-フェニルスルホンアミド等)、アシルオキシ基(好ましくは炭素原子数1~20のアシルオキシ基、例えば、アセチルオキシ、ベンゾイルオキシ等)、カルバモイル基(好ましくは炭素原子数1~20のカルバモイル基、例えば、N,N-ジメチルカルバモイル、N-フェニルカルバモイル等)、アシルアミノ基(好ましくは炭素原子数1~20のアシルアミノ基、例えば、アセチルアミノ、ベンゾイルアミノ等)、シアノ基、又はハロゲン原子(例えばフッ素原子、塩素原子、臭素原子、ヨウ素原子等)であり、より好ましくはアルキル基、アルケニル基、アリール基、ヘテロ環基、アルコキシ基、アリールオキシ基、アルコキシカルボニル基、アミノ基、アシルアミノ基、シアノ基又はハロゲン原子であり、特に好ましくはアルキル基、アルケニル基、ヘテロ環基、アルコキシ基、アルコキシカルボニル基、アミノ基、アシルアミノ基又はシアノ基が挙げられる。
本実施形態の光透過性硬化膜形成用樹脂組成物中に含まれるシロキサン樹脂は、上述したアルコキシシラン原料を用いて、加水分解反応および縮合反応を介して得ることができる。
加水分解反応および縮合反応としては公知の方法を使用することができ、必要に応じて、酸または塩基などの触媒を使用してもよい。触媒としてはpHを変更させるものであれば特に制限がなく、具体的には、酸(有機酸、無機酸)としては、例えば硝酸、シュウ酸、酢酸、蟻酸、塩酸など、アルカリとしては、例えばアンモニア、トリエチルアミン、エチレンジアミンなどが挙げられる。使用する量は、シロキサン樹脂が所定の分子量を満たせば、特に限定されない。
なお、重量平均分子量は、公知のGPC(ゲル浸透クロマトグラフィー)を用いて測定し、標準ポリスチレンに換算したときの値である。特に断らない限り、GPC測定においては、カラムとしてWaters2695およびShodex製GPCカラムKF-805L(カラム3本を直結)を使用し、カラム温度40℃、試料濃度0.5質量%のテトラヒドロフラン溶液を50μl注入し、溶出溶媒としてテトラヒドロフランを毎分1mlの流量でフローさせ、RI検出装置(Waters2414)およびUV検出装置(Waters2996)にて試料ピークを検出することで行った。
本実施形態の光透過性硬化膜形成用樹脂は、ポリオキシアルキレン構造を有する界面活性剤を含有することが好ましい。ポリオキシアルキレン構造とは、アルキレン基と二価の酸素原子が隣接して存在している構造のことをいい、具体的にはエチレンオキサイド(EO)構造、プロピレンオキサイド(PO)構造などが挙げられる。ポリオキシアルキレン構造を有する界面活性剤としては、該ポリオキシアルキレン構造を有する限りにおいてフッ素系界面活性剤、ノニオン界面活性剤、カチオン界面活性剤、アニオン界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。これらの中でもノニオン界面活性剤、アニオン界面活性剤、及びシリコーン系界面活性剤が好ましく、ノニオン界面活性剤、及びアニオン界面活性剤が更に好ましく、アニオン界面活性剤が最も好ましい。
界面活性剤は、1種のみを用いてもよいし、2種類以上を組み合わせてもよい。
式(4):R5O(R6O)mR7
(上記式中、R5は炭素数1~20のアルキル基を表し、R6は炭素数1~4のアルキレン基を表し、R7は水素原子、カルボキシル基、又は-PO3H2を表す。mは1~8の整数を表す。)
式(5):Si(OR51)n-4(R52)n
ここで、R51は前記R4と同義の基である。R52は炭素数4~12のアルキル基であることが好ましく、炭素数6~10のアルキル基であることがより好ましい。nは1~3の整数である。
前記硬化性樹脂組成物ないしそれを硬化した硬化膜は、中空粒子を含むことが好ましい。中空粒子としては、中空構造はもちろん多孔質の微粒子を使用してもよい。中空粒子は、内部に空洞を有する構造のものであり、外郭に包囲された空洞を有する粒子を指し、多孔質粒子は、多数の空洞を有する多孔質の粒子を指す。以下、中空粒子又は多孔質粒子を、適宜「特定粒子」と称する。特定粒子は、有機粒子であっても、無機粒子であってもよい。
特定粒子の中でも、屈折率を低下しやすい観点から、中空粒子であることがより好ましく、中空シリカ粒子であることが特に好ましい。例えば、中空粒子をシリカで構成した場合には、中空シリカ粒子は、屈折率の低い空気(屈折率=1.0)を有しているため、その屈折率は、通常のシリカ(屈折率=1.6)と比較して著しく低くなる。
特定粒子の平均一次粒子径は、分散した粒子を透過型電子顕微鏡により観察し、得られた写真から求めることができる。粒子の投影面積を求め、そこから円相当径を求め平均一次粒子径とする。本明細書における平均一次粒子径は、300個以上の粒子について投影面積を測定して、円相当径を求めて算出する。
ここでの屈折率は粒子全体として屈折率を表し、粒子が中空粒子である場合、中空粒子を形成している外殻のみの屈折率を表すものではない。粒子が多孔質粒子である場合、多孔質粒子の屈折率は、アッベ屈折率計(アタゴ(株)製)にて測定することができる(測定温度25℃,波長633nm)。
これらの無機粒子の平均一次粒子径は、1nm~100nmであることが好ましく、1nm~60nmであることがより好ましい。
無機粒子は、必要な空隙率を満たす限りにおいて、結晶系は、結晶質でも、アモルファスのいずれでもよく、また単分散粒子でも、所定の粒子径を満たすならば凝集粒子でも構わない。形状は、球形状が最も好ましいが、数珠状、長径と短径の比が1以上の形状、あるいは不定形状であってもよい。
すなわち、無機粒子がシリカ粒子であり、カップリング剤がシラン化合物である場合、シラン化合物とシラノール基との反応により、オルガノシリル基(モノオルガノシリル、ジオルガノシリル、トリオルガノシリル基)がシリカ粒子の表面に結合するものである。表面処理されたシリカ粒子がその表面に有する有機基としては、飽和又は不飽和の炭素数1~18の炭化水素基、炭素数1~18のハロゲン化炭化水素基などが挙げられる。
上記カップリング剤は、無機粒子の表面処理剤として低屈折率膜用塗布液の調製以前にあらかじめ表面処理を施すために用いられても、塗布液調製時にさらに添加剤として添加してもよい。
無機粒子は、表面処理前に、媒体中に予め分散されていることが、表面処理の負荷軽減のために好ましい。
シリカからなる特定粒子としては市販されているものを好ましく用いることができる。
例えば、日揮触媒化成(株)製スルーリアシリーズ(中空粒子、イソプロパノール(IPA)分散、4-メチル-2-ペンタノン(MIBK)分散など。例えばスルーリア2320など。)、OSCALシリーズ、日産化学(株)製スノーテックスシリーズ(多孔質粒子、IPA分散、エチレングリコール分散、メチルエチルケトン(MEK)分散、ジメチルアセトアミド分散、MIBK分散、プロピレングリコールモノメチルアセテート分散、プロピレングリコールモノメチルエーテル分散、メタノール分散、酢酸エチル分散、酢酸ブチル分散、キシレン-n-ブタノール分散、トルエン分散など。例えばMIBK-SD-L、MIBK-STなど。)、日鉄鉱業(株)製シリナックス(多孔質粒子)、扶桑化学工業(株)製PLシリーズ(多孔質粒子、IPA分散、トルエン分散、プロピレングリコールモノメチルエーテル分散、メチルエチルケトン分散など。例えばPL-1-IPA、PL-2L-PGMEなど。)、EVONIK社製アエロジルシリーズ(多孔質粒子、プロピレングリコールアセテート分散、エチレングリコール分散、MIBK分散など)などのシリカ粒子を用いることができる。
前記硬化性樹脂組成物ないしそれを硬化した硬化膜は、フッ素系樹脂を含むことが好ましい。例えば特開2004-21036号公報に記載のフッ素系のシロキサンポリマーが挙げられる。
フッ素系樹脂の添加量は、特に限定されないが、前記シロキサン樹脂と同様の観点から、前記シロキサン樹脂と同様の含有率の範囲であることが好ましい。
本実施形態の光透過性硬化膜形成用樹脂組成物は、さらに硬化剤を含有しても良い。硬化剤としては、Al、Mg、Mn、Ti、Cu、Co、Zn、Hf及びZrよりなる硬化剤が好ましく、これらを併用することもできる。
本実施形態の光透過性硬化膜形成用樹脂組成物(硬化性樹脂組成物)は、一般には、有機溶剤を用いて構成することができる。有機溶剤は、各成分の溶解性や光透過性硬化膜形成用樹脂組成物の塗布性を満足すれば基本的には特に制限はないが、特に、バインダーの溶解性、塗布性、安全性を考慮して選ばれることが好ましい。また、本実施形態における光透過性硬化膜形成用樹脂組成物を調製する際には、2種類の有機溶剤を含んでもよい。
特に好ましくは、上記の3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、エチルセロソルブアセテート、乳酸エチル、ジエチレングリコールジメチルエーテル、酢酸ブチル、3-メトキシプロピオン酸メチル、2-ヘプタノン、シクロヘキサノン、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールメチルエーテル、ジプロピレングリコールジメチルエーテル、プロピレングリコールモノn-ブチルエーテル、プロピレングリコールモノtert-ブチルエーテル、及びプロピレングリコールメチルエーテルアセテートである。
本実施形態の光透過性硬化膜形成用樹脂組成物は、厚みのある良好な透過膜を形成する観点から、その粘度が調節されていることが好ましい。具体的な粘度の範囲は特に限定されないが、1~20cPであることが好ましく、2~15cPであることがより好ましく、4~6cPであることが特に好ましい。本明細書における粘度の値は、特に断らない限り、後記の測定方法によるものとする。
・測定方法
E型粘度計「TV-20形粘度計・コーンプレートタイプ TVE-20L」(東機産業製)を用いて、室温(約25℃)で測定する。サンプリングは100秒ごとに5回粘度を測定した値の平均とする。
本発明の好ましい実施形態に係るマイクロレンズユニットは、固体撮像素子に組み込まれ、マイクロレンズ体とこれを被覆する光透過性硬化膜とを有する。なお、マイクロレンズ体の語は、マイクロレンズアレイの意味を含み、単にレンズ体(lens member、lens members)と総称して言うことがある。マイクロレンズアレイがマイクロレンズ体として用いられる場合、マイクロレンズ体同士の間隙である溝部は光透過性硬化膜に隙間なく埋め込まれ、空隙(ボイド)等が全く発生していないことが理想的である。このような態様では、マイクロレンズユニットは該ユニットを通過する光にボイド由来のノイズを発生させることがなく、良好な品質性能を奏する。
(下層)
前記硬化膜の下層をなすマイクロレンズ体の屈折率は1.65以上であり、1.75以上であることが好ましく、1.85以上であることがより好ましく、1.89以上が特に好ましい。この下限値以上とすることで、カメラモジュールの感度を向上することができる。同様の観点で、当該屈折率は、さらに1.95以下であり、1.93以下であることが好ましい。なお、本発明において屈折率は特に断らない限り、後記実施例に示した測定方法で測定した値を言う。
レンズ体の高さ(厚さ)は特に限定されないが、200~1500nmが好ましく、200~1000nmがであることが実際的である。レンズ体の幅は特に限定されないが、下に形成されている画素のサイズに対して70~90%(具体的には、1画素が1.4μm□のイメージセンサーの場合は、0.98μm~1.26μm)であることが実際的である。ここで言うレンズ体の高さとは、レンズ体の最長点の高さをさす。
本発明におけるマイクロレンズユニットが取り得る実施態様としては特に制限はなく、マイクロレンズユニットの用途、目的に応じて適宜選択することができる。具体的な態様として下記があげられるが、本発明はこれらの構成に限定されるものではない。なお、本明細書で「被覆」というときには、対象物に直接当接して被覆する場合のみならず、他の層を介して被覆することを包含するものとする。
第一の態様:マイクロレンズ体が光透過性硬化膜で直接被覆されてなる態様
第二の態様:マイクロレンズ体がオーバーコート層で被覆されてなり、更に光透過性硬化膜で被覆されてなる態様
第三の態様:マイクロレンズ体と半導体受光ユニットの間に光透過性硬化膜の層が形成される態様
上記の中でも、第一の態様が好ましい。以下、第一の態様についてその製造方法を詳しく説明する。
本実施形態の光透過性硬化膜形成用樹脂組成物は、反射防止膜や低屈折率膜の形成材料として用いることが好ましい。硬化膜を形成するためにレンズ体等の被加工物に塗布する方法は特に限定されないが、適宜の公知の塗布方法を適用することができる。例えば、スピンコート法、ディップコート法、ローラーブレード法、スプレー法などを適用することができる。必要に応じて、塗布された塗膜には加熱処理などを施し、塗膜中に含まれる溶媒を除去することが好ましい。
光透過性硬化膜形成用樹脂組成物を被加工物上に適用し、その後に、溶媒除去して硬化膜を形成することが好ましい。そのために、塗布後の塗膜を好ましくは60~200℃、より好ましくは100~150℃の条件下に、好ましくは1~10分、より好ましくは1~5分静置することにより行う。なお、該溶媒除去は、異なる条件で2回以上にわたって実施してもよい。
本発明における硬化膜の好適な使用態様として、反射防止膜が挙げられる。特に、固体撮像素子等を用いた光学デバイス、例えば、イメージセンサ用マイクロレンズ、プラズマディスプレイパネル、液晶ディスプレイ、有機エレクトロルミネッセンスなど用の反射防止膜として好適である。反射防止膜として使用した場合の反射率は低いほど好ましい。具体的には、450~650nmの波長領域での鏡面平均反射率が3%以下であることが好ましく、2%以下であることがさらに好ましく、1%以下であることが最も好ましい。なお、反射率は小さければ小さいほど好ましく、最も好ましくは0である。
反射防止膜のヘイズは、3%以下であることが好ましく、1%以下であることがさらに好ましく、0.5%以下であることが最も好ましい。なお、反射率は小さければ小さいほど好ましく、最も好ましくは実質的に0である。
本発明の好ましい実施形態に係る固体撮像素子は、半導体受光ユニット上にマイクロレンズユニットを有し、マイクロレンズ体とカラーフィルタが接するように組み込まれる。受光素子は光透過性硬化膜、レンズ体、及びカラーフィルタの順に通過する光を受光し、イメージセンサーとして機能する。具体的には、光透過性硬化膜が反射防止膜として機能し、レンズ体の集光効率を向上させ、レンズ体によって効率的に集められた光がカラーフィルタを介して受光素子に検知される。これらがRGBそれぞれに対応する光を検知する素子の全般に渡って機能するため、受光素子とレンズ体とが高密度に配列されている場合でも、極めて鮮明な画像を得ることができる。
なお、素子ないしユニットの上方・下方は特に限定されないが、特に断らない限り、光透過性硬化膜の側を上方ないし外方とし、受光素子の側を下方ないし内方とする。
なお、本発明においては、後記実施形態の樹脂組成物のほか、市販の硬化性樹脂を好適に用いることができる。以下にその商品名(製品番号)を列記しておく。
(1)超高屈折率、高耐熱コーティング材料:UR-108、UR-202、UR-501、HR-102(日産化学工業社製)
(2)厚膜用高屈折率コーティング材料:UR-108、UR-204、HR-201(日産化学工業社製)
(3)チオエポキシ樹脂LPH1101(三菱ガス化学社製)
(4)エピスルフィド樹脂MR-174(三井化学社製)
(5)チオウレタン樹脂MR-7(三井化学社製)
金属酸化物粒子としては、屈折率の高い無機粒子であり、チタン(Ti)、ジルコニウム(Zr)、アルミニウム(Al)、ケイ素(Si)、亜鉛(Zn)又はマグネシウム(Mg)の酸化物粒子が挙げられ、二酸化チタン(TiO2)粒子、二酸化ジルコニウム(ZrO2)粒子又は二酸化珪素(SiO2)粒子であることが好ましく、中でも二酸化チタン粒子(以下、単に「二酸化チタン」ということもある)であることがより好ましい。
無色又は透明な二酸化チタン粒子としては、化学式TiO2で表すことができ、純度が70%以上であることが好ましく、純度80%以上であることがより好ましく、純度85%以上であることが更に好ましい。一般式TinO2n-1(nは2~4の数を表す。)で表される低次酸化チタン、酸窒化チタン等は30質量%以下であることが好ましく、20質量%以下であることがより好ましく、15質量%以下であることが更に好ましい。
前記金属酸化物粒子の一次粒子径は1nm~100nmが好ましいが、1nm~80nmであることがより好ましく、1nm~50nmであることが特に好ましい。金属酸化物粒子の一次粒子径が100nmを超えると屈折率及び透過率が低下することがある。また1nm未満の場合には、凝集により分散性や分散安定性が低下する場合がある。
金属酸化物粒子の平均粒子径は、後記実施例で採用した測定方法によるものとする。
また金属酸化物粒子の比表面積は、10m2/g~400m2/gであることが好ましく、20m2/g~200m2/gであることが更に好ましく、30m2/g~150m2/gであることが最も好ましい。
また金属酸化物粒子の形状には特に制限はない。例えば、米粒状、球形状、立方体状、紡錘形状あるいは不定形状であることができる。
表面処理は、1種単独の表面処理剤でも、2種類以上の表面処理剤を組み合わせて実施してもよい。
また金属酸化物粒子の表面が、アルミニウム、ケイ素、ジルコニアなどの酸化物により覆われていることもまた好ましい。これにより、より耐候性が向上する。
二酸化チタン粒子の市販物としては、例えば石原産業(株)製TTOシリーズ(TTO-51(A)、TTO-51(C)など)、TTO-S、Vシリーズ(TTO-S-1、TTO-S-2、TTO-V-3など)、テイカ(株)製MTシリーズ(MT-01、MT-05など)などを挙げることができる。
二酸化ジルコニウム粒子の市販物としては、例えば、UEP(第一稀元素化学工業(株)製)、PCS(日本電工(株)製)、JS-01、JS-03、JS-04(日本電工(株)製)、UEP-100(第一稀元素化学工業(株)製)などを挙げることができる。
二酸化珪素粒子の市販物としては、例えば、OG502-31クラリアント社(Clariant Co.)製などを挙げることができる。
一方、特に、高屈折率のマイクロレンズ用としては、分散組成物の全固形分に対して50質量%~90質量%であり、より好ましくは52質量%~85質量%であり、最も好ましくは55質量%~80質量%である。
上記したように、近年では高画素化に伴い1画素のサイズが極めて小さく、より効率よく光を集めるべく、更に高い屈折率を有するマイクロレンズが要求されているが、金属酸化物粒子の含有量が、分散組成物の全固形分に対して50質量%未満であると、そのようなマイクロレンズを得難い。
また、金属酸化物粒子の含有量が、分散組成物(I)の全固形分に対して90質量%を超えると、充分な量のグラフト共重合体(B)を存在させにくい等の理由から、分散性及び分散安定性が損なわれやすい。更に、分散組成物(硬化性組成物)が大サイズ(例えば12インチ)のウエハーに塗布した場合に、ウエハーの中心部と周辺部での膜厚差が小さい膜を形成しにくくなる。
本実施形態の分散組成物は、グラフト共重合体(以下、「特定樹脂」ともいう)を含むものである。本実施形態のグラフト共重合体は、水素原子を除いた原子数が40~10000の範囲であるグラフト鎖を有している。この場合のグラフト鎖とは、共重合体の主鎖の根元(主鎖から枝分かれしている基において主鎖に結合する原子)から、主鎖から枝分かれしている基の末端までを示す。分散組成物において、この特定樹脂は、金属酸化物粒子に分散性を付与する分散樹脂であり、グラフト鎖による溶媒との親和性を有するために、金属酸化物粒子の分散性、及び、経時後の分散安定性に優れる。また、分散組成物としたとき、グラフト鎖と溶媒とが良好な相互作用を示すことにより、塗布膜における膜厚の均一性が悪化することが抑制されるものと考えられる。
W1、W2、W3、及び、W4はそれぞれ独立に酸素原子或いはNHを表し、特に酸素原子が好ましい。
n、m、p、及び、qはそれぞれ1~500の整数である。
j及びkは、それぞれ独立に、2~8の整数を表す。
j及びkは、分散安定性の観点から、4~6の整数が好ましく、5が最も好ましい。
式(2A)中、X2、Y2、Z2及びmは、式(2)におけるX2、Y2、Z2及びmと同義であり、好ましい範囲も同様である。
酸基を有する構造単位の含有量が、特定樹脂の総質量に対し90質量%超過であると、上記グラフト鎖の特定樹脂への導入量が不十分となって分散安定性が悪くなり、同様に、ウエハーの中心部と周辺部での膜厚差が小さい膜を形成しにくくなる。
また、酸基を有する構造単位の含有量が上記範囲内であることにより、特定樹脂の酸価を下記の好ましい範囲内に好適に調整できる。
特定樹脂は、塩基性基を有する構造単位(繰り返し単位)を含有してもしなくても良いが、含有する場合、塩基性基を有する構造単位の含有量は、特定樹脂の総質量に対し0.1質量%以上50質量%以下であり、特に好ましくは、0.1質量%以上30質量%以下である。
特定樹脂は、配位性基又は反応性を有する基を有する構造単位(繰り返し単位)を含有してもしなくても良いが、含有する場合、配位性基又は反応性を有する基を有する構造単位の含有量は、特定樹脂の総質量に対し0.1質量%以上50質量%以下であり、特に好ましくは、0.1質量%以上30質量%以下である。
R1、R2、及びR3は、より好ましくは水素原子、又は炭素原子数が1~3のアルキル基であり、最も好ましくは、水素原子又はメチル基である。R2、及びR3は、水素原子であることが特に好ましい。
Xは、酸素原子(-O-)又はイミノ基(-NH-)を表し、酸素原子であることが好ましい。
脂肪族基は不飽和脂肪族基よりも飽和脂肪族基の方が好ましい。また、脂肪族基は、置換基を有していてもよい。置換基の例は、ハロゲン原子、ヒドロキシル基、芳香族基及び複素環基が挙げられる。
また、上記一般式(ii)で表される単量体として、R1が水素原子又はメチル基であって、Lがアルキレン基であって、Zがカルボン酸基であって、Yがメチン基である化合物が好ましい。また、上記一般式(iii)で表される単量体として、R4、R5、及びR6が水素原子又はメチル基であって、Zがカルボン酸基である化合物が好ましい。
分散組成物(I)には、金属酸化物粒子の分散性を調整する等の目的で、上記特定樹脂以外の分散樹脂(以下、「その他の分散樹脂」と称する場合がある)が含有されていてもよい。
本発明に用いることができるその他の分散樹脂としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、及び、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン、顔料誘導体等を挙げることができる。
その他の分散樹脂は、その構造から更に直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
これらのその他の樹脂は、単独で使用してもよく、2種以上を組み合わせて使用してもよい。
分散組成物(I)は溶媒を含むが、該溶媒は種々の有機溶剤を用いて構成することができる。
ここで使用できる有機溶剤としては、アセトン、メチルエチルケトン、シクロヘキサン、酢酸エチル、エチレンジクロライド、テトラヒドロフラン、トルエン、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールジメチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、アセチルアセトン、シクロヘキサノン、ジアセトンアルコール、エチレングリコールモノメチルエーテルアセテート、エチレングリコールエチルエーテルアセテート、エチレングリコールモノイソプロピルエーテル、エチレングリコールモノブチルエーテルアセテート、3-メトキシプロパノール、メトキシメトキシエタノール、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、3-メトキシプロピルアセテート、N,N-ジメチルホルムアミド、ジメチルスルホキシド、γ-ブチロラクトン、乳酸メチル、乳酸エチルなどがある。
これらの有機溶剤は、単独あるいは混合して使用することができる。分散組成物(I)における固形分の濃度は、2~60質量%であることが好ましい。
本実施形態の分散性組成物(I)は、重合性化合物(D)と、重合開始剤とを含み、必要に応じてその他の成分を含むことによって構成される高屈折率層形成用硬化性組成物であることが好ましい。
このように、本実施形態において、「硬化性組成物」は、「分散組成物」の一形態であるため、上記したように、高屈折率層形成用硬化性組成物の全固形分に対する金属酸化物粒子の含有量は、50質量%~90質量%であり、より好ましくは52質量%~85質量%であり、最も好ましくは55質量%~80質量%である。
前記分散組成物が、高屈折率層形成用硬化性組成物とされることにより、分散性及び分散安定性に優れるとともに、屈折率が非常に高く、かつ大サイズのウエハーに塗布された場合でも、中心部と周辺部での膜厚差が小さい膜(代表的には透明膜)を形成できる。
また、本発明は、本実施形態の高屈折率層形成用硬化性組成物を用いて形成された透明膜にも関する。
すなわち、本実施形態の透明膜は、膜厚1.0μmにおいて、膜の厚み方向に対する光透過率が、400~700nmの波長領域全域に渡って90%以上となるような膜を言う。
このような光透過率の物性は、硬化性組成物が、本実施形態の分散組成物(I)、重合性化合物(D)及び重合開始剤(E)を含有する限りにおいて、どのような手段によって達成されても良いが、例えば、重合性化合物(D)や、更に添加され得るバインダーポリマーの種類及び含有量の調整することにより、好適に達成される。また、金属酸化物粒子(A)の粒子径や、グラフト共重合体(B)の種類及び添加量を調整することによっても、上記光透過率の物性を好適に達成できる。
本実施形態の高屈折率層形成用硬化性組成物及び透明膜に関し、上記光透過率が、400~700nmの波長領域全域に渡って90%以上であることは、特にマイクロレンズが、その求められる特性を発現するために重要な要素である。
(D)重合性化合物は、少なくとも1個のエチレン性不飽和二重結合、エポキシ基、オキセタニル基などの重合性基を有する付加重合性化合物であり、これらの重合性基を少なくとも1個、好ましくは2個以上有する化合物から選ばれる。このような化合物は当該技術分野において広く知られるものであり、本発明においてはこれらを特に限定無く用いることができる。
これらは、例えばモノマー、プレポリマー、すなわち2量体、3量体などの多量体及びオリゴマー、又はそれらの混合物並びにそれらの共重合体などの化学的形態をもつ。モノマー及びその共重合体の例としては、不飽和カルボン酸(例えば、アクリル酸、メタクリル酸、イタコン酸、クロトン酸、イソクロトン酸、マレイン酸など)や、そのエステル類、アミド類が挙げられ、好ましくは、不飽和カルボン酸と脂肪族多価アルコール化合物とのエステル、不飽和カルボン酸と脂肪族多価アミン化合物とのアミド類が用いられる。また、ヒドロキシル基やアミノ基、メルカプト基等の求核性置換基を有する不飽和カルボン酸エステル類あるいは不飽和カルボン酸アミド類と単官能若しくは多官能イソシアネート類あるいはエポキシ類との付加反応物、及び単官能若しくは、多官能のカルボン酸との脱水縮合反応物等も好適に使用される。また、イソシアネート基や、エポキシ基等の親電子性置換基を有する不飽和カルボン酸エステルあるいは不飽和カルボン酸アミド類と単官能若しくは多官能のアルコール類、アミン類、チオール類との付加反応物;更にハロゲン基や、トシルオキシ基等の脱離性置換基を有する不飽和カルボン酸エステルあるいは不飽和カルボン酸アミド類と単官能若しくは多官能のアルコール類、アミン類、チオール類との置換反応物も好適である。また、別の例として、上記の不飽和カルボン酸の代わりに、不飽和ホスホン酸、スチレン、ビニルエーテル等に置き換えた化合物群を使用することも可能である。これらの具体的な化合物としては、特開2009-288705号公報の段落番号0095~段落番号0108に記載されている化合物を本発明においても好適に用いることができる。
多官能カルボン酸にグリシジル(メタ)アクリレート等の環状エーテル基とエチレン性不飽和基を有する化合物を反応させ得られる多官能(メタ)アクリレートなども挙げることができる。
また、その他の好ましい重合性モノマー等として、特開2010-160418、特開2010-129825、特許4364216等に記載される、フルオレン環を有し、エチレン性重合性基を2官能以上有する化合物、カルドポリマーも使用することが可能である。
mは1~5が好ましく、1~3がより好ましい。
Rは、
上記一般式(MO-1)~(MO-6)で表される、ラジカル重合性モノマーの具体例としては、特開2007-269779号公報の段落番号0248~段落番号0251に記載されている化合物を本発明においても好適に用いることができる。
例えば、RP-1040(日本化薬株式会社製)などが挙げられる。
酸基を有する多官能モノマーの好ましい酸価としては、0.1~40mg-KOH/gであり、特に好ましくは5~30mg-KOH/gである。異なる酸基の多官能モノマーを2種以上併用する場合、或いは酸基を有しない多官能モノマーを併用する場合、全体の多官能モノマーとしての酸価が上記範囲に入るように調製することが必須である。
カプロラクトン変性構造を有する多官能性単量体としては、その分子内にカプロラクトン変性構造を有する限り特に限定されるものではないが、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸およびε-カプロラクトンをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートを挙げることができる。なかでも下記式(1)で表されるカプロラクトン変性構造を有する多官能性単量体が好ましい。
本発明において、カプロラクトン変性構造を有する多官能性単量体は、単独で又は2種以上を混合して使用することができる。
前記一般式(i)中、アクリロイル基及びメタクリロイル基の合計は3個又は4個であり、mは各々独立に0~10の整数を表し、各mの合計は0~40の整数である。但し、各mの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
前記一般式(ii)中、アクリロイル基及びメタクリロイル基の合計は5個又は6個であり、nは各々独立に0~10の整数を表し、各nの合計は0~60の整数である。但し、各nの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
前記一般式(ii)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。また、各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が特に好ましい。
また、一般式(i)又は一般式(ii)中の-((CH2)yCH2O)-又は-((CH2)yCH(CH3)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
具体的には、下記式(a)~(f)で表される化合物(以下、「例示化合物(a)~(f)」ともいう。)が挙げられ、中でも、例示化合物(a)、(b)、(e)、(f)が好ましい。
重合性モノマー等の市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ社製)、UA-7200」(新中村化学社製、DPHA-40H(日本化薬社製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄社製)などが挙げられる。
本発明の第三の好ましい態様は、重合性化合物として、エポキシ基またはオキセタニル基を有する化合物を用いてもよい。エポキシ基またはオキセタニル基を有する化合物としては、具体的には側鎖にエポキシ基を有するポリマー、および分子内に2個以上のエポキシ基を有する重合性モノマーまたはオリゴマーがあり、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、脂肪族エポキシ樹脂等を挙げることができる。
これらの化合物は、市販品を用いてもよいし、ポリマーの側鎖へエポキシ基を導入することによっても得られる。
エポキシ不飽和化合物としてはグリシジル(メタ)アクリレートやアリルグリシジルエーテル等のエポキシ基としてグリシジル基を有するものも使用可能であるが、好ましいものは脂環式エポキシ基を有する不飽和化合物である。このようなものとしては例えば以下の化合物を例示することができる。
その他の好ましいアミド系モノマーの例としては、特公昭54-21726号公報記載のシクロへキシレン構造を有すものを挙げることができる。
下記式(V)中、R7及びR8はそれぞれ独立して、水素原子又はメチル基を示す。
感度の点では1分子あたりの不飽和基含量が多い構造が好ましく、多くの場合、2官能以上が好ましい。また、硬化膜の強度を高くするためには、3官能以上のものがよく、更に、異なる官能数・異なる重合性基(例えばアクリル酸エステル、メタクリル酸エステル、スチレン系化合物、ビニルエーテル系化合物、エポキシ系化合物、オキセタン系化合物)のものを併用することで、感度と強度の両方を調節する方法も有効である。
また、硬化性組成物に含有される他の成分(例えば、重合開始剤、金属酸化物粒子等)との相溶性、分散性に対しても、重合性化合物の選択・使用法は重要な要因であり、例えば、低純度化合物の使用や、2種以上の他の成分の併用により相溶性を向上させうることがある。また、基板などの硬質表面との密着性を向上させる目的で特定の構造を選択することもあり得る。
この範囲内であると、屈折率を低下させることなく、硬化性が良好で好ましい。
(E)重合開始剤は、(D)重合性化合物の重合を開始、促進する化合物であり、45℃までは安定であるが高温加熱時の重合開始能が良好であることが好ましい。
また、前記重合開始剤は、約300nm~800nm(330nm~500nmがより好ましい。)の範囲内に少なくとも約50の分子吸光係数を有する化合物を、少なくとも1種含有していることが好ましい。
また、重合開始剤は、単独で、又は2種以上を併用して用いることができる。
ヘキサアリールビイミダゾール化合物としては、例えば、特公昭45-37377号公報、特公昭44-86516号公報記載のロフィンダイマー類、特公平6-29285号公報、米国特許第3,479,185号、同第4,311,783号、同第4,622,286号等の各明細書に記載の種々の化合物、具体的には、2,2’-ビス(o-クロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-ブロモフェニル))4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o,p-ジクロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-クロロフェニル)-4,4’,5,5’-テトラ(m-メトキシフェニル)ビイジダゾール、2,2’-ビス(o,o’-ジクロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-ニトロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-メチルフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-トリフルオロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール等が挙げられる。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959,IRGACURE-127(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤としては、市販品であるIRGACURE-907、IRGACURE-369、及び、IRGACURE-379(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤として、365nmまたは405nm等の長波光源に吸収波長がマッチングされた特開2009-191179公報に記載の化合物も用いることができる。また、アシルホスフィン系開始剤としては市販品であるIRGACURE-819やDAROCUR-TPO(商品名:いずれもBASF社製)を用いることができる。
オキシム化合物としては、J.C.S.Perkin II(1979)1653-1660)、J.C.S.Perkin II(1979)156-162、Journal of Photopolymer Science and Technology(1995)202-232、Journal of Applied Polymer
Science(2012年)pp.725-731、特開2000-66385号公報記載の化合物、特開2000-80068号公報、特表2004-534797号公報記載の化合物等が挙げられる。
また、オキシム化合物の特定部位に不飽和結合を有する特開2009-242469号公報に記載の化合物も、重合不活性ラジカルから活性ラジカルを再生することで高感度化を達成でき好適に使用することができる。
前記式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
前記一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基又はアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
下記の構造中、Y、X、及び、nは、それぞれ、後述する式(OX-2)におけるY、X、及び、nと同義であり、好ましい例も同様である。
中でも、式(OX-1)におけるAとしては、感度を高め、加熱経時による着色を抑制する点から、無置換のアルキレン基、アルキル基(例えば、メチル基、エチル基、tert-ブチル基、ドデシル基)で置換されたアルキレン基、アルケニル基(例えば、ビニル基、アリル基)で置換されたアルキレン基、アリール基(例えば、フェニル基、p-トリル基、キシリル基、クメニル基、ナフチル基、アンスリル基、フェナントリル基、スチリル基)で置換されたアルキレン基が好ましい。
式(OX-2)におけるR、A、及びArは、前記式(OX-1)におけるR、A、及びArと同義であり、好ましい例も同様である。
また、式(2)におけるnは、0~5の整数を表し、0~2の整数が好ましい。
中でも、高感度化の観点から、構造Sub-1およびSub-2が好ましい。
式(OX-3)におけるR、X、A、Ar、及び、nは、前記式(OX-2)におけるR、X、A、Ar、及び、nとそれぞれ同義であり、好ましい例も同様である。
オキシム化合物は、365nm又は405nmにおけるモル吸光係数は、感度の観点から、1,000~300,000であることが好ましく、2,000~300,000であることがより好ましく、5,000~200,000であることが特に好ましい。化合物のモル吸光係数は、公知の方法を用いることができるが、具体的には、例えば、紫外可視分光光度計(Varian社製Carry-5 spectrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
また、その他の好ましいスルホニウム塩としては、トリアリールスルホニウム塩の1つの置換基がクマリン構造又はアントアキノン構造を有し、300nm以上に吸収を有するスルホニウム塩が挙げられる。別の好ましいスルホニウム塩としては、トリアリールスルホニウム塩が、アリロキシ基、アリールチオ基を置換基に有する300nm以上に吸収を有するスルホニウム塩が挙げられる。
硬化性組成物の製造中あるいは保存中において重合可能なエチレン性不飽和二重結合を有する化合物の不要な重合を阻止するために、重合禁止剤を添加することが好ましい。
重合禁止剤としては、フェノール系水酸基含有化合物、N-オキシド化合物類、ピペリジン1-オキシルフリーラジカル化合物類、ピロリジン1-オキシルフリーラジカル化合物類、N-ニトロソフェニルヒドロキシルアミン類、ジアゾニウム化合物類、及びカチオン染料類、スルフィド基含有化合物類、ニトロ基含有化合物類、FeCl3、CuCl2等の遷移金属化合物類が挙げられる。
フェノール系水酸基含有化合物が、ハイドロキノン、p-メトキシフェノール、ジ-t-ブチル-p-クレゾール、ピロガロール、t-ブチルカテコール、ベンゾキノン、4,4-チオビス(3-メチル-6-t-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、フェノール樹脂類、及びクレゾール樹脂類からなる群より選択される化合物であるのが好ましい。
上記範囲とすることで、非画像部における硬化反応抑制及び画像部における硬化反応促進が充分おこなわれ、画像形成性及び感度が良好となる。
本実施形態の高屈折率層形成用硬化性組成物は、皮膜特性向上などの観点から、更にバインダーポリマーを含むことが好ましい。
前記バインダーポリマーとしてはカルボキシル基を有するモノマーを単独あるいは共重合させた樹脂、酸無水物を有するモノマーを単独あるいは共重合させ酸無水物ユニットを加水分解若しくはハーフエステル化若しくはハーフアミド化させた樹脂、エポキシ樹脂を不飽和モノカルボン酸及び酸無水物で変性させたエポキシアクリレート等が挙げられる。カルボキシル基を有するモノマーとしては、アクリル酸、メタクリル酸、イタコン酸、クロトン酸、マレイン酸、フマル酸、4-カルボキシルスチレン等があげられ、酸無水物を有するモノマーとしては、無水マレイン酸等が挙げられる。
また、同様に側鎖にカルボン酸基を有する酸性セルロース誘導体がある。この他に水酸基を有する重合体に環状酸無水物を付加させたものなどが有用である。
(2)アクリル酸メチル、アクリル酸エチル、アクリル酸プロピル、アクリル酸ブチル、アクリル酸イソブチル、アクリル酸アミル、アクリル酸ヘキシル、アクリル酸2-エチルヘキシル、アクリル酸オクチル、アクリル酸ベンジル、アクリル酸-2-クロロエチル、グリシジルアクリレート、3,4-エポキシシクロヘキシルメチルアクリレート、ビニルアクリレート、2-フェニルビニルアクリレート、1-プロペニルアクリレート、アリルアクリレート、2-アリロキシエチルアクリレート、プロパルギルアクリレート等のアルキルアクリレート。
(4)アクリルアミド、メタクリルアミド、N-メチロールアクリルアミド、N-エチルアクリルアミド、N-ヘキシルメタクリルアミド、N-シクロヘキシルアクリルアミド、N-ヒドロキシエチルアクリルアミド、N-フェニルアクリルアミド、N-ニトロフェニルアクリルアミド、N-エチル-N-フェニルアクリルアミド、ビニルアクリルアミド、ビニルメタクリルアミド、N,N-ジアリルアクリルアミド、N,N-ジアリルメタクリルアミド、アリルアクリルアミド、アリルメタクリルアミド等のアクリルアミド若しくはメタクリルアミド。
(6)ビニルアセテート、ビニルクロロアセテート、ビニルブチレート、安息香酸ビニル等のビニルエステル類。
(7)スチレン、α-メチルスチレン、メチルスチレン、クロロメチルスチレン、p-アセトキシスチレン等のスチレン類。
(8)メチルビニルケトン、エチルビニルケトン、プロピルビニルケトン、フェニルビニルケトン等のビニルケトン類。
(9)エチレン、プロピレン、イソブチレン、ブタジエン、イソプレン等のオレフィン類。
(11)マレイミド、N-アクリロイルアクリルアミド、N-アセチルメタクリルアミド、N-プロピオニルメタクリルアミド、N-(p-クロロベンゾイル)メタクリルアミド等の不飽和イミド。
(12)α位にヘテロ原子が結合したメタクリル酸系モノマー。例えば、特開2002-309057号、特開2002-311569号等の各公報に記載の化合物を挙げる事ができる。
また、酸基を導入するための単量体は、重合後に酸基を付与しうる単量体であってもよく、例えば、2-ヒドロキシエチル(メタ)アクリレート等の水酸基を有する単量体、グリシジル(メタ)アクリレート等のエポキシ基を有する単量体、2-イソシアナートエチル(メタ)アクリレート等のイソシアネート基を有する単量体等が挙げられる。ラジカル重合性二重結合を導入するための単量体を用いる場合、重合後に酸基を付与しうる単量体を用いる場合、重合後に酸基を付与する処理を行う必要がある。重合後に酸基を付与する処理は、単量体の種類によって異なり、例えば、次の処理が挙げられる。水酸基を有する単量体を用いる場合であれば、例えば、コハク酸無水物、テトラヒドロフタル酸無水物、マレイン酸無水物等の酸無水物を付加させる処理が挙げられる。エポキシ基を有する単量体を用いる場合であれば、例えば、N-メチルアミノ安息香酸、N-メチルアミノフェノール等のアミノ基と酸基を有する化合物を付加させか、又は、例えば(メタ)アクリル酸のような酸を付加させた後に生じた水酸基に、例えば、コハク酸無水物、テトラヒドロフタル酸無水物、マレイン酸無水物等の酸無水物を付加させる処理が挙げられる。イソシアネート基を有する単量体を用いる場合であれば、例えば、2-ヒドロキシ酪酸等の水酸基と酸基を有する化合物を付加させる処理が挙げられる。
一般式(ED)で表される化合物を含む単量体成分を重合してなる重合体が、エポキシ基を導入するための単量体を含む場合、その含有割合は、特に制限されないが、全単量体成分中、5~70質量%が好ましく、より好ましくは10~60質量%である。
また、一般式(ED)で表される化合物を含む単量体成分を重合してなる重合体が酸基を有する場合には、酸価が、好ましくは30~500mgKOH/g、より好ましくは50~400mgKOH/gであるのがよい。
一般式(ED)で表される化合物を含む単量体成分を重合してなる重合体の合成に適用される重合方法としては、特に制限はなく、従来公知の各種重合方法を採用することができるが、特に、溶液重合法によることが好ましい。詳細には、例えば、特開204-300204号公報に記載されるポリマー(a)の合成方法に準じて、一般式(ED)で表される化合物を含む単量体成分を重合してなる重合体を合成することができる
本発明で用いる重合体は、重量平均分子量(GPC法で測定されたポリスチレン換算値)が1000~2×105であることが好ましく、2000~1×105であることがより好ましく、5000~5×104であることがさらに好ましい。
また、欧州特許第993966号、欧州特許第1204000号、特開2001-318463号公報等に記載の酸基を有するアセタール変性ポリビニルアルコール系バインダーポリマーも、膜強度に優れており、好適である。
更にこの他に水溶性線状有機ポリマーとして、ポリビニルピロリドンやポリエチレンオキサイド等が有用である。また硬化皮膜の強度を上げるためにアルコール可溶性ナイロンや2,2-ビス-(4-ヒドロキシフェニル)-プロパンとエピクロロヒドリンのポリエーテル等も有用である。
これらのバインダーポリマーは、ランダムポリマー、ブロックポリマー、グラフトポリマー等いずれでもよい。
本実施形態の高屈折率層形成用硬化性組成物において用いうるバインダーポリマーを合成する際に用いられるラジカル重合開始剤としては、アゾ系開始剤、過酸化物開始剤等公知の化合物が挙げられる。
本実施形態の硬化性組成物は、塗布性をより向上させる観点から、各種の界面活性剤を添加してもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。具体的には、前掲の「光透過性硬化膜形成用樹脂組成物」における界面活性剤と同様なものを使用できる。
即ち、フッ素系界面活性剤を含有する感光性透明組成物を適用した塗布液を用いて膜形成する場合においては、被塗布面と塗布液との界面張力を低下させることにより、被塗布面への濡れ性が改善され、被塗布面への塗布性が向上する。このため、少量の液量で数μm程度の薄膜を形成した場合であっても、厚みムラの小さい均一厚の膜形成をより好適に行える点で有効である。
界面活性剤は、1種のみを用いてもよいし、2種類以上を組み合わせてもよい。
更に、高屈折率層形成用硬化性組成物に対しては、硬化皮膜の物性を改良するために可塑剤や感脂化剤等の公知の添加剤を加えてもよい。
可塑剤としては、例えば、ジオクチルフタレート、ジドデシルフタレート、トリエチレングリコールジカプリレート、ジメチルグリコールフタレート、トリクレジルホスフェート、ジオクチルアジペート、ジブチルセバケート、トリアセチルグリセリン等があり、バインダーポリマーを使用した場合、重合性化合物とバインダーポリマーとの合計質量に対し10質量%以下添加することができる。
本実施形態の高屈折率層形成用硬化性組成物は、紫外線吸収剤を含有してもよい。紫外線吸収剤としては、共役ジエン系化合物である下記一般式(I)で表される化合物が特に好ましい。
ハメット則は、ベンゼン誘導体の反応又は平衡に及ぼす置換基の影響を定量的に論ずるために、1935年にL. P. Hammettにより提唱された経験則であるが、これは今日広く妥当性が認められている。ハメット則により求められた置換基定数には、σp値とσm値とがあり、これらの値は多くの一般的な成書に記載があるが、例えば、J.A. Dean編「Lange’s Handbook of Chemistry」第12版、1979年(Mc Graw-Hill)や「化学の領域増刊」、122号、96~103頁、1979年(南江堂)、Chemical Reviews, 91巻、165頁~195頁、1991年に詳しい。本発明では、これらの成書に記載の文献既知の値がある置換基にのみ限定されるという意味ではなく、その値が文献未知であってもハメット則に基づいて測定した場合にその範囲内に含まれる限り包含されることは勿論である。
また、下層(高屈折率層)は以下説明する分散組成物IIであってもよい。
<分散組成物II>
分散組成物IIとは、一次粒子径が1nm~100nmである金属酸化物粒子(A)と、特定分散樹脂(B)と、溶媒(C)とを含有する分散組成物を指す。ここで、特定分散樹脂(B)以外の他の成分は前記分散組成物Iと同様である。
高屈折率粒子分散用分散剤として、主鎖及び側鎖の少なくとも一方に窒素原子を含むオリゴイミン系分散剤を用いることが好ましい。オリゴイミン系分散剤としては、pKa14以下の官能基を有する部分構造Xを有する繰り返し単位と、原子数40~10,000の側鎖Yを含む側鎖とを有し、かつ主鎖及び側鎖の少なくとも一方に塩基性窒素原子を有する分散樹脂(以下、適宜「特定分散樹脂(B)」と称する。)が好ましい。ここで、塩基性窒素原子とは、塩基性を呈する窒素原子であれば特に制限はない。
特定樹脂(B)としては、前記部分構造X等と対をなす部分構造Wを有していてもよく、部分構造WはpKb14以下の窒素原子を有する構造部であることが好ましく、pKb10以下の窒素原子を有する構造を含有することがより好ましい。塩基強度pKbとは、水温25℃でのpKbをいい、塩基の強さを定量的に表すための指標のひとつであり、塩基性度定数と同義である。塩基強度pKbと、後述の酸強度pKaとは、pKb=14-pKaの関係にある。なお、部分構造Xと部分構造Wとが対になって塩構造を形成しているときには、それぞれが解離した構造を想定し、そこにプロトン(H+)ないし水酸化物イオン(OH-)がイオン結合した化合物として、そのpKaおよびpKbを評価する。部分構造Xについては、さらにその詳細を後記にて説明する。
R8及びR9はR1と同義の基である。
Lは単結合、アルキレン基(炭素数1~6が好ましい)、アルケニレン基(炭素数2~6が好ましい)、アリーレン基(炭素数6~24が好ましい)、ヘテロアリーレン基(炭素数1~6が好ましい)、イミノ基(炭素数0~6が好ましい)、エーテル基、チオエーテル基、カルボニル基、またはこれらの組合せに係る連結基である。なかでも、単結合もしくは-CR5R6-NR7-(イミノ基がXもしくはYの方になる)であることが好ましい。ここで、R5R6は各々独立に、水素原子、ハロゲン原子、アルキル基(炭素数1~6が好ましい)を表す。R7は水素原子または炭素数1~6のアルキル基である。
LaはCR8CR9とNとともに環構造形成する構造部位であり、CR8CR9の炭素原子と合わせて炭素数3~7の非芳香族複素環を形成する構造部位であることが好ましい。さらに好ましくはCR8CR9の炭素原子及びN(窒素原子)を合わせて5~7員の非芳香族複素環を形成する構造部位であり、より好ましくは5員の非芳香族複素環を形成する構造部位であり、ピロリジンを形成する構造部位であることが特に好ましい。ただし、当該構造部位はさらにアルキル基等の置換基を有していてもよい。
XはpKa14以下の官能基を有する基を表す。
Yは原子数40~10,000の側鎖を表す。
なお、上記式(I-2)の共重合比に関する説明は、式(I-2a)、式(I-4)、式(I-5)で表される繰り返し単位についても同義であり、両者を含むときにはその総量を意味する。
上記各式中の部分構造Xは、水温25℃でのpKaが14以下の官能基を有する。ここでいう「pKa」とは、化学便覧(II)(改訂4版、1993年、日本化学会編、丸善株式会社)に記載されている定義のものである。「pKa14以下の官能基」は、物性がこの条件を満たすものであれば、その構造などは特に限定されず、公知の官能基でpKaが上記範囲を満たすものが挙げられるが、特にpKaが12以下である官能基が好ましく、pKaが11以下である官能基が特に好ましい。下限値は特にないが、-5以上であることが実際的である。部分構造Xとして具体的には、例えば、カルボン酸基(pKa:3~5程度)、スルホン酸(pKa:-3~-2程度)、-COCH2CO-(pKa:8~10程度)、-COCH2CN(pKa:8~11程度)、-CONHCO-、フェノール性水酸基、-RFCH2OH又は-(RF)2CHOH(RFはペルフルオロアルキレン基もしくはペルフルオロアルキル基を表す。pKa:9~11程度)、スルホンアミド基(pKa:9~11程度)等が挙げられ、特にカルボン酸基(pKa:3~5程度)、スルホン酸基(pKa:-3~-2程度)、-COCH2CO-(pKa:8~10程度)が好ましい。
また、生産性の観点から、dは1が好ましく、また、eは0が好ましい。
・側鎖Y
Yとしては、特定分散樹脂(B1)の主鎖部と連結できるポリエステル、ポリアミド、ポリイミド、ポリ(メタ)アクリル酸エステル等の公知のポリマー鎖が挙げられる。Yにおける特定分散樹脂(B1)との結合部位は、側鎖Yの末端であることが好ましい。
Yは、前記塩基性窒素原子を有する繰り返し単位の前記窒素原子とアミド結合、又はカルボン酸塩としてイオン結合していることが好ましい。
また、Yの数平均分子量はGPC法によるポリスチレン換算値により測定することができる。このとき、Yは樹脂に組み込む前の状態でその分子量を測定することが実際的である。Yの数平均分子量は、特に1,000~50,000が好ましく、1,000~30,000が分散性・分散安定性・現像性の観点から最も好ましい。Yの分子量は、Yの原料となる高分子化合物から特定することができ、その測定方法は後記GPCによる測定条件に順ずるものとする。
Yで示される側鎖構造は、主鎖連鎖に対し、樹脂1分子中に、2つ以上連結していることが好ましく、5つ以上連結していることが特に好ましい。
ZBは、水素原子又は1価の有機基を表す。ZBが有機基であるとき、アルキル基(好ましくは炭素数1~30)、アリール基、複素環基などが好ましい。ZBはさらに置換基を有していてもよく、当該置換基としては、炭素数6~24のアリール基、炭素数3~24の複素環基が挙げられる。
LBは、アルキレン基(炭素数1~6が好ましい)、アルケニレン基(炭素数2~6が好ましい)、アリーレン基(炭素数6~24が好ましい)、ヘテロアリーレン基(炭素数1~6が好ましい)、イミノ基(炭素数0~6が好ましい)、エーテル基、チオエーテル基、カルボニル基、またはこれらの組合せに係る連結基である。なかでも、アルキレン基(炭素数1~6が好ましい)、エーテル基、カルボニル基、またはこれらの組合せに係る連結基であることが好ましい。アルキレン基は分岐でも直鎖であってもよい。アルキレン基は置換基を有していてもよく、好ましい置換基としては、アルキル基(好ましい炭素数1~6)、アシル基(好ましい炭素数2~6)、アルコキシ基(好ましい炭素数1~6)、またはアルコキシカルボニル基(好ましい炭素数2~8)である。nBは5~100,000の整数である。nB個のLBはそれぞれ異なる構造であってもよい。
本発明の感光性組成物において、高屈折率粒子用分散剤は、1種単独で、あるいは2種以上を組み合わせて用いることができる。
フィルタの孔径は、0.01~7.0μm程度が適しており、好ましくは0.01~2.5μm程度、さらに好ましくは0.01~1.5μm程度である。この範囲とすることにより、溶解した顔料等に混入しており、後工程において均一及び平滑な硬化性組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。
フィルタを使用する際、異なるフィルタを組み合わせても良い。その際、第1のフィルタでのフィルタリングは、1回のみでもよいし、2回以上行ってもよい。異なるフィルタを組み合わせて2回以上フィルタリングを行う場合は1回目のフィルタリングの孔径より2回目以降の孔径が大きい方が好ましい。また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール株式会社、アドバンテック東洋株式会社、日本インテグリス株式会社(旧日本マイクロリス株式会社)又は株式会社キッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
第2のフィルタは、上述した第1のフィルタと同様の材料等で形成されたものを使用することができる。第2のフィルタの孔径は、0.5~7.0μm程度が適しており、好ましくは2.5~7.0μm程度、さらに好ましくは4.5~6.0μm程度である。この範囲とすることにより、混合液に含有されている成分粒子を残存させたまま、混合液に混入しており、後工程でおいて均一及び平滑な硬化性組成物の調製を阻害する異物を除去することができる。
例えば、第1のフィルタでのフィルタリングは、分散液のみで行い、他の成分を混合した後で、第2のフィルタリングを行ってもよい。
[シロキサンの調製]
メチルトリエトキシシラン(MTES)及び/又はテトラエトキシシラン(TEOS)を用いて、加水分解・縮合反応を行い、加水分解縮合物S-1、S-2、S-c1を得た。このときに用いた溶媒は エタノールである。得られた加水分解縮合物S-1は重量平均分子量 約10000であった。
以下の成分を配合して、シロキサン硬化性組成物A-1を調製した。また、下記表Aの成分を配合して、シロキサン硬化性組成物A-2,A-c1を調製した。
・シロキサン:上記加水分解縮合物S-1 ・・・20部
・溶剤:プロピレングリコールモノメチルエーテルアセテート
(PGMEA) ・・・62部
・溶剤:3-エトキシプロピオン酸エチル(EEP) ・・・16部
・界面活性剤:EMULSOGEN-COL-020
(クラリアントジャパン製) ・・・2部
前記硬化膜の屈折率を、ジェー・エー・ウーラム・ジャパン社製エリプソメーターを用いて測定した。測定条件は、633nmで、25℃とし、5点の平均値を採用した。結果を下記表Aに示した。
樹脂組成物A-2,A-c1は下表のとおりの組成とし、上記と同様にして屈折率の測定を行った
以下の成分を配合して、中空粒子含有シロキサン硬化性組成物A-3を調製した。また、下記表Aの成分を配合して、硬化性組成物A-4,A-5、A-c2を調製した。
・中空粒子:スルーリア2320(日揮触媒化成(株)製) ・・・55部
・硬化性樹脂:サイクロマーP ACA230AA(略称:230AA)
(ダイセル化学(株)製) ・・・18部
・重合開始剤:IRGACURE OXE-01(BASF製)・・・0.05部
・界面活性剤:メガファックF-781
(DIC(株)製)・・・0.01部
・溶剤:プロピレングリコールモノメチルエーテルアセテート
(PGMEA)・・・26.94部
PNB・・・プロピレングリコールモノn-ブチルエーテル
PTB・・・プロピレングリコールモノtert-ブチルエーテル
DMM・・・ジプロピレングリコールジメチルエーテル
2-Hep・・・2-ヘプタノン
[二酸化チタン分散液(分散組成物)の調製]
下記組成の混合液に対し、循環型分散装置(ビーズミル)として、シンマルエンタープライゼス株式会社製NPMを用いて、以下のようにして分散処理を行い、分散組成物として二酸化チタン分散液を得た。
~組成~
・二酸化チタン(石原産業(株)製 TTO-51(C)) : 150.0部
・下記分散樹脂1(固形分20%PGMEA溶液) : 165.0部
・プロピレングリコールモノメチルエーテルアセテート : 142.5部
・ビーズ径:φ0.05mm
・ビーズ充填率:60体積%
・周速:10m/sec
・ポンプ供給量:30Kg/hour
・冷却水:水道水
・ビーズミル環状通路内容積:1.0L
・分散処理する混合液量:10kg
平均粒子径は分散時間(パス回数)とともに減少していったが、次第にその変化量が少なくなっていった。分散時間を30分間延長したときの平均粒子径変化が5nm以下となった時点で分散を終了した。尚、この分散液中の二酸化チタン粒子の平均粒子径は40nmであった。
この測定は、日機装株式会社製マイクロトラックUPA-EX150を用いて行った。
・上記で調製した二酸化チタン分散液(分散組成物) ・・・80.5部
・溶剤:プロピレングリコール
モノメチルエーテルアセテート ・・・15部
・重合性化合物:KAYARAD DPHA
(日本化薬(株)製) ・・・3.6部
・重合開始剤:IRGACURE OXE-01(BASF製)・・・0.10部
・ポリマーA:ベンジルメタクリレート/メタクリル酸共重合体
(共重合比:80/20(wt%)、重量平均分子量:12,000)
(FFFC社製) ・・・0.5部
・界面活性剤:メガファックF-781(DIC(株)製) ・・・0.30部
前記二酸化チタン含有硬化性組成物をシリコンウエハー上に塗布後、プリベーク(100℃2min)、ポストベーク(230℃10min)を実施して硬化膜B-1を作成した。
(重合性化合物)
1031S・・・JER1031S(ジャパンエポキシレジン(株)製)
157S65・・・JER157S65(ジャパンエポキシレジン(株)製)
(ポリマー)
・ポリマーB・・・アクリベース (ベンジルメタクリレート/i-ブチルメタクリレート・2-ヒドロキシエチルメタクリレート・メタクリル酸共重合体とメトキシポリエチレングリコールとのグラフト共重合物、藤倉化成(株)製)
フォトダイオード及び転送電極が形成されたシリコンウエハー上に、フォトダイオードの受光部のみ開口したタングステンからなる遮光膜を形成し、形成された遮光膜全面及びフォトダイオード受光部(遮光膜中の開口部)を覆うようにして窒化シリコンからなるデバイス保護層を形成する。
この上に、上記のようにして調製した本発明の実施例記載の硬化性組成物B-1~B-6、B-c1を、乾燥膜厚1.5μmとなるように塗布後、100℃で2分間、ホットプレートで加熱後、230℃で10分間、ホットプレートで加熱し、硬化させた。
・RFパワー:800W
・アンテナバイアス:100W
・ウエハバイアス:500W
・チャンバー内圧:0.5Pa
・基板温度:50℃
・混合ガス種および流量:CF4/C4F6/O2/Ar =
175/25/50/200ml/分
・フォトレジストエッチングレート:140nm/分
得られたイメージセンサーを用いて、200ルクスの照度条件下にて白色版を撮影し、この画像を画像取り込みソフト(photograb-300[商品名]、富士フイルム(株)製)を用いて、8ビットのビットマップ形式でパソコンに取り込んだ。この評価により得られた平均色濃度が本デバイスの感度に相当し、数値が高いほど高感度であることを表す。また、相対色濃度が-10%以下の割合が大きいほど、ノイズが多いことを表す。
なお、相対色濃度は下記式にて算出される。
相対色濃度=(各画素の色濃度-平均色濃度)/平均色濃度×100%
この結果を、下記表に示す。
前記の試験101及び110のセットについて、上層及び下層の厚さの異なるものを種々作製して試験を行った(表2)。その結果、厚さを変化させても良好な性能が実現されることが分かった。
前記A-1において、Emulsogen COL-020に変えて、ECT-7(日光ケミカルズ株式会社製)1部を用いた以外は同様に硬化性組成物を調製し評価した。その結果、平均色素濃度及び相対色素濃度のばらつきについても良好な結果であった。なお、ECT-7はポリオキシアルキレン構造を有する界面活性剤であり、R-O-(EO)7-COOH(R=C13 アルキル基)の構造を有する。
A-1の(組成)において、Emulsogen COL-020に変えて、ECT-7(日光ケミカルズ株式会社製)1部及びKF6001(信越シリコーン社製)0.02部を用いた以外は、実施例1と同様に塗布組成物を調製し評価した。その結果、平均色素濃度及び相対色素濃度のばらつきについても良好な結果であった。
(二酸化チタンレス高屈折率材料組成物)
屈折率(1.68)の層を形成するために、下記組成物を調製した。なお、下記組成物C-1を用いる場合には、プリベーク(100℃2min)、ポストベーク(230℃10min)を実施して硬化膜を形成する。
溶剤:プロピレングリコールモノメチルエーテルアセテート ・・・15部
シクロヘキサノン ・・・30部
樹脂:日産化学工業社製超高屈折率コーティング材料UR202 ・・・32部
硬化促進剤:SB-A(三菱ガス化学) ・・・5部
エポキシ樹脂:157S65(三菱化学社製) ・・・17.5部
界面活性剤:メガファックF-781(DIC) ・・・0.5部
試験体201において、シロキサン硬化性組成物A-1をA-2~A-10及び後述するA-20に変更したこと以外は試験体201と同様にして試験体202~211を作製した。試験体202~211について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
(加水分解縮合物の合成)
メチルトリエトキシシランを用いて、加水分解・縮合反応を行った。このときに用いた溶媒はエタノールである。得られた加水分解縮合物は重量平均分子量約10,000であった。なお、上記重量平均分子量は先に説明の手順に沿ってGPCにより確認した。下記組成の成分を攪拌機で混合して、組成物A-20を調製した。組成物A-20で形成された硬化膜の屈折率は1.30であった。
(組成)
加水分解縮合物(メチルトリエトキシシラン) ・・・5部
プロピレングリコールモノメチルエーテルアセテート
(PGMEA)・・・5部
EMULSOGEN-COL-020(アニオン界面活性剤、クラリアント(株)製)
・・・2部
スルーリア2320(日揮触媒化成社製の中空シリカの20質量%分散液)
・・・88部
試験体201の二酸化チタンレス高屈折率材料組成物C-1(日産化学工業社製超高屈折率コーティング材料UR202含有)の日産化学工業社製超高屈折率コーティング材料UR202を、チオエポキシ樹脂LPH1101(三菱ガス化学社製)に変えたこと以外は、試験体201と同様にして試験体301を得た。試験体301について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
試験体301において、シロキサン硬化性組成物A-1をA-2~A-10及びA-20に変更したこと以外は試験体201と同様にして試験体302~311を作製した。試験体302~311について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
試験体201の二酸化チタンレス高屈折率材料組成物(日産化学工業社製超高屈折率コーティング材料UR202含有)の日産化学工業社製超高屈折率コーティング材料UR202を、エピスルフィド樹脂MR-174(三井化学社製)に変えたこと以外は、試験体201と同様にして試験体401を得た。試験体401について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
試験体401において、シロキサン硬化性組成物A-1をA-2~A-10及びA-20に変更したこと以外は試験体401と同様にして試験体402~411を作製した。試験体402~411について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
試験体201の二酸化チタンレス高屈折率材料組成物(日産化学工業社製超高屈折率コーティング材料UR202含有)の日産化学工業社製超高屈折率コーティング材料UR202を、チオウレタン樹脂MR-7(三井化学社製)に変えたこと以外は、試験体201と同様にして試験体501を得た。試験体501について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
試験体501において、シロキサン硬化性組成物A-1をA-2~A-10及びA-20に変更したこと以外は試験体501と同様にして試験体502~511を作製した。試験体502~511について、試験体101と同様に、平均色濃度および相対色濃度のばらつきを評価し、良好な結果であることを確認した。
Claims (16)
- 硬化性樹脂組成物を硬化させてなる第1の光学部材と、これに被覆された第2の光学部材とを有してなる光学部材セットであって、
前記第1の光学部材は屈折率1.25~1.45であり、前記第2の光学部材は屈折率1.65~1.95である光学部材セット。 - 前記第1の光学部材は屈折率1.35~1.45であり、前記第2の光学部材は屈折率1.85~1.95である請求項1に記載の光学部材セット。
- 前記第1の光学部材が、シロキサン樹脂およびフッ素系樹脂の少なくともいずれかを含有する請求項1または2に記載の光学部材セット。
- 前記第1の光学部材が、さらに中空粒子を含有する請求項1~3のいずれか1項に記載の光学部材セット。
- 前記第2の光学部材がチタニアまたはジルコニアを含有する請求項1~4のいずれか1項に記載の光学部材セット。
- 前記第1の光学部材が膜状であり、その膜厚が0.5μm~3.0μmである請求項1~5のいずれか1項に記載の光学部材セット。
- 前記第1の光学部材の厚さが500nm~2800nmであり、前記第2の光学部材の厚さが200nm~1500nmである請求項1~6のいずれか1項に記載の光学部材セット。
- 前記第1の光学部材の屈折率と前記第2の光学部材の屈折率との差が0.45~0.55である請求項1~7のいずれか1項に記載の光学部材セット。
- 前記シロキサン樹脂の65質量%以上100質量%以下が下記式(1)で表されるシルセスキオキサン構造で構成されている請求項3~8のいずれか1項に記載の光学部材セット。
-(R1SiO3/2)n- 式(1)
(上記式(1)中、R1は炭素数1~3のアルキル基を表す。nは20~1000の整数を表す。) - 前記第1の光学部材が、さらに界面活性剤を含有する請求項1~9のいずれか1項に記載の光学部材セット。
- 前記シロキサン樹脂が下記式(2)で表されるアルキルトリアルコキシシランを加水分解縮合し得られた樹脂である請求項3~10のいずれか1項に記載の光学部材セット。
R2Si(OR3)3 式(2)
(R2は炭素数1~3のアルキル基を表し、R3はアルキル基を表す。) - 前記第2の光学部材が、一次粒子径が1nm~100nmである金属酸化物粒子(A)と、水素原子を除いた原子数が40~10000のグラフト鎖を有するグラフト共重合体(B)と、溶媒(C)とを含有する分散組成物の光硬化物である請求項1~11のいずれか1項に記載の光学部材セット。
- 前記グラフト共重合体(B)が、pKa14以下の官能基を有する基Xを有する繰り返し単位と、原子数40~10,000の側鎖Yとを有し、かつ塩基性窒素原子を含有する樹脂(B1)である請求項12に記載の光学部材セット。
- 前記樹脂(B1)が、下記式(I-1)で表される繰り返し単位及び下記式(I-2)で表される繰り返し単位を有する、あるいは下記式(I-1)で表される繰り返し単位及び下記式(I-2a)で表される繰り返し単位を有する請求項13に記載の光学部材セット。
- 前記第2の光学部材として複数の凸レンズが採用され、該複数の凸レンズはその膨出方向を実質的に同一方向にむけて配列されており、かつ該複数の凸レンズはその膨出方向から光透過性硬化膜をなす前記第1の光学部材により被覆されており、前記複数の凸レンズ間に形成された凹部には実質的に隙間無く前記光透過性硬化膜が充填され、一方、該光透過性硬化膜において前記凸レンズの反対側は平坦面とされている請求項1~14のいずれか1項に記載の光学部材セット。
- 請求項1~15のいずれか1項に記載の光学部材セットと、半導体受光ユニットとを備えた固体撮像素子。
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JP2015118353A (ja) * | 2013-12-20 | 2015-06-25 | 凸版印刷株式会社 | 半球形状のマイクロレンズ付カラーフィルタ |
WO2023157793A1 (ja) * | 2022-02-15 | 2023-08-24 | 三菱ケミカル株式会社 | 熱可塑性樹脂組成物、成形材料及び成形体 |
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- 2012-12-26 EP EP12862041.6A patent/EP2799912A4/en not_active Withdrawn
- 2012-12-26 KR KR1020147014920A patent/KR20140090232A/ko not_active Application Discontinuation
- 2012-12-26 TW TW101150238A patent/TW201331611A/zh unknown
- 2012-12-26 WO PCT/JP2012/083653 patent/WO2013099945A1/ja active Application Filing
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