WO2011024689A1 - 剥離装置 - Google Patents
剥離装置 Download PDFInfo
- Publication number
- WO2011024689A1 WO2011024689A1 PCT/JP2010/063946 JP2010063946W WO2011024689A1 WO 2011024689 A1 WO2011024689 A1 WO 2011024689A1 JP 2010063946 W JP2010063946 W JP 2010063946W WO 2011024689 A1 WO2011024689 A1 WO 2011024689A1
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- WO
- WIPO (PCT)
- Prior art keywords
- peeling
- reinforcing sheet
- rods
- flexible member
- substrate
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H41/00—Machines for separating superposed webs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/50—Auxiliary process performed during handling process
- B65H2301/51—Modifying a characteristic of handled material
- B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
- B65H2301/5112—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface
- B65H2301/51122—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface peeling layer of material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
- Y10T156/1168—Gripping and pulling work apart during delaminating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1978—Delaminating bending means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1978—Delaminating bending means
- Y10T156/1989—Corner edge bending delaminating means
Definitions
- This invention relates to the peeling apparatus which peels the reinforcement sheet affixed on the board
- Patent Document 1 discloses a laminate in which a reinforcing sheet is attached to a glass substrate in a peelable manner. After forming the electronic device member on the surface of the glass substrate opposite to the reinforcing sheet side, the reinforcing sheet attached to the glass substrate is peeled off to compensate for the decrease in strength of the glass substrate.
- Patent Document 1 describes that an initial peeling is performed by inserting a razor blade between the glass substrate and the reinforcing sheet in order to peel the reinforcing sheet attached to the glass substrate. . Subsequent peeling can be easily performed by performing initial peeling.
- Patent Document 2 as a peeling device for peeling a glass substrate attached to an adsorbing member, a plate-like flexible member is attached on a glass substrate, and a plurality of rods fixed on the flexible member are attached.
- An apparatus has been proposed in which a glass substrate is sequentially bent and deformed from both ends by peeling and extending each rod in the axial direction of the rod.
- Patent Document 3 as a peeling device that peels a reinforcing sheet attached to a resin substrate, the rotating body is rotated while the curved surface of the rotating body is sequentially brought into contact with the upper surface of the reinforcing sheet, from the contacted portion.
- An apparatus is described in which a reinforcing sheet is sequentially bent and deformed to separate.
- Patent Document 1 there is no specific description of the peeling method after the initial peeling. Therefore, it is conceivable to use the peeling apparatus described in Patent Document 2 as a peeling method after the initial peeling.
- a plate-like flexible member is attached on the reinforcing sheet, a plurality of rods fixed on the flexible member are expanded and contracted in the axial direction for each rod, and the reinforcing sheet is removed from one end side (ie, initial peeling). It is conceivable that the material is sequentially deformed and peeled off (from the position where the operation is performed).
- Patent Document 3 since the degree of bending deformation of the reinforcing sheet is determined by the curved surface shape of the rotating body, it is difficult to cope with the change of the separation target.
- the present invention has been made in view of the above problems, and provides a peeling apparatus that can easily peel a reinforcing sheet attached to a substrate and can easily cope with a change of a peeling target. With the goal.
- the present invention provides a peeling apparatus for peeling a reinforcing sheet attached to a substrate.
- a support unit that supports one main surface of the laminate including the substrate and the reinforcing sheet;
- a plate-like flexible member attached to the other main surface of the laminate;
- a plurality of pads fixed to a surface of the flexible member opposite to the laminated body;
- a plurality of rods coupled to any of the plurality of pads;
- a plurality of driving devices for moving the plurality of rods in the axial direction for each rod;
- a controller for controlling the positions of the plurality of rods for each rod;
- the plurality of pads are connected to any of the plurality of rods via any of a plurality of joints, and the center line of the connected rods and the substrate-side surface or the substrate on the reinforcing sheet It is possible to rotate around the intersection near the surface on the reinforcing sheet side above,
- a peeling device that supports one main surface of the multilayer body by the support unit and controls the positions of the plurality
- the present invention provides a peeling apparatus for peeling a reinforcing sheet attached to a substrate.
- a plate-like flexible member attached to both main surfaces of the laminate including the substrate and the reinforcing sheet;
- a plurality of pads fixed to a surface of the flexible member opposite to the laminated body;
- a plurality of rods coupled to any of the plurality of pads;
- a plurality of drive devices for moving the plurality of rods in the axial direction of the rods for each rod;
- a controller for controlling the positions of the plurality of rods for each rod;
- the plurality of pads are connected to any of the plurality of rods via any of a plurality of joints, and the center line of the connected rods and the substrate-side surface or the substrate on the reinforcing sheet It is possible to rotate around the intersection near the surface on the reinforcing sheet side above,
- the control device controls the positions of the plurality of rods so that one main surface of the laminate is sequentially bent and deformed from one end side, and the control device
- the present invention it is possible to provide a peeling apparatus that can easily peel a reinforcing sheet attached to a substrate and can easily cope with a change of a peeling target.
- FIG. 1 is a partial cross-sectional side view showing a peeling apparatus in the first embodiment.
- FIG. 2 is a partial cross-sectional side view showing the operation of the peeling apparatus of FIG.
- FIG. 3 is a side view showing an example of the reinforcing sheet 120.
- FIG. 4 is a side view showing a modification of FIG.
- FIG. 5 is a side view showing an example of the laminated body 100.
- FIG. 6 is a side view showing an example of the peeling blade 20.
- 7A and 7B are general views showing an example of the flexible member 30.
- FIG. FIG. 8 is a top view showing an arrangement example of the pads 40.
- FIG. 9 is a partial cross-sectional side view showing the peeling apparatus in the second embodiment.
- FIGS. 11A to 11F are process diagrams showing a peeling method according to the second embodiment.
- 12 (a) to 12 (f) are process diagrams showing a peeling method according to the third embodiment.
- FIG. 1 is a partial cross-sectional side view showing a peeling apparatus in the first embodiment.
- FIG. 2 is a partial cross-sectional side view showing the operation of the peeling apparatus of FIG.
- the peeling device is a device for peeling the reinforcing sheet 120 attached to the glass substrate 110.
- the peeling device supports the first main surface 102 of the laminated body 100 including the glass substrate 110 and the reinforcing sheet 120, and sequentially bends and deforms the second main surface 104 of the laminated body 100 from one end side. In this way, the peeling device holds the glass substrate 110 flat and peels the reinforcing sheet 120 by bending and deforming sequentially from one end side.
- the peeling device holds the glass substrate 110 flat and peels the reinforcing sheet 120 by sequentially bending and deforming from one end side, but the present invention is not limited to this.
- the peeling device may hold the reinforcing sheet 120 flat and peel the glass substrate 110 by bending and deforming sequentially from one end side.
- the laminate 100 is composed of at least a glass substrate 110 and a reinforcing sheet 120.
- the electronic device member may be formed on the surface of the glass substrate 110 opposite to the reinforcing sheet 120 side.
- the electronic device refers to an electronic component such as a display panel, a solar cell, or a thin film secondary battery.
- the display panel includes a liquid crystal panel such as TFT-LCD and STN-LCD, an organic EL panel, a plasma display panel, a field emission panel, and the like.
- the glass substrate 110 may be an alkali-free glass substrate or an alkali glass substrate, and is appropriately selected based on the applied electronic device and its manufacturing process, but has a low thermal shrinkage rate.
- a non-alkali glass substrate is preferred.
- the thickness of the glass substrate 110 is not particularly limited, but is preferably 0.3 mm or less, more preferably 0.15 mm or less from the viewpoint of thinning. In the case of 0.3 mm or less, it is possible to give good flexibility to the glass substrate 110. In the case of 0.15 mm or less, the glass substrate 110 can be rolled up.
- the reinforcing sheet 120 preferably has a small absolute value of the difference in linear expansion coefficient from the glass substrate 110 in order to suppress warping and peeling during heating and cooling, and preferably includes at least a glass sheet.
- the glass sheet may be formed of the same material as the glass substrate 110 or may be formed of a different material, but is preferably formed of the same material.
- FIG. 3 is a side view showing an example of the reinforcing sheet 120.
- the reinforcing sheet 120 includes only the glass sheet 121.
- the reinforcing sheet 120 and the glass substrate 110 can be attached to each other by a bonding force between glass silanol groups (Si—OH) or van der Waals force.
- FIG. 4 is a side view showing a modification of FIG.
- the reinforcing sheet 120 includes a glass sheet 121 and a resin layer 122 formed on the glass sheet 121.
- the resin layer 122 and the glass substrate 110 can be detachably attached by van der Waals force acting between the resin layer 122 and the glass substrate 110, the adhesive force of the resin layer 122, or the like.
- the resin layer 122 preferably contains at least one of acrylic resin, polyolefin resin, epoxy resin, polyurethane resin, and silicone resin from the viewpoint of flexibility and impact resistance.
- the resin layer 122 is more preferably made of a silicone resin from the viewpoint of heat resistance.
- the reinforcing sheet 120 is composed of the glass sheet 121 and the resin layer 122, but another resin layer is further formed on the surface of the glass sheet 121 opposite to the resin layer 122 side. It may be.
- FIG. 5 is a side view showing an example of the laminated body 100.
- the laminate 100 has a configuration in which a reinforcing sheet 120A, a glass substrate 110A, a liquid crystal layer 130, a glass substrate 110B, and a reinforcing sheet 120B are sequentially arranged.
- the laminated body 100 is used for a TFT-LCD, and a thin film transistor (TFT) (not shown) is formed on the surface of the glass substrate 110A on the liquid crystal layer 130 side, and the liquid crystal layer on the glass substrate 110B is formed.
- a color filter (not shown) is formed on the surface on the 130 side.
- the laminate 100 is configured such that the reinforcing sheets are disposed on both sides, but may be configured such that the reinforcing sheet is disposed only on one side.
- the peeling device includes a stage 10 (support unit), a peeling blade 20, a flexible member 30, a plurality of pads 40, a plurality of joints 50, a plurality of rods 60, a plurality of driving devices 70, a control device 80, and the like. .
- the stage 10 supports the first main surface 102 of the laminate 100 and holds the glass substrate 110 flat.
- the stage 10 supports the first main surface 102 of the stacked body 100 and holds the glass substrate 110 flat, but supports the second main surface 104 of the stacked body 100,
- the reinforcing sheet 120 may be held flat.
- the stage 10 vacuum-sucks the first main surface 102 of the stacked body 100.
- electrostatic suction may be performed, or detachable bonding may be performed.
- the peeling blade 20 is for performing initial peeling, and is inserted between the glass substrate 110 and the reinforcing sheet 120 manually or by an appropriate driving device.
- the peeling blade 20 is inserted between the glass substrate 110 and the reinforcing sheet 120 at the corner of the laminated body 100 and moved by a predetermined amount along the interface between the glass substrate 110 and the reinforcing sheet 120.
- FIG. 6 is a side view showing an example of the peeling blade 20.
- the blade surface 22 on the glass substrate 110 side is configured to move away from the glass substrate 110 toward the tip as shown in FIG. Thereby, the damage of the glass substrate 110 by insertion of the peeling blade 20 can be suppressed.
- the blade surface 24 on the reinforcing sheet 120 side is configured to be separated from the reinforcing sheet 120 toward the tip. Thereby, damage to the reinforcing sheet 120 due to insertion of the peeling blade 20 can be suppressed.
- the resin layer 122 has lower scratch resistance than the glass sheet 121. It is valid.
- the blade surface 24 on the reinforcing sheet 120 side includes two inclined surfaces 26 and 28.
- the angle ⁇ formed by the blade surface 22 and the inclined surface 26 is set to 65 °, and the angle ⁇ formed by the blade surface 22 and the inclined surface 28 is set to 12 °.
- the length L1 of the inclined surface 26 is set to 35 ⁇ m, and the length L2 of the inclined surface 28 is set to 290 ⁇ m.
- the flexible member 30 is a plate-like member that is attached to the second main surface 104 of the laminate 100. That is, the flexible member 30 is a member attached to the surface 104 on the opposite side of the glass substrate 110 on the reinforcing sheet 120. The flexible member 30 may be detachably attached to the second main surface 104 of the laminate 100.
- the flexible member 30 is attached to the second main surface 104 of the multilayer body 100, but may be attached to the first main surface 102 of the multilayer body 100.
- the reinforcing sheet 120 and the glass substrate 110 are directly below the pad 40 when the pad 40 starts to move. Since they are peeled off substantially in parallel, the force for peeling increases, making it difficult to peel off. Therefore, when the reinforcing sheet 120 includes the resin layer 122 and the resin layer 122 and the glass substrate 110 are in close contact with each other, the resin layer 122 adheres to the glass substrate 110 due to cohesive failure during peeling. There is a risk of doing.
- FIG. 7 is an overall view showing an example of the flexible member 30, FIG. 7 (a) is a plan view, and FIG. 7 (b) is taken along line AA ′ in FIG. 7 (a). It is sectional drawing.
- the flexible member 30 includes an attachment portion 32 and a defining portion 34.
- the attachment portion 32 is a part that is detachably attached to the second main surface 104 of the laminate 100.
- a groove portion 36 is formed in the attachment portion 32 and communicates with the through hole 38 of the defining portion 34. The inside of the groove 36 is depressurized by a vacuum pump or the like connected to the through hole 38, and the second main surface 104 of the multilayer body 100 is vacuum-sucked to the mounting portion 32.
- vacuum suction electrostatic suction may be performed, or removably bonded.
- the material of the attachment portion 32 is not particularly limited, but rubber is preferable from the viewpoint of adhesion.
- rubber silicone rubber is preferable from the viewpoint of releasability.
- Silicone gel can be used instead of silicone rubber. In this case, when the mounting portion 32 attached to the laminate 100 is removed, the silicone gel may adhere to the laminate 100 due to cohesive failure. .
- the surface of the mounting portion 32 may be coated for the purpose of improving peelability.
- the thickness T1 of the mounting portion 32 is preferably 1 mm or more, and more preferably 2 mm or more.
- the thickness T1 of the attachment portion 32 is less than 1 mm, the deformation allowance of the attachment portion 32 is small, so that it is difficult to obtain sufficient adhesion between the attachment portion 32 and the laminate 100.
- it is preferable that thickness T1 of the attaching part 32 is 30 mm or less. If the thickness T1 of the attachment portion 32 exceeds 30 mm, the deformation allowance of the attachment portion 32 is large, so that it is difficult to control the bending deformation of the second main surface 104 of the laminate 100.
- the defining part 34 is a part that defines the bending rigidity of the flexible member 30.
- the flexural rigidity per unit width (1 mm) of the flexible member 30 is preferably 1000 to 40000 N ⁇ mm 2 / mm. In other words, the flexural rigidity of the flexible member 30 is preferably 1000 to 40000 N ⁇ mm 2 .
- the flexural rigidity per unit width (1 mm) of the flexible member 30 is less than 1000 N ⁇ mm 2 / mm, the flexible member 30 becomes soft, and the reinforcing sheet 120 is bent at the time of peeling.
- the material of the defining portion 34 is not particularly limited as long as the bending rigidity per unit width (1 mm) of the flexible member 30 is 1000 to 40000 N ⁇ mm 2 / mm.
- PVC polyvinyl chloride
- acrylic acrylic
- resin plates such as resin and polyacetal (POM) resin
- metal plates are used.
- the plurality of pads 40 are fixed to the surface of the flexible member 30 opposite to the laminated body 100 side.
- the plurality of pads 40 may be adsorbed and fixed on the flexible member 30 or may be bonded and fixed.
- FIG. 8 is a top view showing an arrangement example of the plurality of pads 40.
- the size of the pad 40 is set so as not to hinder the bending deformation of the flexible member 30.
- the diameter is set to 29 mm.
- the plurality of pads 40 are arranged in a grid pattern at an equal pitch, but the present invention is not limited to this. For example, they may be arranged at unequal pitches or may be arranged in a staggered manner.
- the plurality of pads 40 are connected to any of the plurality of rods 60 via any one of the plurality of joints 50, and the center line X of the connected rods 60 and the surface of the reinforcing sheet 120 on the glass substrate 110 side. And the vicinity of the intersection point P (within ⁇ 15 mm from the intersection point P, more preferably within ⁇ 5 mm from the intersection point P). As a result, as shown in FIG. 2, the pad 40 side can move in the direction orthogonal to the axis of the rod 60 at the connecting portion between the pad 40 and the rod 60, and can follow the bending deformation of the flexible member 30. .
- Examples of the joint 50 include a spherical joint and a link shown in FIG. Among these, a spherical joint having a relatively simple structure is preferable.
- the pad 40 side cannot move in the direction orthogonal to the axis of the rod 60 at the connecting portion, so that the bending deformation of the flexible member 30 is hindered, and the laminated body
- the bending deformation of the second main surface 104 of 100 may be hindered. If the bending deformation of the second main surface 104 of the laminate 100 is small, the reinforcing sheet 120 and the glass substrate 110 are peeled off substantially in parallel, so that the force for peeling becomes large and it becomes difficult to peel off. Therefore, when the reinforcing sheet 120 includes the resin layer 122 and the resin layer 122 and the glass substrate 110 are in close contact with each other, the resin layer 122 adheres to the glass substrate 110 due to cohesive failure during peeling. There is a risk of doing.
- each pad 40 can be made to follow the bending deformation of the flexible member 30 by the joint 50, the reinforcing sheet 120 attached to the glass substrate 110 can be easily peeled off. Can do. For this reason, when the reinforcing sheet 120 includes the resin layer 122 and the resin layer 122 and the glass substrate 110 are in close contact with each other, damage at the time of peeling can be suppressed.
- a coil spring 52 is interposed between the pad 40 and the joint 50 in a slightly contracted state. Due to the restoring force of the coil spring 52, rattling of the connecting portion of the pad 40 and the rod 60 can be eliminated.
- the plurality of drive devices 70 are for moving the plurality of rods 60 for each rod 60 in a direction approaching and separating from the stage 10 under the control of one control device 80.
- the plurality of drive devices 70 are for expanding and contracting the plurality of rods 60 in the axial direction for each rod 60 under the control of one control device 80.
- One driving device 70 is installed for each rod 60. Although it does not specifically limit as the drive device 70, It is preferable that an air cylinder and a servomotor are used.
- the plurality of driving devices 70 are connected to the frame 16 via any one of the plurality of cushion members 14.
- the material of the cushion member 14 is not particularly limited, and examples thereof include urethane rubber.
- the frame 16 is relatively movable in the direction approaching and separating from the stage 10.
- each rod 60 can be slightly tilted in the direction perpendicular to the axis, and each pad 40 is flexible. It is easy to follow the bending deformation of the member 30.
- the control device 80 is configured by a microcomputer or the like, and controls the positions of the plurality of rods 60 with respect to the stage 10 for each rod 60. As shown in FIG. 2, the control device 80 sequentially deforms and reinforces the reinforcing sheet 120 from the position where the initial peeling is performed (the position where the peeling blade 20 is inserted) in a state where the glass substrate 110 is supported flat. In addition, the positions of the plurality of rods 60 are controlled. For this reason, the position of the some rod 60 can be set according to the thickness, the kind, etc. of peeling object (the glass substrate 110 or the reinforcement sheet 120), and can respond to the change of peeling object easily.
- the control device 80 has a separation region 124 in the vicinity of the separation front 128 that divides the surface on the glass substrate 110 side on the reinforcing sheet 120 that is sequentially deformed into a separation region 124 and an unpeeled region 126.
- the positions of the plurality of rods 60 are controlled so that the radius of curvature is 250 mm to 2500 mm, more preferably 500 mm to 1000 mm.
- the vicinity of the peeling front 128 means a region within 50 mm from the peeling front 128.
- the reinforcing sheet 120 may be broken and damaged. This is a problem particularly when the reinforcing sheet 120 includes the glass sheet 121.
- the reinforcing sheet 120 and the glass substrate 110 are peeled substantially in parallel. It becomes difficult. For this reason, adsorption
- the shape of the reinforcing sheet 120 is not limited as long as the reinforcing sheet 120 is not broken and damaged, and may be a flat plate, for example.
- the control device 80 When the servo motor is used as the driving device 70, the control device 80 includes a position detection unit 82 and a control unit 84 as shown in FIGS.
- the position detection unit 82 detects the current positions of the plurality of rods 60 for each rod 60 based on the number of rotations of the servo motor.
- the controller 84 controls the power supplied to the plurality of servo motors for each servo motor so that the current position detected by the position detector 82 approaches a preset target position.
- the target position changes for each rod 60 in accordance with the time T from the start of control, and the information recorded in advance on the recording medium for each rod 60 is read and used.
- the time T is detected by a timer or the like incorporated in the control device 80.
- control device 80 can accurately control the positions of the plurality of rods 60 for each rod 60 and can accurately control the positions of the plurality of rods 60 in association with each other.
- the moving speed of the peeling front 128 of the reinforcing sheet 120 can be kept constant.
- the control device 80 may further include a load detection unit 86 as shown in FIGS.
- the load detection unit 86 detects the load torque (for example, current supplied to the plurality of servo motors) of the plurality of servo motors for each servo motor.
- the control unit 84 corrects the target positions of the plurality of rods 60 for each rod 60 based on the detection result of the load detection unit 86 and records them on the recording medium.
- the time T of the target position of the rod 60 moved by the one servo motor is set to a predetermined time. It is corrected so as to be delayed (for example, 0.06 seconds) and recorded on a recording medium.
- the power supplied to a plurality of servomotors is controlled for each servomotor based on the corrected and recorded target positions after the nth control. To do.
- an excessive load can be suppressed from being applied to the reinforcing sheet 120, and damage to the reinforcing sheet 120 can be suppressed.
- the frame 16 that can be moved up and down with respect to the stage 10 is lowered and the plate-like flexible member 30 is pressed against the reinforcing sheet 120A. Thereafter, the frame 16 is stopped, and the reinforcing sheet 120 ⁇ / b> A is vacuum-sucked to the flexible member 30. In this state, as shown in FIG. 1, the flexible member 30 has a flat plate shape.
- the peeling blade 20 is inserted between the reinforcing sheet 120A of the laminate 100 and the glass substrate 110A to perform initial peeling.
- the plurality of rods 60 are moved for each rod 60, the flexible member 30 is sequentially bent and deformed from one end side, and the reinforcing sheet 120 ⁇ / b> A is removed from one end side (initial peeling was performed). From the position), the entire surface is peeled off from the glass substrate 110A by bending and deforming sequentially.
- peeling is performed so that the radius of curvature of the peeling region is 250 mm to 2500 mm, more preferably 500 mm to 1000 mm, in the vicinity of the peeling front of the reinforcing sheet 120A.
- the damage in the case of peeling can be suppressed.
- the frame 16 After peeling the reinforcing sheet 120A, the frame 16 is raised to a predetermined position, the vacuum suction by the flexible member 30 is released, the reinforcing sheet 120A is removed, the vacuum suction by the stage 10 is released, and the laminate 100 is removed. .
- the laminate 100 from which the reinforcing sheet 120A has been peeled is placed on the stage 10 so that the reinforcing sheet 120B is on the upper side and is vacuum-sucked. Sequentially bend and deform (from the performed position) and peel off from the glass substrate 110B.
- the reinforcing sheets 120A and 120B can be easily peeled from the laminate 100, and damage during peeling can be suppressed.
- the reinforcing sheet 120 is sequentially bent and deformed from one end side and peeled off, but the present invention is not limited to this.
- the reinforcing sheet 120 may be sequentially bent and deformed from both end sides and peeled off.
- the stage 10 is fixed and the frame 16 is moved up and down.
- the stage 10 may be moved up and down and the frame 16 is fixed, or both the stage 10 and the frame 16 are moved up and down. It may be configured to. The point is that the stage 10 and the frame 16 may move relative to each other.
- FIG. 9 is a partial cross-sectional side view showing the peeling apparatus in the second embodiment.
- 10 is a partial cross-sectional side view showing the operation of the peeling apparatus of FIG.
- the plate-like flexible member 30, the plurality of pads 40, the plurality of rods 60, the plurality of driving devices 70, and the like are arranged on one side of the laminate 100.
- the plate-like flexible member 30, the plurality of pads 40, the plurality of rods 60, the plurality of driving devices 70, and the like are arranged on both sides of the laminate 100.
- the peeling device of the present embodiment has a plate-like flexible member 30 ⁇ / b> A, a plurality of pads 40 ⁇ / b> A, a plurality of rods 60 ⁇ / b> A, a plurality of pieces on one side of the laminate 100.
- a driving device 70 and the like are arranged, and a plate-like flexible member 30B, a plurality of pads 40B, a plurality of rods 60B, a plurality of driving devices 70B and the like are arranged on the other side of the laminated body 100.
- the flexible member 30 ⁇ / b> A is a member attached to one main surface 104 of the laminate 100.
- the flexible member 30 ⁇ / b> B is a member attached to the other main surface 102 of the laminate 100.
- the plurality of pads 40A are fixed to the surface opposite to the laminated body 100 side on the flexible member 30A.
- the plurality of pads 40B are fixed to the surface of the flexible member 30B opposite to the laminated body 100 side.
- the plurality of pads 40A are connected to any of the plurality of rods 60A via any of the plurality of joints 50A, and the center line X of the connected rods 60A and the surface of the reinforcing sheet 120 on the glass substrate 110 side. It can be rotated around the intersection P and the center.
- the plurality of pads 40B are connected to any of the plurality of rods 60B via any of the plurality of joints 50B, and the center line Y of the connected rods 60B and the reinforcing sheet 120 side on the glass substrate 110 are connected. It is possible to rotate around the vicinity of the intersection Q with the surface.
- a coil spring 52A is interposed between the pad 40A and the joint 50A in a slightly contracted state. By the restoring force of the coil spring 52A, rattling of the connecting portion between the pad 40A and the rod 60A can be eliminated.
- a coil spring 52B is interposed between the pad 40B and the joint 50B in a slightly contracted state. By the restoring force of the coil spring 52B, rattling of the connecting portion of the pad 40B and the rod 60B can be eliminated.
- the plurality of drive devices 70A are controlled by one control device 80, and the plurality of rods 60A are arranged for each rod 60A. It is for extending and contracting in the axial direction.
- One driving device 70A is installed for each rod 60A.
- the plurality of driving devices 70A are coupled to the frame 16A via any one of the plurality of cushion members 14A.
- the plurality of driving devices 70B are for expanding and contracting the plurality of rods 60B in the axial direction for each rod 60B under the control of one control device 80.
- One driving device 70B is installed for each rod 60B.
- the plurality of driving devices 70B are coupled to the frame 16B via any one of the plurality of cushion members 14B.
- the control device 80 is configured by a microcomputer or the like, and controls the positions of the plurality of rods 60A for each rod 60A and controls the positions of the plurality of rods 60B for each rod 60B. As shown in FIGS. 9 and 10, the control device 80 positions the plurality of rods 60 ⁇ / b> A so that the reinforcing sheet 120 is sequentially bent and deformed from the position where the initial peeling is performed (the position where the peeling blade 20 is inserted). While controlling, the position of the some rod 60B is controlled so that the glass substrate 110 may bend and deform sequentially from the position which performed the initial peeling. In this manner, the glass substrate 110 and the reinforcing sheet 120 are bent and deformed in directions opposite to each other to perform peeling. The glass substrate 110 and the reinforcing sheet 120 may be bent and deformed substantially symmetrically or may be bent and deformed asymmetrically.
- the glass substrate 110 and the reinforcing sheet 120 may be broken and damaged.
- the degree of bending deformation is small, the glass substrate 110 and the reinforcing sheet 120 are peeled off substantially in parallel, so that the force for peeling increases and it becomes difficult to peel off.
- both the glass substrate 110 and the reinforcing sheet 120 are bent and deformed in directions opposite to each other. Therefore, compared with a case where either one is held flat and the other is bent and deformed, 110 and the reinforcing sheet 120 are unlikely to be substantially parallel. For this reason, breakage can be suppressed effectively or peeling force can be reduced.
- the radius of curvature of the peeling region is substantially set as compared with the case where either one is held flat and the other is bent and deformed. By setting it to 2 times, breakage can be effectively suppressed while keeping the peeling force equal.
- the radius of curvature of the separation region is set to be substantially the same as when either one is held flat and the other is bent and deformed.
- FIG. 11A to FIG. 11F are process diagrams showing a peeling method according to the second embodiment.
- the peeling blade 20 is inserted between the reinforcing sheet 120A of the laminate 100 and the glass substrate 110A to perform initial peeling.
- the flexible member 30A is sequentially bent and deformed from one end side, and the reinforcing sheet 120A is sequentially bent from the one end side (from the position where the initial peeling has been performed). Deform.
- the flexible member 30B is sequentially bent and deformed from one end side, and the glass substrate 110A is sequentially bent and deformed from one end side (from the position where the initial peeling has been performed). In this way, the entire reinforcing sheet 120A is peeled off from the glass substrate 110A.
- the frame 16A After peeling off the reinforcing sheet 120A, the frame 16A is raised to a predetermined position, and after removing the vacuum suction by the one flexible member 30A, the reinforcing sheet 120A is removed. Next, the flexible member 30A is lowered and pressed against the glass substrate 110A. Thereafter, the glass substrate 110A is vacuum-adsorbed on the flexible member 30A. In this state, as shown in FIG. 11 (d), the flexible member 30A and the flexible member 30B are flat.
- the peeling blade 20 is inserted between the reinforcing sheet 120B and the glass substrate 110B to perform initial peeling.
- the flexible member 30B is bent and deformed sequentially from one end side, and the reinforcing sheet 120B is sequentially moved from one end side (from the position where the initial peeling has been performed). Bend and deform.
- the flexible member 30A is sequentially bent and deformed from one end side, and the glass substrate 110B is sequentially bent and deformed from one end side (from the position where the initial peeling has been performed). In this way, the entire surface of the reinforcing sheet 120B is peeled from the glass substrate 110B.
- the reinforcing sheets 120A and 120B can be easily peeled from the laminate 100, and damage during peeling can be suppressed.
- the frame 16B is fixed and the frame 16A is moved up and down, but the frame 16B may be moved up and down and the frame 16A is fixed, or both the frame 16B and the frame 16A are moved up and down. It may be configured to. In short, any structure may be used as long as the frame 16B and the frame 16A move relatively.
- 12 (a) to 12 (f) are process diagrams showing a peeling method according to the third embodiment.
- the peeling blade 20 is inserted between the reinforcing sheet 120A of the laminate 100 and the glass substrate 110A to perform initial peeling.
- the flexible member 30A is bent and deformed sequentially from one end side, and the reinforcing sheet 120A is moved from one end side.
- the entire surface is peeled off from the glass substrate 110A by bending and deforming sequentially (from the position where the initial peeling is performed).
- peeling is performed so that the radius of curvature of the peeling region is 250 mm to 2500 mm, more preferably 500 mm to 1000 mm, in the vicinity of the peeling front of the reinforcing sheet 120A.
- the damage in the case of peeling can be suppressed.
- the flexible member 30A After peeling off the reinforcing sheet 120A, the flexible member 30A is raised to a predetermined position, and after releasing the vacuum suction by the flexible member 30A, the reinforcing sheet 120A is removed. Next, the flexible member 30A is lowered and pressed against the glass substrate 110A. Thereafter, the glass substrate 110A is vacuum-adsorbed on the flexible member 30A. In this state, as shown in FIG. 12D, the flexible member 30A and the flexible member 30B are flat.
- the peeling blade 20 is inserted between the reinforcing sheet 120B and the glass substrate 110B to perform initial peeling.
- the flexible member 30B is bent and deformed sequentially from one end side, and the reinforcing sheet 120B is moved to the one end side. From (from the position where the initial peeling is performed), the entire surface is peeled off from the glass substrate 110B by bending and deforming sequentially.
- peeling is performed so that the radius of curvature of the peeling region is 250 mm to 2500 mm, more preferably 500 mm to 1000 mm, in the vicinity of the peeling front of the reinforcing sheet 120B.
- the damage in the case of peeling can be suppressed.
- the reinforcing sheets 120A and 120B can be easily peeled from the laminate 100, and damage during peeling can be suppressed.
- the reinforcing sheets 120A and 120B are sequentially bent and deformed from one end side to be peeled off, but the present invention is not limited to this.
- the reinforcing sheets 120A and 120B may be sequentially bent and deformed from both end sides and peeled off.
- the frame 16B is fixed and the frame 16A is moved up and down.
- the frame 16B may be moved up and down and the frame 16A is fixed, or both the frame 16B and the frame 16A are moved up and down. It may be configured to. In short, any structure may be used as long as the frame 16B and the frame 16A move relatively.
- the initial peeling is performed using the peeling blade 20, but the present invention is not limited to this.
- the initial peeling may be performed by spraying compressed air or liquid.
- the peeling device is a device for peeling the reinforcing sheet 120 attached to the glass substrate 110, but the present invention is not limited to this.
- the peeling apparatus may be an apparatus that peels a reinforcing sheet attached to a substrate such as a silicon wafer, a metal substrate, or a plastic substrate.
- a substrate such as a silicon wafer, a metal substrate, or a plastic substrate.
- a material of a metal substrate For example, stainless steel, copper, etc. are mentioned.
- the material for the plastic substrate is not particularly limited, and examples of the transparent resin include polyethylene terephthalate resin, polycarbonate resin, polyethersulfone resin, polyethylene naphthalate resin, polyacrylic resin, polysilicone resin, and transparent fluororesin.
- the opaque resin examples include polyimide resin, fluorine resin, polyamide resin, polyaramid resin, polyether ketone resin, polyether ether ketone resin, and various liquid crystal polymer resins.
- polyimide resin, fluororesin, polyamide resin, polyaramid resin, polyethersulfone resin, polyetherketone resin, polyetheretherketone resin, polyethylene naphthalate resin, various liquid crystal polymer resins and the like are preferable. . Since these materials have a 5% weight loss temperature by heating of 300 ° C. or higher, a thin film transistor (TFT) or the like can be formed over the substrate. A more preferable 5% heating weight loss temperature is 350 ° C. or higher.
- TFT thin film transistor
- any of the above glass substrates is applicable in terms of heat resistance.
- More preferable plastic substrates from the viewpoint of heat resistance include polyimide resin, fluororesin, polyamide resin, polyaramid resin, polyethersulfone resin, polyetherketone resin, polyetheretherketone resin, polyethylene naphthalate resin, various liquid crystal polymer resins, etc. Is exemplified.
- the substrate may be a laminated substrate in which the same material or different materials are laminated, such as a glass substrate, a silicon wafer, a metal plate, and a plastic substrate.
- a laminated body of a glass substrate and a plastic substrate a laminated body in which plastic substrates, glass, and a plastic substrate are laminated in this order, two or more glass substrates, or a laminated body of two or more plastic substrates may be used.
- the reinforcing sheet 120 is made of only the glass sheet 121 or made of the glass sheet 121 and the resin layer 122 formed on the glass sheet 121, but the present invention is limited to this.
- a silicon wafer, a metal sheet, or a plastic sheet may be used instead of the glass sheet 121.
- a metal sheet For example, stainless steel, copper, etc. are mentioned.
- the material of the plastic sheet is not particularly limited.
- polyimide resin, fluororesin, polyamide resin, polyaramid resin, polyethersulfone resin, polyetherketone resin, polyetheretherketone resin, polyethylene naphthalate resin, various liquid crystal polymer resins and the like are preferable. . Since these materials have a 5% weight loss temperature by heating of 300 ° C. or higher, a thin film transistor (TFT) or the like can be formed over the substrate. A more preferable 5% heating weight loss temperature is 350 ° C. or higher.
- TFT thin film transistor
- Example 1 (Production of reinforcing sheet) A glass sheet having a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm (Asahi Glass Co., Ltd., AN100) was alkali-cleaned, ultrasonically cleaned with pure water, and then dried by applying IPA vapor at 80 ° C. for 10 minutes.
- a glass substrate having a length of 350 mm, a width of 300 mm and a thickness of 0.3 mm was washed with alkali and pure water, and then dried by applying IPA vapor at 80 ° C. for 10 minutes.
- the dried glass substrate and the reinforcing sheet were attached by a press device in a vacuum, and the glass substrate and the silicone resin layer were adhered to each other.
- Two sets of glass substrates / reinforcing sheets bonded in this way were prepared, and the glass substrates were bonded together with a double-sided tape to produce a laminate.
- This laminate has a configuration in which a reinforcing sheet, a glass substrate, a double-sided tape (adhesive layer), a glass substrate, and a reinforcing sheet are sequentially arranged.
- the adhesive layer replaces the liquid crystal layer 130 shown in FIG. (Peel test)
- the laminate was peeled using the peeling device shown in FIGS. Specifically, the first main surface of the laminate was vacuum-adsorbed on the stage 10 and the flexible member 30 was vacuum-adsorbed on the second main surface of the laminate.
- the peeling blade 20 is inserted between the reinforcing sheet on the second main surface side of the laminate and the glass substrate to perform initial peeling, and the plurality of rods 60 are moved for each rod 60 to be a flexible member. 30 was bent and deformed sequentially from one end side, and the reinforcing sheet was sequentially bent and deformed from one end side (from the position where the initial peeling was performed) to peel the entire surface from the glass substrate.
- Table 1 shows the radius of curvature R of the peeling region in the vicinity of the peeling front of the reinforcing sheet, together with the result of the peeling test.
- the average moving speed of the peeling front of the reinforcing sheet was set to 0.4 m / second.
- Example 1 the reinforcing sheet after peeling was not damaged.
- Example 2 and 3 and Comparative Examples 1 and 2 a reinforcing sheet was prepared by preparing a laminate and pasting it on a glass substrate in the same manner as in Example 1 except that the radius of curvature R was changed to the conditions described in Table 1. Was peeled off. The results are shown in Table 1.
- the glass sheet which is a reinforcing sheet, has a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm (Asahi Glass Co., Ltd., AN100) washed with alkali, ultrasonically washed with pure water, and then subjected to IPA at 80 ° C. A product which was dried by applying steam for 10 minutes was used.
- Example 7 In Example 7, except that a reinforcing sheet made of a glass sheet (Asahi Glass Co., Ltd., AN100) having a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm was attached to a polyethylene terephthalate resin plate having a thickness of 0.1 mm, A laminate was produced in the same manner as in Example 3, and the reinforcing sheet attached to the polyethylene terephthalate resin plate was peeled off. No damage was observed on the reinforcing sheet after peeling.
- a reinforcing sheet made of a glass sheet Asahi Glass Co., Ltd., AN100
- Example 8 a reinforcing sheet made of a glass sheet having a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm (manufactured by Asahi Glass Co., Ltd., AN100) is attached to a stainless steel substrate (SUS304) having a mirror finish of 0.1 mm.
- a laminate was prepared in the same manner as in Example 3 except that the reinforcing sheet was attached to the stainless steel substrate. No damage was observed on the reinforcing sheet after peeling.
- Example 9 In Example 9, a reinforcing sheet made of a glass sheet (Asahi Glass Co., Ltd., AN100) having a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm was applied to a polyimide substrate (manufactured by Toray DuPont, Kapton 200HV). A laminate was prepared in the same manner as in Example 3 except that the reinforcing sheet was attached, and the reinforcing sheet attached to the polyimide substrate was peeled off. No damage was observed on the reinforcing sheet after peeling.
- Example 10 In Example 10, first, a glass substrate (Asahi Glass Co., Ltd., AN100, non-alkali glass substrate) having a length of 350 mm, a width of 300 mm, a plate thickness of 0.08 mm, and a linear expansion coefficient of 38 ⁇ 10 ⁇ 7 / ° C. was used. The surface was cleaned with an alkaline detergent. Further, a 0.1% methanol solution of ⁇ -mercaptopropyltrimethoxysilane was sprayed on the surface of the glass substrate, followed by drying at 80 ° C. for 3 minutes to prepare a laminated glass film.
- a glass substrate Asahi Glass Co., Ltd., AN100, non-alkali glass substrate having a length of 350 mm, a width of 300 mm, a plate thickness of 0.08 mm, and a linear expansion coefficient of 38 ⁇ 10 ⁇ 7 / ° C. was used. The surface was cleaned with an alkaline detergent. Further, a 0.1% m
- a plasma-treated surface of a polyimide substrate (manufactured by Toray DuPont, Kapton 200HV) having a length of 350 mm, a width of 300 mm, and a thickness of 0.05 mm was prepared.
- stacking and the said polyimide substrate were piled up, both were laminated
- Lamination is performed in the same manner as in Example 3 except that a reinforcing sheet made of a glass sheet (Asahi Glass Co., Ltd., AN100) having a length of 350 mm, a width of 300 mm, and a thickness of 0.4 mm is attached to the resin surface of the glass / resin laminate substrate.
- a body was prepared, and the reinforcing sheet attached to the glass / resin laminated substrate was peeled off. No damage was observed on the reinforcing sheet after peeling.
- the present invention it is possible to provide a peeling apparatus that can easily peel a reinforcing sheet attached to a substrate and can easily cope with a change of a peeling target.
- Support unit (stage) DESCRIPTION OF SYMBOLS 20 Peeling blade 30 Flexible member 32 Attachment part 34 Regulation
Abstract
Description
前記基板及び前記補強シートを含む積層体の一方の主面を支持する支持ユニットと、
前記積層体の他方の主面に取付けられる板状の可撓性部材と、
前記可撓性部材上の前記積層体側と反対側の面に固定された複数のパッドと、
前記複数のパッドのいずれかに連結された複数のロッドと、
前記複数のロッドをロッド毎に軸方向に移動させるための複数の駆動装置と、
前記複数のロッドの位置をロッド毎に制御する制御装置とを備え、
前記複数のパッドは、複数の継手のいずれかを介して、前記複数のロッドのいずれかに連結され、前記連結されたロッドの中心線と、前記補強シート上の前記基板側の面又は前記基板上の前記補強シート側の面との交点近傍を中心として回動可能とされており、
前記支持ユニットにより前記積層体の一方の主面を支持すると共に、前記積層体の他方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御する剥離装置に関する。
また本発明は、基板に貼り付けられた補強シートを剥離する剥離装置において、
前記基板及び前記補強シートを含む積層体の両方の主面に取付けられる板状の可撓性部材と、
前記可撓性部材上の前記積層体側と反対側の面に固定された複数のパッドと、
前記複数のパッドのいずれかに連結された複数のロッドと、
前記複数のロッドをロッド毎にロッドの軸方向に移動させるための複数の駆動装置と、
前記複数のロッドの位置をロッド毎に制御する制御装置とを備え、
前記複数のパッドは、複数の継手のいずれかを介して、前記複数のロッドのいずれかに連結され、前記連結されたロッドの中心線と、前記補強シート上の前記基板側の面又は前記基板上の前記補強シート側の面との交点近傍を中心として回動可能とされており、
前記積層体の一方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御し、他方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御する剥離装置に関する。
(第1実施形態)
図1は、第1実施形態における剥離装置を示す一部断面側面図である。図2は、図1の剥離装置の動作を示す一部断面側面図である。
剥離刃20は、初期剥離を行うためのものであって、手動又は適当な駆動装置により、ガラス基板110と補強シート120との間に刺入される。例えば、剥離刃20は、積層体100の角部においてガラス基板110と補強シート120との間に刺入され、ガラス基板110と補強シート120との界面に沿って所定量移動される。
シリコーンゴムの代わりに、シリコーンゲルを用いることも可能であるが、この場合、積層体100に取付けた取付部32を取外す際に、シリコーンゲルが凝集破壊して積層体100に付着することがある。
図9は、第2実施形態における剥離装置を示す一部断面側面図である。図10は、図9の剥離装置の動作を示す一部断面側面図である。
複数の駆動装置70Aは、1つの制御装置80による制御下で、複数のロッド60Aをロッド60A毎に軸方向に伸縮させるためのものである。駆動装置70Aは、ロッド60A毎に1つずつ設置されている。複数の駆動装置70Aは、複数のクッション部材14Aのいずれかを介して、フレーム16Aに連結されている。一方、複数の駆動装置70Bは、1つの制御装置80による制御下で、複数のロッド60Bをロッド60B毎に軸方向に伸縮させるためのものである。駆動装置70Bは、ロッド60B毎に1つずつ設置されている。複数の駆動装置70Bは、複数のクッション部材14Bのいずれかを介して、フレーム16Bに連結されている。
本実施形態では、図9に示す剥離装置を用いて剥離を行うが、剥離装置の動作が異なる。
この場合、耐熱性の点では上記したガラス基板はどれも当てはまる。
耐熱性の観点でより好ましいプラスチック基板としては、ポリイミド樹脂、フッ素樹脂、ポリアミド樹脂、ポリアラミド樹脂、ポリエーテルスルホン樹脂、ポリエーテルケトン樹脂、ポリエーテルエーテルケトン樹脂、ポリエチレンナフタレート樹脂、各種液晶ポリマー樹脂等が例示される。
また、基板はガラス基板、シリコンウェハ、金属板、プラスチック基板等、同じ材質、または異なる材質を積層した積層基板であってもよい。例えば、ガラス基板とプラスチック基板の積層体、プラスチック基板、ガラス、プラスチック基板の順に積層した積層体、2枚以上のガラス基板同士、あるいは2枚以上のプラスチック基板同士の積層体などでもよい。
[実施例1]
(補強シートの作製)
縦350mm、横300mm、厚さ0.4mmのガラスシート(旭硝子社製、AN100)をアルカリ洗浄し、純水で超音波洗浄した後、80℃のIPA蒸気を10分間あてて乾燥を行った。乾燥後のガラスシート上に、付加反応型の液状シリコーン(信越シリコーン社製、KNS-320A)100質量部と白金系触媒(信越シリコーン社製、CAT-PL-56)2質量部との混合物をスピンコータにより塗工した(塗工量30g/m2)。次いで、180℃にて10分間大気中で加熱硬化して、ガラスシートとシリコーン樹脂層とからなる補強シートを作製した。
(ガラス基板と補強シートの貼り付け)
縦350mm、横300mm、厚さ0.3mmのガラス基板(旭硝子社製、AN100)をアルカリ洗浄、純水洗浄した後、80℃のIPA蒸気を10分間あてて乾燥を行った。乾燥後のガラス基板と補強シートとを真空中でプレス装置により貼り付け、ガラス基板とシリコーン樹脂層とを密着させた。
(積層体の作製)
このようにして貼り合わせたガラス基板/補強シートを2組用意し、ガラス基板同士を両面テープにより貼り合わせて積層体を作製した。この積層体は、補強シート、ガラス基板、両面テープ(接着剤層)、ガラス基板、補強シートが順次配置された構成である。尚、接着剤層は、図5に示す液晶層130に代わるものである。
(剥離試験)
上記積層体を、図1、図2に示す剥離装置を用いて剥離した。具体的には、積層体の第1主面をステージ10上に真空吸着し、積層体の第2主面に可撓性部材30を真空吸着した。
[実施例2~3、比較例1~2]
実施例2~3、比較例1~2では、曲率半径Rを表1に記載の条件に変更した以外は、実施例1と同様に、積層体を作製し、ガラス基板に貼り付けた補強シートを剥離した。結果を表1に示す。
[実施例4~6、比較例3~4]
実施例4~6、比較例3~4では、補強シートとして、ガラスシートのみを用い、曲率半径Rを表1に記載の条件に変更した以外は、実施例1と同様に、積層体を作製し、ガラス基板に貼り付けた補強シートを剥離した。結果を表1に示す。
実施例7では、縦350mm、横300mm、厚さ0.4mmのガラスシート(旭硝子社製、AN100)からなる補強シートを、厚さ0.1mmのポリエチレンテレフタラート樹脂板に貼り付けた以外は、実施例3と同様に積層体を作製し、ポリエチレンテレフタラート樹脂板に貼り付けた補強シートを剥離した。剥離後の補強シートに破損は認められなかった。
実施例8では、縦350mm、横300mm、厚さ0.4mmのガラスシート(旭硝子社製、AN100)からなる補強シートを、厚さ0.1mmの鏡面処理を施したステンレス基板(SUS304)に貼り付けた以外は、実施例3と同様に積層体を作製し、ステンレス基板に貼り付けた補強シートを剥離した。剥離後の補強シートに破損は認められなかった。
実施例9では、縦350mm、横300mm、厚さ0.4mmのガラスシート(旭硝子社製、AN100)からなる補強シートを、厚さ0.05mmのポリイミド基板(東レ・デュポン製、カプトン200HV)に貼り付けた以外は、実施例3と同様に積層体を作製し、ポリイミド基板に貼り付けた補強シートを剥離した。剥離後の補強シートに破損は認められなかった。
実施例10では、初めに縦350mm、横300mm、板厚0.08mm、線膨張係数38×10-7/℃のガラス基板(旭硝子社製、AN100、無アルカリガラス基板)を、洗浄装置を用いてアルカリ洗剤で洗浄を行い、表面を清浄化した。さらにガラス基板表面にγ-メルカプトプロピルトリメトキシシランの0.1%メタノール溶液を噴霧し、続いて80℃で3分乾燥させ、積層用ガラスフィルムとして準備した。一方で、縦350mm、横300mm、板厚0.05mmのポリイミド基板(東レ・デュポン社製、カプトン200HV)の表面をプラズマ処理した物を準備した。そして、前記積層用ガラスフィルムと前記ポリイミド基板とを重ね合わせ、320℃に加熱したプレス装置を用いて両者を積層し、ガラス/樹脂積層基板とした。
縦350mm、横300mm、厚さ0.4mmのガラスシート(旭硝子社製、AN100)からなる補強シートを、前記ガラス/樹脂積層基板の樹脂面に貼り付けた以外は、実施例3と同様に積層体を作製し、ガラス/樹脂積層基板に貼り付けた補強シートを剥離した。剥離後の補強シートに破損は認められなかった。
本出願は、2009年8月31日出願の日本特許出願2009-200914に基づくものであり、その内容はここに参照として取り込まれる。
20 剥離刃
30 可撓性部材
32 取付部
34 規定部
40 パッド
50 球面継手
60 ロッド
70 駆動装置
80 制御装置
100 積層体
110 ガラス基板
120 補強シート
121 ガラスシート
122 樹脂層
124 剥離領域
126 未剥離領域
128 剥離前線
Claims (9)
- 基板に貼り付けられた補強シートを剥離する剥離装置において、
前記基板及び前記補強シートを含む積層体の一方の主面を支持する支持ユニットと、
前記積層体の他方の主面に取付けられる板状の可撓性部材と、
前記可撓性部材上の前記積層体側と反対側の面に固定された複数のパッドと、
前記複数のパッドのいずれかに連結された複数のロッドと、
前記複数のロッドをロッド毎にロッドの軸方向に移動させるための複数の駆動装置と、
前記複数のロッドの位置をロッド毎に制御する制御装置とを備え、
前記複数のパッドは、複数の継手のいずれかを介して、前記複数のロッドのいずれかに連結され、前記連結されたロッドの中心線と、前記補強シート上の前記基板側の面又は前記基板上の前記補強シート側の面との交点近傍を中心として回動可能とされており、
前記支持ユニットにより前記積層体の一方の主面を支持すると共に、前記積層体の他方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御する剥離装置。 - 前記継手は、球面継手である請求項1に記載の剥離装置。
- 前記複数の駆動装置は、複数のクッション部材のいずれかを介して、1つのフレームに連結される請求項1又は2に記載の剥離装置。
- 前記駆動装置は、サーボモータである請求項1~3のいずれか一項に記載の剥離装置。
- 前記可撓性部材は、前記積層体の他方の主面に取外し可能に取付けられる取付部、及び前記可撓性部材の曲げ剛性を規定する規定部により構成される請求項1~4のいずれか一項に記載の剥離装置。
- 前記取付部は、ゴムからなる請求項5に記載の剥離装置。
- 前記補強シートは、少なくともガラスシートを含む請求項1~6のいずれか一項に記載の剥離装置。
- 前記基板上の前記補強シート側と反対側の面に、電子デバイス用部材が形成されている請求項1~7のいずれか一項に記載の剥離装置。
- 基板に貼り付けられた補強シートを剥離する剥離装置において、
前記基板及び前記補強シートを含む積層体の両方の主面に取付けられる板状の可撓性部材と、
前記可撓性部材上の前記積層体側と反対側の面に固定された複数のパッドと、
前記複数のパッドのいずれかに連結された複数のロッドと、
前記複数のロッドをロッド毎にロッドの軸方向に移動させるための複数の駆動装置と、
前記複数のロッドの位置をロッド毎に制御する制御装置とを備え、
前記複数のパッドは、複数の継手のいずれかを介して、前記複数のロッドのいずれかに連結され、前記連結されたロッドの中心線と、前記補強シート上の前記基板側の面又は前記基板上の前記補強シート側の面との交点近傍を中心として回動可能とされており、
前記積層体の一方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御し、他方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御する剥離装置。
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JP2013056774A (ja) | 2013-03-28 |
TW201119864A (en) | 2011-06-16 |
CN102202994B (zh) | 2014-03-12 |
JP5155454B2 (ja) | 2013-03-06 |
KR101254418B1 (ko) | 2013-04-15 |
TWI436892B (zh) | 2014-05-11 |
JPWO2011024689A1 (ja) | 2013-01-31 |
US20110198040A1 (en) | 2011-08-18 |
TWI400166B (zh) | 2013-07-01 |
US8360129B2 (en) | 2013-01-29 |
KR20110063693A (ko) | 2011-06-13 |
TW201311455A (zh) | 2013-03-16 |
JP5445663B2 (ja) | 2014-03-19 |
CN102202994A (zh) | 2011-09-28 |
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