KR20020055444A - 절삭공구용 경질피막, 경질피막 피복 절삭공구,경질피막의 제조방법 및 경질피막 형성용 타겟 - Google Patents
절삭공구용 경질피막, 경질피막 피복 절삭공구,경질피막의 제조방법 및 경질피막 형성용 타겟 Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S264/00—Plastic and nonmetallic article shaping or treating: processes
- Y10S264/91—Sintering to produce translucent inorganic article
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12785—Group IIB metal-base component
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Abstract
Description
Claims (20)
- (Ti1-a-b-c-d, Ala, Crb, Sic, Bd)(C1-eNe)로 이루어진 경질피막으로서,0.5≤a≤0.8, 0.06≤b, 0≤c≤0.1, 0≤d≤0.1, 0≤c+d≤0.1, a+b+c+d<1 및 0.5≤e≤1(a, b, c 및 d는 각각 Al, Cr, Si 및 B의 원자비를 나타내고, e는 N의 원자비를 나타낸다. 이하 동일)인 것을 특징으로 하는 절삭공구용 경질피막.
- 제 1 항에 있어서,상기 c의 값이 0을 초과하는 절삭공구용 경질피막.
- 제 1 항에 있어서,상기 a 및 b의 값이 0.02≤1-a-b≤0.30, 0.55≤a≤0.765 및 0.06≤b, 또는 0.02≤1-a-b≤0.175, 0.765≤a 및 4(a-0.75)≤b인 절삭공구용 경질피막.
- 제 3 항에 있어서,상기 (c+d)의 값이 0인 절삭공구용 경질피막.
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서,상기 e의 값이 1인 절삭공구용 경질피막.
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서,결정 구조가 암염 구조형을 주체로 하는 것인 절삭공구용 경질피막.
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서,θ-2θ법에 의한 X선 회절로 측정되는 암염 구조형의 (111)면, (200)면 및 (220)면의 회절선 강도를 각각 I(111), I(200) 및 I(220)으로 할 때, 이들 값이 하기 수학식 1 및/또는 수학식 2와 수학식 3을 만족시키는 절삭공구용 경질피막.수학식 1I(220)≤I(111)수학식 2I(220)≤I(200)수학식 3I(200)/I(111)≥0.1
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서,Cu의 Kα선을 이용한 θ-2θ법에 의한 X선 회절로 측정되는 암염 구조형의 (111)면의 회절선의 회절 각도가 36.5 내지 38.0°의 범위내에 있는 절삭공구용 경질피막.
- 제 8 항에 있어서,상기 (111)면의 회절선의 반값 폭이 1° 이하인 절삭공구용 경질피막.
- 제 1 항 내지 제 4 항중 어느 한 항에 기재된 절삭공구용 경질피막이 피복된 경질피막 피복 절삭공구.
- 제 1 항 내지 제 4 항중 어느 한 항에 기재된 절삭공구용 경질피막의 제조방법으로서, 성막 가스 분위기중에서 금속을 증발시켜 이온화하고, 상기 금속과 함께 성막 가스의 플라즈마화를 촉진시키면서 성막하는 것을 특징으로 하는 절삭공구용 경질피막의 제조방법.
- 제 11 항에 있어서,타겟을 구성하는 금속의 증발 및 이온화를 아크 방전으로 수행하는 아크 이온 플레이팅법에서, 상기 타겟의 증발면에 거의 직교하여 전방으로 발산 내지 평행하게 진행하는 자력선을 형성하고, 이 자력선에 의해 피처리체 근방에서의 성막 가스의 플라즈마화를 촉진시키면서 성막하는 절삭공구용 경질피막의 제조방법.
- 제 12 항에 있어서,상기 피처리체에 인가하는 바이어스 전위가 어스 전위에 대하여 -50V 내지 -400V인 절삭공구용 경질피막의 제조방법.
- 제 12 항 또는 제 13 항에 있어서,성막시의 상기 피처리체 온도를 300℃ 이상 800℃ 이하로 하는 절삭공구용 경질피막의 제조방법.
- 제 12 항 또는 제 13 항에 있어서,성막시의 반응 가스의 분압 또는 전압을 0.5㎩ 이상 7㎩ 이하로 하는 절삭공구용 경질피막의 제조방법.
- Ti, Al, Cr, Si 및 B로 이루어지고, 상대 밀도가 95% 이상인 것을 특징으로 하는 경질피막 형성용 타겟.
- 제 16 항에 있어서,(Ti1-x-y-z-w, Alx, Cry, Siz, Bw)로 이루어지되, 0.5≤x≤0.8, 0.06≤y, 0≤z≤0.1, 0≤w≤0.1, 0≤z+w≤0.1 및 x+y+z+w<1(x, y, z 및 w는 각각 Al, Cr, Si 및 B의 원자비를 나타낸다. 이하 동일)인 경질피막 형성용 타겟.
- 제 16 항 또는 제 17 항에 있어서,상기 타겟중에 존재하는 구멍의 크기가 반경 0.3㎜ 미만인 경질피막 형성용 타겟.
- 제 16 항 또는 제 17 항에 있어서,산소 함유량이 0.3 질량% 이하이고, 수소 함유량이 0.05 질량% 이하이고, 염소 함유량이 0.2 질량% 이하인 경질피막 형성용 타겟.
- 제 16 항 또는 제 17 항에 있어서,Cu 함유량이 0.05 질량% 이하이고, Mg 함유량이 0.03 질량% 이하인 경질피막 형성용 타겟.
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
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JP2000402555 | 2000-12-28 | ||
JPJP-P-2000-00402555 | 2000-12-28 | ||
JP2001185464 | 2001-06-19 | ||
JP2001185465 | 2001-06-19 | ||
JPJP-P-2001-00185465 | 2001-06-19 | ||
JPJP-P-2001-00185464 | 2001-06-19 | ||
JPJP-P-2001-00287587 | 2001-09-20 | ||
JP2001287587A JP4112834B2 (ja) | 2000-12-28 | 2001-09-20 | 切削工具用硬質皮膜を形成するためのターゲット |
JP2001310562A JP4112836B2 (ja) | 2001-06-19 | 2001-10-05 | 切削工具用硬質皮膜を形成するためのターゲット |
JPJP-P-2001-00310562 | 2001-10-05 |
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KR1020050059351A Division KR100653001B1 (ko) | 2000-12-28 | 2005-07-01 | 절삭공구용 경질피막, 경질피막 피복 절삭공구, 경질피막의제조방법 및 경질피막 형성용 타겟 |
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KR20020055444A true KR20020055444A (ko) | 2002-07-08 |
KR100632610B1 KR100632610B1 (ko) | 2006-10-09 |
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KR1020010087082A KR100632610B1 (ko) | 2000-12-28 | 2001-12-28 | 절삭공구용 경질피막, 경질피막 피복 절삭공구,경질피막의 제조방법 및 경질피막 형성용 타겟 |
KR1020050059351A KR100653001B1 (ko) | 2000-12-28 | 2005-07-01 | 절삭공구용 경질피막, 경질피막 피복 절삭공구, 경질피막의제조방법 및 경질피막 형성용 타겟 |
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KR1020050059351A KR100653001B1 (ko) | 2000-12-28 | 2005-07-01 | 절삭공구용 경질피막, 경질피막 피복 절삭공구, 경질피막의제조방법 및 경질피막 형성용 타겟 |
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US (3) | US6824601B2 (ko) |
EP (4) | EP1992717B1 (ko) |
KR (2) | KR100632610B1 (ko) |
CN (2) | CN100460114C (ko) |
AT (3) | ATE343659T1 (ko) |
AU (2) | AU780899B2 (ko) |
CA (3) | CA2551155C (ko) |
DE (2) | DE60124061T2 (ko) |
ES (1) | ES2273772T3 (ko) |
IL (3) | IL167082A (ko) |
PT (1) | PT1219723E (ko) |
TW (1) | TW570989B (ko) |
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KR100783990B1 (ko) * | 2003-05-30 | 2007-12-07 | 유니온쓰루 가부시키가이샤 | 절삭공구용 경질피막 |
KR100837031B1 (ko) * | 2006-02-03 | 2008-06-10 | 가부시키가이샤 고베 세이코쇼 | 경질 피막 및 이의 성막 방법 |
US7695829B2 (en) | 2006-09-21 | 2010-04-13 | Kobe Steel, Ltd. | Hard film and hard film-coated tool |
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KR20130006667A (ko) * | 2010-03-29 | 2013-01-17 | 쿄세라 코포레이션 | 절삭 공구 |
KR20170118872A (ko) * | 2015-03-27 | 2017-10-25 | 가부시키가이샤 탕가로이 | 피복절삭공구 |
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KR100783990B1 (ko) * | 2003-05-30 | 2007-12-07 | 유니온쓰루 가부시키가이샤 | 절삭공구용 경질피막 |
KR100837031B1 (ko) * | 2006-02-03 | 2008-06-10 | 가부시키가이샤 고베 세이코쇼 | 경질 피막 및 이의 성막 방법 |
US7695829B2 (en) | 2006-09-21 | 2010-04-13 | Kobe Steel, Ltd. | Hard film and hard film-coated tool |
KR100986883B1 (ko) * | 2006-09-21 | 2010-10-08 | 가부시키가이샤 고베 세이코쇼 | 경질막 및 경질막 코팅된 공구 |
US8043728B2 (en) | 2007-01-17 | 2011-10-25 | Kobe Steel, Ltd. | Hard coating film for forming tool and forming tool |
KR20130006667A (ko) * | 2010-03-29 | 2013-01-17 | 쿄세라 코포레이션 | 절삭 공구 |
KR20170118872A (ko) * | 2015-03-27 | 2017-10-25 | 가부시키가이샤 탕가로이 | 피복절삭공구 |
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