NL2023484B1 - Saw blade or other cutting tool comprising a coating - Google Patents

Saw blade or other cutting tool comprising a coating Download PDF

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Publication number
NL2023484B1
NL2023484B1 NL2023484A NL2023484A NL2023484B1 NL 2023484 B1 NL2023484 B1 NL 2023484B1 NL 2023484 A NL2023484 A NL 2023484A NL 2023484 A NL2023484 A NL 2023484A NL 2023484 B1 NL2023484 B1 NL 2023484B1
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Netherlands
Prior art keywords
layer element
layer
layers
coating
aluminum
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NL2023484A
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Dutch (nl)
Inventor
Schröder Werner
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Knight Acquisition B V
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Publication date
Application filed by Knight Acquisition B V filed Critical Knight Acquisition B V
Priority to NL2023484A priority Critical patent/NL2023484B1/en
Priority to CN202080049172.1A priority patent/CN114080469B/en
Priority to MX2022000148A priority patent/MX2022000148A/en
Priority to EP20740437.7A priority patent/EP3997254B1/en
Priority to CA3143943A priority patent/CA3143943A1/en
Priority to US17/624,892 priority patent/US20220281013A1/en
Priority to PCT/NL2020/050461 priority patent/WO2021006739A1/en
Priority to JP2021578231A priority patent/JP7550179B2/en
Application granted granted Critical
Publication of NL2023484B1 publication Critical patent/NL2023484B1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

The invention provides a cutting tool (1) comprising a coating (10) on a substrate (5), wherein the coating (10) comprises a first layer element (20), wherein the first layer element (20) has an overall composition comprising the metal elements aluminum, chromium, titanium, and silicon, wherein the first layer element (20) comprises one or more first layer element layers (21), wherein each of the first layer element layers (21) comprises a nitride layer, wherein aluminum is available in the first layer element (20) with at least 68 at.% relative to a total of the metal elements, and wherein silicon is available in the range of 0.5-2 at.% relative to the total of the metal elements.

Description

Saw blade or other cutting tool comprising a coating P1600115NL00
FIELD OF THE INVENTION The invention relates to an article, especially a cutting tool, comprising a coating, a method for providing a coating at an article, and a (tribological) coating per se.
BACKGROUND OF THE INVENTION Cutting tools comprising a wear resistance coating are known in the art. EP 3228726 describes, e.g., a coated cutting tool comprising a body and a coating deposited by PVD on the body, wherein the body comprises cemented carbide, cermet, ceramics, polycrystalline diamond, polycrystalline cubic boron nitride based materials or a high speed steel, and wherein the coating comprises a first layer (2) of (Ti1xAlx)N where 0.3<x<0.7, and a second layer of (TipqAlpSig)N where 0.15<p<0.45, and 0.05<q<0.20, wherein the second layer is deposited outside the first layer as seen in a direction from the body.
SUMMARY OF THE INVENTION Cutting, drilling, and milling tools often comprise a protective coating. The coating 1s provided for protecting the tool material (substrate or body) against mechanical, thermal and chemical loads. The coating is, e.g., applied for extending the tool life and/or minimize the friction during tooling, which again may extend the tool life; and at the same time may reduce the cutting force needed. Coatings may be used to improve tribological properties, such as friction and wear of tools for cutting and (metal) forming and may also be used to improve properties of machine elements e.g. sliding bearings, seals and valves. Such coatings, especially improving properties of an article that is relatively moved to a further element, may also be called “tribological coatings” Tribological coatings may be relatively thin (e.g. up to 10 or 20 um, or even less) such that still the substrate material may play a role in friction and wear performance. Tribological coatings, further referred to as “coatings” may be provided to a substrate by means of chemical vapor deposition or physical vapor deposition.
These coatings are also classified as gaseous coatings, as the deposited material is applied from the gas phase. The required properties of a coating may be determined by the tooling conditions such as tool speed, material to be tooled, temperature, cutting geometry, et cetera. Especially, the material to be tooled, the speed of the tool and a relative movement of the material with respect to the tool may be most relevant factors for the wear of the tool and the resulting temperature at the tool surface.
The coating may be configured for counter acting this wear, by means of providing a hard protection cover, which has a lower wear rate than the substrate; providing a thermal barrier, for lowering the temperature rise of the substrate; providing a chemical barrier, for minimizing the exchange of components between the substrate and the metal being cut; lowering the friction coefficient with the work piece, for lowering the frictional forces during tooling, which on its turn will lead to less heat being generated and a lower wear rate In cutting tools, thin hard coatings on softer, tough substrates have often resulted in the extension of tool life of ten times and more.
Various coating structures have been developed throughout the years.
The simplest coating structure is called a monolithic structure, especially comprising a single functional layer.
Many different coatings are known in the art having many different compositions and substructure.
The first-generation titanium nitride (TiN), titanium carbonitride (TiCN) and zirconium nitride (ZrN), as well as later developed titanium aluminum nitride (TiAIN) and aluminum chromium nitride (AICrN) coating layers and nanostructured layers are all referred to as monolithic coatings.
Multilayer coatings are also known and consist of a combination of monolithic coatings that essentially differ in functionality, i.e. one layer type especially increasing the hardness, while the other layer may lower the friction coefficient.
These various layers are commonly bound together by an interlayer to improve the adhesion of the two layers, and to prevent crack propagation in a direction of the substrate.
Nanocomposite structures may comprise a mixture of various components in a single layer.
Normally, the substrate is first covered by an interface (or base) layer to improve the adherence of the coating structure on the substrate.
A top layer often finishes the structure.
A top layer may e.g. be configured for having a lower friction coefficient that the functional layer, so that at the start of the tooling a more even wear may be obtained.
Herein, the coating may further be explained based on a (circular) saw blade comprising the coating.
It is however noted that the coating may be a functional coating e.g. to improve wear and/or lower friction, that may be provided to all kinds of tools or machine parts.
The coating may, e.g., be provided to a cutting tool, a drilling tool, or a milling tool.
Hence, the tool of the invention comprising such coating may, e.g., be a saw blade, a tool bit, a router bit, a drill, etc.. Such tool may at least partly be covered by the coating.
As discussed above, different coatings are known that may be applied to different kinds of tools or machine parts.
In the table below, some coating substructure compositions for cutting tools are listed with their respective properties: Substructure composition | Hardness Friction coefficient | Maximum temperature eT Wo me few fw TaN fw fee fw aT fw for fw oon (mw fos fw Preferably, the coating has a high hardness, a low friction coefficient and is stable at very high temperatures.
The harder the coating, the lower the wear will be.
Especially, when cutting high tensile strength steels, hard coatings may be needed.
The temperature rise during cutting may especially determine whether the coating will hold its properties.
At high cutting speeds, insufficient cooling (directly or via the material that is cut) may result in a high temperature of (the surface of) the tool.
Coatings with a relatively low temperature stability may then not hold their properties.
A low friction coefficient may help to prevent the temperature rise to a certain extent, acting as a lubricant.
Since decades studies have been focusing on improving (the tribological properties of) the coating.
Yet, still many coatings seem to suffer from high friction and/or high wear.
Articles and tools having the coatings already may show cracks or loose part of the coating after a limited period of operation.
Today still the tooling branch is further looking for higher productivity and more efficient production.
Therefore, there is still a need for further improved coatings that may be applied for a longer period and/or at higher speeds and as such may lower the downtime and/or increase the productivity.
Hence, it is an aspect of the invention to provide an alternative article, especially an alternative (cutting) tool, comprising a coating, which preferably further at least partly obviates one or more of above-described drawbacks.
Moreover it is an object of the invention to provide a (tribological) coating, especially the coating comprised by the article, which preferably further at least partly obviates one or more above described drawback.
The invention further provides a method for providing a (tribological) coating, especially the coating of the invention, on a substrate, especially of a cutting tool, which preferably further at least partly obviates one or more of above-described drawbacks.
The present invention may have as object to overcome or ameliorate at least one of the disadvantages of the prior art, or to provide a useful alternative.
The coating of the invention may show less wear after use compared to prior art solutions.
The coating (and article) may have a longer (tool) life.
The coating may provide a lower friction when being used.
The material being tooled may (therefore) heat up in a lesser extend compared to prior art solutions.
The article/tool comprising the coating may be used for an extended period before it needs replacement compared to prior art tools.
The tool may allow tooling at higher speeds compared to prior art tools.
Hence, the article and/or tool may improve productivity and efficiency and may lower times required to change the tool.
Therefore, in a first aspect, the invention provides an article, especially a (cutting) tool, comprising a coating (on a substrate), wherein the coating comprises a first layer element, wherein the first layer element has an overall composition comprising the metal elements (and/or metalloid elements) aluminum, chromium, titanium, and silicon, wherein the first layer element comprises one or more (stacked) first layer element layers, especially wherein each of the first layer element layers comprises a nitride layer.
Especially, in the first layer element, the aluminum is available with at least 68 at.% relative to a total of the metal elements.
Especially, (in the first layer element) silicon is available in the range of 0.5-2 at.% relative to the total of the metal elements.
The coating is especially a tribological coating.
In a further aspect, the invention provides the coating per se.
The term “substrate” may especially relate to a body of the article and/or tool comprising the coating.
The substrate may thus comprise characteristics configured for the (final) article.
The substrate may e.g. comprise an uncoated (part of a) (roller) bearing or an uncoated drill bit.
The substrate may comprise an (uncoated) tool, such as an uncoated (circular) saw blade.
The substrate may comprise an uncoated tooth, tip or insert of a saw blade to be coated.
The coating may in embodiments comprise a thickness in the micrometer range. A total coating thickness of the coating may in embodiments, e.g., be selected from the range of 1.5-12 um, especially from the range of 3-8 pum (see further below).
Therefore, dimensions of the substrate especially substantially are the same as dimensions of the (final) article/tool. Furthermore, the substrate may comprise (a material 5 comprising) cemented carbide such as tungsten carbide, titanium carbide, or tantalum carbide. In further embodiments, the substrate may comprise high speed steel. The dimensions and the material of the substrate are especially selected for providing the article/tool.
Hence, in embodiments, the (article or) tool is a cutting tool, such as a saw blade, a tool bit, a router bit or a drill. Especially, the cutting tool is a (circular) saw blade. The cutting tool may in further embodiments be a tooth or an insert or a tip of a sawblade, especially of a circular saw blade. The cutting tool may be a tungsten carbide tipped cutting tool.
Hence, in embodiments, the first layer element comprises (consist of) one first element layer. In further embodiments, the first layer element comprises a plurality of first layer element layers. In a specific embodiment, the first layer element layer comprises a number Ny, of first layer element layers. The plurality of first layer element layers are especially configured on top of (and contacting) each other, i.e. in a stacked configuration, especially wherein the respective (successive) layers at least partly cover each other. If the first layer element, for example, comprises Nuy first layer element layers, the 2 first layer element layer may be configured at (and contacting) the 1% first layer element layer, and especially at least partly covering the 1* first layer element layer; the 3™ first layer element layer (if present) may be configured at (and contacting) the 2™ first layer element layer, and especially at least partly covering the 2 first layer element layer; … , and the Nay‘? first layer element layer may be configured at (and contacting) the Niy-1 first layer element layer, and (especially) at least partly covering the Nu,-1'? first layer element layer.
Herein the term first layer element layer may relate to a plurality of (different) first layer element layers. Also the terms “base layer element layer”, “top layer element layer”, “intermediate layer element layer”, and optional other layer element(s) (layer) may relate to a plurality of (different) base layer element layers, (different) top layer element layers, and (different) intermediate layer element layer, and optional other layer element (layer), respectively (see further below).
The first layer element has an overall composition comprising the elements aluminum, chromium, titanium, and silicon, herein also indicates as “Al”, “Cr”, “Ti”, and “St”, respectively. In specific embodiments (also) each of the first layer element layers comprises the metal elements aluminum, chromium, titanium, and silicon.
Silicon may commonly be recognized as a metalloid. Yet, silicon (Si) may also be recognized as a metal element. Herein, Si may be indicated as a metal element for clarity reasons. Thus, the term “metal element” may also refer to metal elements and metalloid elements. Especially, the phrase “the metal elements Al, Cr, Ti, and Si” and comparable phrases may also refer to “the metal elements Al, Cr and Ti, and the metalloid element Si”.
Hence, the first layer element comprises the metal elements Al, Cr, Ti, and Si. Al, Cr, Ti, and Si are not necessarily the only metal (and/or metalloid) elements in the first layer element (or in the first layer element layer(s)). The first layer element (layer(s)) may comprise a (small) amount of other metal elements and/or metalloid elements. Such as at maximum 10 at.%, especially at maximum 5 at.%, even more especially at maximum 1 at.%, such as at maximum 0.5 at.%, or at maximum 0.1 at.% (1000 ppm), of the total of the metal elements (and metalloid elements) (of the first layer element layer). In embodiments, the first layer element (layer(s)) may comprise impurities, such as other metal elements (or metalloid elements) in the range of a few ppm or even a few ppb to 10000 ppm (of the total of the metal elements (and metalloid elements).
In the first layer element (layer(s)), the metals may primarily be present as nitrides. The terms “nitrides” are especially related to compounds comprising the nitride anion and one or more of the cations of the metal elements (or metalloid element). The anions and cations may form different complexes and/or crystal structures. The nitrogen/nitride content is preferably close to stoichiometric but may vary in the range of about 80%-110% from stoichiometry. Yet, at least a part of the nitrogen may be present not bound to the metal elements, especially at high operating pressures. This unbound nitrogen is generally assumed to have a negative effect on the properties of the coating. Preferably, less than 1 at.% of nitrogen present in the coating is not bound to a metal element.
The layers may e.g. additionally comprise some carbon and/or oxygen, e.g. in concentrations between 0 and 2 at.%. Herein, the “names” of the layers referred to may be based on the composition of the compounds. Hence, if a nitride layer substantially consists of the metal elements metal 1 (M1), metal 2 (M2),.., and metal n (Mn), the layer may be referred to as a “metal 1 metal 2 ... metal n nitride” layer or (M1 M2... Mn)N layer. Thus, the nitride layer comprising the elements Al, Ti, Cr, and Si, may be referred to as an aluminum chromium titanium silicon nitride/(AICrTiSi)N layer. Moreover, such layers may (also) be referred to as a nitride layer comprising AICrTiSi. Likewise, an aluminum titanium nitride layer refers to a nitride layer comprising substantially only the metal elements aluminum and titanium. Such layer may also be indicated as (AITi)N.
Moreover, some of the layer elements of the coating, especially the top layer element, (see below) may comprise a carbonitride layer. Also carbonitride may form complexes with the metal elements, e.g., comparable to nitride. Hence, a layer may be referred to as a “metal 1 metal 2 ... metal n carbonitride” layer or (M1 M2... Mn)CN or) if a carbonitride layer substantially consists of the metal elements metal 1 (M1), metal 2 (M2),.., and metal n (Mn).
The first layer element comprises a nitride layer of AICrTiSi. The content of the different metal elements relative to each other may further be indicated by subscripts, such as in the next formulas Al,CryTi:S1q and (Al.CryTicSia)N. In such notation the subscripts indicate the fractions or ratios of a specific metal element (atoms) relative to the total metal elements (atoms). Such notation is known to the person skilled in the art.
Moreover, the phrase “wherein the first layer element has an overall composition comprising the metal elements (and/or metalloid elements) aluminum, chromium, titanium, and silicon” may relate to the first layer element comprising (Al;CrpTicSig)N. A phrase like (in the first layer element,) the aluminum is available with at least 68 at.% relative to a total of the metal elements, wherein (in the first layer element) silicon is available in the range of
0.5-2 at.% relative to the total of the metal elements may thus also be formulated as the first layer element comprising (Al.CrpTicSig)N, wherein a > 0.68 and 0.005<d<0.02 Hence, in specific embodiments, the first layer element comprises (Al4CroTicSig)N, wherein a > 0.68. In further embodiments, the first layer element comprises (Al.CrpTicSig)N, wherein 0.5<d<2.
Furthermore, because additional metal elements are not excluded (in the first layer element) a+b+c+d <1 (in the first layer element), especially a+b+c+d is at least 0.9, especially at least 0.95, even more especially at least 0.99.
Herein the term “at.%” or atomic percent is used. The atomic percent (normally) gives the percentage of one kind of atom relative to the total number of atoms. Herein, the atomic percent (at.%) is especially used in relation to the metal elements (only). The at.% as used herein especially refers to the percentage of atoms of the respective metal element relative to the total metal elements in the respective element concerned. For instance, if the concerned element is the first layer element and it is described that “the first layer element comprises (or has available) 70 at.% of aluminum”, this especially refers to the fact that the first layer element comprises 70 atoms of the specific metal element per every 100 atoms of all metal atoms (including aluminum) in the first layer element. For instance, if it is described herein that the first layer element layer comprises a nitride layer comprising (the metal elements) aluminum, titanium, chromium and silicon, wherein the first layer element layer comprises at least 70 at.% aluminum (or wherein aluminum is available with at least 70 at.%) (relative to the total of metal elements) than at least 70% of the total of the metal atoms (of aluminum, titanium, chromium, and silicon, and optionally any further metal element) are aluminum atoms (irrespectively of the number of nitrogen atoms in the first layer element layer).
Herein, also the term “content”. That term may especially also refer to a number of atoms or ions (of the respective metal) relative to a total number of atoms, elements or ions etc., (especially referring to at.%) and thus being independent from a size or thickness of the layer or a weight of any of the other metal elements. The content may be expressed in at.%, and especially relative to the total of metal elements.
In further embodiments, aluminum is available in the first layer element (layer(s)) with at least 70 at.%, such as at least 72 at.%, more especially at least 72.5 at.% (relative to the total of metal elements available in the first layer element layer(s)). Especially, aluminum is available in the first layer element (layer(s)) with equal to or less than 80 at.%, such as equal to or less than least 78 at.%, more especially equal to or less than 77 at.%, such as equal to or less than 75 at.% (relative to the total of metal elements available in the first layer element layer(s)).
Hence, in further embodiments, the first layer element (layer(s)) comprises (the) (ALCrpTiSig)N, wherein a > 0.70, such as >0.72. especially >0.725, and especially ¢<0.80, such as <0.78, especially <0.77, such as <0.75.
Hence, especially aluminum is available in the first layer element with a maximum of 80 at.% relative to the total of the metal elements.
Titanium may further especially be available in the first layer element, especially in the first layer element layer(s), with at least 4 at.%, such as at least 5 at.%, relative to the total ofthe metal elements. Hence, in embodiments, ¢ > 0.04 in (the) (AL.CrpTi.Sig)N of the first layer element (layer(s)). In further embodiments c>0.05, such as > 0.07, especially > 0.08 in (AlaCrsTicSig)N of the first layer element (layer(s)). The content of titanium in the first layer element (layers(s)) is especially equal to or lower than 15 at.%, such as equal to or lower than 13 at.%, especially equal to or lower than 11 at.% (relative to the total of the metal elements in the first layer element (layer(s))). Hence, in further embodiments, the first layer element (layer(s)) comprise (the) (Al.CrsTicSig)N, wherein ¢<0.15, especially <0.13, such as <0.11; such as 0.05<c<0.11.
In further embodiments, chromium is available in the first layer element with a maximum of 22 at.%, especially at maximum 20 at.%, such as equal to or less than 18 at.%
relative to the total of the metal elements. The first layer element (layers(s)) may further comprise at least 10 at.%, such as at least 11 at.%, even more especially at least 12 at.%, such as at least 13 at.% chromium. Hence, chromium may be available in the first layer element (layer(s)) with an atomic percent selected from the range of 10-22 at.%, especially 12-21 at.%, even more especially 13-20 at.%.
Hence, in further embodiments, the first layer element (layer(s)) comprises (the) (Al:CryTicSig)N, wherein b<0.22, especially <0.20, such as <0.18. The first layer element (layer(s)) may especially comprises (the) (AlaCrTieSia)N, wherein b> 0.10, especially > 0.11, such as > 0.13. such as 0.10<b<0.22, especially 0.11<b<0.21, even more especially
0.13<b=<0.2.
The presence of silicon in the first layer element (layer(s)) may provide an improved wear resistance of the coating. Yet, experimentally it was observed than under a minimum content of silicon no significant effect may be shown. Furthermore, also silicon contents higher than a specific maximum silicon content did not seem to have a positive effect or even could in embodiments have a negative effect on the wear characteristics of the coating. Preferably, silicon is available with at least 0.5 at.%, such at least 0.6 at.%, especially at least
0.7 at.% in the first layer element (relative to the total of the metal elements in the first layer element). Moreover, in specific embodiments, silicon is available in the first layer element) at a maximum of 2 at.%, such at a maximum of 1.9 at.%, especially at a maximum of 1.7 at.% (relative to the total of the metal elements in the first layer element). Hence, the first layer element especially comprises at least 0.5 at.%, such as at least 0.7 at.%, such as selected from the range of 0.5-2 at.%, especially from the range of 0.6-1.9 at.%, even more especially in the range of 0.7-1.7 at.%. Especially, also the silicon content (in at.%o) in the first layer element layer (s) may be in the ranges described (above) in relation to the first layer element. Yet, in specific embodiments the silicon content (in at.%) in at least one of the first layer element layers may be higher than the values described in relation to the first layer element. In further embodiments at least one of the first layer element layers may be lower than the values described in relation to the first layer element (but especially larger than 0 at.%).
Hence, in further embodiments, the first layer element (layer(s)) comprises (the) (AlaCrpTicSig)N, wherein d<0.02, especially <0.019, such as <0.017. The first layer element (layer(s)) may especially comprises (the) (AlsCrsTicSig)N, wherein d > 0.005 especially >0.006, such as >0.007. such as 0.005<d<0.02, especially 0.006<d<0.019, even more especially 0.007<d<0.017.
The above described embodiments depicting the different percentages may especially be combined. For instance, in an embodiment, the first layer element (layer(s)) comprise (Al.CrpTicSig)N, wherein 0.72<a<0.77, 0.13<b<0.2, 0.05<c<11, and 0.07<d<0.017. Especially, with such composition provided durable coatings have been produced In a specific embodiment, in the first layer element (layer(s)), aluminum is available in the range of 72-77 at.%, titanium is available in the range of 5-11 at.%, chromium is available in the range of 13-20 at.%, and silicon is available in the range of 0.7-1.7 at.% (wherein all at.% are defined relative to the total of the metal elements in the first layer element (layer(s))). Hence, it may be understood that in such embodiment 72-77 percent of the metal atoms Al, Cr, Ti, and Si (plus any optional further metal atoms) in the first layer element (layer(s)) are aluminum atoms. It further will be understood that a total of aluminum, chromium, titanium and silicon available in the first layer element layer(s)) is equal to or less than 100 at.%. In embodiments, the total of the metal elements chromium and titanium may be available in the range of about 20-30 at.%, especially 21-27 at.%, even more especially 22- 26 at.%, in the first layer element (layer(s)). The first layer element is especially a functional layer element, especially improving the durability of the coating.
In further embodiments, the coating may comprise further layer elements. The coating may, e.g., comprise a base layer element arranged between the substrate and the first layer element, and may be configured for adhering the first layer element to the substrate.
Additionally or alternatively, the coating may comprise a top layer element, arranged over, especially covering, the first layer element, especially at an exterior side of the article and/or (cutting) tool. The top layer element may especially be configured for lowering the friction between the article (tool) and a material contacting the article (tool), such as a material being cut by a cutting tool. The top layer element may especially comprise carbon to lower the friction coefficient. In further embodiments, the top layer element is configured for allowing a recoating of the article/tool and/or to increase chemical resistance of the article. These different layer elements may comprise (only) one respective layer element layer. Yet, at least one of these different layers, especially both layer elements, may in embodiments comprise a plurality of (stacked) respective layer elements layers. Hence, in embodiments, at least one of the top layer element layers comprises a carbonitride layer. The top layer element layer(s) may further comprise a nitride layer. Moreover, in embodiments, at least the top layer element layer configured most remote from the substrate may comprise a nitride layer (configured for enabling recoating).
To further improve the adherence between the substrate and the first layer element, the composition of the base layer element layers may (gradually) (layer-by-layer) change in the base layer element in a direction from the substrate to the first layer element. The (composition of the) base layer element layer configured contacting the substrate may be selected for a good adherence to the substrate. The (composition of the) base layer element layer contacting the first layer element may be configured for a good adherence to the first layer element. In the base layer element, especially the aluminum content (as expressed in at.%) may increase in successive layers (in the direction form the substrate to the first element layer) of the base layer element.
Therefore, in further embodiments, an aluminum content of an upper base layer element layer configured closest to, especially contacting, the first layer element, is higher than the aluminum content in a lower base layer element layer configured closest to, especially contacting, the substrate. Like for the other contents, the aluminum content is especially expressed in at.% (relative to the total of metal elements in the respective base layer element layer) (see also above).
Hence, in embodiments, the coating further comprises (i) a base layer element arranged between the substrate and the first layer element and/or (ii) a top layer element arranged over (covering) the first layer element (at an exterior side of the article /tool), wherein the base layer element comprises one or more base layer element layers, especially wherein any one of the base layer element layers comprises a nitride layer comprise chromium nitride and/or aluminum-chromium-nitride, and wherein the top layer element comprises one or more top layer element layers, especially wherein any one of the top layer element layers comprises (1) a nitride layer comprising chromium and/or aluminum, such as CrN and/or (AICr)N or (ii) a carbonitride layer comprising chromium and/or aluminum, such as CrCN and/or (AICr)CN.
The base layer element may further comprise a base layer element thickness (of the base layer element) selected from the range of 0.1-2 um, such as 0.2-1.2 um. The top layer element may comprise a top layer element thickness (of the top layer element) selected from the range of 0.1-2 um, such as 0.2-1.2 pm. In embodiments, a thickness of the first layer element may be selected from the range of 1-12 um, especially from the range of 2-7 um.
In further embodiments, a total coating thickness of the coating (including -if present- any base layer element, top layer element, intermediate layer element or further layer element) may be selected from the range of 1.5-12 um, such as 3-10 um, especially 3-8 um.
Herein also the term “functional layer (element)” may be used in relation to the first layer element (layer). Yet, in embodiments, the coating may comprise at least one further functional layer (element). It will be understood that the coating may also further comprise (any) further layer. The further (functional) layer may be arranged between the first layer element and the substrate. Additionally or alternatively, the further (functional) layer may be arranged further remote from the substrate than the first layer element, such as between the first layer element and the top layer element. The further (functional) layer essentially has another composition than the first layer element layer(s)). The further (functional) layer may, e.g., not comprise all metal elements from the group of Al, Ti, Cr, and Si, or the content of said elements may differ from the contents of these elements in the embodiments of the first layer element as described herein. The further (functional) layer may comprise further metal elements and/or further non-metal elements.
In yet further embodiments, the coating may comprise more than one first layer element, especially wherein an intermediate layer element is configured between (at least two) successive first layer elements. The coating may comprise, e.g., two, three, four, six or ten first layer elements. The coating may comprise even more first layer elements. At least a part of the plurality of first elements are especially configured sandwiching an intermediate layer element. The different first layer elements may differ from each other, e.g., in thickness and composition. Hence, the term first layer element may relate to a plurality of (different) first layer elements.
The intermediate layer element may thus (also) comprise the further (functional) layer. Additionally or alternatively, the intermediate layer element comprises an intermediate layer element layer comprising a nitride layer (i.e. an “intermediate layer element nitride layer”) of one or more of the metal elements described herein. The intermediate layer element layer may especially substantially not comprise silicon. The intermediate layer element layer may e.g. comprise less than 0.01 at.% of the metal element silicon, relative to the total of the metal elements in the intermediate layer element layer. Yet in embodiments, the intermediate layer element may comprise silicon (especially wherein the intermediate layer element layer(s) is a further (functional) layer).
The intermediate layer element (layer(s)) may e.g. comprise one or more of (AITICr)N, (AIT)N, (AICr)N. In other embodiments, the intermediate layer element (layer) may comprise (TiCr)N. The intermediate layer element layer may further comprise other metal elements such as V, Co, Zr, W, Ta, Mo, Cu. The intermediate layer may in embodiments comprise a carbonitride layer. The intermediate layer element layer may be rather thin. A thickness of the intermediate layer element may e.g. be selected from the range of 0.05-0.5 wm. In further embodiments, the intermediate layer element (layer) may comprise a thickness as described in relation with the first layer element (layer). Hence, in a further embodiment, the coating comprises more than one first layer element, wherein an intermediate layer element is arranged between at least two of the first layer elements, wherein the intermediate layer element comprises an intermediate layer element layer, wherein the intermediate layer element layer comprises a nitride layer comprising one or more of the metal elements selected from the group consisting of aluminum, titanium and chromium, especially wherein the nitride layer comprises one or more of aluminum titanium nitride, chromium nitride and aluminum chromium nitride.
Experimentally, it was further found that coatings comprising a first layer element with a plurality of (stacked) first layer element layers, having different compositions may (further) positively affect the lifetime of the article, especially of the cutting tool. Yet, each of the different first layer element layers may (still) comprise the metal elements aluminum, chromium, titanium, and silicon. The ratio between the different metal elements (in the different first layer element layers) may be selected to be different in at least one of the first layer element layers compared to the other first layer element layer(s). The first layer element layers may therefore comprise at least two different types of first layer element layers, wherein the different type of first layer element layers have a different composition.
The different types of first layer element layers may especially all comprise (Al:CryTicSig)N. Especially, at least part of the fractions (of the different metal elements) (the subscripts) a, b, c‚ and d may in a first type of the different types of (first layer element) layers differs from the once of a second type of the different types of the layers. Especially, the content of silicon (or the value of the subscript d in the above given formulas) may be selected to differ in different types of the first layer element layers. In embodiment, each first layer element layer may differ in composition from the other first layer element layers. Therefore, the first layer element comprising Nu, first layer element layers, may especially comprise (two) up to Nyy different types of first layer element layers. In further embodiments the first layer element layer comprises 2-15, such as 2-10, especially 2-7, different types of first layer element layers. The term “first type”, “second type”, or any “further type”, etc. in relation with the different types of first layer element layers may especially relate to a plurality of the first type and/or the second type and/or the further type, etc. of the different types of first layer element layers.
The terms “tool life” and “lifetime” especially relate to a total time the article may be used (under normal conditions) before it is worn out (and must be replaced).
In further embodiments, arrangements or sets of two or more different types of first layer element layers may be provided in the first layer element, and especially the arrangements may be stacked to provide the first layer element. In embodiments, the first layer element may e.g. comprise repeating (stacked) subsets (or arrangements) of the first layer element layers.
Hence, in further embodiments, the first layer element comprises a plurality of first layer element layers, wherein any one of the first layer element layers comprises the metal elements aluminum, chromium, titanium, and silicon, and wherein the first layer element layers comprise at least two different types of layers, wherein the different types of the layer at least differ in a silicon content. A first type of the (different) layers may have a highest silicon content Csi (in at.%) (relative to a total of the metal elements (in said layer)), and a second type of the (different) layers may have a lowest silicon content Csir (in at.%) (relative to a total of the metal elements ( in said layer)). In embodiments, a ratio of the lowest silicon content CsiL to the highest silicon content Csix may, e.g., be selected from the range of
0.1=Csit/Csin<0.9, more especially from the range of 0.25<Cgi1/Csin<0.9. In further embodiments, the ratio Cs;1/Csim may be 0.4-0.6. The silicon content (Csir and Csin) is especially expressed herein in at.% (see further below). For instance, in an embodiment (CsiL is 0.7 at.% and Csix is 1.4 at.%. and the ratio Csi/Csin equals 0.5.
In further embodiments, the plurality of first layer elements layers comprises a number subsN of (stacked) subsets of the first layer elements layers, wherein subsw is at least 2, and wherein at least 2, especially each, of the subsets comprises the first type of the (different) layers and the second type of the (different) layers. In embodiments the first type ofthe layers and/or the second type of the layers of different subsets may comprise a different Csiz and/or Csi. The term “lowest silicon content” and “highest silicon content” may relate to a plurality of (different) lowest silicon contents and highest silicon contents.
A subset thickness of each of the subsets may be equal to or smaller than 0.5 um. It appears that especially the last described embodiments may be advantageously by applied at some cutting tools.
It has been found that cutting tools having a plurality of (stacked) first layer element layers, may be less sensitive to wear. Additionally, it may be beneficial if the stacked first layer elements comprise (a number of) different compositions. It is hypothesized that the different layers may absorb different kinds of impact (in direction, temperature, friction, etc.)
and may differ in their tendency to adhere to the material being cut and as such together may be less sensitive to wear. Herein the term “different” in relation to a layer, especially relates to layers having a different composition. Hence, in a further specific embodiment, the invention provides the article or (cutting) tool comprising a coating (on a substrate), wherein the coating comprises a first layer element, wherein the first layer element has an overall composition comprising the metal elements aluminum, wherein the first layer element comprises a number Nia; of (stacked) first layer element layers, wherein Niay is at least 2, wherein at least two, especially each, of the first layer element layers comprises a nitride layer comprising the metal elements aluminum, chromium, titanium, and silicon, especially wherein each of the first layer element layers comprise the metal elements aluminum, chromium, titanium and silicon, and wherein the Niay (stacked) first layer element layers comprise at least two different types of layers, wherein the different types of layer at least differ in a silicon content, especially wherein a first type of the (different) layers has a highest silicon content Csix, (at.%) relative to a total of the metal elements, and wherein a second type of the (different) layers has a lowest silicon content Csip(at.%), relative to a total of the metal elements, especially wherein a ratio of the lowest silicon content Csi to the highest silicon content Csiu is selected from the range of
0.1<CsiL/Csiu<0.9, especially 0.25<Cs;1./Csin<0.9. In a further aspect, the invention provides a method for producing a (cutting) tool comprising a coating, especially the coating described herein (by PVD). The method especially comprises applying physical vapor deposition (“PVD”) (techniques), more especially cathodic arc evaporation. The method especially comprises providing a substrate into a vacuum chamber of a physical vapor deposition (“PVD”) oven. The vacuum chamber may comprise a number Catn of metal cathodes. Such number may be any number, such as 1, 2, 3, 4, 10, 16, 20, 40, etc.. The number Catx is at least 1, especially at least 2. Especially, the (number Catx of) metal cathodes (together) are configured for providing at least part of the desired coating. Moreover, especially at least a subset (of the number Catn) of cathodes may be configured for providing the first layer element. Hence, in embodiments, at least a subset of the number Caty of metal cathodes together comprise the metal elements aluminum, chromium, titanium, and silicon, especially in a concentration to provide the first element layer described herein. Other cathodes (of the number of metal cathodes) may comprise further metal elements. In specific embodiments, aluminum is available with at least 67 at.% relative to a total of the metal elements, and silicon is available in the range of 0.5-2 at.% relative to the total of the metal elements, in (at least the subset of) the number Catx of metal cathodes (together). The method further comprises depositing the coating at the substrate (by physical vapor depositing, especially in a depositing stage). During depositing (in the depositing stage) especially a gas atmosphere comprising nitrogen and/or a carbon containing gas, especially a nitrogen containing gas, is provided in the vacuum chamber.
Furthermore (during depositing) an evaporation current to the cathodes, especially in the range of 40-150 A is applied (to vaporize part of the cathode), and especially while depositing a bias voltage, such as in the range of 30-300 V, may be applied to the substrate (to force positively charged metal ions to the substrate), to provide the coating to the substrate.
In the depositing stage, the substrate may be rotated along a rotation axis.
The coating is especially deposited (or “grown”) layer- by-layer (or nano layer by nanolayer (see below)). Hence, the method especially further comprises depositing the coating at the substrate (in the vacuum chamber) by physical vapor deposition, while providing one or more of (i) a nitrogen comprising gaseous fluid and (ii) a carbon comprising gaseous fluid, especially at least the nitrogen comprising fluid, in the vacuum chamber, and while rotating the substrate, to provide the coating, especially comprising the first layer element as defined herein.
The term “gaseous fluid” especially relates to a gas.
Furthermore, in the depositing stage a vacuum pressure is created in the vacuum chamber such as lower than 10 Pa and especially at least 1.0 Pa, e.g., in the range of 1.5-8 Pa.
In embodiments, the vacuum pressure is at least 1.0 Pa.
In further embodiments, the vacuum pressure is equal to or lower than 8 Pa, especially equal to and lower than 5 Pa, such as equal to and lower than 2.5 Pa.
In further, the vacuum pressure is selected to be at least 1.5 Pa, such as at least 2.5 Pa, especially at least 5 Pa.
Especially, by using a vacuum of at least 2.5 Pa good results have been obtained.
Further, especially at temperature in the vacuum chamber is controlled, such as at a temperature of 300-600 °C.
In embodiments, the bias voltage is selected from the range of 50-100 V.
The evaporation current may be selected for each of the metal cathodes independently from the other cathodes.
For instance, a first cathode may be provided with a current of less than 100 A., whereas a further (or second) cathode may be provided with a current of more than 100 A.
Even more especially, the first cathode may be provided with a current > 100 A. and the second or further with a current <100 A. for providing a 1* first layer element layer, and successively the current to the first cathode may be set to < 100 A. and, especially, the current to the second or further cathode may be set to >100 A. for providing a further first layer element layer having another composition.
Hence, in embodiments, a variable (evaporation) current is provided to the metal cathodes.
The evaporation current to respective cathodes may especially be changed during depositing the coating.
The method especially comprises selecting the metal cathodes and processing conditions to provide the first layer element.
The term “processing conditions” 1s known and comprises for instance the evaporation current (to the cathodes), the bias voltage, the temperature (in the chamber), the pressure (in the chamber), a speed of rotation (of the substrate), a processing time, et cetera.
Hence, the depositing stage especially comprises depositing the coating at the substrate by physical vapor deposition, wherein one or more of (i) a nitrogen comprising gaseous fluid and (in) a carbon comprising gaseous fluid, especially at least the nitrogen comprising gaseous fluid, is provided in the vacuum chamber during depositing, and especially wherein the substrate is rotated during depositing to provide the coating.
The substrate may in embodiments be rotated around a central axis of the vacuum chamber.
The depositing stage may comprise successively depositing one or more of the base layer element (described herein), the first layer element (described herein), and the top layer element (described herein). The depositing stage may further comprise depositing a further (functional) layer (element) before or after any of the above-mentioned layer elements.
The coating may be provided comprising the first layer element comprising one or more (stacked) first layer element layers, wherein each of the first layer element layers comprises a nitride layer, wherein the first layer element has an overall composition comprising the metal elements aluminum, chromium, titanium, and silicon, especially wherein aluminum is available with at least 68 at.% relative to a total of the metal elements, and especially wherein silicon is available in the range of 0.5-2 at.% relative to the total of the metal elements.
During depositing, especially during depositing the first layer element, the nitrogen comprising gaseous fluid may be provided (wherein especially no carbon comprising gaseous fluid is provided in the vacuum chamber). During depositing any other layer element, especially during depositing the top layer element, the carbon containing gaseous fluid may also be provided to the vacuum chamber.
The method may further comprise cleaning of the substrate (in the vacuum chamber) prior to the depositing stage.
The metal cathodes, or “targets”, may be selected for providing the coating of the invention.
As such, at least a subset of the metal cathodes may comprise a single metal element selected from the group of aluminum, chromium, titanium, and silicon.
Additionally or alternatively, the cathodes may comprise a combination of the different metal elements. Many different options to select a cathode for providing the coating described herein are possible. It will be clear to the person skilled in the art how to operate a PVD oven.
The metal cathodes are especially selected to provide the coating described herein.
The cathodes not necessarily need to have the same composition as the final coating may have. Aluminum that is evaporated may, e.g., be deposited in a larger amount relative to other evaporated metal elements. Therefore, an overall composition of the (subset) of cathodes used for providing the first layer element may be selected to having a lower aluminum content than the final deposited first layer element may have. For depositing 74 at.% Al, e.g., a cathode comprising less than 74 at.%, such as 72 at.% or even 70 at.% may be applied in embodiments.
The metal cathodes may further comprise sets of (the same) metal cathodes. For instance, one set of a first type of cathodes may be arranged at a first side of the vacuum chamber, and a second set of second types of cathodes may be arranged at another side of the vacuum chamber. If such set comprises the same type of cathodes, this may also be referred to as one (or a single) cathode. Hence, herein the term cathode may also relate to a plurality of (the same) cathodes.
Hence, in an embodiment each ((at least of the subset) of the number Caty) of the metal cathodes comprises (i) one or more of the metal elements AL Cr, Ti, and Si or (ii) a combination of the metals Al, Cr, Ti, and Si. Further metal cathodes may comprise further metal elements.
In a specific embodiment, at least one of the metal cathodes comprises the metal elements aluminum, titanium, and silicon, and at least another one of the metal cathodes comprises the metal elements aluminum and chromium. Hence, in embodiments, the cathodes comprise a first cathode comprising AlTiSi and a second cathode comprising AlCr. In further embodiments, the cathodes comprise (at least) two (second) cathodes comprising AlCr per one (first) cathode comprising AITiSi. With such configuration durable coatings have been provided, especially wherein the first layer element comprises different first layer element layers. In yet further embodiments, at least one of the cathodes (a further or third cathode) comprises chromium (only). Further cathodes may comprise further metal elements that may be deposited in any one of the further layers or further layer elements. In further embodiments, the cathodes comprise a first cathode comprising AICrSi and a second cathode comprising AlTi. In further embodiments, the cathodes comprise at least two cathodes comprising AlTi per one cathode comprising AlCrSi.
The first and the second cathodes are in embodiment arranged at opposite sides of the vacuum chamber. In further embodiments the first cathode is arranged between the (two) second cathodes. Hence, a line perpendicular to the central axis of the vacuum chamber may during a rotation around the central axis contact successively a first one of the second cathodes, the first cathode, and the other one of the second cathodes.
In specific embodiments, the depositing stage is configured to provide the first layer element comprising a plurality of first layer element layers, wherein each of the first layer element layers comprises the metal elements Al, Cr, Ti, and Si, and wherein the first layer element layers comprise at least two different types of layers, wherein the different types of the (different) layers at least differ in a silicon content, wherein a first type of the (different types of) layers has a highest silicon content Cs, and wherein a second type of the (different types of) layers has a lowest silicon content Css, wherein a ratio of the lowest silicon content Csi to the highest silicon content Csin is selected from the range of 0.1<Cs;1/Csin=<0.9, especially from the range of 0.25<Cg1/Csin<0.9, such as from the range of
0.4<Cs;1./Csin<0.6. In such embodiment, especially the current to the cathode(s) comprising silicon may be configured (controlled)to provide a change in silicon content in the different types of layers.
Hence, the depositing (stage) may comprise depositing the least two types (of different types) of first layer element layers, wherein at least one of the first type of the (different types of) layers is deposited before at least one of the second type (of the different) layers and/or wherein at least one of the first type (of the different types) of layers is deposited after at least one of the second type (of the different types) of layers.
In further embodiments, the depositing stage further comprises depositing the base layer element and/or the top layer element and/or any further (functional) layer. The depositing stage especially comprises depositing the coating described herein. Hence, the depositing stage especially comprises depositing the first layer element described herein.
The invention further provides a system (“system”) for producing the article of the invention, especially the (coating tool) of the invention. The system comprises the physical vapor deposition oven (or physical vapor deposition system) comprising the vacuum chamber.
The oven thus comprises at least the metal cathodes configured for providing the coating. The system is further configured to allow the processing conditions required to provide the coating at the substrate. The system may further comprise a control system for controlling the processing conditions. The control system may be a programmable system. Additionally or alternatively, the control system may be operated manually. The control system may be loaded with a software, especially a computer program, causing the control system to provide the coating at a substrate provided in the vacuum chamber, especially to bring about the method described herein, when it runs on the control system. Hence, the invention further provides software, especially a computer program, that is configured to execute the method described herein (especially in the system described herein) when the computer program is running on a computer program functionally coupled to the physical vapor deposition oven, especially when the computer program is running on the control system (of the system of the invention). The composition of the coating may e.g. be determined using SEM EDX (or EDS) or X-ray diffraction. Furthermore, the structure of different layers in detail may be analyzed using techniques in which the coating is removed layer by layer.
BRIEF DESCRIPTION OF THE DRAWINGS Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which corresponding reference symbols indicate corresponding parts, and in which: Fig. 1 schematically depict an embodiment of a tool according to the invention; Figs 2 and 3 schematically depicts some aspects of the coating; Fig. 4 schematically depicts some further aspects of the invention. The schematic drawings are not necessarily to scale.
DETAILED DESCRIPTION OF THE EMBODIMENTS In Fig. 1, a saw blade is depicted as an embodiment of an article/cutting tool 1 of the invention. The tool 1 comprises a coating 10 on a substrate 5, especially a tribological coating. The coating 10 may only partly cover the substrate 5. In other embodiments, the coating may cover the entire of the exterior side(s) 4 of the substrate 5. The coating 10 comprises a first layer element 20, having an overall composition comprising the metal elements aluminum, chromium, titanium, and silicon. The first layer element 20 of Fig. 1 comprises two stacked first layer element layers 21. Any first layer element layer 21 may comprise a nitride layer which is also indicated herein as (AlCrTiSi)N. In embodiments of the first layer element 20, Al is especially available with at least 68 at.% and especially at maximum 80 at.%, Si is especially available in the range of 0.5-2 at.%, Ti is especially available with at least 4 at.%, and Cr is especially available with a maximum of 20 at.%,; all relative to the total of the metal elements (in the first layer element
20). Herein, this may also be indicated by the first layer element 20 comprises Al,CryTicSig, especially wherein 0.68<a<0 80, especially wherein b<0.2; especially wherein c > 0.04, and especially wherein 0.005<d<0.02. In further embodiments of the first layer element 20
0.72<a<0.77; 0.13<b<0.2; 0.05<c<0. 11; and 0.007<d<0.017.
The coating 10 comprises a coating thickness 15 that is defined in Fig. 1 by a thickness 25 of the first layer element 20, a base layer element thickness 35 and a top layer element thickness 45. It is noted that these respective layer elements 10, 20, 30, and 40 not necessarily are present in all embodiments. The thickness 25 of the first layer element 20 (or “first layer element thickness” 25 may especially be 2-7 um. Furthermore, the coating thickness 15 may in embodiments be 3-8 um. Both the top layer element thickness 45 and the base layer element thickness 35 may especially be in the range of 0.2-1.2 um.
The base layer element 30 may comprise one or more base layer element layers 31, e.g., comprising nitride layers, such as comprising CrN or AICrN. The top layer element 40 may (also) comprise one or more top layer element layers 41, especially any one of these top layer element layers 41 comprising a nitride layer or a carbonitride layer, such as an AIN, CrN, ALCrN, AICN, CrCN, or AICrCN layer.
The coating 10 may further comprise an intermediate layer element 50 comprising an intermediate layer element layer 51, as is depicted in Fig. 2. The intermediate layer element 50 is especially arranged between two of first layer elements 20. The intermediate layer element layer 51 especially comprises a nitride layer comprising one or more of the metal elements aluminum, titanium and chromium, especially AITiN, CtN or AICrN. Two first layer elements 20 may also be stacked without having an intermediate layer element 50 in between. It will further be appreciated that the coating 10 may further comprise further layer (elements) at any location in the coating.
Herein the terms “top” “upper”, “higher”, “above”, “over”, etc. in relation to the coating 10 may especially refer to a location most (or further) remote from the substrate 5 (with respect to another location). Likewise the terms “base”, “lower” “under” and the like may be located closer or closest to the substrate 5.
In Fig. 3, an embodiment of a coating 10 is depicted in further detail. The embodiment comprises the base layer element 30 comprising a plurality of base layer element layers 31. The arrangement of the plurality of base layer element layers 31 is especially configured to improve the adherence of the first layer element 20 to the substrate 5. For that the aluminum content of the upper base layer element layer 319 (contacting the first layer element 20) may be higher than the aluminum content in the lower base layer element layer
311 (contacting the substrate 5). Moreover the aluminum content of successive base layer element layers 31 stacked on top of each other in a direction from the substrate 5 to the exterior side 4 of the cutting tool 1 may (gradually) increase Fig. 3 (as well as Fig. 2) further depicts the first layer element 20 comprising a plurality of first layer element layers 21. The first layer element layers 21 comprise different types of layers, of which two different types of layers 22, 23 are indicated. These different types of the layer 22, 23 differ in a silicon content and thus also in the content of at least one of the other metal elements Al, Cr, and Ti, which are especially all comprised in each of the first layer element layers 21. Hence a first type 22 of the layers 22, 23 has a highest silicon content Csi, and a second type 23 of the layers 22, 23 has a lowest silicon content Cs, The ratio of the lowest silicon content Csit to the highest silicon content Csi may e.g., be about 0.5.
Fig. 3, further depicts the cutting tool 1 wherein the plurality of first layer elements layers 21 comprise a number subsx of subsets 200 of the first layer elements layers 21. The depicted embodiment comprises six stacked subsets 200 (here subsn equals six), all comprising the first type 22 of the layers 22, 23 and the second type 23 of the layers 22, 23 plus a third (other) first layer element layer 21. Also the subset thickness 205 is indicated.
In embodiments, the configuration of the first layer element layers 21 in each of the subsets 200 may be identical. As such, the first layer element 20 may comprise a configuration with repeating first layer element layer 21 composition. If the embodiment in Fig. 3 would only comprise the lower three subsets 200, such a repeating configuration would have been provided. Yet, the configuration in one or more of the subsets 200 may also differ from the configuration of the other subsets 200 as is depicted with the subset 200” on top of the lower three subsets 200.
The coating 10 of the invention may be produced by physical vapor deposition (PVD). During PVD the substrate 5 is rotated and especially during every rotation a very thin film or nanolayer 29 may be deposited. As such, every layer may comprise a plurality of stacked nano layers 29 as is also depicted in Fig. 3. For instance, the lowest first layer element layer 21; in the present embodiment a first type 22 of layer, comprises twelve of such nanolayers 29. The total of these nanolayers 29 may especially define the first later element layer 21. Based on the rotation, the configuration of the cathodes 110 (see Fig. 4) and especially the (variable) current applied, the composition of each nanolayer 29 may be heterogeneous, whereas the overall composition of each nanolayer 29 in the first layer element layer 21 1s substantially the same (see below).
Fig. 4, very schematically depicts a physical vapor deposition oven 100 with a vacuum chamber 150 comprising four metal cathodes 110. It is noted that each cathode 110 may be a single cathode 110. Yet, each cathode 110 may also represent a set or a plurality of the same cathodes 110. In the depicted embodiment, the number of cathodes Cat is four.
In the figure also a central axis 160 of the vacuum chamber 150 is depicted.
For providing the first layer element 20, at least a subset of the Catx cathodes 110, such as cathode 111, cathode 112, and cathode 113 together at least comprise Al, Cr, Ti, and Si.
For providing other metal elements, at least one of the cathodes 110, e.g., cathode 114, may comprise the other elements.
In the method, the substrate 5 is provided in the vacuum chamber 150 (wherein a vacuum is created) at temperatures in the range of 300-600 C°. During depositing the substrate 5 is rotated as is indicated by the arrow.
In the given embodiment around the central axis 160 of the chamber 150. Furthermore, for obtaining a nitride layer a nitrogen comprising gaseous fluid 120, such as nitrogen gas, is provided in the vacuum chamber 150. Optionally, especially during depositing the top layer element, also a carbon comprising gaseous fluid 130, e.g. methane, ethane, ethylene, or acetylene, is provided in the vacuum chamber 150 for providing a carbonitride layer.
Further, metal elements from the metal cathode 110 are evaporated by providing an electrical current to the cathode 110. The metal elements may react with the gaseous fluids 120, 130 and are attracted to the substrate by providing a (negative) bias voltage to the substrate 5 (over the substrate 5 and the vacuum chamber 150) and deposit on the substrate 5, thereby growing the coating 10, nanolayer 29 by nanolayer 29; layer by layer.
The composition of the coating 10 may thus among others be controlled by the composition of the cathodes 110. Yet, also the current to the cathodes 110, the bias voltage, the temperature and the pressure in the chamber 150 may be configured for controlling the composition of the coating 10. By using four (sets) of cathodes 110, e.g. each single cathode 111, 112, 113, 114 could comprise just one or two (or more) of the respective metals Al, Cr, Ti, Si.
Alternatively all the cathodes 110 may comprise a combination of the metals aluminum, chromium, titanium, and silicon.
The different cathodes 110 may further have the metal elements in different ratios.
Yet, in embodiments, one of the cathodes 110, e.g. cathode 114, may be configured for providing the base layer element 30 and/or the top layer element 40, and/or the intermediate layer element 50, optionally in combination with one or more of the other cathodes 111, 112, 113. In further embodiments, three cathodes 111, 112, 113, may be configured for providing the first element layer element 20. Hence, in embodiments three cathodes 110 together comprise the elements Al, Ti, Cr, and Si, especially in an amount that agrees with the composition of the coating 10, especially the first layer element 20 (of the invention) to be produced (taking into account that some metal elements may be deposited more preferred than other metal elements). In further embodiments, (at least) one of the cathodes 111, 112, 113 may comprise an AlTiSi (or an AlCrSi) cathode (i.e. a cathode 110 substantially only containing the elements Al, Ti, (or Cr) and Si in a predetermined ratio) (herein also especially indicated as the first cathode) and one or two other ones of the cathodes 111, 112, 113 may comprise an AlCr (or AlT1) cathode (comprising substantially only Al and Cr (or Ti)) (herein also especially indicated as the second cathode(s)). In embodiments, the Si-containing cathode (such as AICrSi) may be arranged between two AlTi cathodes. For instance cathodes 111 and 113 may be the second cathodes such as AITi cathodes, and cathode 112, arranged between the other two others 111,113, may then be the first cathode, such as the AICrSi cathode. The further cathode 114 arranged between the two other cathodes 111, 113 may e.g. comprise a Cr cathode. Yet other configurations are also feasible, wherein, e.g., cathodes 114 and 113 or 111 comprise second cathodes (and cathode 112 the first cathode).
Having cathodes 110 comprising Al, Cr and/or Ti, but without containing Si, while having other cathodes 110 comprising Si allows for depositing the first layer element layers 21 comprising at least two different types of layers 22, 23, wherein the first type 22 has the highest silicon content Csin, and the second type 23 has the lowest silicon content Csir. This may e.g. be achieved by controlling the current (value(s) or duration) to change the amount of metal elements evaporated.
As discussed above, based on the composition and location of the cathodes 110 and because of the rotation of the substrate 5 during depositing a nanolayer 29 may be deposited every rotation. Such nanolayer 29 may therefore in embodiments comprise a heterogeneous composition. Hence, the first element layer 21 may comprise a repeating structure comprising a number of these nanolayers 29 stacked on top of each other, see Fig. 3. It is hypothesized that changing structures in the coating 10 facilitates the tool life. Moreover, it is hypothesized that also such substructure in the first layer element layer may positively affect the durability of the coated article 1.
The term “plurality” refers to two or more. Furthermore, the terms “a plurality of” and “a number of” may be used interchangeably. The terms “substantially” or “essentially” herein, and similar terms, will be understood by the person skilled in the art. The terms “substantially” or “essentially” may also include embodiments with “entirely”, “completely”, “all”, etc. Hence, in embodiments the adjective substantially or essentially may also be removed. Where applicable, the term “substantially” or the term “essentially” may also relate to 90% or higher, such as 95% or higher, especially 99% or higher, even more especially
99.5% or higher, including 100%. Moreover, the terms “about” and “approximately” may also relate to 90% or higher, such as 95% or higher, especially 99% or higher, even more especially 99.5% or higher, including 100%. For numerical values it is to be understood that the terms “substantially”, “essentially”, “about”, and “approximately” may also relate to the range of 90% - 110%, such as 95%-105%, especially 99%-101% of the values(s) it refers to.
The term “comprise” includes also embodiments wherein the term “comprises” means “consists of”.
The term “and/or” especially relates to one or more of the items mentioned before and after “and/or”. For instance, a phrase “item 1 and/or item 2” and similar phrases may relate to one or more of item 1 and item 2. The term "comprising" may in an embodiment refer to "consisting of" but may in another embodiment also refer to "containing at least the defined species and optionally one or more other species".
Furthermore, the terms first, second, third and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other sequences than described or illustrated herein.
The devices, apparatus, or systems may herein amongst others be described during operation. As will be clear to the person skilled in the art, the invention is not limited to methods of operation, or devices, apparatus, or systems in operation.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design many alternative embodiments without departing from the scope of the appended claims.
In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Use of the verb "to comprise" and its conjugations does not exclude the presence of elements or steps other than those stated in a claim. Unless the context clearly requires otherwise, throughout the description and the claims, the words “comprise”, “comprising”, “include”, “including”, “contain”, “containing” and the like are to be construed in an inclusive sense as opposed to an exclusive or exhaustive sense; that is to say, in the sense of “including, but not limited to”.
The article "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The invention may be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. In a device claim, or an apparatus claim, or a system claim, enumerating several means, several of these means may be embodied by one and the same item of hardware. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.
The invention also provides a control system that may control the device, apparatus, or system, or that may execute the herein described method or process. Yet further, the invention also provides a computer program product, when running on a computer which is functionally coupled to or comprised by the device, apparatus, or system, controls one or more controllable elements of such device, apparatus, or system.
The invention further applies to a device, apparatus, or system comprising one or more of the characterizing features described in the description and/or shown in the attached drawings. The invention further pertains to a method or process comprising one or more of the characterizing features described in the description and/or shown in the attached drawings. Moreover, if a method or an embodiment of the method is described being executed in a device, apparatus, or system, it will be understood that the device, apparatus, or system is suitable for or configured for (executing) the method or the embodiment of the method respectively.
The various aspects discussed in this patent can be combined in order to provide additional advantages. Further, the person skilled in the art will understand that embodiments can be combined, and that also more than two embodiments can be combined. Furthermore, some of the features can form the basis for one or more divisional applications.
EXPERIMENTAL Saw blades (both HSS saw blades as well as TCT saw blades) with different coatings have been tested. The coating composition was measured by SEM-EDX During the test, the saw blade was inspected with an optical microscope with 500x magnification.. The tests were stopped when a certain degree of damaged was observed.
TCT coated blades (350 mm diameter, kerf 2.7 mm, 120 teeth) were tested on a Rattunde ACS90 cutting machine, for cutting E355+N tubes with 50 mm diameter and 3 mm wall thickness. The cutting speed was 280 m/min, while the feed varied between 0.05 mm/tooth at the entrance and the exit of the tube, to 0.14 mm/tooth at the middle of the tube. So called micro spraying with emulsion was used for cooling and lubrication of the saw blade.
In the following table some relevant results on TCT coated blades are given: Experiment | Coating composition Functional layer | Wear/damage Al Cr |Ti Si structure [thickness os
CE CO I Pirin? [750215 [0 [zwar [ime dns 12 Pirin fn eo | [zwar [om es dase 12 Pras 19 [0 [0 [ven [oun psn Ec [55 [002i Jom wen 12 Saen EE | [rive [Sim Deen Fone? [7 [10 [5 Toi Jom [owmaeas To In the table, the structure “mono” indicates that the saw blade has a coating comprising a single functional layer. The term “2 layers” indicates that the saw blade has two different functional layers. The term “multi” indicates that the first layer element comprises at least two different first layer element layers with different composition. The coatings further have a base layer, a top layer and optionally intermediate layers. Based on these experiments the next conclusions are drawn: A saw blade with a coating resembling a coating as described herein, having two different first layer element layers with different composition, but without silicon in the first layer element (Example 0) has a shorter tool life that saw blades with the coatings described herein comprising 1 at.% silicon (Examples 1-3 and 5) and about the same tool life as Example 4, also comprising two first layer element layers with different composition, wherein the silicon content is about 2 at.%. All saw blades according to the invention seem to have a longer tool life than a prior art saw blade also comprising silicon, however not comprising titanium (prior art 3). Both multi layers and two layers (of which one comprising AlICrTiSi) seem to have a positive effect. Yet Example 5 seems to have the longest tool life. In example 5 the coating comprises about 15 first layer element layers comprising three different layer types.

Claims (17)

Conclusies: l. Een snijwerktuig (1) omvattende een coating (10) op een substraat (5), waarbij de coating (10) een eerstelaagelement (20) omvat, waarbij het eerstelaagelement (20) een overall samenstelling heeft die de metaalelementen aluminium, chroom, titanium en silicium omvat, waarbij het eerstelaagelement (20) één of meer eerstelaagelementlagen (21) omvat, waarbij elk van de eerstelaagelementlagen (21) een nitridelaag omvat, waarbij aluminium beschikbaar is in het eerstelaagelement (20) met ten minste 68 at.% ten opzichte van een totaal van de metaalelementen, en waarbij silicium beschikbaar is in het bereik van 0,5-2 at.% ten opzichte van het totaal van de metaalelementen.Conclusions: l. A cutting tool (1) comprising a coating (10) on a substrate (5), the coating (10) comprising a first layer element (20), the first layer element (20) having an overall composition comprising the metal elements aluminum, chrome, titanium and silicon, wherein the first layer element (20) comprises one or more first layer element layers (21), each of the first layer element layers (21) comprising a nitride layer, aluminum being available in the first layer element (20) at least 68 at% relative to a total of the metallic elements, and where silicon is available in the range of 0.5-2 at.% with respect to the total of the metallic elements. 2. Het snijwerktuig (1) volgens conclusie 1, waarbij titanium beschikbaar is in het eerstelaagelement (20) met ten minste 4 at% ten opzichte van het totaal van de metaalelementen.The cutting tool (1) according to claim 1, wherein titanium is available in the first layer element (20) at least 4 at% with respect to the total of the metallic elements. 3. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij chroom beschikbaar is in het eerstelaagelement (20) met een maximum van 20 at.% ten opzichte van het totaal van de metaalelementen.The cutting tool (1) according to any one of the preceding claims, wherein chromium is available in the first layer element (20) with a maximum of 20 at% with respect to the total of the metallic elements. 4. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij aluminium beschikbaar is in het eerstelaagelement (20) met een maximum van 80 at.% ten opzichte van het totaal van de metaalelementen.The cutting tool (1) according to any of the preceding claims, wherein aluminum is available in the first layer element (20) with a maximum of 80 at% with respect to the total of the metallic elements. 5. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij in het eerstelaagelement (20), ten opzichte van het totaal van de metaalelementen - aluminium beschikbaar is in het bereik van 72-77 at.%, - titanium beschikbaar is in het bereik van 5-11 at.%, - chroom beschikbaar is in de range van 13-20 at.%, en - silicium beschikbaar is in het bereik van 0,7-1,7 at.%.The cutting tool (1) according to any one of the preceding claims, wherein in the first layer element (20), relative to the total of the metal elements - aluminum is available in the range of 72-77 at%, - titanium is available in the range 5-11 at.%, - chromium is available in the range of 13-20 at.%, and - silicon is available in the range of 0.7-1.7 at%. 6. Het snijwerktuig (1) volgens één van de voorgaande conclusies, omvattende een veelvoud aan eerstelaagelementlagen (21), waarbij elk van de eerstelaagelementlagen (21) de metaalelementen aluminium, chroom, titanium, en silicium omvat.The cutting tool (1) according to any one of the preceding claims, comprising a plurality of first layer element layers (21), each of the first layer element layers (21) comprising the metallic elements aluminum, chromium, titanium, and silicon. 7. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij een dikte (25) van het eerstelaagelement (20) wordt gekozen uit het bereik van 2-7 um.The cutting tool (1) according to any of the preceding claims, wherein a thickness (25) of the first layer element (20) is selected from the range 2-7 µm. 8. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij de coating (10) verder (1) een basislaagelement (30) gerangschikt tussen het substraat (5) en het eerstelaagelement (20) en/of (ii) een toplaagelement (40) aangebracht over het eerstelaagelement (10) omvat, waarbij een basislaagelementdikte (35) van het basislaagelement (30) wordt gekozen uit het bereik van 0,2-1,2 um, waarbij het basislaagelement (30) één of meer basislaagelementlagen (31) omvat, waarbij elk van de basislaagelementlagen (31) een nitridelaag omvat die chroomnitride en/of aluminiumchroomnitride omvat; en waarbij een toplaagelementdikte (45) van het toplaagelement (40) wordt gekozen uit het bereik van 0,2-1,2 um, waarbij het toplaagelement (40) één of meer toplaagelementlagen (41) omvat, waarbij elke toplaagelementlaag (41) (i) een nitridelaag omvattende chroom en/of aluminium of (ii) een carbonitridelaag omvattende chroom en/of aluminium omvat; en waarbij een totale coatingdikte (15) van de coating (10) wordt gekozen uit het bereik van 3-8 um.The cutting tool (1) according to any of the preceding claims, wherein the coating (10) further comprises (1) a base layer element (30) arranged between the substrate (5) and the first layer element (20) and / or (ii) a top layer element. (40) disposed over the first layer element (10), wherein a base layer element thickness (35) of the base layer element (30) is selected from the range 0.2-1.2 µm, the base layer element (30) having one or more base layer element layers ( 31), wherein each of the base layer element layers (31) comprises a nitride layer comprising chromium nitride and / or aluminum chromium nitride; and wherein a top layer element thickness (45) of the top layer element (40) is selected from the range of 0.2-1.2 µm, the top layer element (40) comprising one or more top layer element layers (41), each top layer element layer (41) ( i) a nitride layer comprising chromium and / or aluminum or (ii) a carbonitride layer comprising chromium and / or aluminum; and wherein a total coating thickness (15) of the coating (10) is selected from the range 3-8 µm. 9. Het snijwerktuig (1) volgens conclusie 8, omvattende het basislaagelement (30), waarbij het basislaagelement (30) een veelvoud aan basislaagelementlagen (31) omvat, waarbij een aluminiumgehalte van een boven-basislaagelementlaag (319) die het dichtst bij het eerstelaagelement (20) is geconfigureerd hoger is dan het aluminiumgehalte in een onder- basislaagelementlaag (311) die het dichtst bij het substraat (5) is geconfigureerd.The cutting tool (1) of claim 8, comprising the base layer element (30), wherein the base layer element (30) comprises a plurality of base layer element layers (31), with an aluminum content of an upper base layer element layer (319) closest to the first layer element. (20) is configured higher than the aluminum content in a sub-base layer element layer (311) configured closest to the substrate (5). 10. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij de coating (10) meer dan één eerstelaagelement (20) omvat, waarbij een tussenlaagelement (50) is gerangschikt tussen ten minste twee van de eerstelaagelementen (20), waarbij het tussenlaagelement (50) een tussenlaagelementlaag (51) omvat, waarbij de tussenlaagelementlaag (51) een nitridelaag omvat die één of meer van metaalelementen gekozen uit de groep bestaande uit aluminium, titanium en chroom omvat, in het bijzonder waarbij de nitridelaag één of meer van aluminiumtitaniumnitride, chroomnitride en aluminiumchroomnitride omvat.The cutting tool (1) according to any one of the preceding claims, wherein the coating (10) comprises more than one first layer element (20), wherein an intermediate layer element (50) is arranged between at least two of the first layer elements (20), the said coating being interlayer element (50) comprises an interlayer element layer (51), wherein the interlayer element layer (51) comprises a nitride layer comprising one or more of metallic elements selected from the group consisting of aluminum, titanium and chromium, in particular wherein the nitride layer comprises one or more of aluminum titanium nitride , chromium nitride and aluminum chromium nitride. 11. Het snijwerktuig (1) volgens een van de voorgaande conclusies, waarbij het eerstelaagelement (20) een veelvoud aan eerstelaagelementlagen (21) omvat, waarbij elke eerstelaagelementlaag (21) de metaalelementen aluminium, chroom, titanium en silicium omvat, en waarbij de eerstelaagelementlagen (21) ten minste twee verschillende typen lagen (22, 23) omvatten, waarbij de verschillende typen van de lagen (22, 23) ten minste verschillen in een siliciumgehalte, waarbij een eerste type (22) van de lagen (22, 23) een hoogste siliciumgehalte Csin (at.%) heeft en waarbij een tweede type (23) van de lagen (22, 23) een laagste siliciumgehalte Csi (at.%) heeft, waarbij een verhouding van het laagste siliciumgehalte Csir tot het hoogste siliciumgehalte Csi wordt gekozen uit het bereik van 0,25 <Csip/Csin< 0,9.The cutting tool (1) according to any of the preceding claims, wherein the first layer element (20) comprises a plurality of first layer element layers (21), each first layer element layer (21) comprising the metallic elements aluminum, chromium, titanium and silicon, and wherein the first layer element layers (21) comprise at least two different types of layers (22, 23), the different types of layers (22, 23) differing at least in silicon content, a first type (22) of layers (22, 23) has a highest silicon content Csin (at.%) and a second type (23) of the layers (22, 23) has a lowest silicon content Csi (at.%), where a ratio of the lowest silicon content Csir to the highest silicon content Csi is selected from the range 0.25 <Csip / Csin <0.9. 12. Het snijwerktuig (1) volgens conclusie 11, waarbij het aantal lagen (21) van eerstelaagelementen een aantal subsn van gestapelde subsets (200) van de eerstelaagelementlagen (21) omvat, waarbij subsn ten minste 2 is, en waarbij elk van de subsets (200) het eerste type (22) van de lagen (22, 23) en het tweede type (23) van de lagen (22, 23) omvat, waarbij een subsetdikte (205) van elke subset (200) gelijk is aan of kleiner is dan 0,5 um.The cutting tool (1) of claim 11, wherein the plurality of layers (21) of first layer elements comprises a number of subsn of stacked subsets (200) of the first layer element layers (21), where subsn is at least 2, and wherein each of the subsets (200) comprises the first type (22) of the layers (22, 23) and the second type (23) of the layers (22, 23), where a subset thickness (205) of each subset (200) is equal to or is less than 0.5 µm. 13. Het snijwerktuig (1) volgens één van de voorgaande conclusies, waarbij het snijwerktuig (1) een cirkelzaagblad, een gereedschapbit, een freesbeitel of een boor is.The cutting tool (1) according to any of the preceding claims, wherein the cutting tool (1) is a circular saw blade, a tool bit, a milling bit or a drill. 14. Een coating (10) zoals gedefinieerd in één van de voorgaande conclusies 1-12.A coating (10) as defined in any one of the preceding claims 1-12. 15. Een werkwijze voor het produceren van een snijwerktuig (1) omvattende een coating (10), omvattende: - het verschaffen van een substraat (5) in een vacuümkamer (150) van een oven voor fysische afzetting uit de dampfase (‘physical vapor deposition’ ) (100), waarbij de kamer (150) een aantal Caty metaalkathodes (110) omvat, waarbij Caty ten minste 1 1s, waarbij het aantal Caty metaalkathodes (110) gezamenlijk de metaalelementen aluminium, chroom, titanium en silicium omvat, en - het afzetten van de coating (10) op het substraat (5) door fysische afzetting uit de dampfase, terwijl één of meer van (1) een stikstofomvattend gasvormig fluidum (120) en (ii) een koolstofomvattend gasvormig fluïdum (130) in de vacuümkamer (150) wordt verschaft,A method of producing a cutting tool (1) comprising a coating (10), comprising: - providing a substrate (5) in a vacuum chamber (150) of a physical vapor deposition oven. deposition ') (100), the chamber (150) comprising a plurality of Caty metal cathodes (110), the Caty having at least 11s, the plurality of Caty metal cathodes (110) collectively comprising the metal elements aluminum, chromium, titanium and silicon, and - depositing the coating (10) on the substrate (5) by physical vapor deposition, while leaving one or more of (1) a nitrogen-containing gaseous fluid (120) and (ii) a carbon-containing gaseous fluid (130) in the vacuum chamber (150) is provided, terwijl het substraat wordt geroteerd, om de coating (10) te verschaffen die het eerstelaagelement (20) omvat zoals gedefinieerd in conclusie 1.while rotating the substrate, to provide the coating (10) comprising the first layer element (20) as defined in claim 1. 16. De werkwijze volgens conclusie 15, waarbij (i) ten minste één van de metaalkathodes (110) de metaalelementen aluminium, titanium en silicium omvat, en waarbij ten minste een andere van de metaalkathodes (110) de metaalelementen aluminium en chroom omvat, of waarbij (i1) ten minste een van de metaalkathodes (110) de metaalelementen aluminium, chroom en silicium omvat, en waarbij ten minste een andere van de metaalkathodes (110) de metaalelementen aluminium en titanium omvat.The method of claim 15, wherein (i) at least one of the metal cathodes (110) comprises the metal elements aluminum, titanium and silicon, and wherein at least one other of the metal cathodes (110) comprises the metal elements aluminum and chromium, or wherein (i1) at least one of the metal cathodes (110) comprises the metal elements aluminum, chromium and silicon, and wherein at least another of the metal cathodes (110) comprises the metal elements aluminum and titanium. 17. De werkwijze volgens één van de conclusies 15-16, omvattende het selecteren van de metaalkathodes (110) en verwerkingscondities om het eerstelaagelement (20) te verschaffen zoals gedefinieerd in conclusie 11.The method of any of claims 15-16, comprising selecting the metal cathodes (110) and processing conditions to provide the first layer element (20) as defined in claim 11.
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CN202080049172.1A CN114080469B (en) 2019-07-11 2020-07-10 Saw blade or other cutting tool comprising a coating
MX2022000148A MX2022000148A (en) 2019-07-11 2020-07-10 Saw blade or other cutting tool comprising a coating.
EP20740437.7A EP3997254B1 (en) 2019-07-11 2020-07-10 Saw blade or other cutting tool comprising a coating
CA3143943A CA3143943A1 (en) 2019-07-11 2020-07-10 Saw blade or other cutting tool comprising a coating
US17/624,892 US20220281013A1 (en) 2019-07-11 2020-07-10 Saw Blade or Other Cutting Tool Comprising a Coating
PCT/NL2020/050461 WO2021006739A1 (en) 2019-07-11 2020-07-10 Saw blade or other cutting tool comprising a coating
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US20020168552A1 (en) * 2000-12-28 2002-11-14 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film
JP2007144595A (en) * 2005-11-30 2007-06-14 Mitsubishi Materials Corp Surface coated cutting tool having hard coating layer exhibiting excellent chipping resistance in heavy cutting of difficult-to-cut material
JP2007313582A (en) * 2006-05-23 2007-12-06 Mitsubishi Materials Corp Surface-coated cutting tool having hard coating layer with excellent chipping resistance in heavy cutting difficult-to-cut material
EP3228726A1 (en) 2016-04-08 2017-10-11 Seco Tools Ab Coated cutting tool

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