JP5610219B2 - Hard coating for cutting tool and hard coating coated cutting tool - Google Patents

Hard coating for cutting tool and hard coating coated cutting tool Download PDF

Info

Publication number
JP5610219B2
JP5610219B2 JP2010265979A JP2010265979A JP5610219B2 JP 5610219 B2 JP5610219 B2 JP 5610219B2 JP 2010265979 A JP2010265979 A JP 2010265979A JP 2010265979 A JP2010265979 A JP 2010265979A JP 5610219 B2 JP5610219 B2 JP 5610219B2
Authority
JP
Japan
Prior art keywords
range
coating layer
coating
hard
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010265979A
Other languages
Japanese (ja)
Other versions
JP2012115924A (en
Inventor
正俊 櫻井
正俊 櫻井
孝臣 戸井原
孝臣 戸井原
▲微▼ 王
▲微▼ 王
須藤 祐司
祐司 須藤
小池 淳一
淳一 小池
翔子 小宮山
翔子 小宮山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University NUC
OSG Corp
Original Assignee
Tohoku University NUC
OSG Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku University NUC, OSG Corp filed Critical Tohoku University NUC
Priority to JP2010265979A priority Critical patent/JP5610219B2/en
Publication of JP2012115924A publication Critical patent/JP2012115924A/en
Application granted granted Critical
Publication of JP5610219B2 publication Critical patent/JP5610219B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Description

本発明は、切削工具の表面に被覆して設けられる切削工具用硬質被膜及びその硬質被膜が設けられた硬質被膜被覆切削工具に関し、特に、耐摩耗性及び耐溶着性を共に向上させるための改良に関する。   The present invention relates to a hard coating for a cutting tool provided on the surface of a cutting tool and a hard coating coated cutting tool provided with the hard coating, and in particular, an improvement for improving both wear resistance and welding resistance. About.

ドリルやタップ等の切削工具には、耐摩耗性を向上させるために硬質被膜が被覆して設けられる。この切削工具用硬質被膜としては、TiN系、TiAlN系、及びAlCr系のコーティングが広く用いられており、その性能を更に向上させるために改良が図られている。例えば、特許文献1に記載された硬質積層被膜がそれである。   Cutting tools such as drills and taps are provided with a hard coating to improve wear resistance. As the hard coating for cutting tools, TiN-based, TiAlN-based, and AlCr-based coatings are widely used, and improvements are made to further improve the performance. For example, it is the hard laminated film described in Patent Document 1.

特開2006−336032号公報JP 2006-336032 A

しかし、前述したような従来の技術により硬質被膜が形成された切削工具では、その切削加工に際して被削材の種類や切削条件によっては耐溶着性が不十分となるおそれがあった。すなわち、被削材等の溶着により工具の寿命が短くなる場合があり、改良の余地があった。すなわち、優れた耐摩耗性及び耐溶着性を兼ね備えた切削工具用硬質被膜及び硬質被膜被覆切削工具の開発が求められていた。   However, in a cutting tool in which a hard coating is formed by the conventional technique as described above, the welding resistance may be insufficient depending on the type of workpiece and cutting conditions during the cutting process. That is, the tool life may be shortened by welding of the work material or the like, and there is room for improvement. That is, development of a hard coating for a cutting tool and a hard coating coated cutting tool having both excellent wear resistance and welding resistance has been demanded.

本発明は、以上の事情を背景として為されたものであり、その目的とするところは、優れた耐摩耗性及び耐溶着性を兼ね備えた切削工具用硬質被膜及び硬質被膜被覆切削工具を提供することにある。   The present invention has been made in the background of the above circumstances, and its object is to provide a hard coating for a cutting tool and a hard coating-coated cutting tool having excellent wear resistance and welding resistance. There is.

斯かる目的を達成するために、本第1発明の要旨とするところは、切削工具の表面に被覆して設けられる切削工具用硬質被膜であって、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層とが、交互に2層以上積層した多層膜であり、前記第1被膜層に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、総膜厚は0.2μm以上10.0μm以下の範囲内であることを特徴とするものである。 In order to achieve such an object, the gist of the first invention is a hard coating for a cutting tool provided on the surface of the cutting tool, which is made of Ti a Cr b Al c Mo 1-abc . A first film layer made of nitride or carbonitride and a second film layer made of Ti d Cre e Al 1-de nitride or carbonitride are multilayer films in which two or more layers are alternately laminated; The atomic ratio a related to the first coating layer is in the range of 0.2 to 0.7, b is in the range of 0.01 to 0.2, and c is in the range of 0.01 to 0.2. 1-abc is 0.1 or more, the atomic ratio d according to the second coating layer is in the range of 0.1 to 0.7, and e is 0.01 to 0.2. The film thickness of the first coating layer is in the range of 0.1 μm to 5.0 μm, and the film thickness of the second coating layer is 0.1 μm to 5.0 μm. In the following range, the total film thickness is in the range of 0.2 μm to 10.0 μm.

また、前記目的を達成するために、本第2発明の要旨とするところは、上記第1発明の切削工具用硬質被膜が表面に被覆して設けられたことを特徴とする硬質被膜被覆切削工具である。   In order to achieve the above object, the gist of the second invention is that the hard coating for cutting tool according to the first invention is provided on the surface of the hard coating coated cutting tool. It is.

このように、前記第1発明によれば、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層とが、交互に2層以上積層した多層膜であり、前記第1被膜層に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、総膜厚は0.2μm以上10.0μm以下の範囲内であることから、被膜中にMoを含有することで被膜表面にMo酸化物が形成され、耐溶着性に優れると共に高硬度の被膜が得られることに加え、TiCrAl系被膜とTiCrAlMo系被膜の積層構造とすることで、耐摩耗性と耐溶着性を両立させることができる。すなわち、優れた耐摩耗性及び耐溶着性を兼ね備えた切削工具用硬質被膜を提供することができる。 In this way, the according to the first invention, Ti a Cr b Al c Mo 1-abc a first coating layer made of nitride or carbonitride, Ti d Cr e Al 1- de nitride or a carbonitride The second coating layer made of nitride is a multilayer film in which two or more layers are alternately stacked. The atomic ratio a related to the first coating layer is in the range of 0.2 to 0.7, and b is 0. In the range of 01 or more and 0.2 or less, c is in the range of 0.01 or more and 0.2 or less, 1-abc is 0.1 or more, and the atomic ratio d related to the second coating layer is Within the range of 0.1 to 0.7, e is within the range of 0.01 to 0.2, and the film thickness of the first coating layer is within the range of 0.1 μm to 5.0 μm. The film thickness of the second coating layer is in the range of 0.1 μm to 5.0 μm, and the total film thickness is in the range of 0.2 μm to 10.0 μm. In addition to forming a Mo oxide on the surface of the coating, which provides excellent welding resistance and a high hardness coating, it has a laminated structure of a TiCrAl-based coating and a TiCrAlMo-based coating. It is possible to achieve both welding resistance. That is, it is possible to provide a hard coating for a cutting tool that has both excellent wear resistance and welding resistance.

また、前記第2発明によれば、前記第1発明の切削工具用硬質被膜が表面に被覆して設けられたものであるため、被膜中にMoを含有することで被膜表面にMo酸化物が形成され、耐溶着性に優れると共に高硬度の被膜が得られることに加え、TiCrAl系被膜とTiCrAlMo系被膜の積層構造とすることで、耐摩耗性と耐溶着性を両立させることができる。すなわち、優れた耐摩耗性及び耐溶着性を兼ね備えた硬質被膜被覆切削工具を提供することができる。   Further, according to the second invention, since the hard coating for a cutting tool of the first invention is provided on the surface, Mo oxide is contained on the coating surface by containing Mo in the coating. In addition to being formed and having a high hardness coating as well as having a high hardness, a laminated structure of a TiCrAl-based coating and a TiCrAlMo-based coating can achieve both wear resistance and welding resistance. That is, it is possible to provide a hard coating coated cutting tool having both excellent wear resistance and welding resistance.

本発明の硬質被膜被覆切削工具の一実施例であるエンドミルを軸心に垂直な方向から見た正面図である。It is the front view which looked at the end mill which is one Example of the hard film coating cutting tool of this invention from the direction perpendicular | vertical to an axial center. 本発明の切削工具用硬質被膜がコーティングされた図1のエンドミルの表面部分の断面図である。It is sectional drawing of the surface part of the end mill of FIG. 1 by which the hard film for cutting tools of this invention was coated. 本発明の切削工具用硬質被膜を形成する際に好適に用いられるスパッタリング装置を説明する概略構成図である。It is a schematic block diagram explaining the sputtering device used suitably when forming the hard film for cutting tools of this invention. 本発明の効果を検証するために本発明者等が行った試験に関して、その試験に用いられた試験品の被膜構造及び膜厚と、各試験品の試験結果を併せて示す図である。It is a figure which shows collectively the film structure and film thickness of the test goods used for the test, and the test result of each test goods regarding the test which the present inventors performed in order to verify the effect of this invention. 本発明の効果を検証するために本発明者等が行った他の試験に関して、その試験に用いられた試験品の被膜構造及び膜厚と、各試験品の試験結果を併せて示す図である。It is a figure which shows collectively the film structure and film thickness of the test article used for the test, and the test result of each test article regarding other tests conducted by the present inventors to verify the effects of the present invention. . 本発明の切削工具用硬質被膜の摩擦特性を検証するため、本発明者等が行った試験の結果を示すグラフである。It is a graph which shows the result of the test which the present inventors conducted in order to verify the friction characteristic of the hard film for cutting tools of the present invention.

本発明の切削工具用硬質被膜は、エンドミル、ドリル、正面フライス、総型フライス、リーマ、タップ等の回転切削工具の他、バイト等の非回転式の切削工具等、種々の切削工具の表面コーティングに好適に適用される。また、工具母材すなわち硬質被膜が設けられる部材の材質としては、超硬合金や高速度工具鋼が好適に用いられるが、他の材料でもよく、本発明の切削工具用硬質被膜は種々の材料から構成された切削工具に広く適用される。   The hard coating for a cutting tool of the present invention is a surface coating of various cutting tools such as a rotating cutting tool such as an end mill, a drill, a face mill, a total mill, a reamer, a tap, and a non-rotating cutting tool such as a bite. It is preferably applied to. Further, as the material of the tool base material, that is, the member provided with the hard coating, cemented carbide or high-speed tool steel is preferably used, but other materials may be used, and the hard coating for a cutting tool of the present invention may be various materials. Widely applied to cutting tools composed of

本発明の切削工具用硬質被膜は、切削工具の一部乃至全部の表面に被覆して設けられるものであり、好適には、その切削工具において切削加工に関与する刃部に設けられる。更に好適には、少なくともその刃部における切れ刃乃至すくい面を被覆するように設けられる。   The hard coating for a cutting tool of the present invention is provided so as to cover a part or all of the surface of the cutting tool, and is preferably provided on a blade part involved in cutting in the cutting tool. More preferably, it is provided so as to cover at least the cutting edge or rake face of the blade portion.

本発明の切削工具用硬質被膜の形成方法としては、スパッタリング法が好適に用いられるが、アークイオンプレーティング法等の他の物理蒸着法(PVD法)や、プラズマCVD法、熱CVD法等の化学蒸着法(CVD法)を用いることもできる。   As a method for forming the hard film for a cutting tool of the present invention, a sputtering method is preferably used, but other physical vapor deposition methods (PVD method) such as arc ion plating method, plasma CVD method, thermal CVD method, etc. Chemical vapor deposition (CVD) can also be used.

本発明の切削工具用硬質被膜は、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層とが、交互に2層以上積層した多層膜であり、前記第1被膜層に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内とされたものであるが、斯かる数値範囲を外れる場合には十分な耐摩耗性及び耐溶着性が得られず、工具寿命が短くなることが考えられる。前記第1被膜層に係る原子比aを0.2以上0.7以下の範囲内、bを0.01以上0.2以下の範囲内、cを0.01以上0.2以下の範囲内、1−a−b−cを0.1以上、前記第2被膜層に係る原子比dを0.1以上0.7以下の範囲内、eを0.01以上0.2以下の範囲内とすることで、優れた耐摩耗性及び耐溶着性を兼ね備えた硬質被膜を構成することができる。 Cutting tools for hard coating of the present invention, Ti a Cr b Al c Mo 1-abc nitride or a first coating layer made of carbonitride, Ti d Cr e Al 1- de nitride or carbonitride And the second coating layer is a multilayer film in which two or more layers are alternately laminated. The atomic ratio a relating to the first coating layer is in the range of 0.2 or more and 0.7 or less, and b is 0.01 or more. Within the range of 0.2 or less, c is within the range of 0.01 or more and 0.2 or less, 1-abc is 0.1 or more, and the atomic ratio d of the second coating layer is 0.00. In the range of 1 to 0.7, e is in the range of 0.01 to 0.2. However, if the numerical value is out of the range, sufficient wear resistance and welding resistance are obtained. It is conceivable that the tool life is shortened. The atomic ratio a related to the first coating layer is in the range of 0.2 to 0.7, b is in the range of 0.01 to 0.2, and c is in the range of 0.01 to 0.2. 1-a-b-c is 0.1 or more, the atomic ratio d according to the second coating layer is in the range of 0.1 to 0.7, and e is in the range of 0.01 to 0.2. By doing so, a hard coating film having excellent wear resistance and welding resistance can be formed.

本発明の切削工具用硬質被膜に係る前記第1被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、総膜厚は0.2μm以上10.0μm以下の範囲内とされたものであるが、斯かる数値範囲を外れる場合には十分な耐摩耗性及び耐溶着性が得られず、工具寿命が短くなることが考えられる。特に、硬質被膜の総膜厚が0.2μm未満である場合には十分な耐摩耗性及び耐溶着性が得られなくなるおそれがある一方、10.0μmを超える場合には靱性が低下して欠けや剥離等が発生し易くなるおそれがあり、何れの場合においても工具寿命が短くなることが考えられる。前記第1被膜層の膜厚を0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚を0.1μm以上5.0μm以下の範囲内、総膜厚を0.2μm以上10.0μm以下の範囲内とすることで、耐摩耗性及び耐溶着性を保証するのに必要十分な厚さを有し、欠けや剥離等が発生し難い硬質被膜を構成することができる。   The film thickness of the first coating layer relating to the hard coating for a cutting tool of the present invention is in the range of 0.1 μm to 5.0 μm, and the film thickness of the second coating layer is in the range of 0.1 μm to 5.0 μm. Of these, the total film thickness is in the range of 0.2 μm or more and 10.0 μm or less. However, if the numerical value is out of the range, sufficient wear resistance and welding resistance cannot be obtained, and the tool life is shortened. May be shortened. In particular, if the total thickness of the hard coating is less than 0.2 μm, sufficient wear resistance and welding resistance may not be obtained. In some cases, the tool life may be shortened. The thickness of the first coating layer is in the range of 0.1 μm to 5.0 μm, the thickness of the second coating layer is in the range of 0.1 μm to 5.0 μm, and the total thickness is 0.2 μm or more. By setting the thickness within the range of 10.0 μm or less, it is possible to form a hard coating that has a necessary and sufficient thickness to ensure wear resistance and welding resistance and is less likely to be chipped or peeled off.

以下、本発明の好適な実施例を図面に基づいて詳細に説明する。図1は、本発明の硬質被膜被覆切削工具の一実施例であるエンドミル10を軸心に垂直な方向から見た正面図である。この図1に示すように、本実施例のエンドミル10は、例えば超硬合金にて構成される工具母材12にシャンク及び刃部14が一体に設けられた回転切削工具である。この刃部14には、切れ刃として外周刃16及び底刃18が設けられており、図示しない切削装置に取り付けられてその切削装置により軸心まわりに回転駆動させられることにより、上記外周刃16及び底刃18によって被削材に対する切削加工が行われる。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a front view of an end mill 10 as an embodiment of the hard film-coated cutting tool of the present invention as viewed from a direction perpendicular to the axis. As shown in FIG. 1, the end mill 10 of this embodiment is a rotary cutting tool in which a shank and a blade portion 14 are integrally provided on a tool base material 12 made of, for example, a cemented carbide. The blade portion 14 is provided with an outer peripheral blade 16 and a bottom blade 18 as cutting blades. The outer peripheral blade 16 is attached to a cutting device (not shown) and is driven to rotate around the axis by the cutting device. And the cutting work is performed on the work material by the bottom blade 18.

図2は、本発明の切削工具用硬質被膜がコーティングされた上記エンドミル10の表面部分の断面図である。この図2に示すように、上記エンドミル10の表面には、その表面を被覆して本発明の切削工具用硬質被膜の一実施例である硬質被膜20がコーティングされている。図1の斜線部は、上記エンドミル10においてこの硬質被膜20が設けられた部分を示しており、この図に示すように、上記硬質被膜20は、好適には、上記エンドミル10における刃部14に対応する工具母材12の表面に被覆して設けられる。   FIG. 2 is a cross-sectional view of the surface portion of the end mill 10 coated with the hard film for a cutting tool of the present invention. As shown in FIG. 2, the surface of the end mill 10 is coated with a hard coating 20 that is an example of a hard coating for a cutting tool of the present invention. The hatched portion in FIG. 1 shows a portion of the end mill 10 where the hard coating 20 is provided. As shown in the drawing, the hard coating 20 is preferably applied to the blade portion 14 of the end mill 10. The surface of the corresponding tool base material 12 is provided so as to be covered.

図2から明らかなように、本実施例の硬質被膜20は、第1被膜層22と第2被膜層24とが交互に2層以上積層した多層膜であり、斯かる第1被膜層22及び第2被膜層24は、以下に示す化学組成を満足する材料から構成される。すなわち、上記第1被膜層22は、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物であって、原子比(混晶比)aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上である。上記原子比a〜cは、上記数値範囲内において適宜定められる。すなわち、本実施例の硬質被膜20における第1被膜層22としては、例えばTi0.5Cr0.1Al0.1Mo0.3N等が好適に適用される。また、上記第2被膜層24は、TidCreAl1-d-eの窒化物又は炭窒化物であって、原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内である。上記原子比d、eは、上記数値範囲内において適宜定められる。すなわち、本実施例の硬質被膜20における第2被膜層24としては、例えばTi0.5Cr0.1Al0.4N等が好適に適用される。 As is clear from FIG. 2, the hard coating 20 of this example is a multilayer film in which two or more first coating layers 22 and second coating layers 24 are alternately stacked. The second coating layer 24 is made of a material that satisfies the chemical composition shown below. That is, the first coating layer 22, Ti a Cr b Al c Mo 1-abc a nitride or carbo-nitrides, the atomic ratio (mole ratio) a range of 0.2 to 0.7 B is in the range of 0.01 to 0.2, c is in the range of 0.01 to 0.2, and 1-abc is 0.1 or more. The atomic ratios a to c are appropriately determined within the above numerical range. That is, for example, Ti 0.5 Cr 0.1 Al 0.1 Mo 0.3 N or the like is suitably applied as the first coating layer 22 in the hard coating 20 of the present embodiment. Further, the second coating layer 24 is a Ti d Cr e Al 1-de nitride or carbonitride atomic ratio d in the range of 0.1 to 0.7, e is 0.01 It is in the range of 0.2 or more and 0.2 or less. The atomic ratios d and e are appropriately determined within the above numerical range. That is, for example, Ti 0.5 Cr 0.1 Al 0.4 N is suitably applied as the second coating layer 24 in the hard coating 20 of the present embodiment.

また、前記硬質被膜20における各第1被膜層22の膜厚D1は0.1μm以上5.0μm以下の範囲内、第2被膜層24の膜厚D2は0.1μm以上5.0μm以下の範囲内、総膜厚Dは0.2μm以上10.0μm以下の範囲内とされる。上記第1被膜層22及び第2被膜層24の積層数は、前記硬質被膜20の総膜厚D及び各被膜層22、24の膜厚D1、D2に係る上記数値範囲を逸脱しない限りにおいて適宜定められるが、好適には2層(第1被膜層22及び第2被膜層24が各1層)乃至60層(第1被膜層22及び第2被膜層24が各30層)の範囲内とされる。また、前記硬質被膜20における複数の第1被膜層22の膜厚D1はすべて等しいものであってもよいし、上記数値範囲内で相互に異なるものであってもよい。同様に、前記硬質被膜20における複数の第2被膜層24の膜厚D2はすべて等しいものであってもよいし、上記数値範囲内で相互に異なるものであってもよい。  The thickness D1 of each first coating layer 22 in the hard coating 20 is in the range of 0.1 μm to 5.0 μm, and the thickness D2 of the second coating layer 24 is in the range of 0.1 μm to 5.0 μm. Of these, the total film thickness D is in the range of 0.2 μm to 10.0 μm. The number of laminated layers of the first coating layer 22 and the second coating layer 24 is appropriately determined as long as it does not deviate from the above numerical range relating to the total film thickness D of the hard coating 20 and the film thicknesses D1 and D2 of the coating layers 22 and 24. Preferably, it is within the range of 2 layers (the first coating layer 22 and the second coating layer 24 are each one layer) to 60 layers (the first coating layer 22 and the second coating layer 24 are each 30 layers). Is done. Further, the film thicknesses D1 of the plurality of first coating layers 22 in the hard coating 20 may all be the same, or may be different from each other within the above numerical range. Similarly, the film thicknesses D2 of the plurality of second coating layers 24 in the hard coating 20 may all be equal or may be different from each other within the above numerical range.

また、前記硬質被膜20における前記第1被膜層22及び第2被膜層24の積層順は、好適には、図2に示すように前記工具母材12側から第1被膜層22、第2被膜層24、・・・、第2被膜層24、第1被膜層22の順で積層されたものである。すなわち、前記硬質被膜20の基層(工具母材12と接する最下層)及び表層(硬質被膜20の最上層)は、何れも前記第1被膜層22とされたものであるが、必ずしも斯かる構成には限定されず、前記第2被膜層24が基層乃至表層とされたものであっても本発明の一応の効果を奏する。   Further, the stacking order of the first coating layer 22 and the second coating layer 24 in the hard coating 20 is preferably such that the first coating layer 22 and the second coating from the tool base material 12 side as shown in FIG. The layers 24,..., The second coating layer 24, and the first coating layer 22 are laminated in this order. That is, the base layer of the hard coating 20 (the lowermost layer in contact with the tool base material 12) and the surface layer (the uppermost layer of the hard coating 20) are both the first coating layer 22, but such a configuration is not necessarily required. The present invention is not limited thereto, and even if the second coating layer 24 is a base layer or a surface layer, the effects of the present invention can be obtained.

図3は、本実施例の硬質被膜20を形成する際に好適に用いられるスパッタリング装置30を説明する概略構成図(模式図)である。このスパッタリング装置30によるスパッタリング工程では、前記硬質被膜20を構成しているTiAl、Ti等のターゲット38に電源40により負の一定のバイアス電圧(例えば−50〜−60V程度)を印加するとともに、バイアス電源34により前記工具母材12に負の一定のバイアス電圧(例えば−100V程度)を印加することにより、アルゴンイオンAr+を上記ターゲット38に衝突させてTiAl、Ti等の構成物質を叩き出す。上記電源40及びバイアス電源34により印加される電圧はコントローラ36により制御される。チャンバ32内には、アルゴンガスの他に窒素ガス(N2)や炭化水素ガス(CH4、C22)等の反応ガスが所定の流量で導入され、その窒素原子Nや炭素原子Cがターゲット38から叩き出されたTiAlやTi等と結合してTiAlN、TiCN、TiN等となり、前記工具母材12の表面に硬質被膜として付着させられる。 FIG. 3 is a schematic configuration diagram (schematic diagram) illustrating a sputtering apparatus 30 that is preferably used when forming the hard coating 20 of the present embodiment. In the sputtering process by the sputtering apparatus 30, a negative constant bias voltage (for example, about −50 to −60 V) is applied to the target 38 such as TiAl or Ti constituting the hard coating 20 by the power source 40, and the bias By applying a negative constant bias voltage (for example, about −100 V) to the tool base material 12 by the power source 34, argon ions Ar + collide with the target 38 to strike out constituent materials such as TiAl and Ti. The voltage applied by the power supply 40 and the bias power supply 34 is controlled by the controller 36. In addition to argon gas, a reactive gas such as nitrogen gas (N 2 ) or hydrocarbon gas (CH 4 , C 2 H 2 ) is introduced into the chamber 32 at a predetermined flow rate, and the nitrogen atom N or carbon atom C is introduced. Are combined with TiAl, Ti, and the like knocked out from the target 38 to become TiAlN, TiCN, TiN, and the like, and are attached to the surface of the tool base material 12 as a hard coating.

続いて、本発明の効果を検証するために本発明者等が行った試験について説明する。図4は、この試験に用いられた試験品1〜47の構成(被膜構造、膜厚、及び積層数)と、各試験品の試験結果(切削距離及び判定)を併せて示す図である。本発明者等は、工具径6(mmφ)の超硬ドリルに図4に示す各構成の硬質被膜をコーティングして試験品1〜47を作成し、各試験品について以下の切削条件で切削試験を行った。なお、この図4に示す試験品1〜47のうち、試験品1〜39が本実施例の硬質被膜20が適用された本発明品に相当し、試験品40〜47が本発明の要件を満たさない硬質被膜が適用された非発明品に相当する。また、これら試験品40〜47のうち、試験品40、41がTiAlNから成る硬質被膜が適用された従来品(従来技術による硬質被膜被覆切削工具)に相当し、試験品42〜47がTiCrAlMoN/TiCrAlNの多層膜から成る硬質被膜が適用されたものであるが、その原子比が本発明の数値範囲を逸脱する比較試料に相当する。   Subsequently, a test conducted by the present inventors in order to verify the effect of the present invention will be described. FIG. 4 is a diagram showing the configuration (film structure, film thickness, and number of layers) of the test products 1 to 47 used in this test and the test results (cutting distance and determination) of each test product. The inventors of the present invention coat a hard drill having a tool diameter of 6 (mmφ) with a hard film having each configuration shown in FIG. 4 to prepare test samples 1 to 47, and each test product is subjected to a cutting test under the following cutting conditions. Went. Note that, among the test products 1 to 47 shown in FIG. 4, test products 1 to 39 correspond to the present invention product to which the hard coating 20 of this embodiment is applied, and the test products 40 to 47 satisfy the requirements of the present invention. It corresponds to a non-invention product to which a hard coating that is not satisfied is applied. Moreover, among these test products 40 to 47, the test products 40 and 41 correspond to conventional products to which a hard coating made of TiAlN is applied (hard coating coated cutting tool according to the prior art), and the test products 42 to 47 are TiCrAlMoN / Although a hard coating composed of a multilayer film of TiCrAlN is applied, it corresponds to a comparative sample whose atomic ratio deviates from the numerical range of the present invention.

[切削条件]
・試験品:超硬ドリル 工具径6(mmφ)
・被削材:SCM440(JIS規格)
・切削方法:穴加工
・切削速度:70(m/min)
・送り速度:557(mm/min)
・加工深さ:18(mm)
・切削油:水溶性
[Cutting conditions]
・ Test product: Carbide drill, tool diameter 6 (mmφ)
・ Work material: SCM440 (JIS standard)
・ Cutting method: Hole machining ・ Cutting speed: 70 (m / min)
・ Feeding speed: 557 (mm / min)
・ Processing depth: 18 (mm)
・ Cutting oil: Water-soluble

図4に※1で示す切削距離(m)は、逃げ面摩耗幅が0.2(mm)以内である場合の切削距離である。また、※2で示す判定結果は、逃げ面摩耗幅が0.2(mm)以内の工具寿命が切削距離80(m)以上継続することを合格判定基準とし、その合格判定基準を満たす合格品を○で、合格基準を満たさない不合格品を×でそれぞれ示している。前述のように、図4に示す試験品1〜39は、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層22と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層24とが、交互に2層以上積層した多層膜であり、前記第1被膜層22に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層24に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層22の膜厚D1は0.1μm以上5.0μm以下の範囲内、前記第2被膜層24の膜厚D2は0.1μm以上5.0μm以下の範囲内、総膜厚Dは0.2μm以上10.0μm以下の範囲内である本実施例の硬質被膜20が適用されたものである。本試験の結果、これら試験品1〜39については、何れも上記合格判定基準を満たし、良好な切削が行われていることがわかる。 The cutting distance (m) indicated by * 1 in FIG. 4 is a cutting distance when the flank wear width is within 0.2 (mm). In addition, the determination result indicated by * 2 is a pass product that satisfies the pass criteria, with the tool life within a flank wear width of 0.2 (mm) continuing for a cutting distance of 80 (m) or longer. Is indicated by ◯, and rejected products not satisfying the acceptance criteria are indicated by ×. As mentioned above, specimens 1 to 39 shown in FIG. 4, a Ti a Cr b Al c Mo 1 -abc of the first coating layer 22 made of nitride or carbonitride, Ti d Cr e Al 1- de And the second coating layer 24 made of nitride or carbonitride of the above is a multilayer film in which two or more layers are alternately laminated, and the atomic ratio a related to the first coating layer 22 is 0.2 or more and 0.7 or less. In the range, b is in the range of 0.01 to 0.2, c is in the range of 0.01 to 0.2, 1-abc is 0.1 or more, and the second coating The atomic ratio d related to the layer 24 is in the range of 0.1 to 0.7, e is in the range of 0.01 to 0.2, and the film thickness D1 of the first coating layer 22 is 0. Within the range of 1 μm to 5.0 μm, the film thickness D2 of the second coating layer 24 is within the range of 0.1 μm to 5.0 μm, and the total film thickness D is 0.2 μm to 10.0 μm. The following embodiment are within the scope of those of the hard coating 20 has been applied for. As a result of this test, it can be seen that these test products 1 to 39 all satisfy the above acceptance criteria and are being cut well.

一方、図4に示す試験品40は、Ti0.52Al0.48Nから成る膜厚10.3(μm)の硬質被膜(単層膜)が形成されたもの、試験品41はTi0.48Al0.52Nから成る膜厚5.0(μm)の硬質被膜(単層膜)が形成されたものであり、何れも従来技術の硬質被膜が適用された非発明品に相当する。本試験の結果、これらの試験品40、41については、何れも上記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。 On the other hand, the test product 40 shown in FIG. 4 has a hard film (single layer film) made of Ti 0.52 Al 0.48 N with a film thickness of 10.3 (μm), and the test product 41 is made of Ti 0.48 Al 0.52 N. A hard film (single layer film) having a film thickness of 5.0 (μm) is formed, and each corresponds to a non-invention product to which the hard film of the prior art is applied. As a result of this test, it can be seen that none of these test products 40 and 41 satisfied the above-mentioned acceptance criteria, and good cutting was not performed.

また、図4に示す試験品42は、Ti0.63Cr0.07Al0.14Mo0.16Nから成る膜厚5.20(μm)の第1被膜層と、Ti0.10Cr0.12Al0.78Nから成る膜厚5.10(μm)の第2被膜層とが、交互に2層積層して形成された総膜厚10.3(μm)の多層膜であり、第1被膜層の膜厚D1が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、第2被膜層の膜厚D2が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、更に、総膜厚Dが本発明に係る0.2μm以上10.0μm以下の範囲内から逸脱する。本試験の結果、この試験品42については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層の膜厚D1は5.0μm以下、第2被膜層の膜厚D2は5.0μm以下、総膜厚Dは10.0μm以下とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 4 has a first coating layer with a thickness of 5.20 (μm) made of Ti 0.63 Cr 0.07 Al 0.14 Mo 0.16 N, and a thickness of 5.10 (μm) made of Ti 0.10 Cr 0.12 Al 0.78 N. The second coating layer of 10 (μm) is a multilayer film having a total film thickness of 10.3 (μm) formed by alternately stacking two layers, and the thickness D1 of the first coating layer is related to the present invention. Deviation from the range of 0.1 μm or more and 5.0 μm or less, the film thickness D2 of the second coating layer deviates from the range of 0.1 μm or more and 5.0 μm or less according to the present invention, and the total film thickness D is It deviates from the range of 0.2 μm or more and 10.0 μm or less according to the present invention. As a result of this test, it can be seen that the test product 42 did not satisfy the acceptance criteria, and good cutting was not performed. From this result, it is verified that the film thickness D1 of the first coating layer should be 5.0 μm or less, the film thickness D2 of the second coating layer should be 5.0 μm or less, and the total film thickness D should be 10.0 μm or less, The significance of the numerical range according to the present invention was confirmed.

また、図4に示す試験品43は、Ti0.19Cr0.03Al0.21Mo0.57Nから成る膜厚0.08(μm)の第1被膜層と、Ti0.65Cr0.22Al0.13Nから成る膜厚0.08(μm)の第2被膜層とが、交互に2層積層して形成された総膜厚0.16(μm)の多層膜であり、第1被膜層に係るTiの原子比aが本発明に係る0.2以上0.7以下の範囲内から逸脱すると共に、Alの原子比cが本発明に係る0.01以上0.2以下の範囲内から逸脱する。また、第1被膜層の膜厚D1が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、第2被膜層の膜厚D2が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、更に、総膜厚Dが本発明に係る0.2μm以上10.0μm以下の範囲内から逸脱する。本試験の結果、この試験品43については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層に係るTiの原子比aは0.2以上、Alの原子比cは0.2以下、第1被膜層の膜厚D1は0.1μm以上、第2被膜層の膜厚D2は0.1μm以上、総膜厚Dは0.2μm以上とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 Further, the test article 43 shown in FIG. 4 includes a first coating layer having a thickness of 0.08 (μm) made of Ti 0.19 Cr 0.03 Al 0.21 Mo 0.57 N, and a thickness of 0. 6 made of Ti 0.65 Cr 0.22 Al 0.13 N. The second coating layer of 08 (μm) is a multilayer film having a total film thickness of 0.16 (μm) formed by alternately stacking two layers, and the atomic ratio a of Ti related to the first coating layer is While deviating from the range of 0.2 or more and 0.7 or less according to the invention, the atomic ratio c of Al deviates from the range of 0.01 or more and 0.2 or less according to the present invention. Further, the film thickness D1 of the first coating layer deviates from the range of 0.1 μm or more and 5.0 μm or less according to the present invention, and the film thickness D2 of the second coating layer is 0.1 μm or more and 5.0 μm according to the present invention. The total thickness D deviates from the range of 0.2 μm or more and 10.0 μm or less according to the present invention. As a result of this test, it can be seen that the test product 43 did not satisfy the acceptance criteria and did not perform good cutting. From this result, in particular, the atomic ratio a of Ti related to the first coating layer is 0.2 or more, the atomic ratio c of Al is 0.2 or less, the film thickness D1 of the first coating layer is 0.1 μm or more, and the second coating It was verified that the film thickness D2 of the layer should be 0.1 μm or more and the total film thickness D should be 0.2 μm or more, and the significance of the numerical range according to the present invention was confirmed.

また、図4に示す試験品44は、Ti0.69Cr0.01Al0.21Mo0.09Nから成る膜厚5.20(μm)の第1被膜層と、Ti0.09Cr0.21Al0.70Nから成る膜厚0.08(μm)の第2被膜層とが、交互に2層積層して形成された総膜厚5.3(μm)の多層膜であり、第1被膜層に係るAlの原子比cが本発明に係る0.01以上0.2以下の範囲内から逸脱すると共に、Moの原子比1−a−b−cが0.1未満となっている。また、第2被膜層に係るTiの原子比dが本発明に係る0.1以上0.7以下の範囲内から逸脱すると共に、Crの原子比eが本発明に係る0.01以上0.2以下の範囲内から逸脱する。更に、第1被膜層の膜厚D1が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、第2被膜層の膜厚D2が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱する。本試験の結果、この試験品44については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層に係るAlの原子比cは0.2以下、Moの原子比1−a−b−cは0.1以上、第2被膜層に係るTiの原子比dは0.1以上、Crの原子比eは0.2以下、第1被膜層の膜厚D1は0.5μm以下、第2被膜層の膜厚D2は0.1以上とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 Further, the test product 44 shown in FIG. 4 has a first coating layer having a film thickness of 5.20 (μm) made of Ti 0.69 Cr 0.01 Al 0.21 Mo 0.09 N, and a film thickness 0. 5 made of Ti 0.09 Cr 0.21 Al 0.70 N. The second coating layer of 08 (μm) is a multilayer film having a total film thickness of 5.3 (μm) formed by alternately stacking two layers, and the atomic ratio c of Al related to the first coating layer is While deviating from the range of 0.01 or more and 0.2 or less according to the invention, the atomic ratio 1-abbc of Mo is less than 0.1. Further, the atomic ratio d of Ti related to the second coating layer deviates from the range of 0.1 or more and 0.7 or less according to the present invention, and the atomic ratio e of Cr is 0.01 or more and 0.00 according to the present invention. Deviation from within 2 or less. Furthermore, the film thickness D1 of the first coating layer deviates from the range of 0.1 μm or more and 5.0 μm or less according to the present invention, and the film thickness D2 of the second coating layer is 0.1 μm or more and 5.0 μm according to the present invention. Deviations from within the following ranges. As a result of this test, it can be seen that this test product 44 did not satisfy the acceptance criteria and did not perform good cutting. From this result, in particular, the atomic ratio c of Al related to the first coating layer is 0.2 or less, the atomic ratio 1-abc of Mo is 0.1 or more, and the atomic ratio d of Ti related to the second coating layer. Is 0.1 or more, the atomic ratio e of Cr is 0.2 or less, the thickness D1 of the first coating layer is 0.5 μm or less, and the thickness D2 of the second coating layer is 0.1 or more Thus, the significance of the numerical range according to the present invention was confirmed.

また、図4に示す試験品45は、Ti0.50Cr0.05Al0.05Mo0.40Nから成る膜厚0.08(μm)の第1被膜層と、Ti0.55Cr0.15Al0.30Nから成る膜厚5.5(μm)の第2被膜層とが、交互に2層積層して形成された総膜厚5.58(μm)の多層膜であり、第1被膜層の膜厚D1が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱すると共に、第2被膜層の膜厚D2が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱する。本試験の結果、この試験品45については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層の膜厚D1は0.1μm以上、第2被膜層の膜厚D2は5.0μm以下とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 Moreover, the test article 45 shown in FIG. 4, a first coating layer having a thickness of 0.08 ([mu] m) made of Ti 0.50 Cr 0.05 Al 0.05 Mo 0.40 N, the thickness 5 consisting of Ti 0.55 Cr 0.15 Al 0.30 N. 5 (μm) of the second coating layer is a multilayer film having a total film thickness of 5.58 (μm) formed by alternately stacking two layers, and the thickness D1 of the first coating layer is related to the present invention. While deviating from the range of 0.1 μm to 5.0 μm, the film thickness D2 of the second coating layer deviates from the range of 0.1 μm to 5.0 μm according to the present invention. As a result of this test, it can be seen that the test product 45 did not satisfy the acceptance criteria, and good cutting was not performed. From this result, it was verified that the film thickness D1 of the first coating layer should be 0.1 μm or more and the film thickness D2 of the second coating layer should be 5.0 μm or less, and the significance of the numerical range according to the present invention was confirmed. It was.

また、図4に示す試験品46は、Ti0.35Cr0.21Al0.21Mo0.23Nから成る膜厚0.08(μm)の第1被膜層と、Ti0.10Cr0.009Al0.89Nから成る膜厚0.07(μm)の第2被膜層とが、交互に50層積層して形成された総膜厚3.8(μm)の多層膜であり、第1被膜層に係るCrの原子比bが本発明に係る0.01以上0.2以下の範囲内から逸脱すると共に、Alの原子比cが本発明に係る0.01以上0.2以下の範囲内から逸脱する。また、第2被膜層に係るCrの原子比eが本発明に係る0.01以上0.2以下の範囲内から逸脱する。更に、第1被膜層の膜厚D1が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱し、第2被膜層の膜厚D2が本発明に係る0.1μm以上5.0μm以下の範囲内から逸脱する。本試験の結果、この試験品46については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層に係るCrの原子比bは0.2以下、Alの原子比cは0.2以下、第2被膜層に係るCrの原子比eは0.01以上、第1被膜層の膜厚D1は0.1μm以上、第2被膜層の膜厚D2は0.1μm以上とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 Further, the test product 46 shown in FIG. 4 includes a first coating layer having a film thickness of 0.08 (μm) made of Ti 0.35 Cr 0.21 Al 0.21 Mo 0.23 N, and a film thickness 0. 5 made of Ti 0.10 Cr 0.009 Al 0.89 N. The second coating layer of 07 (μm) is a multilayer film having a total film thickness of 3.8 (μm) formed by alternately stacking 50 layers, and the atomic ratio b of Cr related to the first coating layer is While deviating from the range of 0.01 or more and 0.2 or less according to the invention, the atomic ratio c of Al deviates from the range of 0.01 or more and 0.2 or less according to the present invention. Further, the atomic ratio e of Cr in the second coating layer deviates from the range of 0.01 to 0.2 according to the present invention. Furthermore, the film thickness D1 of the first coating layer deviates from the range of 0.1 μm or more and 5.0 μm or less according to the present invention, and the film thickness D2 of the second coating layer is 0.1 μm or more and 5.0 μm according to the present invention. Deviations from within the following ranges. As a result of this test, it can be seen that the test product 46 did not satisfy the acceptance criteria, and good cutting was not performed. From this result, in particular, the atomic ratio b of Cr related to the first coating layer is 0.2 or less, the atomic ratio c of Al is 0.2 or less, the atomic ratio e of Cr related to the second coating layer is 0.01 or more, It was verified that the thickness D1 of the first coating layer should be 0.1 μm or more and the thickness D2 of the second coating layer should be 0.1 μm or more, and the significance of the numerical range according to the present invention was confirmed.

また、図4に示す試験品47は、Ti0.59Cr0.22Al0.10Mo0.09Nから成る膜厚2.50(μm)の第1被膜層と、Ti0.71Cr0.15Al0.14Nから成る膜厚3.0(μm)の第2被膜層とが、交互に2層積層して形成された総膜厚5.5(μm)の多層膜であり、第1被膜層に係るCrの原子比bが本発明に係る0.01以上0.2以下の範囲内から逸脱すると共に、Moの原子比1−a−b−cが0.1未満となっている。また、第2被膜層に係るTiの原子比dが本発明に係る0.1以上0.7以下の範囲内から逸脱する。この試験品47については前記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。この結果から特に、第1被膜層に係るCrの原子比bは0.2以下、Moの原子比1−a−b−cは0.1以上、第2被膜層に係るTiの原子比dは0.7以下とすべきことが検証され、本発明に係る数値範囲の意義が確かめられた。 4 has a first coating layer having a thickness of 2.50 (μm) made of Ti 0.59 Cr 0.22 Al 0.10 Mo 0.09 N and a thickness of 3.0.71 Cr 0.15 Al 0.14 N. The second coating layer of 0 (μm) is a multilayer film having a total film thickness of 5.5 (μm) formed by alternately stacking two layers, and the atomic ratio b of Cr related to the first coating layer is While deviating from the range of 0.01 or more and 0.2 or less according to the invention, the atomic ratio 1-abbc of Mo is less than 0.1. Further, the atomic ratio d of Ti related to the second coating layer deviates from the range of 0.1 or more and 0.7 or less according to the present invention. It can be seen that the test product 47 did not satisfy the acceptance criteria and was not cut well. From this result, in particular, the atomic ratio b of Cr related to the first coating layer is 0.2 or less, the atomic ratio 1-abc of Mo is 0.1 or more, and the atomic ratio d of Ti related to the second coating layer. Was verified to be 0.7 or less, and the significance of the numerical range according to the present invention was confirmed.

以上の説明から明らかなように、図4に示す本試験の結果から、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層とが、交互に2層以上積層した多層膜であり、前記第1被膜層に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、総膜厚は0.2μm以上10.0μm以下の範囲内である本実施例の硬質被膜20が適用された切削工具において良好な切削性能が得られる一方、各数値範囲を逸脱する構成の硬質被膜が適用された切削工具においては良好な切削性能が得られないことがわかった。すなわち、本発明に係る数値範囲の意義が確かめられ、その総ての数値範囲を満たすことによってはじめて、従来の技術に比べて優れた切削性能を示す硬質被膜乃至硬質被膜被覆切削工具を実現できることが検証された。 As apparent from the above description, from the result of this test shown in FIG. 4, the first coating layer made of a nitride or carbonitride of Ti a Cr b Al c Mo 1-abc , and Ti d Cr e Al 1 and a second coating layer made of nitride or carbonitride of -de is a multilayer film in which two or more layers are alternately laminated, and the atomic ratio a related to the first coating layer is 0.2 or more and 0.7 or less In the range, b is in the range of 0.01 to 0.2, c is in the range of 0.01 to 0.2, 1-abc is 0.1 or more, and the second coating The atomic ratio d relating to the layer is in the range of 0.1 to 0.7, e is in the range of 0.01 to 0.2, and the film thickness of the first coating layer is 0.1 μm or more. Within the range of 5.0 μm or less, the film thickness of the second coating layer is within the range of 0.1 μm to 5.0 μm, and the total film thickness is within the range of 0.2 μm to 10.0 μm. While good cutting performance can be obtained in the cutting tool to which the hard coating 20 of the present embodiment is applied, good cutting performance cannot be obtained in the cutting tool to which the hard coating having a configuration deviating from each numerical range is applied. I understood. That is, the significance of the numerical range according to the present invention is confirmed, and only when the numerical range is satisfied, can a hard coating or a hard coating coated cutting tool exhibit cutting performance superior to that of the prior art be realized. Verified.

図5は、本発明の効果を検証するために本発明者等が行った他の試験に関して、その試験に用いられた実施例試料1〜4及び従来品の構成(被膜構造、膜厚、及び積層数)と、各試験品の試験結果を併せて示す図である。本発明者等は、工具径6(mmφ)の超硬ドリルに図5に示す各構成の硬質被膜をコーティングして試験品1〜5すなわち実施例試料1〜4及び従来品を作成し、各試験品について以下の切削条件で切削試験を行った。なお、この図5に示す試験品のうち、実施例試料1〜4が本実施例の硬質被膜20が適用された本発明品に相当し、従来品が本発明の要件を満たさない硬質被膜が適用された非発明品に相当する。また、この従来品は、TiAlNから成る硬質被膜が適用された従来技術による硬質被膜被覆切削工具に相当する。   FIG. 5 shows the configurations of Example Samples 1 to 4 and conventional products used in the test (the film structure, the film thickness, and the other test) conducted by the inventors in order to verify the effect of the present invention. It is a figure which shows collectively the number of laminations) and the test result of each test product. The inventors prepared a test sample 1-5, that is, Example Samples 1 to 4 and a conventional product by coating a hard drill having a tool diameter of 6 (mmφ) with a hard film having each configuration shown in FIG. The test product was subjected to a cutting test under the following cutting conditions. In addition, among the test products shown in FIG. 5, Example Samples 1 to 4 correspond to the products of the present invention to which the hard coating 20 of the present example is applied, and the conventional products do not satisfy the requirements of the present invention. It corresponds to the applied non-invention product. Further, this conventional product corresponds to a hard film coated cutting tool according to the prior art to which a hard film made of TiAlN is applied.

[切削条件]
・試験品:超硬ドリル 工具径6(mmφ)
・被削材:SCM440(JIS規格)
・切削方法:穴加工
・切削速度:70(m/min)
・送り速度:557(mm/min)
・加工深さ:18(mm)
・切削油:水溶性
[Cutting conditions]
・ Test product: Carbide drill, tool diameter 6 (mmφ)
・ Work material: SCM440 (JIS standard)
・ Cutting method: Hole machining ・ Cutting speed: 70 (m / min)
・ Feeding speed: 557 (mm / min)
・ Processing depth: 18 (mm)
・ Cutting oil: Water-soluble

図5に示す切削距離(m)は、逃げ面摩耗幅が0.2(mm)以内である場合の切削距離である。また、判定結果は、逃げ面摩耗幅が0.2(mm)以内の工具寿命が切削距離80(m)以上継続することを合格判定基準とし、その合格判定基準を満たす合格品を○で、合格基準を満たさない不合格品を×でそれぞれ示している。前述のように、図5に示す実施例試料1〜4は、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層22と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層24とが、交互に2層以上積層した多層膜であり、前記第1被膜層22に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層24に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層22の膜厚D1は0.1μm以上5.0μm以下の範囲内、前記第2被膜層24の膜厚D2は0.1μm以上5.0μm以下の範囲内、総膜厚Dは0.2μm以上10.0μm以下の範囲内である本実施例の硬質被膜20が適用されたものである。本試験の結果、これら実施例試料1〜4については、何れも上記合格判定基準を満たし、良好な切削が行われていることがわかる。一方、図5に示す従来品は、Ti0.5Al0.5Nから成る膜厚7.8(μm)の硬質被膜(単層膜)が形成されたものであり、従来技術の硬質被膜が適用された非発明品に相当する。本試験の結果、この従来品については上記合格判定基準を満たさず、良好な切削が行われなかったことがわかる。 The cutting distance (m) shown in FIG. 5 is a cutting distance when the flank wear width is within 0.2 (mm). In addition, the determination result is that a tool life within a flank wear width of 0.2 (mm) continues for a cutting distance of 80 (m) or more, and a pass product that satisfies the pass criteria is ○ Rejected products that do not satisfy the acceptance criteria are indicated by crosses. As described above, the example samples 1 to 4 shown in FIG. 5 include the first coating layer 22 made of Ti a Cr b Al c Mo 1-abc nitride or carbonitride, and the Ti d Cr e Al 1- The second coating layer 24 made of de nitride or carbonitride is a multilayer film in which two or more layers are alternately stacked, and the atomic ratio a related to the first coating layer 22 is 0.2 or more and 0.7 or less. , B is in the range of 0.01 to 0.2, c is in the range of 0.01 to 0.2, 1-abc is 0.1 or more, and the second The atomic ratio d related to the coating layer 24 is in the range of 0.1 to 0.7, e is in the range of 0.01 to 0.2, and the film thickness D1 of the first coating layer 22 is Within the range of 0.1 μm to 5.0 μm, the film thickness D2 of the second coating layer 24 is within the range of 0.1 μm to 5.0 μm, and the total film thickness D is 0.2 μm to 10.0. m is within the range in which the hard coating 20 of the present embodiment is applied. As a result of this test, it can be seen that these Example Samples 1 to 4 all satisfy the above acceptance criteria and are being cut well. On the other hand, the conventional product shown in FIG. 5 is formed with a hard film (single layer film) having a film thickness of 7.8 (μm) made of Ti 0.5 Al 0.5 N, and the conventional hard film was applied. It corresponds to a non-invention product. As a result of this test, it can be seen that this conventional product did not satisfy the above acceptance criteria, and good cutting was not performed.

また、図5の結果に示す実施例試料1〜4は、基層すなわち前記工具母材12と接する基層及び表層すなわち表層を、TiCrAlMoN或いはTiCrAlNとして様々に入れ替えた本実施例の硬質被膜20が適用されたものである。すなわち、実施例試料1は基層がTiCrAlMoNすなわち第1被膜層22とされると共に表層がTiCrAlNすなわち第2被膜層24とされたもの、実施例試料2は基層及び表層が共にTiCrAlMoNすなわち第1被膜層22とされたもの、実施例試料3は基層及び表層が共にTiCrAlNすなわち第2被膜層24とされたもの、実施例試料4は基層がTiCrAlNすなわち第2被膜層24とされると共に表層がTiCrAlMoNすなわち第1被膜層22とされたものである。図5の結果から明らかなように、基層及び表層が共にTiCrAlMoNすなわち第1被膜層22とされた実施例試料2が逃げ面摩耗幅が0.2(mm)以内である場合の切削距離が96.5(m)と最も良好な耐摩耗性を示していることがわかる。一方、基層及び表層の少なくとも一方をTiCrAlNすなわち第2被膜層24とした実施例試料1、3、4では、実施例試料2に及ばないまでも逃げ面摩耗幅が0.2(mm)以内である場合の切削距離が何れも80(m)以上と良好な耐摩耗性を示している。この結果から、前記硬質被膜20においては、基層及び表層共に第1被膜層22とすることが望ましいが、基層及び表層の少なくとも一方を第2被膜層24とした構成においても、本発明の一応の効果を奏することが検証された。   5 are applied with the hard coating 20 of this embodiment in which the base layer, that is, the base layer in contact with the tool base material 12 and the surface layer, that is, the surface layer, are variously replaced with TiCrAlMoN or TiCrAlN. It is a thing. That is, Example Sample 1 has a base layer of TiCrAlMoN, that is, a first coating layer 22, and a surface layer of TiCrAlN, that is, a second coating layer 24. Example Sample 2 has both a base layer and a surface layer of TiCrAlMoN, that is, a first coating layer. In Example Sample 3, the base layer and the surface layer are both TiCrAlN, that is, the second coating layer 24. In Example Sample 4, the base layer is TiCrAlN, that is, the second coating layer 24, and the surface layer is TiCrAlMoN, that is, The first coating layer 22 is formed. As is apparent from the results of FIG. 5, the cutting distance when the flank wear width is within 0.2 (mm) in the example sample 2 in which the base layer and the surface layer are both TiCrAlMoN, that is, the first coating layer 22, is 96. It can be seen that the wear resistance is the best at .5 (m). On the other hand, in Example Samples 1, 3, and 4 in which at least one of the base layer and the surface layer is TiCrAlN, that is, the second coating layer 24, the flank wear width is within 0.2 (mm) even if it does not reach Example Sample 2. In some cases, the cutting distance is 80 (m) or more, indicating good wear resistance. From this result, in the hard coating 20, it is desirable that both the base layer and the surface layer are the first coating layer 22. However, even in a configuration in which at least one of the base layer and the surface layer is the second coating layer 24, the present invention is also suitable for the present invention. It was verified that the effect was achieved.

図6は、本実施例の硬質被膜20の摩擦特性を検証するため、本発明者等が行った試験の結果を示すグラフである。本発明者等は、よく知られた超硬圧子に本実施例の硬質被膜20をコーティングした実施例試料及び従来の硬質被膜をコーティングした比較例試料を作成し、それらの摩擦特性を比較する試験を行った。すなわち、本実施例の硬質被膜20としてTi0.5Cr0.1Al0.1Mo0.3N/Ti0.5Cr0.1Al0.4Nから成る厚さ3.0μmの多層膜を施した実施例試料と、従来の硬質被膜としてTi0.5Al0.5Nから成る厚さ3.0μmの単層膜を施した比較例試料とを作成し、以下の条件で摩擦試験を行った。 FIG. 6 is a graph showing the results of tests conducted by the present inventors in order to verify the friction characteristics of the hard coating 20 of this example. The present inventors made an example sample in which the well-known super indenter was coated with the hard film 20 of the present example and a comparative example sample in which the conventional hard film was coated, and a test for comparing the friction characteristics thereof. Went. That is, an example sample in which a multilayer film having a thickness of 3.0 μm made of Ti 0.5 Cr 0.1 Al 0.1 Mo 0.3 N / Ti 0.5 Cr 0.1 Al 0.4 N was applied as the hard film 20 of the present example, and a conventional hard film as A comparative sample having a single layer film of Ti 0.5 Al 0.5 N having a thickness of 3.0 μm was prepared, and a friction test was performed under the following conditions.

[試験条件]
・試験品:超硬圧子 JIS R1613「ファインセラミックスのボールオンディスク法による摩擦磨耗試験方法」に規定された圧子であり、φ5mm(先端R形状)
・被摩擦材:S45C(JIS規格)
・加重:50(g)
・摩擦速度:100(mm/s)
・摩擦時間:600(s)
・温度:22(℃)
・湿度:35(%)
[Test conditions]
・ Test article: Carbide indenter This is an indenter specified in JIS R1613 "Friction wear test method of fine ceramics by ball-on-disk method", φ5mm (R shape at the tip)
・ Friction material: S45C (JIS standard)
・ Weight: 50 (g)
・ Friction speed: 100 (mm / s)
・ Friction time: 600 (s)
・ Temperature: 22 (℃)
・ Humidity: 35 (%)

図6では、上記摩擦試験の結果として、Ti0.5Cr0.1Al0.1Mo0.3N/Ti0.5Cr0.1Al0.4Nから成る厚さ3.0μmの多層膜を施した実施例試料の結果を実線で、Ti0.5Al0.5Nから成る厚さ3.0μmの単層膜を施した比較例試料の結果を破線でそれぞれ示している。この図6に示すように、本実施例の硬質被膜20を施した試料では、従来の硬質被膜を施した試料に比べて、600(s)に渡る試験時間を通して摩擦係数(μ)が概ね20〜30%程度低い値を示し、優れた摩擦特性(潤滑性)を示すという結果が得られた。この結果は、本実施例の硬質被膜20を施した試料では、従来の硬質被膜を施した試料に比べて摩耗し難いという性質を示しており、また、被削材(被摩擦材)の溶着が発生し難いという性質を裏付けている。このように、本実施例の硬質被膜20を施した試料が従来の硬質被膜を施した試料に比べて優れた耐摩耗性及び耐溶着性を示すのは、被膜中にMoを含有することで被膜表面にMo酸化物が形成されているためと考えられる。以上の結果から、本実施例の硬質被膜20が適用された切削工具においては、従来の技術に比べて優れた耐摩耗性及び耐溶着性を実現できることが検証された。 In FIG. 6, as a result of the friction test, the result of the example sample in which a multilayer film having a thickness of 3.0 μm made of Ti 0.5 Cr 0.1 Al 0.1 Mo 0.3 N / Ti 0.5 Cr 0.1 Al 0.4 N is applied is shown by a solid line. The results of the comparative example samples to which a single layer film made of Ti 0.5 Al 0.5 N and having a thickness of 3.0 μm are applied are shown by broken lines. As shown in FIG. 6, the sample with the hard coating 20 of the present example has a coefficient of friction (μ) of approximately 20 over a test time of 600 (s) compared to the sample with the conventional hard coating. As a result, a value as low as about 30% was exhibited, and excellent friction characteristics (lubricity) were exhibited. This result shows that the sample to which the hard coating 20 of the present embodiment is applied is less likely to be worn than the sample to which the conventional hard coating is applied, and the work material (friction material) is welded. This proves that it is difficult to occur. Thus, the reason why the sample to which the hard coating 20 of this example is applied exhibits superior wear resistance and welding resistance compared to the sample to which the conventional hard coating is applied is that Mo is contained in the coating. This is presumably because Mo oxide is formed on the coating surface. From the above results, it was verified that the cutting tool to which the hard coating 20 of the present example was applied can achieve superior wear resistance and welding resistance as compared with the conventional technique.

このように、本実施例によれば、前記エンドミル10をはじめとする切削工具の表面に被覆して設けられる硬質被膜20であって、TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層22と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層24とが、交互に2層以上積層した多層膜であり、前記第1被膜層22に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、前記第2被膜層24に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、且つ、前記第1被膜層22の膜厚D1は0.1μm以上5.0μm以下の範囲内、前記第2被膜層24の膜厚D2は0.1μm以上5.0μm以下の範囲内、総膜厚Dは0.2μm以上10.0μm以下の範囲内であることから、被膜中にMoを含有することで被膜表面にMo酸化物が形成され、耐溶着性に優れると共に高硬度の被膜が得られることに加え、TiCrAl系被膜とTiCrAlMo系被膜の積層構造とすることで、耐摩耗性と耐溶着性を両立させることができる。すなわち、優れた耐摩耗性及び耐溶着性を兼ね備えた硬質被膜20を提供することができる。 Thus, according to the present embodiment, the hard coating 20 provided on the surface of the cutting tool including the end mill 10 is provided, which is a Ti a Cr b Al c Mo 1-abc nitride or charcoal. a first coating layer 22 made of nitride, a Ti d Cr e Al 1-de of the second coating layer 24 made of nitride or carbonitride, a multilayer film formed by laminating alternately two or more layers, the first The atomic ratio a relating to one coating layer 22 is in the range of 0.2 to 0.7, b is in the range of 0.01 to 0.2, c is in the range of 0.01 to 0.2, 1-abc is 0.1 or more, the atomic ratio d according to the second coating layer 24 is in the range of 0.1 to 0.7, and e is 0.01 to 0.2. The film thickness D1 of the first coating layer 22 is in the range of 0.1 μm or more and 5.0 μm or less, and the film thickness of the second coating layer 24 is within the range. 2 is in the range of 0.1 μm or more and 5.0 μm or less, and the total film thickness D is in the range of 0.2 μm or more and 10.0 μm or less. Therefore, by containing Mo in the coating, Mo oxide is formed on the coating surface. In addition to being excellent in welding resistance and obtaining a high-hardness coating, a laminated structure of a TiCrAl-based coating and a TiCrAlMo-based coating can achieve both wear resistance and welding resistance. That is, it is possible to provide the hard coating 20 having both excellent wear resistance and welding resistance.

また、本実施例によれば、前記硬質被膜20が表面に被覆して設けられた切削工具としてのエンドミル10であるため、被膜中にMoを含有することで被膜表面にMo酸化物が形成され、耐溶着性に優れると共に高硬度の被膜が得られることに加え、TiCrAl系被膜とTiCrAlMo系被膜の積層構造とすることで、耐摩耗性と耐溶着性を両立させることができる。すなわち、優れた耐摩耗性及び耐溶着性を兼ね備えたエンドミル10を提供することができる。   Moreover, according to the present embodiment, since the hard coating 20 is an end mill 10 as a cutting tool provided on the surface, Mo oxide is formed on the coating surface by containing Mo in the coating. In addition to being able to obtain a coating film having excellent welding resistance and a high hardness, it is possible to achieve both wear resistance and welding resistance by employing a laminated structure of a TiCrAl-based film and a TiCrAlMo-based film. That is, the end mill 10 having both excellent wear resistance and welding resistance can be provided.

以上、本発明の好適な実施例を図面に基づいて詳細に説明したが、本発明はこれに限定されるものではなく、その趣旨を逸脱しない範囲内において種々の変更が加えられて実施されるものである。   The preferred embodiments of the present invention have been described in detail with reference to the drawings. However, the present invention is not limited to these embodiments, and various modifications can be made without departing from the spirit of the present invention. Is.

10:エンドミル(切削工具)
20:切削工具用硬質被膜
22:第1被膜層
24:第2被膜層
d:総膜厚
d1:第1被膜層の膜厚
d2:第2被膜層の膜厚
10: End mill (cutting tool)
20: Hard coating for cutting tool 22: First coating layer 24: Second coating layer d: Total film thickness d1: Film thickness of first coating layer d2: Film thickness of second coating layer

Claims (2)

切削工具の表面に被覆して設けられる切削工具用硬質被膜であって、
TiaCrbAlcMo1-a-b-cの窒化物又は炭窒化物から成る第1被膜層と、TidCreAl1-d-eの窒化物又は炭窒化物から成る第2被膜層とが、交互に2層以上積層した多層膜であり、
前記第1被膜層に係る原子比aは0.2以上0.7以下の範囲内、bは0.01以上0.2以下の範囲内、cは0.01以上0.2以下の範囲内、1−a−b−cは0.1以上であり、
前記第2被膜層に係る原子比dは0.1以上0.7以下の範囲内、eは0.01以上0.2以下の範囲内であり、
且つ、前記第1被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、前記第2被膜層の膜厚は0.1μm以上5.0μm以下の範囲内、総膜厚は0.2μm以上10.0μm以下の範囲内である
ことを特徴とする切削工具用硬質被膜。
A hard coating for a cutting tool provided on the surface of a cutting tool,
And Ti a Cr b Al c Mo 1 -abc nitride or first coating layer made of carbonitride, and the Ti d Cr e Al 1-de nitride or the second coating layer made of carbonitride, alternating A multilayer film in which two or more layers are laminated,
The atomic ratio a related to the first coating layer is in the range of 0.2 to 0.7, b is in the range of 0.01 to 0.2, and c is in the range of 0.01 to 0.2. , 1-abc is 0.1 or more,
The atomic ratio d according to the second coating layer is in the range of 0.1 to 0.7, e is in the range of 0.01 to 0.2,
In addition, the thickness of the first coating layer is in the range of 0.1 μm to 5.0 μm, the thickness of the second coating layer is in the range of 0.1 μm to 5.0 μm, and the total thickness is 0.00. Hard coating for cutting tools, characterized in that it is in the range of 2 μm or more and 10.0 μm or less.
請求項1に記載の切削工具用硬質被膜が表面に被覆して設けられた硬質被膜被覆切削工具。   A hard coating-coated cutting tool provided with the hard coating for a cutting tool according to claim 1 coated on a surface thereof.
JP2010265979A 2010-11-30 2010-11-30 Hard coating for cutting tool and hard coating coated cutting tool Active JP5610219B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010265979A JP5610219B2 (en) 2010-11-30 2010-11-30 Hard coating for cutting tool and hard coating coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010265979A JP5610219B2 (en) 2010-11-30 2010-11-30 Hard coating for cutting tool and hard coating coated cutting tool

Publications (2)

Publication Number Publication Date
JP2012115924A JP2012115924A (en) 2012-06-21
JP5610219B2 true JP5610219B2 (en) 2014-10-22

Family

ID=46499404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010265979A Active JP5610219B2 (en) 2010-11-30 2010-11-30 Hard coating for cutting tool and hard coating coated cutting tool

Country Status (1)

Country Link
JP (1) JP5610219B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AR092945A1 (en) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach COATING FOR HIGH TEMPERATURE USES WITH TRIBOLOGICAL REQUEST
WO2015079505A1 (en) 2013-11-26 2015-06-04 オーエスジー株式会社 Hard lubricating coating film and hard lubricating coating film-covered tool
CN104004992B (en) * 2014-05-27 2016-01-13 江苏科技大学 Stainless steel hydrogen permeation barrier composite membrane and preparation method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3451877B2 (en) * 1997-03-10 2003-09-29 三菱マテリアル株式会社 Surface-coated cemented carbide cutting tool with excellent wear resistance
JP5060714B2 (en) * 2004-09-30 2012-10-31 株式会社神戸製鋼所 Hard coating excellent in wear resistance and oxidation resistance, and target for forming the hard coating
JP4672442B2 (en) * 2005-05-31 2011-04-20 オーエスジー株式会社 Hard laminate coating and hard laminate coating tool
JP5027760B2 (en) * 2008-08-20 2012-09-19 株式会社神戸製鋼所 Hard film forming member

Also Published As

Publication number Publication date
JP2012115924A (en) 2012-06-21

Similar Documents

Publication Publication Date Title
JP4576638B2 (en) Surface coated cutting tool
JP4072155B2 (en) Surface-coated cutting tool and manufacturing method thereof
WO2018078731A1 (en) Hard coating and member coated with hard coating
JP5395454B2 (en) Surface coated cutting tool
JP5315526B2 (en) Surface coated cutting tool
JP5315527B2 (en) Surface coated cutting tool
KR101626239B1 (en) Hard coating for cutting tool, and cutting tool coated with hard coating
JP5610219B2 (en) Hard coating for cutting tool and hard coating coated cutting tool
JP6120430B2 (en) Hard coating for machining tools and hard coating coated metal working tools
JP6168539B2 (en) Hard lubricant coating and hard lubricant coating tool
JP5610218B2 (en) Hard coating for cutting tool and hard coating coated cutting tool
JP2009148856A (en) Surface-coated cutting tool
JP6099224B2 (en) Hard lubricant coating and hard lubricant coating tool
JP6168540B2 (en) Hard lubricant coating and hard lubricant coating tool
JP4080481B2 (en) Surface-coated cutting tool and manufacturing method thereof
KR101727420B1 (en) Laminated coating film having excellent abrasion resistance
JP7110352B2 (en) Hard film and hard film-coated parts
JP6273161B2 (en) Laminated coating with excellent wear resistance
JP5762626B2 (en) Hard coating for cutting tool and hard coating coated cutting tool
JP6099225B2 (en) Hard lubricant coating and hard lubricant coating tool
JP2014188637A (en) Surface-coated cutting tool
JPWO2012105001A1 (en) Hard laminate coating
WO2013153640A1 (en) Hard coating for cutting tool, and cutting tool coated with hard coating
JP2015182156A (en) surface-coated cutting tool

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131021

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131028

TRDD Decision of grant or rejection written
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140724

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140729

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140820

R150 Certificate of patent or registration of utility model

Ref document number: 5610219

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250