JP5234925B2 - 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 - Google Patents
硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
Description
(TiaAlbSic)Oxからなり、
0.3≦a≦0.7、
0.3≦b≦0.7、
0≦c≦0.2、
a+b+c=1、
0.8≦[x/(2a+1.5b+2c)]≦1.2
(a,b,cは夫々Ti,Al,Siの原子比を示し、xはOの原子比を示す。)
を満たすところに特徴を有する。
(TiaCrdAlbSic)Oxからなり、
0.05≦a≦0.4、
0.1≦d≦0.85、
0≦b≦0.7、
0≦c≦0.2、
a+b+c+d=1、
0.8≦[x/(2a+1.5d+1.5b+2c)]≦1.2
(a,d,b,cはTi,Cr,Al,Siの原子比を示し、xはOの原子比を示す。)
を満たすところに特徴を有する。
(TiaAlbSic)Oxからなり、
0.3≦a≦0.7、
0.3≦b≦0.7、
0≦c≦0.2、
a+b+c=1、
0.8≦[x/(2a+1.5b+2c)]≦1.2
(a,b,cは夫々Ti,Al,Siの原子比を示し、xはOの原子比を示す。以下同じ)
を満たすことを特徴とする硬質皮膜を規定する。
(TiaCrdAlbSic)Oxからなり、
0.05≦a≦0.4、
0.1≦d≦0.85、
0≦b≦0.7、
0≦c≦0.2、
a+b+c+d=1、
0.8≦[x/(2a+1.5d+1.5b+2c)]≦1.2
(a,d,b,cはTi,Cr,Al,Siの原子比を示し、xはOの原子比を示す。以下同じ)
を満たすことを特徴とする硬質皮膜を規定する。
前記図1に示す装置を用いて、表1に示す成分組成の酸化物皮膜を形成し、耐摩耗性の評価を行った。
被削材:FCD400(生材)
速度:200m/分
深さ切込:3mm
送り:0.2mm/rev
ドライ切削、エアブロー無し
切削時間:5分
摩耗量:クレータ摩耗深さで評価
前記図1に示す装置を用いて、表2に示す中間層および本発明の硬質皮膜(酸化物皮膜)を基板上に形成し、密着性の評価を行った。
前記図1に示す装置を用いて、表3に示す中間層および本発明の硬質皮膜(酸化物皮膜)を基板上に形成し、密着性の評価を行った。
前記図1に示す装置を用いて、表4に示す中間層および本発明の硬質皮膜(酸化物皮膜)を基板上に形成し、成膜レートの評価を行った。
前記図1に示す装置を用いて、中間層としてTiAlNを形成し、次いでx値の異なる(Ti0.43Al0.5Si0.07)Oxまたは(Ti0.1Cr0.25Al0.65)Oxを酸化物皮膜として形成し、x/(2a+1.5b+2c)またはx/(2a+1.5d+1.5b+2c)が、耐摩耗性や成膜レートに及ぼす影響を調べた。
2 回転盤
3 回転テーブル
5 被処理体(基材)
6a,6b アーク蒸発源
6c,6d スパッタ蒸発源
7a,7b,7c,7d ヒータ
8a,8b アーク電源
8c,8d スパッタ電源
9a,9b,9c,9d マスフローコントローラー
10 バイアス電源
11 フィラメント型イオン源
12 フィラメント加熱用交流電源
13 放電用直流電源
Claims (7)
- 基材の表面にPVD法で形成される硬質皮膜であって、
(TiaAlbSic)Oxからなり、
0.4≦a≦0.7、
0.3≦b≦0.7、
0≦c≦0.2、
a+b+c=1、
0.99≦[x/(2a+1.5b+2c)]≦1.2
(a,b,cは夫々Ti,Al,Siの原子比を示し、xはOの原子比を示す。)
を満たすことを特徴とする硬質皮膜。 - 前記c(Si量)は0.03以上である請求項1に記載の硬質皮膜。
- 基材と、当該基材を被覆する請求項1または2に記載の硬質皮膜とを備えていることを特徴とする硬質皮膜被覆部材。
- 前記基材と請求項1または2に記載の硬質皮膜との間に配された、Ti、Crの1種以上を含む窒化物からなる中間層を更に備えている請求項3に記載の硬質皮膜被覆部材。
- 請求項1または2に記載の硬質皮膜が、前記中間層の表面を、基材温度500℃以上、酸素分圧1Pa以上の条件で酸化処理してから形成されたものである請求項4に記載の硬質皮膜被覆部材。
- 前記中間層が、基材側から請求項1または2に記載の硬質皮膜側に向けて、窒素が減少し酸素が増大する組成傾斜層を有する請求項4に記載の硬質皮膜被覆部材。
- 請求項1または2に記載の硬質皮膜の形成方法であって、酸素分圧が0.5Pa以上4Pa以下の雰囲気中でカソード放電型アークイオンプレーティング法により形成することを特徴とする硬質皮膜の形成方法。
Priority Applications (3)
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JP2008097131A JP5234925B2 (ja) | 2008-04-03 | 2008-04-03 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
US12/393,177 US8133598B2 (en) | 2008-04-03 | 2009-02-26 | Hard coating film, method of formation thereof, and material coated with hard coating film |
EP09003301.0A EP2107134B1 (en) | 2008-04-03 | 2009-03-06 | Hard coating film, method of formation thereof, and material coated with hard coating film |
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JP2008097131A JP5234925B2 (ja) | 2008-04-03 | 2008-04-03 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
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JP2012158693A Division JP5358006B2 (ja) | 2012-07-17 | 2012-07-17 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
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JP2009249664A JP2009249664A (ja) | 2009-10-29 |
JP5234925B2 true JP5234925B2 (ja) | 2013-07-10 |
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US (1) | US8133598B2 (ja) |
EP (1) | EP2107134B1 (ja) |
JP (1) | JP5234925B2 (ja) |
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EP3406761A1 (en) * | 2017-05-24 | 2018-11-28 | Walter Ag | A method for producing a coated cutting tool and a coated cutting tool |
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2008
- 2008-04-03 JP JP2008097131A patent/JP5234925B2/ja active Active
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2009
- 2009-02-26 US US12/393,177 patent/US8133598B2/en not_active Expired - Fee Related
- 2009-03-06 EP EP09003301.0A patent/EP2107134B1/en not_active Expired - Fee Related
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US20100215975A1 (en) | 2010-08-26 |
EP2107134A1 (en) | 2009-10-07 |
EP2107134B1 (en) | 2014-12-03 |
JP2009249664A (ja) | 2009-10-29 |
US8133598B2 (en) | 2012-03-13 |
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