JP7438243B2 - 基板をパッケージングするための平坦化方法 - Google Patents
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- 239000000758 substrate Substances 0.000 title claims description 119
- 238000000034 method Methods 0.000 title claims description 47
- 238000004806 packaging method and process Methods 0.000 title description 8
- 238000005498 polishing Methods 0.000 claims description 122
- 239000002002 slurry Substances 0.000 claims description 80
- 238000007517 polishing process Methods 0.000 claims description 58
- 239000002245 particle Substances 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 46
- 239000002270 dispersing agent Substances 0.000 claims description 28
- 238000000227 grinding Methods 0.000 claims description 26
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 19
- 239000003125 aqueous solvent Substances 0.000 claims description 17
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 12
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000002202 Polyethylene glycol Substances 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 229920001223 polyethylene glycol Polymers 0.000 claims description 8
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 7
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 7
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 7
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 229910001868 water Inorganic materials 0.000 claims description 7
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 6
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 229920001451 polypropylene glycol Polymers 0.000 claims description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 6
- 239000004952 Polyamide Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 5
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 235000011187 glycerol Nutrition 0.000 claims description 5
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 5
- 229920002647 polyamide Polymers 0.000 claims description 5
- 229920001296 polysiloxane Polymers 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052582 BN Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 3
- 239000012736 aqueous medium Substances 0.000 claims 2
- 238000004064 recycling Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 14
- 239000012530 fluid Substances 0.000 description 8
- 238000011084 recovery Methods 0.000 description 7
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 239000003002 pH adjusting agent Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- -1 Si<100> or Si<111>) Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229920002535 Polyethylene Glycol 1500 Polymers 0.000 description 1
- 229920000604 Polyethylene Glycol 200 Polymers 0.000 description 1
- 229920002565 Polyethylene Glycol 400 Polymers 0.000 description 1
- 229920002582 Polyethylene Glycol 600 Polymers 0.000 description 1
- 229920002593 Polyethylene Glycol 800 Polymers 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006336 epoxy molding compound Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002523 polyethylene Glycol 1000 Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- VUYXVWGKCKTUMF-UHFFFAOYSA-N tetratriacontaethylene glycol monomethyl ether Chemical compound COCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO VUYXVWGKCKTUMF-UHFFFAOYSA-N 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
Description
分野
本開示の実施形態は、概して、基板上の表面及び基板上に形成された層上の表面の平坦化に関する。より詳細には、本開示の実施形態は、高度なパッケージング用途のための基板上の表面の平坦化に関する。
化学機械平坦化(CMP)は、基板上に堆積されている材料の層を平坦化又は研磨するために高密度集積回路の製造において通常使用される1つのプロセスである。化学的機械的平坦化及び研磨は、粗面、凝集した材料、結晶格子の損傷、引っかき傷、及び汚染された層若しくは材料などの望ましくない表面トポグラフィー並びに表面欠陥を除去するのに有用である。化学的機械的平坦化は、フィーチャを埋めるために堆積された余分な材料を除去することによって基板上にフィーチャを形成し、その後のパターン化操作のために均一な表面を提供するのにも役立つ。
本開示の実施形態は、概して、基板上の表面及び基板上に形成された層上の表面の平坦化に関する。より詳細には、本開示の実施形態は、ポリマー材料層の表面などの高度なパッケージング用途用の基板上の表面の平坦化に関する。
本開示の上記の特徴を詳細に理解できるように、上記で簡単に要約された実装のより具体的な説明は、実装を参照することによって得ることができ、そのいくつかは添付の図面に示されている。しかしながら、本開示は他の等しく有効な実施形態も許容し得るため、添付の図面は、本開示の典型的な実施形態のみを示しており、従って、本開示の範囲を限定すると見なすべきではないことに留意されたい。
本開示の実施形態は、概して、基板上の表面及び基板上に形成された層上の表面の平坦化に関する。より詳細には、本開示の実施形態は、ポリマー材料層の表面など、高度なパッケージング用途用の基板上の表面の平坦化に関する。一実施形態では、本方法は、第1の研磨プロセス中に粉砕スラリの存在下で研磨表面に対して基板表面を機械的に研磨して、基板上に形成された材料の一部を除去すること;及び次に、第2の研磨プロセス中に研磨スラリの存在下で研磨表面に対して基板表面を化学的機械的に研磨して、第1の研磨プロセスによって引き起こされた粗さ又は不均一性を低減することを含む。
Claims (16)
- 基板の平坦化のための方法であって:
研磨装置内にポリマー材料を含む基板を配置することと;
基板の表面を第1の研磨プロセスに曝すことであって、前記第1の研磨プロセスが:
粉砕スラリを前記研磨装置の研磨パッドに供給することを含み、前記粉砕スラリは:
1.2μmと53μmとの間のグリットサイズを有し、酸化鉄(Fe2O3)、ダイヤモンド(C)、及び窒化ホウ素(BN)からなる群から選択される材料を含む、第1の複数のコロイド粒子;
非イオン性ポリマー分散剤;及び
水性溶媒を含む、
前記基板の表面を前記第1の研磨プロセスに曝すことと;
前記基板の表面を第2の研磨プロセスに曝すことであって、前記第2の研磨プロセスが:
研磨スラリを前記研磨装置の前記研磨パッドに供給することを含み、前記研磨スラリは:
25nmと500nmとの間のグリットサイズを有する第2の複数のコロイド粒子を含む、
前記基板の表面を前記第2の研磨プロセスに曝すことと
を含み、
前記非イオン性ポリマー分散剤が、ポリビニルアルコール、エチレングリコール、グリセリン、ポリエチレングリコール、ポリプロピレングリコール、及びポリビニルピロリドンからなる群から選択され、前記非イオン性ポリマー分散剤が、1:1と1:4との間の分散剤:水性溶媒の体積比で水性溶媒と混合される、
方法。 - 前記粉砕スラリ中の前記第1の複数のコロイド粒子の重量パーセントが2%と20%との間である、請求項1に記載の方法。
- 前記ポリマー材料が、ポリイミド、ポリアミド、パリレン、及びシリコーンからなる群から選択される、請求項1に記載の方法。
- 前記第2の複数のコロイド粒子が、25nmと250nmとの間のグリットサイズを有する、請求項1に記載の方法。
- 前記第2の複数のコロイド粒子が、シリカ、アルミナ、セリア、酸化鉄、ジルコニア、チタニア、及び炭化ケイ素からなる群から選択される材料を含む、請求項4に記載の方法。
- 前記第2の複数のコロイド粒子が、前記第1の複数のコロイド粒子の材料とは異なる材料から形成される、請求項5に記載の方法。
- 前記研磨スラリ中の前記第2の複数のコロイド粒子の重量パーセントが1%と25%との間である、請求項6に記載の方法。
- 前記研磨スラリが、水、アルミナ、及び水酸化カリウムのうちの1つ又は複数をさらに含む、請求項7に記載の方法。
- 基板の平坦化のための方法であって:
基板を第1の研磨プロセスに曝すことであって、前記第1の研磨プロセスが:
粉砕スラリで前記基板を研磨することを含み、前記粉砕スラリは、1μmと55μmとの間のグリットサイズを有し、酸化鉄(Fe2O3)、ダイヤモンド(C)、及び窒化ホウ素(BN)からなる群から選択される材料を含む、第1の複数のコロイド粒子を含む、前記基板を前記第1の研磨プロセスに曝すことと;
前記基板の表面を第2の研磨プロセスに曝すことであって、前記第2の研磨プロセスが:
研磨スラリで前記基板を研磨することを含み、前記研磨スラリは、20nmと500nmとの間のグリットサイズを有する第2の複数のコロイド粒子を含む、前記基板の表面を前記第2の研磨プロセスに曝すことと
を含み、
前記粉砕スラリ中の前記第1の複数のコロイド粒子の重量パーセントが2%と20%との間であり、
前記粉砕スラリが、ポリビニルアルコール、エチレングリコール、グリセリン、ポリエチレングリコール、ポリプロピレングリコール、及びポリビニルピロリドンからなる群から選択される非イオン性ポリマー分散剤をさらに含み、
前記非イオン性ポリマー分散剤が、1:1と1:4との間の分散剤:水性溶媒の体積比で水性溶媒と混合される、方法。 - 前記第2の複数のコロイド粒子が、シリカ、アルミナ、セリア、酸化鉄、ジルコニア、ダイヤモンド、窒化ホウ素、チタニア、及び炭化ケイ素からなる群から選択される材料を含む、請求項9に記載の方法。
- 前記第2の複数のコロイド粒子が、前記第1の複数のコロイド粒子の材料とは異なる材料を含む、請求項10に記載の方法。
- 前記研磨スラリ中の前記第2の複数のコロイド粒子の重量パーセントが1%と25%との間である、請求項9に記載の方法。
- 前記基板が、ポリイミド、ポリアミド、パリレン、又はシリコーンを含むポリマー基板である、請求項9に記載の方法。
- 基板の平坦化のための方法であって:
研磨装置に、ポリイミド、ポリアミド、パリレン、及びシリコーンからなる群から選択されるポリマー材料を含む基板を配置することと;
基板の表面を第1の研磨プロセスに曝すことであって、前記第1の研磨プロセスが:
粉砕スラリを前記研磨装置の研磨パッドに供給することを含み、前記研磨パッドは前記基板の表面に押し付けられ、毎分50回転と毎分100回転との間の速度で回転され、前記粉砕スラリは:
1.2μmと20μmとの間のグリットサイズ、及び2%と20%との間の重量パーセントを有し、酸化鉄(Fe2O3)、ダイヤモンド(C)、及び窒化ホウ素(BN)からなる群から選択される材料を含む、第1の複数のコロイド粒子;
ポリビニルピロリドンを含む非イオン性ポリマー分散剤;及び
水性媒体を含む、前記非イオン性ポリマー分散剤が、1:1の分散剤:水性溶媒の体積比で水性溶媒と混合される、
前記基板の表面を前記第1の研磨プロセスに曝すことと;
前記基板の表面を第2の研磨プロセスに曝すことであって、前記第2の研磨プロセスが:
研磨スラリを前記研磨装置の前記研磨パッドに供給することであって、前記研磨スラリは:
25nmと200nmとの間のグリットサイズ及び1%と25%との間の重量パーセントを有する第2の複数のコロイド粒子を含み、前記第2の複数のコロイド粒子が前記第1の複数のコロイド粒子と異なる材料から形成される、
前記研磨スラリを前記研磨装置の前記研磨パッドに供給すること;及び
前記第1及び前記第2の複数のコロイド粒子をリサイクルして、前記粉砕スラリ及び前記研磨スラリを再形成すること
を含む前記基板の表面を前記第2の研磨プロセスに曝すことと
を含む、方法。 - 基板の平坦化のための方法であって:
研磨装置内にポリマー材料を含む基板を配置することと;
基板の表面を第1の研磨プロセスに曝すことであって、前記第1の研磨プロセスが:
粉砕スラリを前記研磨装置の研磨パッドに供給することを含み、前記粉砕スラリは:
1.2μmと53μmとの間のグリットサイズを有する第1の複数のコロイド粒子;
非イオン性ポリマー分散剤;及び
水性溶媒を含む、
前記基板の表面を前記第1の研磨プロセスに曝すことと;
前記基板の表面を第2の研磨プロセスに曝すことであって、前記第2の研磨プロセスが:
研磨スラリを前記研磨装置の前記研磨パッドに供給することを含み、前記研磨スラリは:
25nmと500nmとの間のグリットサイズを有する第2の複数のコロイド粒子を含む、
前記基板の表面を前記第2の研磨プロセスに曝すことと
を含み、
前記非イオン性ポリマー分散剤が、ポリビニルアルコール、エチレングリコール、グリセリン、ポリエチレングリコール、ポリプロピレングリコール、及びポリビニルピロリドンからなる群から選択され、
前記非イオン性ポリマー分散剤が、1:1と1:4との間の分散剤:水性溶媒の体積比で水性溶媒と混合される、方法。 - 基板の平坦化のための方法であって:
研磨装置に、ポリイミド、ポリアミド、パリレン、及びシリコーンからなる群から選択されるポリマー材料を含む基板を配置することと;
基板の表面を第1の研磨プロセスに曝すことであって、前記第1の研磨プロセスが:
粉砕スラリを前記研磨装置の研磨パッドに供給することを含み、前記研磨パッドは前記基板の表面に押し付けられ、毎分50回転と毎分100回転との間の速度で回転され、前記粉砕スラリは:
1.2μmと20μmとの間のグリットサイズ、及び2%と20%との間の重量パーセントを有する第1の複数のコロイド粒子;
ポリビニルアルコール、エチレングリコール、グリセリン、ポリエチレングリコール、ポリプロピレングリコール、及びポリビニルピロリドンからなる群から選択される非イオン性ポリマー分散剤;及び
水性媒体を含む、
前記基板の表面を前記第1の研磨プロセスに曝すことと;
前記基板の表面を第2の研磨プロセスに曝すことであって、前記第2の研磨プロセスが:
研磨スラリを前記研磨装置の前記研磨パッドに供給することであって、前記研磨スラリは:
25nmと200nmとの間のグリットサイズ及び1%と25%との間の重量パーセントを有する第2の複数のコロイド粒子を含む、
前記研磨スラリを前記研磨装置の前記研磨パッドに供給すること;及び
前記第1及び前記第2の複数のコロイド粒子をリサイクルして、前記粉砕スラリ及び前記研磨スラリを再形成すること
を含む前記基板の表面を前記第2の研磨プロセスに曝すことと
を含み、
前記非イオン性ポリマー分散剤が、1:1と1:4との間の分散剤:水性溶媒の体積比で水性溶媒と混合される、方法。
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- 2020-06-02 JP JP2021574255A patent/JP7438243B2/ja active Active
- 2020-06-02 WO PCT/US2020/035778 patent/WO2020256932A1/en active Application Filing
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Also Published As
Publication number | Publication date |
---|---|
WO2020256932A1 (en) | 2020-12-24 |
TWI799329B (zh) | 2023-04-11 |
US11931855B2 (en) | 2024-03-19 |
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TW202113026A (zh) | 2021-04-01 |
JP2022536930A (ja) | 2022-08-22 |
US20200391343A1 (en) | 2020-12-17 |
KR20220019053A (ko) | 2022-02-15 |
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