JP5308145B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5308145B2 JP5308145B2 JP2008323581A JP2008323581A JP5308145B2 JP 5308145 B2 JP5308145 B2 JP 5308145B2 JP 2008323581 A JP2008323581 A JP 2008323581A JP 2008323581 A JP2008323581 A JP 2008323581A JP 5308145 B2 JP5308145 B2 JP 5308145B2
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- electrode
- hole
- bump electrode
- semiconductor device
- insulating film
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Description
本実施の形態1の半導体装置の構成を、図1〜図3を用いて説明する。図1には本実施の形態1の半導体装置が有するシリコン基板(半導体基板)1の要部断面図、図2にはそのシリコン基板1の主面(第1主面)s1側の要部平面図、図3にはそのシリコン基板1の裏面(第2主面)s2側の要部平面図を示している。シリコン基板1の主面s1と裏面s2とは、厚さ方向に沿って互いに反対側に位置している。
本実施の形態2では、上記実施の形態1の半導体装置における貫通電極の形状を変えて、異なる効果を発現する構造を説明する。本実施の形態2の半導体装置において、以下で説明する構成以外は上記実施の形態1の半導体装置と同様の構成であり、同様の効果を有する。
本実施の形態3の半導体装置について図45を用いて説明する。本実施の形態3の半導体装置では、上記実施の形態1および2のような貫通電極を有する半導体チップを複数積層した構成を有する。ここでは、上記図20を用いて説明したようにして、半導体チップを積層する。
2 層間絶縁膜
3 パッド
4 バンプ電極(第1電極)
5 バンプ電極用シード層(第1電極用シード層)
6 裏面電極(第2電極)
7 裏面電極用孔部(第2電極用孔部)
8 絶縁膜
9 裏面電極用シード層
10 バンプ電極用孔部(第1電極用孔部)
11,14〜16,18 フォトレジスト膜
12 接着層
13 サポートウェハ
17 保護絶縁膜
19 孔部
20 配線基板
21 電極
22 はんだバンプ
23 アンダーフィル樹脂
C1 第1チップ
C2 第2チップ
d1 突出部
p1,p2 要部
r1 突出部径
r2 孔部径
s1 主面(第1主面)
s2 裏面(第2主面)
t1 突出部長さ
t2 層間膜厚
v1,v2 テーパ角
Claims (10)
- 主面およびそれとは反対側にある裏面を有する半導体基板と、
前記半導体基板の主面上に形成された第1絶縁膜と、
前記第1絶縁膜に形成された第1孔部と、
前記半導体基板の裏面に形成された第2孔部と、
前記第1絶縁膜上に形成され、前記第1孔部を貫いて前記半導体基板の内部に達する突出部を有するバンプ電極と、
前記第2孔部の側面に形成された第2絶縁膜と、
前記第2孔部内に形成され、前記バンプ電極と電気的に接続された導体膜と、
を有し、
平面視において、前記突出部の径は、前記第2孔部の径よりも小さく、
前記導体膜は前記バンプ電極の底面および側面に接続されている、半導体装置。 - 平面視において、前記第1孔部の形状は円形状であり、前記バンプ電極の形状は多角形状である、請求項1記載の半導体装置。
- 平面視において、前記第1孔部の形状は円形状であり、前記バンプ電極の形状は円形状である、請求項1記載の半導体装置。
- 前記バンプ電極は、前記第2絶縁膜上に露出した部分において、側壁が傾斜を有するような形状を有している、請求項1記載の半導体装置。
- 前記バンプ電極は、前記第2絶縁膜上に露出した部分において、側壁が40度以上70度未満の傾斜を有している、請求項4記載の半導体装置。
- 前記バンプ電極は、前記第2絶縁膜上に露出した部分において、側壁が70度以上90度未満の傾斜を有している、請求項4記載の半導体装置。
- 前記第1絶縁膜および前記バンプ電極の間にパッドが形成されており、前記第2孔部は前記パッドに達していない、請求項1記載の半導体装置。
- 前記第1孔部は前記バンプ電極により完全に埋め込まれており、前記第2孔部は前記導体膜により完全には埋め込まれていない、請求項1記載の半導体装置。
- 前記バンプ電極は、第1シード層および第1金属膜を含んでおり、
前記第1シード層はTiまたはTiWを含み、
前記第1金属膜はAu、Cu、AlまたはNiを含む、請求項8記載の半導体装置。 - 前記導体膜は、第2シード層および第2金属膜を含んでおり、
前記第2シード層はTiおよびAuを含み、またはCrおよびAuを含み、
前記第2金属膜はAu、Cu、AlまたはNiを含む、請求項9記載の半導体装置。
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Families Citing this family (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7791199B2 (en) | 2006-11-22 | 2010-09-07 | Tessera, Inc. | Packaged semiconductor chips |
US8569876B2 (en) * | 2006-11-22 | 2013-10-29 | Tessera, Inc. | Packaged semiconductor chips with array |
JP5584474B2 (ja) | 2007-03-05 | 2014-09-03 | インヴェンサス・コーポレイション | 貫通ビアによって前面接点に接続された後面接点を有するチップ |
JP2010535427A (ja) | 2007-07-31 | 2010-11-18 | テッセラ,インコーポレイテッド | 貫通シリコンビアを使用する半導体実装プロセス |
JP5455538B2 (ja) * | 2008-10-21 | 2014-03-26 | キヤノン株式会社 | 半導体装置及びその製造方法 |
US8304863B2 (en) * | 2010-02-09 | 2012-11-06 | International Business Machines Corporation | Electromigration immune through-substrate vias |
JP2011187681A (ja) * | 2010-03-09 | 2011-09-22 | Toshiba Corp | 半導体装置の製造方法および半導体装置 |
KR101078745B1 (ko) * | 2010-06-09 | 2011-11-02 | 주식회사 하이닉스반도체 | 반도체 칩 및 그의 제조방법 |
US8791575B2 (en) | 2010-07-23 | 2014-07-29 | Tessera, Inc. | Microelectronic elements having metallic pads overlying vias |
US8796135B2 (en) * | 2010-07-23 | 2014-08-05 | Tessera, Inc. | Microelectronic elements with rear contacts connected with via first or via middle structures |
US9640437B2 (en) | 2010-07-23 | 2017-05-02 | Tessera, Inc. | Methods of forming semiconductor elements using micro-abrasive particle stream |
US8847380B2 (en) | 2010-09-17 | 2014-09-30 | Tessera, Inc. | Staged via formation from both sides of chip |
US8610259B2 (en) | 2010-09-17 | 2013-12-17 | Tessera, Inc. | Multi-function and shielded 3D interconnects |
US8736066B2 (en) | 2010-12-02 | 2014-05-27 | Tessera, Inc. | Stacked microelectronic assemby with TSVS formed in stages and carrier above chip |
US8637968B2 (en) | 2010-12-02 | 2014-01-28 | Tessera, Inc. | Stacked microelectronic assembly having interposer connecting active chips |
US8587126B2 (en) | 2010-12-02 | 2013-11-19 | Tessera, Inc. | Stacked microelectronic assembly with TSVs formed in stages with plural active chips |
US8610264B2 (en) | 2010-12-08 | 2013-12-17 | Tessera, Inc. | Compliant interconnects in wafers |
FR2969381A1 (fr) * | 2010-12-21 | 2012-06-22 | St Microelectronics Crolles 2 | Puce electronique comportant des piliers de connexion, et procede de fabrication |
JP5561190B2 (ja) * | 2011-01-31 | 2014-07-30 | 富士通株式会社 | 半導体装置、半導体装置の製造方法及び電子装置 |
JP2012231096A (ja) * | 2011-04-27 | 2012-11-22 | Elpida Memory Inc | 半導体装置及びその製造方法 |
US8853857B2 (en) * | 2011-05-05 | 2014-10-07 | International Business Machines Corporation | 3-D integration using multi stage vias |
JP5579126B2 (ja) * | 2011-05-30 | 2014-08-27 | 日本電子材料株式会社 | 三次元構成デバイス |
US8853072B2 (en) | 2011-06-06 | 2014-10-07 | Micron Technology, Inc. | Methods of forming through-substrate interconnects |
KR101918609B1 (ko) * | 2012-01-11 | 2018-11-14 | 삼성전자 주식회사 | 집적회로 소자 |
JP5970696B2 (ja) * | 2012-03-27 | 2016-08-17 | セイコーエプソン株式会社 | 電子デバイスの製造方法、電子デバイス |
FR2990297A1 (fr) * | 2012-05-07 | 2013-11-08 | St Microelectronics Crolles 2 | Empilement de structures semi-conductrices et procede de fabrication correspondant |
WO2014039546A1 (en) * | 2012-09-05 | 2014-03-13 | Research Triangle Institute, International | Electronic devices utilizing contact pads with protrusions and methods for fabrication |
KR102021884B1 (ko) * | 2012-09-25 | 2019-09-18 | 삼성전자주식회사 | 후면 본딩 구조체를 갖는 반도체 소자 |
US9159699B2 (en) * | 2012-11-13 | 2015-10-13 | Delta Electronics, Inc. | Interconnection structure having a via structure |
US9343400B2 (en) * | 2013-03-13 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dual damascene gap filling process |
JP5826782B2 (ja) * | 2013-03-19 | 2015-12-02 | 株式会社東芝 | 半導体装置の製造方法 |
US9443758B2 (en) * | 2013-12-11 | 2016-09-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Connecting techniques for stacked CMOS devices |
JP6254459B2 (ja) * | 2014-02-27 | 2017-12-27 | 東京エレクトロン株式会社 | 重合膜の耐薬品性改善方法、重合膜の成膜方法、成膜装置、および電子製品の製造方法 |
EP3422415B1 (en) * | 2014-02-28 | 2023-08-02 | LFoundry S.r.l. | Semiconductor device comprising a laterally diffused mos transistor |
US9355997B2 (en) | 2014-03-12 | 2016-05-31 | Invensas Corporation | Integrated circuit assemblies with reinforcement frames, and methods of manufacture |
US20150262902A1 (en) | 2014-03-12 | 2015-09-17 | Invensas Corporation | Integrated circuits protected by substrates with cavities, and methods of manufacture |
US9165793B1 (en) | 2014-05-02 | 2015-10-20 | Invensas Corporation | Making electrical components in handle wafers of integrated circuit packages |
US9455214B2 (en) | 2014-05-19 | 2016-09-27 | Globalfoundries Inc. | Wafer frontside-backside through silicon via |
US9741649B2 (en) | 2014-06-04 | 2017-08-22 | Invensas Corporation | Integrated interposer solutions for 2D and 3D IC packaging |
US9412806B2 (en) | 2014-06-13 | 2016-08-09 | Invensas Corporation | Making multilayer 3D capacitors using arrays of upstanding rods or ridges |
US9252127B1 (en) | 2014-07-10 | 2016-02-02 | Invensas Corporation | Microelectronic assemblies with integrated circuits and interposers with cavities, and methods of manufacture |
US9496154B2 (en) | 2014-09-16 | 2016-11-15 | Invensas Corporation | Use of underfill tape in microelectronic components, and microelectronic components with cavities coupled to through-substrate vias |
JP6436531B2 (ja) * | 2015-01-30 | 2018-12-12 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
US9478504B1 (en) | 2015-06-19 | 2016-10-25 | Invensas Corporation | Microelectronic assemblies with cavities, and methods of fabrication |
JP6290830B6 (ja) * | 2015-06-22 | 2023-10-11 | セイコーエプソン株式会社 | 半導体装置、センサーおよび電子デバイス |
CN105405821A (zh) * | 2015-12-16 | 2016-03-16 | 华进半导体封装先导技术研发中心有限公司 | 一种晶圆级tsv封装结构及封装工艺 |
US11195768B2 (en) * | 2016-06-03 | 2021-12-07 | Dai Nippon Printing Co., Ltd. | Through electrode substrate, manufacturing method thereof and mounting substrate |
US10600691B2 (en) | 2016-10-07 | 2020-03-24 | Xcelsis Corporation | 3D chip sharing power interconnect layer |
US10600735B2 (en) | 2016-10-07 | 2020-03-24 | Xcelsis Corporation | 3D chip sharing data bus |
KR102393946B1 (ko) | 2016-10-07 | 2022-05-03 | 엑셀시스 코포레이션 | 직접-접합된 네이티브 상호접속부 및 능동 베이스 다이 |
US10600780B2 (en) | 2016-10-07 | 2020-03-24 | Xcelsis Corporation | 3D chip sharing data bus circuit |
US10672745B2 (en) | 2016-10-07 | 2020-06-02 | Xcelsis Corporation | 3D processor |
US10580757B2 (en) | 2016-10-07 | 2020-03-03 | Xcelsis Corporation | Face-to-face mounted IC dies with orthogonal top interconnect layers |
US10672744B2 (en) | 2016-10-07 | 2020-06-02 | Xcelsis Corporation | 3D compute circuit with high density Z-axis interconnects |
US10672743B2 (en) | 2016-10-07 | 2020-06-02 | Xcelsis Corporation | 3D Compute circuit with high density z-axis interconnects |
US10580735B2 (en) | 2016-10-07 | 2020-03-03 | Xcelsis Corporation | Stacked IC structure with system level wiring on multiple sides of the IC die |
US10586786B2 (en) | 2016-10-07 | 2020-03-10 | Xcelsis Corporation | 3D chip sharing clock interconnect layer |
US10719762B2 (en) | 2017-08-03 | 2020-07-21 | Xcelsis Corporation | Three dimensional chip structure implementing machine trained network |
US10593667B2 (en) | 2016-10-07 | 2020-03-17 | Xcelsis Corporation | 3D chip with shielded clock lines |
US10672663B2 (en) | 2016-10-07 | 2020-06-02 | Xcelsis Corporation | 3D chip sharing power circuit |
EP3324436B1 (en) * | 2016-11-21 | 2020-08-05 | IMEC vzw | An integrated circuit chip with power delivery network on the backside of the chip |
JP6863574B2 (ja) * | 2017-02-22 | 2021-04-21 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
US10418311B2 (en) | 2017-03-28 | 2019-09-17 | Micron Technology, Inc. | Method of forming vias using silicon on insulator substrate |
US10325870B2 (en) * | 2017-05-09 | 2019-06-18 | International Business Machines Corporation | Through-substrate-vias with self-aligned solder bumps |
US10750614B2 (en) | 2017-06-12 | 2020-08-18 | Invensas Corporation | Deformable electrical contacts with conformable target pads |
DE102017212763A1 (de) | 2017-07-25 | 2019-01-31 | Infineon Technologies Ag | Eine Vorrichtung und ein Verfahren zum Herstellen einer Vorrichtung |
CN110246799B (zh) * | 2018-03-07 | 2021-06-25 | 长鑫存储技术有限公司 | 连接结构及其制造方法、半导体器件 |
JP7353748B2 (ja) * | 2018-11-29 | 2023-10-02 | キヤノン株式会社 | 半導体装置の製造方法および半導体装置 |
CN110010548B (zh) * | 2018-12-26 | 2021-08-24 | 浙江集迈科微电子有限公司 | 一种底部带焊盘的空腔结构制作方法 |
CN109817659B (zh) * | 2019-02-15 | 2021-08-06 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
CN110211931A (zh) * | 2019-06-14 | 2019-09-06 | 上海先方半导体有限公司 | 一种三维封装结构及其制造方法 |
US11599299B2 (en) | 2019-11-19 | 2023-03-07 | Invensas Llc | 3D memory circuit |
US20220287179A1 (en) * | 2021-03-04 | 2022-09-08 | Raytheon Company | Interconnect and Method for Manufacturing the Same |
CN115621192A (zh) * | 2021-07-13 | 2023-01-17 | 长鑫存储技术有限公司 | 一种半导体结构及其形成方法 |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5973396A (en) * | 1996-02-16 | 1999-10-26 | Micron Technology, Inc. | Surface mount IC using silicon vias in an area array format or same size as die array |
EP0926723B1 (en) * | 1997-11-26 | 2007-01-17 | STMicroelectronics S.r.l. | Process for forming front-back through contacts in micro-integrated electronic devices |
US6833613B1 (en) * | 1997-12-18 | 2004-12-21 | Micron Technology, Inc. | Stacked semiconductor package having laser machined contacts |
JP3918350B2 (ja) | 1999-03-05 | 2007-05-23 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
KR20010080327A (ko) * | 1999-09-08 | 2001-08-22 | 모리시타 요이찌 | 표시장치 및 그 제조방법 |
US7087975B2 (en) * | 2000-12-28 | 2006-08-08 | Infineon Technologies Ag | Area efficient stacking of antifuses in semiconductor device |
US6912078B2 (en) * | 2001-03-16 | 2005-06-28 | Corning Incorporated | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
JP4053257B2 (ja) * | 2001-06-14 | 2008-02-27 | 新光電気工業株式会社 | 半導体装置の製造方法 |
US7354798B2 (en) * | 2002-12-20 | 2008-04-08 | International Business Machines Corporation | Three-dimensional device fabrication method |
KR100497111B1 (ko) * | 2003-03-25 | 2005-06-28 | 삼성전자주식회사 | 웨이퍼 레벨 칩 스케일 패키지, 그를 적층한 적층 패키지및 그 제조 방법 |
JP4074862B2 (ja) * | 2004-03-24 | 2008-04-16 | ローム株式会社 | 半導体装置の製造方法、半導体装置、および半導体チップ |
JP4439976B2 (ja) * | 2004-03-31 | 2010-03-24 | Necエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP4441328B2 (ja) * | 2004-05-25 | 2010-03-31 | 株式会社ルネサステクノロジ | 半導体装置及びその製造方法 |
JP2006012953A (ja) * | 2004-06-23 | 2006-01-12 | Sharp Corp | 貫通電極の形成方法、貫通電極および半導体装置 |
US7232754B2 (en) * | 2004-06-29 | 2007-06-19 | Micron Technology, Inc. | Microelectronic devices and methods for forming interconnects in microelectronic devices |
JP2006041148A (ja) * | 2004-07-27 | 2006-02-09 | Seiko Epson Corp | 半導体装置の製造方法、半導体装置、及び電子機器 |
US7276794B2 (en) * | 2005-03-02 | 2007-10-02 | Endevco Corporation | Junction-isolated vias |
US7767493B2 (en) * | 2005-06-14 | 2010-08-03 | John Trezza | Post & penetration interconnection |
JP4694305B2 (ja) | 2005-08-16 | 2011-06-08 | ルネサスエレクトロニクス株式会社 | 半導体ウエハの製造方法 |
JP2007067216A (ja) * | 2005-08-31 | 2007-03-15 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法、回路基板およびその製造方法 |
JP2007073919A (ja) | 2005-09-06 | 2007-03-22 | Tanemasa Asano | 突起電極の製造方法およびそれに用いられるベーク装置ならびに電子装置 |
JP4609317B2 (ja) * | 2005-12-28 | 2011-01-12 | カシオ計算機株式会社 | 回路基板 |
US7563714B2 (en) * | 2006-01-13 | 2009-07-21 | International Business Machines Corporation | Low resistance and inductance backside through vias and methods of fabricating same |
TWI287274B (en) * | 2006-01-25 | 2007-09-21 | Advanced Semiconductor Eng | Three dimensional package and method of making the same |
KR100884238B1 (ko) * | 2006-05-22 | 2009-02-17 | 삼성전자주식회사 | 앵커형 결합 구조를 갖는 반도체 패키지 및 그 제조 방법 |
US7473577B2 (en) * | 2006-08-11 | 2009-01-06 | International Business Machines Corporation | Integrated chip carrier with compliant interconnect |
JP2008053568A (ja) * | 2006-08-25 | 2008-03-06 | Nec Electronics Corp | 半導体装置および半導体装置の製造方法 |
JP5117698B2 (ja) * | 2006-09-27 | 2013-01-16 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
KR100843240B1 (ko) * | 2007-03-23 | 2008-07-03 | 삼성전자주식회사 | 웨이퍼 레벨 스택을 위한 반도체 소자 및 웨이퍼 레벨스택을 위한 반도체 소자의 관통전극 형성방법 |
TWI351751B (en) * | 2007-06-22 | 2011-11-01 | Ind Tech Res Inst | Self-aligned wafer or chip structure, self-aligned |
KR20090047776A (ko) * | 2007-11-08 | 2009-05-13 | 삼성전자주식회사 | 반도체 소자 및 그 형성 방법 |
US8138036B2 (en) * | 2008-08-08 | 2012-03-20 | International Business Machines Corporation | Through silicon via and method of fabricating same |
KR20100020718A (ko) * | 2008-08-13 | 2010-02-23 | 삼성전자주식회사 | 반도체 칩, 그 스택 구조 및 이들의 제조 방법 |
US7786008B2 (en) * | 2008-12-12 | 2010-08-31 | Stats Chippac Ltd. | Integrated circuit packaging system having through silicon vias with partial depth metal fill regions and method of manufacture thereof |
-
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