JP4937842B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP4937842B2 JP4937842B2 JP2007150289A JP2007150289A JP4937842B2 JP 4937842 B2 JP4937842 B2 JP 4937842B2 JP 2007150289 A JP2007150289 A JP 2007150289A JP 2007150289 A JP2007150289 A JP 2007150289A JP 4937842 B2 JP4937842 B2 JP 4937842B2
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- Prior art keywords
- hole
- insulating film
- semiconductor
- semiconductor substrate
- pad
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Description
本実施の形態1では、マイコンチップのように高集積回路を搭載した半導体装置を例に挙げて図面を参照しながら説明する。
前記実施の形態1では、マイコンチップのように高集積回路を形成した半導体チップについて説明したが、本実施の形態2ではインターポーザチップのように再配線を行なうための半導体チップについて説明する。
前記実施の形態1では絶縁膜8を使用する例について説明しているが、本実施の形態3では絶縁膜8に代えて感光性絶縁膜を用いる例について説明する。以下に、本実施の形態3における半導体チップの製造方法について説明する。
本実施の形態4では、例えば、前記実施の形態1〜3で製造した半導体チップを3次元的に積層形成したSiP構造の半導体装置について説明する。
このように半導体チップ20aおよび半導体チップ20bをそれぞれ形成した後、積層することにより半導体装置を形成することができる。なお、半導体チップ20b上に半導体チップ20cを積層する場合も同様である。
1a 第1面
1b 第2面
2 層間絶縁膜
3 パッド
4 接着層
5 支持基板
6 レジスト膜
6a 開口部
7 第1孔
8 絶縁膜
8a 感光性絶縁膜
9 アルミニウム膜
10 レジスト膜
10a 開口部
11 第2孔
12 シード層
13 レジスト膜
14 めっき膜
15 導体膜
16 レジスト膜
17 貫通電極
17a 貫通電極
17b 貫通電極
17c 貫通電極
18 スタッドバンプ電極
18a スタッドバンプ電極
18b スタッドバンプ電極
18c スタッドバンプ電極
19 クラック
20a 半導体チップ
20b 半導体チップ
20c 半導体チップ
21 配線基板
22 電極
23 半田バンプ電極
24 封止用接着材
Claims (20)
- (a)半導体基板の第1面に形成された半導体素子上に層間絶縁膜を形成し、前記層間絶縁膜の内部に形成された配線を介して前記半導体素子と電気的に接続するパッドを前記層間絶縁膜の表面に形成する工程と、
(b)前記半導体基板の前記第1面とは反対側にある第2面上に第1レジスト膜を形成する工程と、
(c)前記パッドと対向する位置に第1開口部を有するように前記第1レジスト膜をパターニングする工程と、
(d)前記第1開口部を形成した前記第1レジスト膜をマスクにして前記半導体基板をエッチングすることにより、底面に前記層間絶縁膜を露出する第1孔を前記半導体基板に形成する工程と、
(e)前記第1レジスト膜を除去する工程と、
(f)前記第1孔の底面に露出する前記層間絶縁膜をエッチングすることにより、前記第1孔の底面を前記層間絶縁膜上であって前記半導体基板と前記層間絶縁膜の境界よりも前記パッドに近い位置に形成する工程と、
(g)前記第1孔の内壁を含む前記半導体基板の前記第2面上に絶縁膜を形成する工程と、
(h)前記絶縁膜上に第2レジスト膜を形成する工程と、
(i)前記第1孔の底面に前記第1孔の径よりも小径の第2開口部を有するように前記第2レジスト膜をパターニングする工程と、
(j)前記第2開口部を形成した前記第2レジスト膜をマスクして前記絶縁膜および前記層間絶縁膜をエッチングすることにより、底面に前記パッドを露出する第2孔を形成する工程と、
(k)前記第1孔の内壁および前記第2孔の内壁を含む前記半導体基板の前記第2面に導体膜を形成し、前記導体膜をパターニングすることにより、前記半導体基板の前記第2面から前記第1面に達し、かつ、前記パッドに電気的に接続する貫通電極を形成する工程とを備え、
前記層間絶縁膜の前記半導体基板側の面は、前記第1孔の底面と前記半導体基板の前記第1面による段差を反映して段差形状になっており、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差および前記第1孔の底面と前記第2孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記(f)工程は、前記半導体基板に形成された前記第1孔をマスクにして前記第1孔の底面に露出する前記層間絶縁膜をエッチングすることを特徴とする半導体装置の製造方法。 - 請求項3記載の半導体装置の製造方法であって、
前記(f)工程では、新たなレジスト膜によるマスクを使用しない一方、前記(d)工程でのエッチングで使用するエッチングガスと前記(f)工程でのエッチングで使用するエッチングガスとは異なることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記(d)工程後における前記第1孔の底面の径と、前記(f)工程後における前記第1孔の底面の径とは等しいことを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記(g)工程後、前記第1孔の底面と前記パッドとの間に残存する前記層間絶縁膜と前記第1孔の底面上に形成されている前記絶縁膜を合わせた膜厚は、前記(j)工程でマスクとして使用される前記第2レジスト膜が消失する前に前記第2孔が形成される膜厚であることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記(c)工程は、赤外顕微鏡を用いて前記パッドと対向する位置に前記第1開口部を有するように前記第1レジスト膜をパターニングすることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、さらに、
(l)前記貫通電極と接続する側とは反対側の前記パッド上にバンプ電極を形成する工程とを備えることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
前記貫通電極は、内部が空洞になっていることを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
(m)第1半導体ウェハにある個々のチップ領域に対して前記(a)工程から前記(k)工程までの処理を実施することにより前記第1半導体ウェハの個々のチップ領域に形成された第1パッドに電気的に接続する第1貫通電極を形成した後、前記第1貫通電極と接続する側とは反対側の前記第1パッド上に第1バンプ電極を形成する工程と、
(n)第2半導体ウェハにある個々のチップ領域に対して前記(a)工程から前記(k)工程までの処理を実施することにより前記第2半導体ウェハの個々のチップ領域に形成された第2パッドに電気的に接続する第2貫通電極を形成した後、前記第2貫通電極と接続する側とは反対側の前記第2パッド上に第2バンプ電極を形成する工程と、
(o)前記第1半導体ウェハ上に前記第2半導体ウェハを積層して電気的に接続する工程とを備え、
前記(o)工程は、前記第2半導体ウェハに形成されている前記第2バンプ電極を前記第1半導体ウェハに形成した前記第1貫通電極に圧接によって変形注入することにより、前記第1半導体ウェハと前記第2半導体ウェハとを電気的に接続することを特徴とする半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法であって、
(p)前記半導体基板として第1半導体ウェハを用い、前記第1半導体ウェハにある個々のチップ領域に対して前記(a)工程から前記(k)工程までの処理を実施することにより前記第1半導体ウェハの個々のチップ領域に形成された第1パッドに電気的に接続する第1貫通電極を形成した後、前記第1半導体ウェハを複数の半導体チップに個片化して第1半導体チップを取得する工程と、
(q)前記第1半導体チップにおいて、前記第1貫通電極と接続する側とは反対側の前記第1パッド上に第1バンプ電極を形成する工程と、
(r)前記半導体基板として第2半導体ウェハを用い、前記第2半導体ウェハにある個々のチップ領域に対して前記(a)工程から前記(k)工程までの処理を実施することにより前記第2半導体ウェハの個々のチップ領域に形成された第2パッドに電気的に接続する第2貫通電極を形成した後、前記第2半導体ウェハを複数の半導体チップに個片化して第2半導体チップを取得する工程と、
(s)前記第2半導体チップにおいて、前記第2貫通電極と接続する側とは反対側の前記第2パッド上に第2バンプ電極を形成する工程と、
(t)前記第1半導体チップ上に前記第2半導体チップを積層して電気的に接続する工程とを備え、
前記(t)工程は、前記第2半導体チップに形成されている前記第2バンプ電極を前記第1半導体チップに形成した前記第1貫通電極に圧接によって変形注入することにより、前記第1半導体チップと前記第2半導体チップとを電気的に接続することを特徴とする半導体装置の製造方法。 - (a)半導体基板の第1面に形成された半導体素子上に層間絶縁膜を形成し、前記層間絶縁膜の内部に形成された配線を介して前記半導体素子と電気的に接続するパッドを前記層間絶縁膜の表面に形成する工程と、
(b)前記半導体基板の前記第1面とは反対側にある第2面上に第1レジスト膜を形成する工程と、
(c)前記パッドと対向する位置に第1開口部を有するように前記第1レジスト膜をパターニングする工程と、
(d)前記第1開口部を形成した前記第1レジスト膜をマスクにして前記半導体基板をエッチングすることにより、底面に前記層間絶縁膜を露出する第1孔を前記半導体基板に形成する工程と、
(e)前記第1レジスト膜を除去する工程と、
(f)前記第1孔の底面に露出する前記層間絶縁膜をエッチングすることにより、前記第1孔の底面を前記層間絶縁膜上であって前記半導体基板と前記層間絶縁膜の境界よりも前記パッドに近い位置に形成する工程と、
(g)前記第1孔の内壁を含む前記半導体基板の前記第2面上に感光性絶縁膜を形成する工程と、
(h)前記第1孔の底面に前記第1孔の径よりも小径の第2開口部を有するように前記感光性絶縁膜をパターニングする工程と、
(i)前記第2開口部を形成した感光性絶縁膜をマスクして前記層間絶縁膜をエッチングすることにより、底面に前記パッドを露出する第2孔を形成する工程と、
(j)前記第1孔の内壁および前記第2孔の内壁を含む前記半導体基板の前記第2面に導体膜を形成し、前記導体膜をパターニングすることにより、前記半導体基板の前記第2面から前記第1面に達し、かつ、前記パッドに電気的に接続する貫通電極を形成する工程とを備え、
前記層間絶縁膜の前記半導体基板側の面は、前記第1孔の底面と前記半導体基板の前記第1面による段差を反映して段差形状になっており、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法であって、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差および前記第1孔の底面と前記第2孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法であって、
前記(f)工程後、前記第1孔の底面と前記パッドとの間に残存する前記層間絶縁膜の膜厚は、前記(i)工程でマスクとして使用される前記感光性絶縁膜が消失する前に前記第2孔が形成される膜厚であることを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法であって、
前記貫通電極は、内部が空洞になっていることを特徴とする半導体装置の製造方法。 - (a)半導体基板と、
(b)前記半導体基板の第1面に形成された半導体素子と、
(c)前記半導体基板の前記第1面上に形成された層間絶縁膜と、
(d)前記層間絶縁膜上に形成されたパッドと、
(e)前記パッド上に形成されたバンプ電極と、
(f)前記半導体基板の前記第1面とは反対側にある第2面から前記パッドに達する貫通電極とを備え、
前記貫通電極は、
(f1)前記半導体基板の前記第1面とは反対側にある前記第2面から前記層間絶縁膜に達する第1孔であって、前記第1孔の底面が前記層間絶縁膜と前記半導体基板の境界よりも前記パッドに近い位置まで形成されている前記第1孔と、
(f2)前記第1孔の孔径よりも小さく、前記第1孔の底面から前記パッドに達するように形成された第2孔と、
(f3)前記第1孔の底面および側面と前記半導体基板の前記第2面上に形成された絶縁膜と、
(f4)前記第2孔の底面および側面と、前記絶縁膜を介した前記第1孔の底面および側面と前記半導体基板の前記第2面上に形成され、前記パッドと電気的に接続された導体膜とを有し、
前記層間絶縁膜の前記半導体基板側の面は、前記第1孔の底面と前記半導体基板の前記第1面による段差を反映して段差形状になっており、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置。 - 請求項16記載の半導体装置であって、
前記導体膜の表面は、前記半導体基板の前記第2面と前記第1孔の底面による段差および前記第1孔の底面と前記第2孔の底面による段差を反映して段差形状になっていることを特徴とする半導体装置。 - 請求項16記載の半導体装置であって、
前記貫通電極は、内部が空洞となっていることを特徴とする半導体装置。 - 請求項16記載の半導体装置であって、
前記半導体基板の前記第2面側から前記貫通電極を見ると、平面的に、前記第1孔によるリングと前記第1孔よりも小さい前記第2孔によるリングにより2重リングになっていることを特徴とする半導体装置。 - 請求項16記載の半導体装置であって、
前記第2孔の底面である前記パッド上に形成されている前記導電膜の膜厚をaとし、前記第1孔の底面と前記パッド間に形成されている前記層間絶縁膜の膜厚および前記第1孔の底面上に形成されている前記絶縁膜の膜厚とを合わせた膜厚をbとするとき、a/(a+b)の値が0.11以上であることを特徴とする半導体装置。
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JP4376715B2 (ja) * | 2004-07-16 | 2009-12-02 | 三洋電機株式会社 | 半導体装置の製造方法 |
JP4373866B2 (ja) | 2004-07-16 | 2009-11-25 | 三洋電機株式会社 | 半導体装置の製造方法 |
JP4365750B2 (ja) * | 2004-08-20 | 2009-11-18 | ローム株式会社 | 半導体チップの製造方法、および半導体装置の製造方法 |
JP2006114545A (ja) * | 2004-10-12 | 2006-04-27 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JP4547247B2 (ja) | 2004-12-17 | 2010-09-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP4409455B2 (ja) * | 2005-01-31 | 2010-02-03 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP2006222138A (ja) | 2005-02-08 | 2006-08-24 | Matsushita Electric Works Ltd | 貫通電極の形成方法 |
JP4551255B2 (ja) | 2005-03-31 | 2010-09-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP4694305B2 (ja) * | 2005-08-16 | 2011-06-08 | ルネサスエレクトロニクス株式会社 | 半導体ウエハの製造方法 |
JP4380718B2 (ja) * | 2007-03-15 | 2009-12-09 | ソニー株式会社 | 半導体装置の製造方法 |
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2007
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JP2008305897A (ja) | 2008-12-18 |
KR101191492B1 (ko) | 2012-10-15 |
CN101320702A (zh) | 2008-12-10 |
CN101320702B (zh) | 2010-07-21 |
US7973415B2 (en) | 2011-07-05 |
US8324736B2 (en) | 2012-12-04 |
TWI357111B (ja) | 2012-01-21 |
KR20080107288A (ko) | 2008-12-10 |
US20090014843A1 (en) | 2009-01-15 |
US20110233773A1 (en) | 2011-09-29 |
TW200908152A (en) | 2009-02-16 |
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