JP2021503714A - 高圧処理システムのためのコンデンサシステム - Google Patents
高圧処理システムのためのコンデンサシステム Download PDFInfo
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- JP2021503714A JP2021503714A JP2020526345A JP2020526345A JP2021503714A JP 2021503714 A JP2021503714 A JP 2021503714A JP 2020526345 A JP2020526345 A JP 2020526345A JP 2020526345 A JP2020526345 A JP 2020526345A JP 2021503714 A JP2021503714 A JP 2021503714A
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- processing chamber
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- capacitor
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- 239000003990 capacitor Substances 0.000 title claims abstract description 47
- 238000009931 pascalization Methods 0.000 title abstract description 7
- 239000012530 fluid Substances 0.000 claims abstract description 117
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 17
- 238000010586 diagram Methods 0.000 abstract description 2
- 230000005494 condensation Effects 0.000 description 15
- 238000009833 condensation Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- 238000010926 purge Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02101—Cleaning only involving supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/008—Processes carried out under supercritical conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/002—Component parts of these vessels not mentioned in B01J3/004, B01J3/006, B01J3/02 - B01J3/08; Measures taken in conjunction with the process to be carried out, e.g. safety measures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16T—STEAM TRAPS OR LIKE APPARATUS FOR DRAINING-OFF LIQUIDS FROM ENCLOSURES PREDOMINANTLY CONTAINING GASES OR VAPOURS
- F16T1/00—Steam traps or like apparatus for draining-off liquids from enclosures predominantly containing gases or vapours, e.g. gas lines, steam lines, containers
- F16T1/38—Component parts; Accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B29/00—Steam boilers of forced-flow type
- F22B29/06—Steam boilers of forced-flow type of once-through type, i.e. built-up from tubes receiving water at one end and delivering superheated steam at the other end of the tubes
- F22B29/08—Steam boilers of forced-flow type of once-through type, i.e. built-up from tubes receiving water at one end and delivering superheated steam at the other end of the tubes operating with fixed point of final state of complete evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00162—Controlling or regulating processes controlling the pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00495—Means for heating or cooling the reaction vessels
Abstract
Description
Claims (15)
- 処理チャンバと、
第1の導管を介して前記処理チャンバと流体連結するボイラと、
前記ボイラと前記処理チャンバとの間の前記第1の導管の上に配置された第1のバルブと、
第2の導管を介して前記処理チャンバと流体連結するコンデンサと、
前記コンデンサと前記処理チャンバとの間の前記第2の導管の上に配置された第2のバルブと、
第3の導管を介して前記コンデンサと流体連結している熱交換器と、
前記コンデンサと前記熱交換器との間の前記第3の導管の上に配置された第3のバルブと
を備える、基板処理システム。 - 前記処理チャンバが単一の基板処理チャンバである、請求項1に記載のシステム。
- 前記処理チャンバがバッチ基板処理チャンバである、請求項1に記載のシステム。
- 前記ボイラが、水源、二酸化炭素源、またはアンモニア源のうちの1つまたは複数と流体連結している、請求項1に記載のシステム。
- 前記処理チャンバと前記コンデンサとの間の前記第2の導管の上に配置された第2の熱交換器
をさらに備える、請求項1に記載のシステム。 - 前記第2のバルブが、前記処理チャンバと前記第2の熱交換器との間の前記第2の導管の上に配置される、請求項5に記載のシステム。
- 逆止バルブが、前記第2の熱交換器と前記第2のバルブとの間の前記第2の導管の上に配置される、請求項6に記載のシステム。
- 前記第2の導管から延びる第4の導管の上に配置された第3の熱交換器
をさらに備える、請求項5に記載のシステム。 - 第4のバルブが、前記第2の熱交換器と前記第3の熱交換器との間の前記第4の導管の上に配置される、請求項8に記載のシステム。
- 前記コンデンサがヒートシンクを含む、請求項1に記載のシステム。
- 前記コンデンサと動作可能に連結するレベルセンサ
をさらに備える、請求項1に記載のシステム。 - 処理チャンバと、
第1の導管を介して前記処理チャンバと流体連結するボイラと、
前記ボイラと前記処理チャンバとの間の前記第1の導管の上に配置された第1のバルブと、
第2の導管を介して前記処理チャンバと流体連結するコンデンサと、
前記コンデンサと前記処理チャンバとの間の前記第2の導管の上に配置された第2のバルブと、
前記処理チャンバと前記コンデンサとの間の前記第2の導管の上に配置された第1の熱交換器と、
第3の導管を介して前記コンデンサと流体連結する流体収集ユニットと、
前記コンデンサと前記流体収集ユニットとの間の前記第3の導管の上に配置された第2の熱交換器と、
前記コンデンサと前記第2の熱交換器との間の前記第3の導管の上に配置された第3のバルブと
を備える、基板処理システム。 - 前記第2の導管から延びる第4の導管の上に配置された第3の熱交換器
をさらに備える、請求項12に記載のシステム。 - 第4のバルブが、前記第1の熱交換器と前記第3の熱交換器との間の前記第4の導管の上に配置される、請求項13に記載のシステム。
- 処理チャンバから延びる導管を加熱することと、
前記処理チャンバと流体連結するボイラを加熱することと、
前記処理チャンバの上流に位置する導管の上に配置されたバルブを閉じることと、
前記処理チャンバから下流に位置する導管の上に配置されたバルブを開くことと、
基板を前記処理チャンバ内に位置付けることと、
前記処理チャンバを加熱することと、
前記処理チャンバから下流に位置する導管の上に配置された前記バルブを閉じることと、
前記ボイラによって生成された流体が前記処理チャンバを加圧できるように、前記処理チャンバから上流に位置する導管の上に配置された前記バルブを開くことと、
前記処理チャンバから下流に位置する導管の上に配置された前記バルブを開くことと、
前記処理チャンバからコンデンサへ前記流体を流すことと
を含む、基板処理方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201762587916P | 2017-11-17 | 2017-11-17 | |
US62/587,916 | 2017-11-17 | ||
PCT/US2018/059676 WO2019099255A2 (en) | 2017-11-17 | 2018-11-07 | Condenser system for high pressure processing system |
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JP2021503714A true JP2021503714A (ja) | 2021-02-12 |
JP2021503714A5 JP2021503714A5 (ja) | 2022-01-04 |
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JP2020526345A Pending JP2021503714A (ja) | 2017-11-17 | 2018-11-07 | 高圧処理システムのためのコンデンサシステム |
Country Status (6)
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US (2) | US10685830B2 (ja) |
JP (1) | JP2021503714A (ja) |
KR (1) | KR20200075892A (ja) |
CN (1) | CN111432920A (ja) |
TW (1) | TW201926509A (ja) |
WO (1) | WO2019099255A2 (ja) |
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WO2019099255A3 (en) | 2019-07-11 |
CN111432920A (zh) | 2020-07-17 |
US11610773B2 (en) | 2023-03-21 |
US20190157074A1 (en) | 2019-05-23 |
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