JP2011228689A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2011228689A JP2011228689A JP2011077735A JP2011077735A JP2011228689A JP 2011228689 A JP2011228689 A JP 2011228689A JP 2011077735 A JP2011077735 A JP 2011077735A JP 2011077735 A JP2011077735 A JP 2011077735A JP 2011228689 A JP2011228689 A JP 2011228689A
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- Prior art keywords
- film
- oxide semiconductor
- metal oxide
- semiconductor film
- oxide film
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Abstract
【解決手段】酸化物半導体膜を含むトランジスタにおいて、酸化物半導体膜の上面部及び下面部に、酸化物半導体膜と同種の成分でなる金属酸化物膜を積層され、さらに、金属酸化物膜において酸化物半導体膜と接する面と対向する面には、金属酸化物膜及び酸化物半導体膜とは異なる成分でなる絶縁膜が接して設けられているトランジスタを提供する。また、トランジスタの活性層に用いる酸化物半導体膜は、熱処理によって、水素、水分、水酸基または水素化物などの不純物を酸化物半導体より排除し、かつ不純物の排除工程によって同時に減少してしまう酸化物半導体を構成する主成分材料である酸素を供給することによって、高純度化及び電気的にi型(真性)化されたものである。
【選択図】図1
Description
本実施の形態では、半導体装置及び半導体装置の作製方法の一形態を、図1乃至図5を用いて説明する。
図1に、半導体装置の例として、ボトムゲート型のトランジスタの断面図及び平面図を示す。図1(A)は平面図であり、図1(B)及び図1(C)は、図1(A)におけるA−B断面及びC−D断面に係る断面図である。なお、図1(A)では、煩雑になることを避けるため、トランジスタ310の構成要素の一部(例えば、第2の金属酸化物膜407など)を省略している。
以下、図4または図5を用いて、図1または図3(A)に示すトランジスタの作製工程の例について説明する。
図4(A)乃至図4(E)を用いて、図1に示すトランジスタ310の作製工程の一例について説明する。
図5(A)乃至図5(C)を用いて、図3(A)に示すトランジスタ320の作製工程の一例について説明する。
実施の形態1で例示したトランジスタを用いて表示機能を有する半導体装置(表示装置ともいう)を作製することができる。また、トランジスタを含む駆動回路の一部または全体を、画素部と同じ基板上に一体形成し、システムオンパネルを形成することができる。
本明細書に開示する半導体装置は、さまざまな電子機器(遊技機も含む)に適用することができる。電子機器としては、例えば、テレビジョン装置(テレビ、またはテレビジョン受信機ともいう)、コンピュータ用などのモニタ、デジタルカメラ、デジタルビデオカメラ等のカメラ、デジタルフォトフレーム、携帯電話機(携帯電話、携帯電話装置ともいう)、携帯型ゲーム機、携帯情報端末、音響再生装置、パチンコ機などの大型ゲーム機などが挙げられる。上記実施の形態で説明した半導体装置を具備する電子機器の例について説明する。
320 トランジスタ
330 トランジスタ
340 トランジスタ
350 トランジスタ
360 トランジスタ
400 基板
401 ゲート電極
402 ゲート絶縁膜
403 酸化物半導体膜
404 第1の金属酸化物膜
405a ソース電極
405b ドレイン電極
407 第2の金属酸化物膜
409 絶縁膜
410 導電膜
Claims (13)
- ゲート電極と、
前記ゲート電極を覆うゲート絶縁膜と、
前記ゲート絶縁膜に接して設けられた第1の金属酸化物膜と、
前記第1の金属酸化物膜と接し、前記ゲート電極と重畳する領域に設けられた酸化物半導体膜と、
前記酸化物半導体膜と接するソース電極及びドレイン電極と、
前記酸化物半導体膜と接する第2の金属酸化物膜と、
前記第2の金属酸化物膜を覆う絶縁膜と、
を有する半導体装置。 - 前記第2の金属酸化物膜は、前記ソース電極及び前記ドレイン電極を覆い、且つ前記第1の金属酸化物膜と接して設けられる請求項1に記載の半導体装置。
- 前記酸化物半導体膜は、前記第1の金属酸化物膜及び前記第2の金属酸化物膜に囲まれた請求項2に記載の半導体装置。
- 少なくとも前記酸化物半導体膜の上面の一部が、前記ソース電極及び前記ドレイン電極と接する請求項1乃至3のいずれか一に記載の半導体装置。
- 少なくとも前記酸化物半導体膜の上面の一部が、前記ソース電極及び前記ドレイン電極と接し、
前記酸化物半導体膜のチャネル長方向の側端部と、前記第1の金属酸化物膜のチャネル長方向の側端部と、が一致する請求項1に記載の半導体装置。 - 少なくとも前記ソース電極及び前記ドレイン電極の上面の一部が、前記酸化物半導体膜と接する請求項1乃至3のいずれか一に記載の半導体装置。
- 少なくとも前記ソース電極及び前記ドレイン電極の上面の一部が、前記酸化物半導体膜と接し、
前記酸化物半導体膜のチャネル長方向の側端部と、前記第2の金属酸化物膜のチャネル長方向の側端部と、が一致する請求項1に記載の半導体装置。 - 前記第1の金属酸化物膜及び前記第2の金属酸化物膜は、前記酸化物半導体膜の構成元素から選択される一または複数の金属元素の酸化物を含んで構成される請求項1乃至7のいずれか一に記載の半導体装置。
- 前記第1の金属酸化物膜及び前記第2の金属酸化物膜のエネルギーギャップは、前記酸化物半導体膜のエネルギーギャップより大きい請求項1乃至8のいずれか一に記載の半導体装置。
- 前記第1の金属酸化物膜及び前記第2の金属酸化物膜の伝導帯の下端のエネルギーは、前記酸化物半導体膜の伝導帯の下端のエネルギーより高い請求項1乃至9のいずれか一に記載の半導体装置。
- 前記第1の金属酸化物膜及び前記第2の金属酸化物膜は、酸化ガリウムを含んで構成される請求項1乃至10のいずれか一に記載の半導体装置。
- 前記第1の金属酸化物膜の構成元素の比率と前記第2の金属酸化物膜の構成元素の比率が等しい請求項11に記載の半導体装置。
- 前記絶縁膜上に、導電膜を有する請求項1乃至12のいずれか一に記載の半導体装置。
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Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2013168646A (ja) * | 2012-01-20 | 2013-08-29 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
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