TWI455820B - 可抵抗還原電漿的含釔陶瓷塗層 - Google Patents

可抵抗還原電漿的含釔陶瓷塗層 Download PDF

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Publication number
TWI455820B
TWI455820B TW98106006A TW98106006A TWI455820B TW I455820 B TWI455820 B TW I455820B TW 98106006 A TW98106006 A TW 98106006A TW 98106006 A TW98106006 A TW 98106006A TW I455820 B TWI455820 B TW I455820B
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TW
Taiwan
Prior art keywords
ceramic coating
cerium
solid solution
plasma
composition
Prior art date
Application number
TW98106006A
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English (en)
Chinese (zh)
Other versions
TW200946331A (en
Inventor
Jennifer Y Sun
Xiaoming He
Kenneth S Collins
Thomas Graves
Senh Thach
Jie Yuan
Li Xu
Ren-Guan Duan
Original Assignee
Applied Materials Inc
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Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200946331A publication Critical patent/TW200946331A/zh
Application granted granted Critical
Publication of TWI455820B publication Critical patent/TWI455820B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
TW98106006A 2008-02-26 2009-02-25 可抵抗還原電漿的含釔陶瓷塗層 TWI455820B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/072,530 US20090214825A1 (en) 2008-02-26 2008-02-26 Ceramic coating comprising yttrium which is resistant to a reducing plasma

Publications (2)

Publication Number Publication Date
TW200946331A TW200946331A (en) 2009-11-16
TWI455820B true TWI455820B (zh) 2014-10-11

Family

ID=40998600

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98106006A TWI455820B (zh) 2008-02-26 2009-02-25 可抵抗還原電漿的含釔陶瓷塗層

Country Status (7)

Country Link
US (1) US20090214825A1 (enExample)
JP (1) JP5674479B2 (enExample)
KR (1) KR20100118994A (enExample)
CN (1) CN102084020B (enExample)
SG (2) SG187415A1 (enExample)
TW (1) TWI455820B (enExample)
WO (1) WO2009108275A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI759234B (zh) * 2018-08-15 2022-03-21 日商信越化學工業股份有限公司 噴塗塗層、製造噴塗塗層的方法、噴塗構件和噴塗材料

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* Cited by examiner, † Cited by third party
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