KR100300758B1 - 반도체장치와 그 제조방법 - Google Patents

반도체장치와 그 제조방법 Download PDF

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Publication number
KR100300758B1
KR100300758B1 KR1019980707001A KR19980707001A KR100300758B1 KR 100300758 B1 KR100300758 B1 KR 100300758B1 KR 1019980707001 A KR1019980707001 A KR 1019980707001A KR 19980707001 A KR19980707001 A KR 19980707001A KR 100300758 B1 KR100300758 B1 KR 100300758B1
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KR
South Korea
Prior art keywords
semiconductor device
circuit board
electrode
electrode terminal
protruding
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Expired - Lifetime
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KR1019980707001A
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English (en)
Korean (ko)
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KR19990087563A (ko
Inventor
츠카사 시라이시
요시히로 벳쇼
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시키가이샤
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Publication of KR19990087563A publication Critical patent/KR19990087563A/ko
Application granted granted Critical
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    • H10W72/071
    • H10W72/012
    • H10W74/012
    • H10W74/15
    • H10W72/0711
    • H10W72/072
    • H10W72/07236
    • H10W72/07251
    • H10W72/20
    • H10W72/227
    • H10W72/241
    • H10W72/251
    • H10W72/856
    • H10W72/923
    • H10W72/952

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  • Wire Bonding (AREA)
KR1019980707001A 1996-03-06 1997-03-05 반도체장치와 그 제조방법 Expired - Lifetime KR100300758B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP96-049065 1996-03-06
JP8049065A JP2951882B2 (ja) 1996-03-06 1996-03-06 半導体装置の製造方法及びこれを用いて製造した半導体装置
PCT/JP1997/000672 WO1997033313A1 (en) 1996-03-06 1997-03-05 Semiconductor device and process for producing the same

Publications (2)

Publication Number Publication Date
KR19990087563A KR19990087563A (ko) 1999-12-27
KR100300758B1 true KR100300758B1 (ko) 2001-11-02

Family

ID=12820690

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KR1019980707001A Expired - Lifetime KR100300758B1 (ko) 1996-03-06 1997-03-05 반도체장치와 그 제조방법

Country Status (7)

Country Link
US (1) US6452280B1 (OSRAM)
EP (2) EP0951063B1 (OSRAM)
JP (1) JP2951882B2 (OSRAM)
KR (1) KR100300758B1 (OSRAM)
CN (1) CN1175480C (OSRAM)
DE (1) DE69722661T2 (OSRAM)
WO (1) WO1997033313A1 (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6909180B2 (en) * 2000-05-12 2005-06-21 Matsushita Electric Industrial Co., Ltd. Semiconductor device, mounting circuit board, method of producing the same, and method of producing mounting structure using the same
US6940178B2 (en) * 2001-02-27 2005-09-06 Chippac, Inc. Self-coplanarity bumping shape for flip chip
TWI245395B (en) * 2001-11-20 2005-12-11 Advanced Semiconductor Eng Multi-chip module package device
CN100356559C (zh) * 2003-09-24 2007-12-19 财团法人工业技术研究院 倒装芯片封装结构及其制造方法
TWI273664B (en) * 2004-03-26 2007-02-11 Advanced Semiconductor Eng Bumping process, bump structure, packaging process and package structure
KR100696190B1 (ko) * 2004-12-14 2007-03-20 한국전자통신연구원 플립 칩 본딩방법
JP4325571B2 (ja) * 2005-02-28 2009-09-02 株式会社日立製作所 電子装置の製造方法
TWI253697B (en) * 2005-04-08 2006-04-21 Phoenix Prec Technology Corp Method for fabricating a flip chip package
JP4765804B2 (ja) * 2006-07-14 2011-09-07 株式会社デンソー 半導体装置の製造方法
JP2008135719A (ja) * 2006-10-31 2008-06-12 Sanyo Electric Co Ltd 半導体モジュール、半導体モジュールの製造方法および携帯機器
JP2008218643A (ja) * 2007-03-02 2008-09-18 Fujitsu Ltd 半導体装置及びその製造方法
JP5028291B2 (ja) * 2008-01-31 2012-09-19 三洋電機株式会社 素子搭載用基板、素子搭載用基板の製造方法、半導体モジュールおよび半導体モジュールの製造方法
US8309864B2 (en) * 2008-01-31 2012-11-13 Sanyo Electric Co., Ltd. Device mounting board and manufacturing method therefor, and semiconductor module
JP5385004B2 (ja) * 2009-05-22 2014-01-08 富士通テン株式会社 回路部品
JP6143104B2 (ja) * 2012-12-05 2017-06-07 株式会社村田製作所 バンプ付き電子部品及びバンプ付き電子部品の製造方法
KR102248876B1 (ko) * 2014-12-24 2021-05-07 엘지디스플레이 주식회사 표시장치 어레이 기판 및 표시장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0499040A (ja) * 1990-08-06 1992-03-31 Matsushita Electric Ind Co Ltd 半導体素子の実装方法および実装基板
JPH0831875A (ja) * 1994-07-18 1996-02-02 Sony Corp 部品実装方法
JPH0855874A (ja) * 1994-08-11 1996-02-27 Matsushita Electric Ind Co Ltd 半導体チップの接着方法

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE296385C (OSRAM)
US4661192A (en) * 1985-08-22 1987-04-28 Motorola, Inc. Low cost integrated circuit bonding process
US4740657A (en) 1986-02-14 1988-04-26 Hitachi, Chemical Company, Ltd Anisotropic-electroconductive adhesive composition, method for connecting circuits using the same, and connected circuit structure thus obtained
JPS6360540A (ja) 1986-09-01 1988-03-16 Seiko Epson Corp 接続端子の製造方法
JPS63152135A (ja) 1986-12-17 1988-06-24 Hitachi Ltd 半導体装置の製造方法
JPS63289824A (ja) 1987-05-21 1988-11-28 Fuji Electric Co Ltd 集積回路装置の実装方法
JPS647542A (en) 1987-06-30 1989-01-11 Toshiba Corp Formation of bump
JPH0793306B2 (ja) 1987-08-05 1995-10-09 日本電装株式会社 半導体集積回路装置
US5014111A (en) * 1987-12-08 1991-05-07 Matsushita Electric Industrial Co., Ltd. Electrical contact bump and a package provided with the same
JP2541284B2 (ja) * 1988-06-09 1996-10-09 富士通株式会社 半導体チップの実装方法
US5001542A (en) 1988-12-05 1991-03-19 Hitachi Chemical Company Composition for circuit connection, method for connection using the same, and connected structure of semiconductor chips
JPH02177546A (ja) * 1988-12-28 1990-07-10 Fujitsu Ltd 半導体集積回路の製造方法
JPH03209831A (ja) * 1990-01-12 1991-09-12 Matsushita Electric Ind Co Ltd 半導体装置
JP2764632B2 (ja) 1990-04-09 1998-06-11 イビデン株式会社 電子回路基板とその製造方法
JPH046841A (ja) * 1990-04-24 1992-01-10 Matsushita Electric Works Ltd 半導体装置の実装構造
JPH0433348A (ja) * 1990-05-29 1992-02-04 Sharp Corp 半導体装置
JPH04137541A (ja) 1990-09-27 1992-05-12 Sharp Corp 突起電極の形成方法
JPH04137630A (ja) 1990-09-28 1992-05-12 Seiko Epson Corp 半導体装置
JPH04144145A (ja) 1990-10-04 1992-05-18 Matsushita Electric Ind Co Ltd 半導体装置の実装方法
JPH05283414A (ja) * 1991-04-16 1993-10-29 Nippon Steel Corp 半導体装置用金属配線のバンプ高さ制御装置
JPH05144821A (ja) 1991-04-30 1993-06-11 Toshiba Corp 半導体装置
JPH0562977A (ja) 1991-09-02 1993-03-12 Fuji Electric Co Ltd 集積回路装置用バンプ電極
JP2730357B2 (ja) * 1991-11-18 1998-03-25 松下電器産業株式会社 電子部品実装接続体およびその製造方法
JPH05144888A (ja) * 1991-11-19 1993-06-11 Fujitsu Ltd 半導体チツプの実装方法
JPH05166879A (ja) 1991-12-12 1993-07-02 Matsushita Electric Ind Co Ltd Ic実装方法
US5436503A (en) 1992-11-18 1995-07-25 Matsushita Electronics Corporation Semiconductor device and method of manufacturing the same
JP3259393B2 (ja) * 1993-01-08 2002-02-25 ソニー株式会社 半導体チップの実装方法
JPH06302649A (ja) 1993-04-13 1994-10-28 Citizen Watch Co Ltd 半導体装置の接続方法
JP3209831B2 (ja) 1993-06-07 2001-09-17 大和製罐株式会社 金属薄板の溶接不良検出方法および装置
KR0171438B1 (ko) * 1993-09-29 1999-10-15 모리시따 요오이찌 반도체 장치를 회로 기판상에 장착하는 방법 및 반도체 장치가 장착된 회로 기판
US5640051A (en) * 1993-12-13 1997-06-17 Matsushita Electric Industrial Co., Ltd. Chip package, a chip carrier, a terminal electrode for a circuit substrate and a chip package-mounted complex
JP2793766B2 (ja) * 1993-12-27 1998-09-03 株式会社ピーエフユー 導電ペースト転写方法
JP3255796B2 (ja) 1994-05-26 2002-02-12 松下電器産業株式会社 半導体装置の実装方法
US5907187A (en) * 1994-07-18 1999-05-25 Kabushiki Kaisha Toshiba Electronic component and electronic component connecting structure
US5686353A (en) 1994-12-26 1997-11-11 Matsushita Electric Industrial Co., Ltd. Semiconductor device and manufacturing method thereof
JP3291950B2 (ja) 1994-12-28 2002-06-17 日産自動車株式会社 設計支援装置
EP0732107A3 (en) * 1995-03-16 1997-05-07 Toshiba Kk Shielding device for a circuit substrate
US5801446A (en) * 1995-03-28 1998-09-01 Tessera, Inc. Microelectronic connections with solid core joining units
US5796591A (en) 1995-06-07 1998-08-18 International Business Machines Corporation Direct chip attach circuit card
US5578527A (en) 1995-06-23 1996-11-26 Industrial Technology Research Institute Connection construction and method of manufacturing the same
JPH0982760A (ja) * 1995-07-07 1997-03-28 Toshiba Corp 半導体装置、半導体素子およびその半田接続部検査方法
US5874780A (en) * 1995-07-27 1999-02-23 Nec Corporation Method of mounting a semiconductor device to a substrate and a mounted structure
JPH09134934A (ja) * 1995-11-07 1997-05-20 Sumitomo Metal Ind Ltd 半導体パッケージ及び半導体装置
US6010769A (en) * 1995-11-17 2000-01-04 Kabushiki Kaisha Toshiba Multilayer wiring board and method for forming the same
US5611884A (en) 1995-12-11 1997-03-18 Dow Corning Corporation Flip chip silicone pressure sensitive conductive adhesive
KR100438256B1 (ko) * 1995-12-18 2004-08-25 마츠시타 덴끼 산교 가부시키가이샤 반도체장치 및 그 제조방법
JP3409957B2 (ja) 1996-03-06 2003-05-26 松下電器産業株式会社 半導体ユニット及びその形成方法
JP2891184B2 (ja) * 1996-06-13 1999-05-17 日本電気株式会社 半導体装置及びその製造方法
US5808319A (en) * 1996-10-10 1998-09-15 Advanced Micro Devices, Inc. Localized semiconductor substrate for multilevel transistors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0499040A (ja) * 1990-08-06 1992-03-31 Matsushita Electric Ind Co Ltd 半導体素子の実装方法および実装基板
JPH0831875A (ja) * 1994-07-18 1996-02-02 Sony Corp 部品実装方法
JPH0855874A (ja) * 1994-08-11 1996-02-27 Matsushita Electric Ind Co Ltd 半導体チップの接着方法

Also Published As

Publication number Publication date
KR19990087563A (ko) 1999-12-27
EP0951063A4 (OSRAM) 1999-10-20
EP1191578A3 (en) 2002-05-08
DE69722661D1 (de) 2003-07-10
WO1997033313A1 (en) 1997-09-12
US6452280B1 (en) 2002-09-17
EP0951063A1 (en) 1999-10-20
EP1191578A2 (en) 2002-03-27
CN1212786A (zh) 1999-03-31
JP2951882B2 (ja) 1999-09-20
CN1175480C (zh) 2004-11-10
EP0951063B1 (en) 2003-06-04
JPH09246320A (ja) 1997-09-19
DE69722661T2 (de) 2004-05-13

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