KR100300758B1 - 반도체장치와 그 제조방법 - Google Patents
반도체장치와 그 제조방법 Download PDFInfo
- Publication number
- KR100300758B1 KR100300758B1 KR1019980707001A KR19980707001A KR100300758B1 KR 100300758 B1 KR100300758 B1 KR 100300758B1 KR 1019980707001 A KR1019980707001 A KR 1019980707001A KR 19980707001 A KR19980707001 A KR 19980707001A KR 100300758 B1 KR100300758 B1 KR 100300758B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- circuit board
- electrode
- electrode terminal
- protruding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H10W72/071—
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- H10W72/012—
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- H10W74/012—
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- H10W74/15—
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- H10W72/0711—
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- H10W72/072—
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- H10W72/07236—
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- H10W72/07251—
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- H10W72/20—
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- H10W72/227—
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- H10W72/241—
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- H10W72/251—
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- H10W72/856—
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- H10W72/923—
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- H10W72/952—
Landscapes
- Wire Bonding (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP96-049065 | 1996-03-06 | ||
| JP8049065A JP2951882B2 (ja) | 1996-03-06 | 1996-03-06 | 半導体装置の製造方法及びこれを用いて製造した半導体装置 |
| PCT/JP1997/000672 WO1997033313A1 (en) | 1996-03-06 | 1997-03-05 | Semiconductor device and process for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19990087563A KR19990087563A (ko) | 1999-12-27 |
| KR100300758B1 true KR100300758B1 (ko) | 2001-11-02 |
Family
ID=12820690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019980707001A Expired - Lifetime KR100300758B1 (ko) | 1996-03-06 | 1997-03-05 | 반도체장치와 그 제조방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6452280B1 (OSRAM) |
| EP (2) | EP0951063B1 (OSRAM) |
| JP (1) | JP2951882B2 (OSRAM) |
| KR (1) | KR100300758B1 (OSRAM) |
| CN (1) | CN1175480C (OSRAM) |
| DE (1) | DE69722661T2 (OSRAM) |
| WO (1) | WO1997033313A1 (OSRAM) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6909180B2 (en) * | 2000-05-12 | 2005-06-21 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device, mounting circuit board, method of producing the same, and method of producing mounting structure using the same |
| US6940178B2 (en) * | 2001-02-27 | 2005-09-06 | Chippac, Inc. | Self-coplanarity bumping shape for flip chip |
| TWI245395B (en) * | 2001-11-20 | 2005-12-11 | Advanced Semiconductor Eng | Multi-chip module package device |
| CN100356559C (zh) * | 2003-09-24 | 2007-12-19 | 财团法人工业技术研究院 | 倒装芯片封装结构及其制造方法 |
| TWI273664B (en) * | 2004-03-26 | 2007-02-11 | Advanced Semiconductor Eng | Bumping process, bump structure, packaging process and package structure |
| KR100696190B1 (ko) * | 2004-12-14 | 2007-03-20 | 한국전자통신연구원 | 플립 칩 본딩방법 |
| JP4325571B2 (ja) * | 2005-02-28 | 2009-09-02 | 株式会社日立製作所 | 電子装置の製造方法 |
| TWI253697B (en) * | 2005-04-08 | 2006-04-21 | Phoenix Prec Technology Corp | Method for fabricating a flip chip package |
| JP4765804B2 (ja) * | 2006-07-14 | 2011-09-07 | 株式会社デンソー | 半導体装置の製造方法 |
| JP2008135719A (ja) * | 2006-10-31 | 2008-06-12 | Sanyo Electric Co Ltd | 半導体モジュール、半導体モジュールの製造方法および携帯機器 |
| JP2008218643A (ja) * | 2007-03-02 | 2008-09-18 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| JP5028291B2 (ja) * | 2008-01-31 | 2012-09-19 | 三洋電機株式会社 | 素子搭載用基板、素子搭載用基板の製造方法、半導体モジュールおよび半導体モジュールの製造方法 |
| US8309864B2 (en) * | 2008-01-31 | 2012-11-13 | Sanyo Electric Co., Ltd. | Device mounting board and manufacturing method therefor, and semiconductor module |
| JP5385004B2 (ja) * | 2009-05-22 | 2014-01-08 | 富士通テン株式会社 | 回路部品 |
| JP6143104B2 (ja) * | 2012-12-05 | 2017-06-07 | 株式会社村田製作所 | バンプ付き電子部品及びバンプ付き電子部品の製造方法 |
| KR102248876B1 (ko) * | 2014-12-24 | 2021-05-07 | 엘지디스플레이 주식회사 | 표시장치 어레이 기판 및 표시장치 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499040A (ja) * | 1990-08-06 | 1992-03-31 | Matsushita Electric Ind Co Ltd | 半導体素子の実装方法および実装基板 |
| JPH0831875A (ja) * | 1994-07-18 | 1996-02-02 | Sony Corp | 部品実装方法 |
| JPH0855874A (ja) * | 1994-08-11 | 1996-02-27 | Matsushita Electric Ind Co Ltd | 半導体チップの接着方法 |
Family Cites Families (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE296385C (OSRAM) | ||||
| US4661192A (en) * | 1985-08-22 | 1987-04-28 | Motorola, Inc. | Low cost integrated circuit bonding process |
| US4740657A (en) | 1986-02-14 | 1988-04-26 | Hitachi, Chemical Company, Ltd | Anisotropic-electroconductive adhesive composition, method for connecting circuits using the same, and connected circuit structure thus obtained |
| JPS6360540A (ja) | 1986-09-01 | 1988-03-16 | Seiko Epson Corp | 接続端子の製造方法 |
| JPS63152135A (ja) | 1986-12-17 | 1988-06-24 | Hitachi Ltd | 半導体装置の製造方法 |
| JPS63289824A (ja) | 1987-05-21 | 1988-11-28 | Fuji Electric Co Ltd | 集積回路装置の実装方法 |
| JPS647542A (en) | 1987-06-30 | 1989-01-11 | Toshiba Corp | Formation of bump |
| JPH0793306B2 (ja) | 1987-08-05 | 1995-10-09 | 日本電装株式会社 | 半導体集積回路装置 |
| US5014111A (en) * | 1987-12-08 | 1991-05-07 | Matsushita Electric Industrial Co., Ltd. | Electrical contact bump and a package provided with the same |
| JP2541284B2 (ja) * | 1988-06-09 | 1996-10-09 | 富士通株式会社 | 半導体チップの実装方法 |
| US5001542A (en) | 1988-12-05 | 1991-03-19 | Hitachi Chemical Company | Composition for circuit connection, method for connection using the same, and connected structure of semiconductor chips |
| JPH02177546A (ja) * | 1988-12-28 | 1990-07-10 | Fujitsu Ltd | 半導体集積回路の製造方法 |
| JPH03209831A (ja) * | 1990-01-12 | 1991-09-12 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JP2764632B2 (ja) | 1990-04-09 | 1998-06-11 | イビデン株式会社 | 電子回路基板とその製造方法 |
| JPH046841A (ja) * | 1990-04-24 | 1992-01-10 | Matsushita Electric Works Ltd | 半導体装置の実装構造 |
| JPH0433348A (ja) * | 1990-05-29 | 1992-02-04 | Sharp Corp | 半導体装置 |
| JPH04137541A (ja) | 1990-09-27 | 1992-05-12 | Sharp Corp | 突起電極の形成方法 |
| JPH04137630A (ja) | 1990-09-28 | 1992-05-12 | Seiko Epson Corp | 半導体装置 |
| JPH04144145A (ja) | 1990-10-04 | 1992-05-18 | Matsushita Electric Ind Co Ltd | 半導体装置の実装方法 |
| JPH05283414A (ja) * | 1991-04-16 | 1993-10-29 | Nippon Steel Corp | 半導体装置用金属配線のバンプ高さ制御装置 |
| JPH05144821A (ja) | 1991-04-30 | 1993-06-11 | Toshiba Corp | 半導体装置 |
| JPH0562977A (ja) | 1991-09-02 | 1993-03-12 | Fuji Electric Co Ltd | 集積回路装置用バンプ電極 |
| JP2730357B2 (ja) * | 1991-11-18 | 1998-03-25 | 松下電器産業株式会社 | 電子部品実装接続体およびその製造方法 |
| JPH05144888A (ja) * | 1991-11-19 | 1993-06-11 | Fujitsu Ltd | 半導体チツプの実装方法 |
| JPH05166879A (ja) | 1991-12-12 | 1993-07-02 | Matsushita Electric Ind Co Ltd | Ic実装方法 |
| US5436503A (en) | 1992-11-18 | 1995-07-25 | Matsushita Electronics Corporation | Semiconductor device and method of manufacturing the same |
| JP3259393B2 (ja) * | 1993-01-08 | 2002-02-25 | ソニー株式会社 | 半導体チップの実装方法 |
| JPH06302649A (ja) | 1993-04-13 | 1994-10-28 | Citizen Watch Co Ltd | 半導体装置の接続方法 |
| JP3209831B2 (ja) | 1993-06-07 | 2001-09-17 | 大和製罐株式会社 | 金属薄板の溶接不良検出方法および装置 |
| KR0171438B1 (ko) * | 1993-09-29 | 1999-10-15 | 모리시따 요오이찌 | 반도체 장치를 회로 기판상에 장착하는 방법 및 반도체 장치가 장착된 회로 기판 |
| US5640051A (en) * | 1993-12-13 | 1997-06-17 | Matsushita Electric Industrial Co., Ltd. | Chip package, a chip carrier, a terminal electrode for a circuit substrate and a chip package-mounted complex |
| JP2793766B2 (ja) * | 1993-12-27 | 1998-09-03 | 株式会社ピーエフユー | 導電ペースト転写方法 |
| JP3255796B2 (ja) | 1994-05-26 | 2002-02-12 | 松下電器産業株式会社 | 半導体装置の実装方法 |
| US5907187A (en) * | 1994-07-18 | 1999-05-25 | Kabushiki Kaisha Toshiba | Electronic component and electronic component connecting structure |
| US5686353A (en) | 1994-12-26 | 1997-11-11 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP3291950B2 (ja) | 1994-12-28 | 2002-06-17 | 日産自動車株式会社 | 設計支援装置 |
| EP0732107A3 (en) * | 1995-03-16 | 1997-05-07 | Toshiba Kk | Shielding device for a circuit substrate |
| US5801446A (en) * | 1995-03-28 | 1998-09-01 | Tessera, Inc. | Microelectronic connections with solid core joining units |
| US5796591A (en) | 1995-06-07 | 1998-08-18 | International Business Machines Corporation | Direct chip attach circuit card |
| US5578527A (en) | 1995-06-23 | 1996-11-26 | Industrial Technology Research Institute | Connection construction and method of manufacturing the same |
| JPH0982760A (ja) * | 1995-07-07 | 1997-03-28 | Toshiba Corp | 半導体装置、半導体素子およびその半田接続部検査方法 |
| US5874780A (en) * | 1995-07-27 | 1999-02-23 | Nec Corporation | Method of mounting a semiconductor device to a substrate and a mounted structure |
| JPH09134934A (ja) * | 1995-11-07 | 1997-05-20 | Sumitomo Metal Ind Ltd | 半導体パッケージ及び半導体装置 |
| US6010769A (en) * | 1995-11-17 | 2000-01-04 | Kabushiki Kaisha Toshiba | Multilayer wiring board and method for forming the same |
| US5611884A (en) | 1995-12-11 | 1997-03-18 | Dow Corning Corporation | Flip chip silicone pressure sensitive conductive adhesive |
| KR100438256B1 (ko) * | 1995-12-18 | 2004-08-25 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체장치 및 그 제조방법 |
| JP3409957B2 (ja) | 1996-03-06 | 2003-05-26 | 松下電器産業株式会社 | 半導体ユニット及びその形成方法 |
| JP2891184B2 (ja) * | 1996-06-13 | 1999-05-17 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| US5808319A (en) * | 1996-10-10 | 1998-09-15 | Advanced Micro Devices, Inc. | Localized semiconductor substrate for multilevel transistors |
-
1996
- 1996-03-06 JP JP8049065A patent/JP2951882B2/ja not_active Expired - Fee Related
-
1997
- 1997-03-05 KR KR1019980707001A patent/KR100300758B1/ko not_active Expired - Lifetime
- 1997-03-05 WO PCT/JP1997/000672 patent/WO1997033313A1/ja not_active Ceased
- 1997-03-05 DE DE69722661T patent/DE69722661T2/de not_active Expired - Fee Related
- 1997-03-05 US US09/117,695 patent/US6452280B1/en not_active Expired - Lifetime
- 1997-03-05 EP EP97905446A patent/EP0951063B1/en not_active Expired - Lifetime
- 1997-03-05 CN CNB971927987A patent/CN1175480C/zh not_active Expired - Fee Related
- 1997-03-05 EP EP01129307A patent/EP1191578A3/en not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499040A (ja) * | 1990-08-06 | 1992-03-31 | Matsushita Electric Ind Co Ltd | 半導体素子の実装方法および実装基板 |
| JPH0831875A (ja) * | 1994-07-18 | 1996-02-02 | Sony Corp | 部品実装方法 |
| JPH0855874A (ja) * | 1994-08-11 | 1996-02-27 | Matsushita Electric Ind Co Ltd | 半導体チップの接着方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR19990087563A (ko) | 1999-12-27 |
| EP0951063A4 (OSRAM) | 1999-10-20 |
| EP1191578A3 (en) | 2002-05-08 |
| DE69722661D1 (de) | 2003-07-10 |
| WO1997033313A1 (en) | 1997-09-12 |
| US6452280B1 (en) | 2002-09-17 |
| EP0951063A1 (en) | 1999-10-20 |
| EP1191578A2 (en) | 2002-03-27 |
| CN1212786A (zh) | 1999-03-31 |
| JP2951882B2 (ja) | 1999-09-20 |
| CN1175480C (zh) | 2004-11-10 |
| EP0951063B1 (en) | 2003-06-04 |
| JPH09246320A (ja) | 1997-09-19 |
| DE69722661T2 (de) | 2004-05-13 |
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