JP5385004B2 - 回路部品 - Google Patents
回路部品 Download PDFInfo
- Publication number
- JP5385004B2 JP5385004B2 JP2009123871A JP2009123871A JP5385004B2 JP 5385004 B2 JP5385004 B2 JP 5385004B2 JP 2009123871 A JP2009123871 A JP 2009123871A JP 2009123871 A JP2009123871 A JP 2009123871A JP 5385004 B2 JP5385004 B2 JP 5385004B2
- Authority
- JP
- Japan
- Prior art keywords
- bump
- bonding
- chip
- bumps
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 description 51
- 238000000034 method Methods 0.000 description 25
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 12
- 230000007423 decrease Effects 0.000 description 11
- 239000010931 gold Substances 0.000 description 10
- 229910052737 gold Inorganic materials 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000012447 hatching Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/06102—Disposition the bonding areas being at different heights
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
図3は、第1の実施形態について説明する図である。図3(A)、(B)は、チップ30に備えられた、バンプ32_11、32_12の側面図と、平面図を示す。図3(A)には、バンプ32_11、32_12の初期状態が示される。ここで、バンプ32_11、32_12は同じバンプ高さH1を有する。
図4は、第2の実施形態について説明する図である。図4(A)、(B)は、チップ30に備えられた、バンプ32_11、32_13の側面図と、平面図を示す。図4(A)には、バンプ32_11、32_13の初期状態が示される。ここで、バンプ32_11、32_13は同じバンプ高さH1を有する。
Claims (2)
- 表面に信号線を有し、当該信号線の上に所定の高さのバンプを備え、当該バンプが超音波接合により回路基板の電極に接合される回路部品であって、
前記表面からの高さが最も低い第1の信号線の上に設けられ、所定の断面積を有する第1のバンプと、
前記表面からの高さが前記第1の信号線より高い第2の信号線の上に設けられ、前記所定の断面積よりも狭い断面積を有する第2のバンプとを有し、
前記電極の接合面に対して第1、第2のバンプの高さが異なり、
前記表面を基準とした前記第2のバンプの高さは、前記表面を基準とした前記第1のバンプの高さよりも高く、前記第1、第2のバンプの前記断面積は、前記回路基板に対して平行な、バンプの中心を通る断面の面積である回路部品。 - 請求項1において、
前記第2のバンプを介して前記回路基板と電気信号の伝送を行うことを特徴とする回路部品。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009123871A JP5385004B2 (ja) | 2009-05-22 | 2009-05-22 | 回路部品 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009123871A JP5385004B2 (ja) | 2009-05-22 | 2009-05-22 | 回路部品 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010272716A JP2010272716A (ja) | 2010-12-02 |
JP5385004B2 true JP5385004B2 (ja) | 2014-01-08 |
Family
ID=43420502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009123871A Expired - Fee Related JP5385004B2 (ja) | 2009-05-22 | 2009-05-22 | 回路部品 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5385004B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5481249B2 (ja) * | 2010-03-26 | 2014-04-23 | 富士通株式会社 | 半導体装置及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2951882B2 (ja) * | 1996-03-06 | 1999-09-20 | 松下電器産業株式会社 | 半導体装置の製造方法及びこれを用いて製造した半導体装置 |
JP3589187B2 (ja) * | 2000-07-31 | 2004-11-17 | 日亜化学工業株式会社 | 発光装置の形成方法 |
JP4186055B2 (ja) * | 2003-04-17 | 2008-11-26 | ソニー株式会社 | 電子部品装置及び電子部品の製造方法 |
JP2007242783A (ja) * | 2006-03-07 | 2007-09-20 | Fujikura Ltd | 半導体装置及び電子装置 |
JP5017930B2 (ja) * | 2006-06-01 | 2012-09-05 | 富士通株式会社 | 半導体装置、はんだバンプ接続用基板の製造方法及び半導体装置の製造方法 |
KR20070117117A (ko) * | 2006-06-07 | 2007-12-12 | 삼성에스디아이 주식회사 | 칩 및 이를 구비한 평판 디스플레이 장치 |
JP4842864B2 (ja) * | 2007-03-15 | 2011-12-21 | 新光電気工業株式会社 | 電子装置及びその製造方法 |
-
2009
- 2009-05-22 JP JP2009123871A patent/JP5385004B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2010272716A (ja) | 2010-12-02 |
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