JP5136869B2 - 等しい優先性で両ブロックを湿潤にするために、制約を受ける上部界面を有するブロック共重合体膜の熱アニーリング - Google Patents
等しい優先性で両ブロックを湿潤にするために、制約を受ける上部界面を有するブロック共重合体膜の熱アニーリング Download PDFInfo
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Classifications
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Description
Claims (10)
- 基板上にナノ構造のポリマー材料を形成する方法であって、
a)円筒相のブロック共重合体材料を、前記円筒相のブロック共重合体材料のガラス転移温度(Tg)以上の温度で加熱しながら、前記円筒相のブロック共重合体材料を、前記円筒相のブロック共重合体材料のいずれのブロックに対しても非優先的である溶媒蒸気に暴露することによって、
または、
b)前記円筒相のブロック共重合体材料の上に且つ前記円筒相のブロック共重合体材料と接触するように、前記円筒相のブロック共重合体材料のいずれのブロックに対しても非優先的な材料を適用し、かつ、前記円筒相のブロック共重合体材料を前記非優先的な材料と接触しながら、前記円筒相のブロック共重合体材料のガラス転移温度(T g )以上の温度で前記円筒相のブロック共重合体材料を加熱することによって、
前記円筒相のブロック共重合体材料をアニールするステップを含み、
前記円筒相のブロック共重合体材料は前記基板上の材料層内のトレンチ内に配置され、前記トレンチは、幅、長さ、中性湿潤底面、および、前記円筒相のブロック共重合体材料の少数ブロックに対して優先的に湿潤である相対する複数の側壁および複数の終端を有し、
前記円筒相のブロック共重合体材料は、前記円筒相のブロック共重合体材料の第二のブロックのマトリクス内の前記円筒相のブロック共重合体材料の第一のブロックの複数の円筒状ドメインへと自己組織化し、前記自己組織化した円筒相のブロック共重合体材料は厚さを有し、前記複数の円筒状ドメインは、前記中性湿潤底面に対して垂直に配向し、かつ、前記トレンチの前記長さに対して、単一のアレイにおける前記自己組織化した円筒相のブロック共重合体材料の前記厚さを介して伸長する、ことを特徴とする方法。 - 前記円筒相のブロック共重合体材料を前記溶媒蒸気に暴露するステップは、有機溶媒の部分的に飽和した濃度内で前記円筒相のブロック共重合体材料を暴露するステップを含む、ことを特徴とする請求項1に記載の方法。
- 前記円筒相のブロック共重合体材料を暴露するステップは、前記溶媒の沸点へと前記円筒相のブロック共重合体材料を加熱するステップを含み、前記溶媒によって前記円筒相のブロック共重合体材料の膨張は生じない、ことを特徴とする請求項1に記載の方法。
- 前記円筒相のブロック共重合体材料をアニールするステップは、前記円筒相のブロック共重合体材料を全体的に加熱するステップを含む、ことを特徴とする請求項1に記載の方法。
- 前記円筒相のブロック共重合体材料をアニールするステップは、前記円筒相のブロック共重合体材料の一部分を加熱して、前記円筒状ドメインを、前記円筒相のブロック共重合体材料の前記加熱された一部分内にのみ形成するステップを含む、ことを特徴とする請求項1に記載の方法。
- 前記第二のブロックの前記マトリクスを選択的に架橋するステップをさらに含む、ことを特徴とする請求項1に記載の方法。
- 前記第一のブロックを選択的に除去して、前記第二のブロックの前記マトリクスを通って伸長する複数の円筒状開口を形成するステップをさらに含む、ことを特徴とする請求項6に記載の方法。
- 前記複数の円筒状開口を介して、前記基板のマスクされていない複数の部分をエッチングして、前記基板内に複数の開口を形成するステップをさらに含む、ことを特徴とする請求項7に記載の方法。
- 前記基板内の前記複数の開口を充填材料で充填するステップをさらに含む、ことを特徴とする請求項8に記載の方法。
- 前記円筒相のブロック共重合体材料をアニールするステップは、非優先的な表面を有する固体エラストマー材料と前記円筒相のブロック共重合体材料を接触させるステップを含む、ことを特徴とする請求項1に記載の方法。
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US12/052,956 | 2008-03-21 | ||
US12/052,956 US8426313B2 (en) | 2008-03-21 | 2008-03-21 | Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference |
PCT/US2009/035861 WO2009117243A1 (en) | 2008-03-21 | 2009-03-03 | Thermal anneal of a block copolymer films with top interface constrained to wet both blocks with equal preference |
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EP (1) | EP2281299B1 (ja) |
JP (1) | JP5136869B2 (ja) |
KR (1) | KR101121303B1 (ja) |
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