JP4638292B2 - マルチチャンネルFin電界効果トランジスタを備える半導体素子 - Google Patents
マルチチャンネルFin電界効果トランジスタを備える半導体素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 149
- 230000005669 field effect Effects 0.000 title description 3
- 230000002093 peripheral effect Effects 0.000 claims description 173
- 239000000758 substrate Substances 0.000 claims description 96
- 238000002955 isolation Methods 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 62
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 description 64
- 238000005468 ion implantation Methods 0.000 description 26
- 238000005530 etching Methods 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 16
- 229910052717 sulfur Inorganic materials 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 8
- 239000011810 insulating material Substances 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 244000208734 Pisonia aculeata Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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Description
図2ないし図9は、このようなレイアウトを有する半導体素子の製造方法の第1実施形態を説明するための斜視図である。各図面において、左側はセル領域、右側は周辺回路領域の工程段階別の中間構造物を示す。
一方、図7に示す段階でのチャンネルイオン注入を実施しない場合には、図8の段階でフィンを露出させた後で実施することもある。このときにも望ましくは、フィンチャンネル内にチャンネルイオンが均一に分布可能に、それぞれ異なるエネルギーで複数回にわたって注入する。そして、イオン注入は、傾斜イオン注入で実施する。
周辺回路領域の活性領域20´には、中心トレンチ22´が一列に複数個形成されているので、フィンも複数個形成されている。周辺回路領域の中心トレンチ22´は、四角形の開口部21のY方向側に形成されている。
図11A及び図11Bは、本発明の第2実施形態による半導体素子のY方向の断面図であって、左側はセル領域、右側は周辺回路領域を表す。図11において、図2ないし図10に示すものと同一な要素に対しては、同一な参照番号を付与し、説明の繰り返しを省略する。
図11Aに示すように、中心トレンチ25、25´を第1実施形態より深く形成し、第2誘電膜40、40´及び第1誘電膜30、30´をチャンネルより浅くリセスさせる。結果的に、第1突出部23、23´と第2突出部24、24´との間の活性領域20、20´の表面は、素子分離膜30a、30a´の表面及び半導体基板10より低い。このように構成することにより、有効チャンネル幅を極大化させることができるという特有の効果がある。
図12ないし図14は、本発明の第3実施形態による半導体素子の製造方法を示す斜視図である。そして、図15は、図14のY方向の断面図である。各図面において、左側はセル領域、右側は周辺回路領域を表す。また、図12ないし図15において、図2ないし図10に示すものと同一な要素に対しては、同一な参照番号を付与し、説明の繰り返しを省略する。
図16ないし図18は、本発明の第4実施形態による半導体素子の製造方法を示す斜視図である。そして、図19は、図18のY方向の断面図である。各図面において、左側はセル領域、右側は周辺回路領域を表す。また、図16ないし図19において、図2ないし図10に示すものと同一な要素に対しては、同一な参照番号を付与し、説明の繰り返しを省略する。
図17に示すように、第2誘電膜40、40´及び第1誘電膜30、30´をチャンネル深さと同一にリセスさせる。これにより、露出された活性領域20、20´の周囲に素子分離膜30a、30a´が形成される。セル領域の活性領域20のみに、フィンチャンネル部位に中心トレンチ22が形成されたことが分かる。
図19に示すように、セル領域には、マルチチャンネルFinFETが、周辺回路領域には、一つの活性領域20´に3個のフィンを含む単一チャンネルFinFETが形成される。
図21ないし図30は、第5実施形態により、このようなレイアウトを有する半導体素子の製造方法を説明するための斜視図である。各図面において、左側はセル領域、右側は周辺回路領域の工程段階別の中間構造物を示す。
図32ないし図40は、第6実施形態により、図20のレイアウトを有する半導体素子の製造方法を説明するための斜視図であって、各図面において、左側はセル領域、右側は周辺回路領域の工程段階別の中間構造物を示す。図32ないし図40において、図21ないし図31に示すものと同一な要素に対しては、同一な参照番号を付与し、説明の繰り返しを省略する。
20,20´ 活性領域
21 四角形の開口部
22,22´ 中心トレンチ
23,23´ 第1突出部
24,24´ 第2突出部
30a,30a´ 素子分離膜
50,50´ ゲート酸化膜
65,65´ ゲート電極
Claims (17)
- 半導体基板に形成され、セル領域と周辺回路領域とを備えている半導体素子において、
素子分離膜で囲まれた領域をフィンとし、前記フィンにはトレンチが形成され、前記トレンチにより前記フィンが二つの突出活性チャンネルの形状となっており、
前記トレンチの下には前記素子分離膜が存在せず、
前記セル領域よりも前記周辺回路領域の方が前記フィンの数が多く、
ゲート酸化膜及びゲート電極が、前記フィン及び前記突出活性チャンネルの上面及び側面を一体となって覆っており、
前記周辺回路領域において、ソース及びドレインが一体となることによって、複数の前記フィン同士が接続されていることを特徴とする半導体素子。 - 前記半導体基板は、シリコンウェーハ、SOI基板、SGOI基板またはSiGeウェーハであることを特徴とする請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネルは、互いに平行であることを特徴とする、請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネルそれぞれは、約30nm以下の幅を有することを特徴とする、請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネル間の前記フィンの上面は、前記半導体基板内の前記素子分離膜の上面の高さと同一であることを特徴とする、請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネル間の前記フィンの上面はリセスされ、
前記二つの突出活性チャンネル間の前記フィンの上面は、前記半導体基板内の前記素子分離膜の上面より低いことを特徴とする、請求項1に記載の半導体素子。 - 前記二つの突出活性チャンネル間の前記フィンの上面は、前記半導体基板内の前記素子分離膜の上面より高いことを特徴とする、請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネルは、前記半導体基板の前記セル領域に形成されたセル領域活性チャンネルであることを特徴とする、請求項1に記載の半導体素子。
- 前記半導体基板の前記周辺回路領域の前記素子分離膜の表面上に突出され、複数個の周辺回路領域の活性チャンネルを画定する前記フィンの一部分をさらに備えることを特徴とする、請求項8に記載の半導体素子。
- 前記半導体基板の前記周辺回路領域の前記素子分離膜の表面上に突出され、複数個の周辺回路領域の活性チャンネルを画定する前記フィンの一部分をさらに備えることを特徴とする、請求項1に記載の半導体素子。
- 前記複数個の周辺回路領域の活性チャンネル下の前記フィンは、前記素子分離膜により分離されていることを特徴とする、請求項10に記載の半導体素子。
- 前記二つの突出活性チャンネルは、前記半導体基板の前記周辺回路領域に形成された周辺回路領域の活性チャンネルであることを特徴とする、請求項1に記載の半導体素子。
- 前記複数個の周辺回路領域の活性チャンネル下の前記フィンは、前記素子分離膜により分離されていることを特徴とする、請求項9に記載の半導体素子。
- 前記半導体基板の前記セル領域の前記素子分離膜の表面上に突出され、セル領域活性チャンネルを定義する前記フィンの一部分をさらに備えることを特徴とする、請求項12に記載の半導体素子。
- 前記二つの突出活性チャンネルの第1部分は、前記半導体基板の前記セル領域に形成されたセル領域活性チャンネルであり、前記二つの突出活性チャンネルの第2部分は、前記半導体基板の前記周辺回路領域に形成された周辺回路領域の活性チャンネルであることを特徴とする、請求項1に記載の半導体素子。
- 前記半導体基板の前記セル領域の前記素子分離膜の表面上に突出され、セル領域活性チャンネルを形成する前記フィンの一部分をさらに備えることを特徴とする、請求項1に記載の半導体素子。
- 前記二つの突出活性チャンネルは、前記半導体基板の前記セル領域に形成されたセル領域活性チャンネルであり、前記半導体基板の前記周辺回路領域の前記素子分離膜の表面上に突出され、複数個の周辺回路領域の活性チャンネルを形成する前記フィンの一部分をさらに備えることを特徴とする、請求項1に記載の半導体素子。
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JP2002033476A (ja) * | 2000-07-13 | 2002-01-31 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2003163356A (ja) * | 2001-10-05 | 2003-06-06 | Internatl Business Mach Corp <Ibm> | 二重ゲート・トランジスタおよびその製造方法 |
JP2003229575A (ja) * | 2002-02-04 | 2003-08-15 | Hitachi Ltd | 集積半導体装置及びその製造方法 |
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JP2006013521A (ja) | 2006-01-12 |
CN100530690C (zh) | 2009-08-19 |
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US7394116B2 (en) | 2008-07-01 |
US20050285204A1 (en) | 2005-12-29 |
KR100594282B1 (ko) | 2006-06-30 |
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