JP4295712B2 - リソグラフィ装置及び装置製造方法 - Google Patents

リソグラフィ装置及び装置製造方法 Download PDF

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Publication number
JP4295712B2
JP4295712B2 JP2004328567A JP2004328567A JP4295712B2 JP 4295712 B2 JP4295712 B2 JP 4295712B2 JP 2004328567 A JP2004328567 A JP 2004328567A JP 2004328567 A JP2004328567 A JP 2004328567A JP 4295712 B2 JP4295712 B2 JP 4295712B2
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Prior art keywords
immersion liquid
substrate
projection
contact angle
supply system
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Expired - Lifetime
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Japanese (ja)
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JP2005150734A (ja
Inventor
シュトレーフケルク ボブ
ヤコブス マテウス バゼルマンス ヨハネス
ジョセフ ブリュレス リチャード
マシユス セオドア マリー ディーリヒス マルセル
ニコラース ラムベルテュス ドンデルス ショエルト
アレクサンダー ホーゲンダム クリスティアーン
ヤンセン ハンス
ロエロフ ロープシュトラ エリック
ヨハネス ソフィア マリア メルテンス ジェロエン
キャサリヌス ヒュベルテュス ムルケンス ヨハネス
フランシスクス センゲルス ティモテウス
ヴァルター ジーン セフェリユンス ロナルド
シュレポフ セルゲイ
ボーム ヘルマン
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エーエスエムエル ネザーランズ ビー．ブイ．
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optics & Photonics (AREA)
JP2004328567A 2003-11-14 2004-11-12 リソグラフィ装置及び装置製造方法 Expired - Lifetime JP4295712B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03257195 2003-11-14
EP04254659 2004-08-03

Related Child Applications (1)

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JP2008219416A Division JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法

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JP2005150734A JP2005150734A (ja) 2005-06-09
JP4295712B2 true JP4295712B2 (ja) 2009-07-15

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JP2004328567A Expired - Lifetime JP4295712B2 (ja) 2003-11-14 2004-11-12 リソグラフィ装置及び装置製造方法
JP2008219416A Expired - Fee Related JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法
JP2009176829A Pending JP2009283970A (ja) 2003-11-14 2009-07-29 リソグラフィ装置および装置製造方法
JP2010116463A Expired - Fee Related JP5530250B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2010116482A Expired - Fee Related JP5200057B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2011152771A Expired - Fee Related JP5314735B2 (ja) 2003-11-14 2011-07-11 リソグラフィ装置
JP2013222157A Expired - Fee Related JP5782495B2 (ja) 2003-11-14 2013-10-25 リソグラフィ装置およびデバイス製造方法
JP2015031453A Expired - Fee Related JP6055501B2 (ja) 2003-11-14 2015-02-20 リソグラフィ装置およびデバイス製造方法
JP2016127256A Expired - Fee Related JP6302006B2 (ja) 2003-11-14 2016-06-28 リソグラフィ装置および装置製造方法

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JP2008219416A Expired - Fee Related JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法
JP2009176829A Pending JP2009283970A (ja) 2003-11-14 2009-07-29 リソグラフィ装置および装置製造方法
JP2010116463A Expired - Fee Related JP5530250B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2010116482A Expired - Fee Related JP5200057B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2011152771A Expired - Fee Related JP5314735B2 (ja) 2003-11-14 2011-07-11 リソグラフィ装置
JP2013222157A Expired - Fee Related JP5782495B2 (ja) 2003-11-14 2013-10-25 リソグラフィ装置およびデバイス製造方法
JP2015031453A Expired - Fee Related JP6055501B2 (ja) 2003-11-14 2015-02-20 リソグラフィ装置およびデバイス製造方法
JP2016127256A Expired - Fee Related JP6302006B2 (ja) 2003-11-14 2016-06-28 リソグラフィ装置および装置製造方法

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US (8) US7528929B2 (enExample)
JP (9) JP4295712B2 (enExample)

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