WO2005036623A1 - 基板搬送装置及び基板搬送方法、露光装置及び露光方法、デバイス製造方法 - Google Patents
基板搬送装置及び基板搬送方法、露光装置及び露光方法、デバイス製造方法 Download PDFInfo
- Publication number
- WO2005036623A1 WO2005036623A1 PCT/JP2004/014945 JP2004014945W WO2005036623A1 WO 2005036623 A1 WO2005036623 A1 WO 2005036623A1 JP 2004014945 W JP2004014945 W JP 2004014945W WO 2005036623 A1 WO2005036623 A1 WO 2005036623A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- liquid
- back surface
- arm member
- transport
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Robotics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005514618A JP4335213B2 (ja) | 2003-10-08 | 2004-10-08 | 基板搬送装置、露光装置、デバイス製造方法 |
EP04792214A EP1672682A4 (en) | 2003-10-08 | 2004-10-08 | SUBSTRATE TRANSPORT DEVICE AND METHOD, EXPOSURE DEVICE AND METHOD AND COMPONENT MANUFACTURING METHOD |
US11/398,603 US7898645B2 (en) | 2003-10-08 | 2006-04-06 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method |
US11/592,222 US20070052942A1 (en) | 2003-10-08 | 2006-11-03 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method |
US12/929,591 US8755025B2 (en) | 2003-10-08 | 2011-02-02 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-349549 | 2003-10-08 | ||
JP2003349552 | 2003-10-08 | ||
JP2003349549 | 2003-10-08 | ||
JP2003-349552 | 2003-10-08 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/398,603 Continuation US7898645B2 (en) | 2003-10-08 | 2006-04-06 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005036623A1 true WO2005036623A1 (ja) | 2005-04-21 |
Family
ID=34436903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/014945 WO2005036623A1 (ja) | 2003-10-08 | 2004-10-08 | 基板搬送装置及び基板搬送方法、露光装置及び露光方法、デバイス製造方法 |
Country Status (5)
Country | Link |
---|---|
US (3) | US7898645B2 (ja) |
EP (1) | EP1672682A4 (ja) |
JP (2) | JP4335213B2 (ja) |
KR (1) | KR20060126949A (ja) |
WO (1) | WO2005036623A1 (ja) |
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EP1598705A1 (en) | 2004-05-18 | 2005-11-23 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2006165502A (ja) * | 2004-06-21 | 2006-06-22 | Nikon Corp | 露光装置、及びその部材の洗浄方法、露光装置のメンテナンス方法、メンテナンス機器、並びにデバイス製造方法 |
JP2007067303A (ja) * | 2005-09-01 | 2007-03-15 | Tokyo Electron Ltd | 基板搬送装置、基板搬送方法及び塗布、現像装置 |
JP2007067080A (ja) * | 2005-08-30 | 2007-03-15 | Tokyo Electron Ltd | 基板洗浄装置及び基板洗浄方法。 |
JP2007095892A (ja) * | 2005-09-28 | 2007-04-12 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
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JP2010087535A (ja) * | 2005-12-02 | 2010-04-15 | Asml Netherlands Bv | 液浸型投影装置の汚染を防止または低減する方法および液浸型リソグラフィ装置 |
US7773195B2 (en) | 2005-11-29 | 2010-08-10 | Asml Holding N.V. | System and method to increase surface tension and contact angle in immersion lithography |
JP2011014935A (ja) * | 2010-10-18 | 2011-01-20 | Tokyo Electron Ltd | 基板洗浄装置及び基板洗浄方法。 |
US7898643B2 (en) | 2003-06-27 | 2011-03-01 | Asml Holding N.V. | Immersion photolithography system and method using inverted wafer-projection optics interface |
US8004649B2 (en) | 2003-06-19 | 2011-08-23 | Asml Holding N.V. | Immersion photolithography system and method using microchannel nozzles |
USRE42741E1 (en) | 2003-06-27 | 2011-09-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8040489B2 (en) | 2004-10-26 | 2011-10-18 | Nikon Corporation | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid |
US8203693B2 (en) | 2005-04-19 | 2012-06-19 | Asml Netherlands B.V. | Liquid immersion lithography system comprising a tilted showerhead relative to a substrate |
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US8514366B2 (en) | 2006-05-18 | 2013-08-20 | Nikon Corporation | Exposure method and apparatus, maintenance method and device manufacturing method |
US20130271945A1 (en) | 2004-02-06 | 2013-10-17 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
US8675177B2 (en) | 2003-04-09 | 2014-03-18 | Nikon Corporation | Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas |
US8698998B2 (en) | 2004-06-21 | 2014-04-15 | Nikon Corporation | Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device |
US8854601B2 (en) | 2005-05-12 | 2014-10-07 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
US9057963B2 (en) | 2007-09-14 | 2015-06-16 | Nikon Corporation | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
US9097981B2 (en) | 2007-10-12 | 2015-08-04 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
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US8755025B2 (en) | 2014-06-17 |
EP1672682A1 (en) | 2006-06-21 |
JPWO2005036623A1 (ja) | 2007-11-22 |
US20070052942A1 (en) | 2007-03-08 |
US7898645B2 (en) | 2011-03-01 |
EP1672682A4 (en) | 2008-10-15 |
US20060256316A1 (en) | 2006-11-16 |
JP4727734B2 (ja) | 2011-07-20 |
US20110122393A1 (en) | 2011-05-26 |
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