JP2011520283A5 - - Google Patents

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JP2011520283A5
JP2011520283A5 JP2011508490A JP2011508490A JP2011520283A5 JP 2011520283 A5 JP2011520283 A5 JP 2011520283A5 JP 2011508490 A JP2011508490 A JP 2011508490A JP 2011508490 A JP2011508490 A JP 2011508490A JP 2011520283 A5 JP2011520283 A5 JP 2011520283A5
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processing
processing chamber
workpiece
cover
ambient air
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JP2011508490A
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JP2011520283A (ja
JP5705723B2 (ja
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Priority claimed from PCT/US2009/002768 external-priority patent/WO2009137032A2/en
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Publication of JP2011520283A5 publication Critical patent/JP2011520283A5/ja
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JP2011508490A 2008-05-09 2009-05-05 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 Expired - Fee Related JP5705723B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12712908P 2008-05-09 2008-05-09
US61/127,129 2008-05-09
PCT/US2009/002768 WO2009137032A2 (en) 2008-05-09 2009-05-05 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation

Related Child Applications (1)

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JP2013076289A Division JP5705903B2 (ja) 2008-05-09 2013-04-01 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法

Publications (3)

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JP2011520283A JP2011520283A (ja) 2011-07-14
JP2011520283A5 true JP2011520283A5 (enExample) 2013-05-16
JP5705723B2 JP5705723B2 (ja) 2015-04-22

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JP2011508490A Expired - Fee Related JP5705723B2 (ja) 2008-05-09 2009-05-05 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法
JP2013076289A Expired - Fee Related JP5705903B2 (ja) 2008-05-09 2013-04-01 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法

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JP2013076289A Expired - Fee Related JP5705903B2 (ja) 2008-05-09 2013-04-01 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法

Country Status (6)

Country Link
US (3) US8235062B2 (enExample)
JP (2) JP5705723B2 (enExample)
KR (4) KR20130083940A (enExample)
CN (2) CN102683249B (enExample)
TW (2) TWI556875B (enExample)
WO (1) WO2009137032A2 (enExample)

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