JP5705723B2 - 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 - Google Patents

操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 Download PDF

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JP5705723B2
JP5705723B2 JP2011508490A JP2011508490A JP5705723B2 JP 5705723 B2 JP5705723 B2 JP 5705723B2 JP 2011508490 A JP2011508490 A JP 2011508490A JP 2011508490 A JP2011508490 A JP 2011508490A JP 5705723 B2 JP5705723 B2 JP 5705723B2
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processing
processing chamber
flow
gas
workpiece
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JP2011520283A (ja
JP2011520283A5 (enExample
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ロイアーハース，ジェフリー，エム．
コリンズ，ジミー，ディー．
ガスト，トレイシー，エー．
ローズ，アラン，ディー．
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テル エフエスアイ インコーポレイテッド
テル エフエスアイ インコーポレイテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0363—For producing proportionate flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2574—Bypass or relief controlled by main line fluid condition
    • Y10T137/2579—Flow rate responsive
    • Y10T137/2599—Venturi

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2011508490A 2008-05-09 2009-05-05 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 Expired - Fee Related JP5705723B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12712908P 2008-05-09 2008-05-09
US61/127,129 2008-05-09
PCT/US2009/002768 WO2009137032A2 (en) 2008-05-09 2009-05-05 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation

Related Child Applications (1)

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JP2013076289A Division JP5705903B2 (ja) 2008-05-09 2013-04-01 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法

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JP2011520283A JP2011520283A (ja) 2011-07-14
JP2011520283A5 JP2011520283A5 (enExample) 2013-05-16
JP5705723B2 true JP5705723B2 (ja) 2015-04-22

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JP2011508490A Expired - Fee Related JP5705723B2 (ja) 2008-05-09 2009-05-05 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法
JP2013076289A Expired - Fee Related JP5705903B2 (ja) 2008-05-09 2013-04-01 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法

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US (3) US8235062B2 (enExample)
JP (2) JP5705723B2 (enExample)
KR (4) KR20130083940A (enExample)
CN (2) CN102683249B (enExample)
TW (2) TWI556875B (enExample)
WO (1) WO2009137032A2 (enExample)

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