JP2009501452A - 基板処理チャンバ用コンポーネントの局所表面アニーリング - Google Patents
基板処理チャンバ用コンポーネントの局所表面アニーリング Download PDFInfo
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- JP2009501452A JP2009501452A JP2008521576A JP2008521576A JP2009501452A JP 2009501452 A JP2009501452 A JP 2009501452A JP 2008521576 A JP2008521576 A JP 2008521576A JP 2008521576 A JP2008521576 A JP 2008521576A JP 2009501452 A JP2009501452 A JP 2009501452A
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- component
- microcracks
- laser
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/0036—Laser treatment
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/02—Annealing glass products in a discontinuous way
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
- Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Optics & Photonics (AREA)
- Structural Engineering (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
基板処理チャンバは、励起されたプロセスガス中で、例えば、半導体ウェハやディスプレイ等の基板を処理するのに用いられる。処理チャンバは、通常、筺体壁を含んでおり、これは、ガスが導入され励起されるプロセスゾーンを囲むものである。チャンバを用いて、化学又は物理蒸着により、基板上に材料を堆積し、材料を基板からエッチングし、材料を基板上に注入し、或いは層の酸化又は窒化物の形成等により基板層を変化させる。チャンバは、通常、数多くの内部チャンバコンポーネントを有している。例えば、基板サポート、ガス分配器、ガス励起器及び様々なライナやシールドである。例えば、ライナ及びシールドは、基板を囲む円柱部材とし、基板周囲にプラズマを方向づけて含める焦点リング、下にあるコンポーネント又は基板の一部への堆積を防ぐ堆積リング、基板シールド及びチャンバ壁ライナとして機能させることができる。
Claims (12)
- 基板処理チャンバコンポーネントであって、アニールされたマイクロクラックを備えた局所表面領域を含む構造体を有し、前記アニールされたマイクロクラックによって、クラック伝播が減じ、破壊抵抗が増大する基板処理チャンバコンポーネント。
- レーザーアニールされたマイクロクラックを備えた局所表面領域を含む請求項1記載のコンポーネント。
- CO2レーザーアニールされたマイクロクラックを備えた局所表面領域を含む請求項1記載のコンポーネント。
- 前記構造体が、内側軸周囲で回転対称である請求項1記載のコンポーネント。
- 前記構造体が、セラミック、ガラス又はガラスセラミックでできている請求項1記載のコンポーネント。
- 前記構造体が石英を含む請求項1記載のコンポーネント。
- 前記局所表面領域が、前記構造体の表面又は端部である請求項1記載のコンポーネント。
- 前記構造体が、(i)未処理の構造体よりも少なくとも約10%大きい平均ビッカース硬さ、又は(ii)前記未処理の構造体よりも少なくとも約25%大きい平均破壊応力のうち少なくとも1つを含む請求項1記載のコンポーネント。
- 前記構造体が、リング、プレート又はシリンダを含む請求項1記載のコンポーネント。
- 基板処理チャンバコンポーネントを製造する方法において、
(a)構造体を有するコンポーネントを形成する工程と、
(b)局所表面領域のマイクロクラックをアニールするのに十分な時間にわたって、前記コンポーネントの前記局所表面領域に、レーザービームを向ける工程とを含み、
アニールされたマイクロクラックによって、クラック伝播が減じ、破壊抵抗が増大する、基板処理チャンバコンポーネントを製造する方法。 - (i)前記局所表面領域にわたって前記レーザービームをスキャニングする工程と、
(ii)CO2レーザーによりレーザービームを生成する工程とのうち少なくとも1つを含む請求項10記載の方法。 - (i)約190nm〜約10,600nmの波長、又は
(ii)約5ワット〜約10,000ワットの電力レベル、
のうち少なくとも1つの特性を有するレーザービームを向ける工程を含む請求項10記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/181,041 US8617672B2 (en) | 2005-07-13 | 2005-07-13 | Localized surface annealing of components for substrate processing chambers |
PCT/US2006/027078 WO2007008999A2 (en) | 2005-07-13 | 2006-07-12 | Localized surface annealing of components for substrate processing chambers |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009501452A true JP2009501452A (ja) | 2009-01-15 |
Family
ID=37637934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008521576A Pending JP2009501452A (ja) | 2005-07-13 | 2006-07-12 | 基板処理チャンバ用コンポーネントの局所表面アニーリング |
Country Status (7)
Country | Link |
---|---|
US (2) | US8617672B2 (ja) |
EP (1) | EP1902003B1 (ja) |
JP (1) | JP2009501452A (ja) |
KR (1) | KR101278217B1 (ja) |
CN (1) | CN101218191B (ja) |
TW (1) | TWI417961B (ja) |
WO (1) | WO2007008999A2 (ja) |
Cited By (1)
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JP2017137237A (ja) * | 2016-02-04 | 2017-08-10 | ショット アクチエンゲゼルシャフトSchott AG | 基板の厚みを制御する方法 |
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TWI351057B (en) * | 2007-04-27 | 2011-10-21 | Applied Materials Inc | Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas |
US10622194B2 (en) | 2007-04-27 | 2020-04-14 | Applied Materials, Inc. | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance |
US8291728B2 (en) * | 2009-02-27 | 2012-10-23 | Corning Incorporated | Method for the joining of low expansion glass |
JP2015505792A (ja) * | 2011-11-02 | 2015-02-26 | フエロ コーポレーション | 低融点ガラス系を用いた無機基材のマイクロ波シーリング |
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US9142465B1 (en) | 2013-03-13 | 2015-09-22 | Sandia Corporation | Precise annealing of focal plane arrays for optical detection |
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- 2006-07-12 CN CN2006800252684A patent/CN101218191B/zh not_active Expired - Fee Related
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KR20080033181A (ko) | 2008-04-16 |
CN101218191A (zh) | 2008-07-09 |
EP1902003A2 (en) | 2008-03-26 |
US20140167327A1 (en) | 2014-06-19 |
US9481608B2 (en) | 2016-11-01 |
CN101218191B (zh) | 2011-12-28 |
TWI417961B (zh) | 2013-12-01 |
TW200710998A (en) | 2007-03-16 |
KR101278217B1 (ko) | 2013-06-24 |
EP1902003B1 (en) | 2018-04-25 |
WO2007008999A2 (en) | 2007-01-18 |
US20070014949A1 (en) | 2007-01-18 |
US8617672B2 (en) | 2013-12-31 |
WO2007008999A3 (en) | 2007-04-26 |
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