AU2001255373A1 - Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn - Google Patents

Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn

Info

Publication number
AU2001255373A1
AU2001255373A1 AU2001255373A AU5537301A AU2001255373A1 AU 2001255373 A1 AU2001255373 A1 AU 2001255373A1 AU 2001255373 A AU2001255373 A AU 2001255373A AU 5537301 A AU5537301 A AU 5537301A AU 2001255373 A1 AU2001255373 A1 AU 2001255373A1
Authority
AU
Australia
Prior art keywords
microcolumn
specimen
indirect
imaging
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001255373A
Inventor
Stuart L. Friedman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etec Systems Inc
Original Assignee
Etec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etec Systems Inc filed Critical Etec Systems Inc
Publication of AU2001255373A1 publication Critical patent/AU2001255373A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU2001255373A 2000-05-04 2001-04-12 Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn Abandoned AU2001255373A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56563500A 2000-05-04 2000-05-04
US09565635 2000-05-04
PCT/US2001/012172 WO2001084590A2 (en) 2000-05-04 2001-04-12 Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn

Publications (1)

Publication Number Publication Date
AU2001255373A1 true AU2001255373A1 (en) 2001-11-12

Family

ID=24259488

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001255373A Abandoned AU2001255373A1 (en) 2000-05-04 2001-04-12 Method and apparatus for imaging a specimen using indirect in-column detection of secondary electrons in a microcolumn

Country Status (3)

Country Link
AU (1) AU2001255373A1 (en)
TW (1) TW508615B (en)
WO (1) WO2001084590A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8617672B2 (en) 2005-07-13 2013-12-31 Applied Materials, Inc. Localized surface annealing of components for substrate processing chambers
US7942969B2 (en) 2007-05-30 2011-05-17 Applied Materials, Inc. Substrate cleaning chamber and components

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1265887A1 (en) * 1985-03-20 1986-10-23 Институт проблем технологии микроэлектроники и особочистых материалов АН СССР Device for registering non-elastically reflected electrons in scanning electrone microscope
US5466940A (en) * 1994-06-20 1995-11-14 Opal Technologies Ltd. Electron detector with high backscattered electron acceptance for particle beam apparatus
JPH0883589A (en) * 1994-09-13 1996-03-26 Hitachi Ltd Scanning electron microscope
US6369385B1 (en) * 1999-05-05 2002-04-09 Applied Materials, Inc. Integrated microcolumn and scanning probe microscope arrays

Also Published As

Publication number Publication date
WO2001084590A3 (en) 2002-03-28
WO2001084590A2 (en) 2001-11-08
TW508615B (en) 2002-11-01

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