JP2009283970A5 - - Google Patents

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Publication number
JP2009283970A5
JP2009283970A5 JP2009176829A JP2009176829A JP2009283970A5 JP 2009283970 A5 JP2009283970 A5 JP 2009283970A5 JP 2009176829 A JP2009176829 A JP 2009176829A JP 2009176829 A JP2009176829 A JP 2009176829A JP 2009283970 A5 JP2009283970 A5 JP 2009283970A5
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substrate
protective film
immersion liquid
resist
contact angle
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JP2009176829A
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Japanese (ja)
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JP2009283970A (ja
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JP2009176829A 2003-11-14 2009-07-29 リソグラフィ装置および装置製造方法 Pending JP2009283970A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03257195 2003-11-14
EP04254659 2004-08-03

Related Parent Applications (1)

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JP2008219416A Division JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法

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JP2009283970A JP2009283970A (ja) 2009-12-03
JP2009283970A5 true JP2009283970A5 (enExample) 2010-06-17

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JP2004328567A Expired - Lifetime JP4295712B2 (ja) 2003-11-14 2004-11-12 リソグラフィ装置及び装置製造方法
JP2008219416A Expired - Fee Related JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法
JP2009176829A Pending JP2009283970A (ja) 2003-11-14 2009-07-29 リソグラフィ装置および装置製造方法
JP2010116482A Expired - Fee Related JP5200057B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2010116463A Expired - Fee Related JP5530250B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2011152771A Expired - Fee Related JP5314735B2 (ja) 2003-11-14 2011-07-11 リソグラフィ装置
JP2013222157A Expired - Fee Related JP5782495B2 (ja) 2003-11-14 2013-10-25 リソグラフィ装置およびデバイス製造方法
JP2015031453A Expired - Fee Related JP6055501B2 (ja) 2003-11-14 2015-02-20 リソグラフィ装置およびデバイス製造方法
JP2016127256A Expired - Fee Related JP6302006B2 (ja) 2003-11-14 2016-06-28 リソグラフィ装置および装置製造方法

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JP2004328567A Expired - Lifetime JP4295712B2 (ja) 2003-11-14 2004-11-12 リソグラフィ装置及び装置製造方法
JP2008219416A Expired - Fee Related JP4881923B2 (ja) 2003-11-14 2008-08-28 リソグラフィ装置および装置製造方法

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JP2010116482A Expired - Fee Related JP5200057B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2010116463A Expired - Fee Related JP5530250B2 (ja) 2003-11-14 2010-05-20 リソグラフィ装置
JP2011152771A Expired - Fee Related JP5314735B2 (ja) 2003-11-14 2011-07-11 リソグラフィ装置
JP2013222157A Expired - Fee Related JP5782495B2 (ja) 2003-11-14 2013-10-25 リソグラフィ装置およびデバイス製造方法
JP2015031453A Expired - Fee Related JP6055501B2 (ja) 2003-11-14 2015-02-20 リソグラフィ装置およびデバイス製造方法
JP2016127256A Expired - Fee Related JP6302006B2 (ja) 2003-11-14 2016-06-28 リソグラフィ装置および装置製造方法

Country Status (2)

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US (8) US7528929B2 (enExample)
JP (9) JP4295712B2 (enExample)

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