JP2009037023A5 - - Google Patents
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- Publication number
- JP2009037023A5 JP2009037023A5 JP2007201570A JP2007201570A JP2009037023A5 JP 2009037023 A5 JP2009037023 A5 JP 2009037023A5 JP 2007201570 A JP2007201570 A JP 2007201570A JP 2007201570 A JP2007201570 A JP 2007201570A JP 2009037023 A5 JP2009037023 A5 JP 2009037023A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- resin layer
- photosensitive resin
- ultraviolet
- absorbing metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 37
- 239000011347 resin Substances 0.000 claims 23
- 229920005989 resin Polymers 0.000 claims 23
- 239000000758 substrate Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 8
- 238000000206 photolithography Methods 0.000 claims 8
- 238000005323 electroforming Methods 0.000 claims 6
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 claims 4
- 238000001015 X-ray lithography Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 3
- 238000000059 patterning Methods 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007201570A JP4642818B2 (ja) | 2007-08-02 | 2007-08-02 | 回折格子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007201570A JP4642818B2 (ja) | 2007-08-02 | 2007-08-02 | 回折格子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009037023A JP2009037023A (ja) | 2009-02-19 |
| JP2009037023A5 true JP2009037023A5 (enExample) | 2010-09-24 |
| JP4642818B2 JP4642818B2 (ja) | 2011-03-02 |
Family
ID=40438991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007201570A Expired - Fee Related JP4642818B2 (ja) | 2007-08-02 | 2007-08-02 | 回折格子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4642818B2 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2443491B1 (en) * | 2009-06-16 | 2020-03-04 | Koninklijke Philips N.V. | Tilted gratings and method for production of tilted gratings |
| US8999435B2 (en) * | 2009-08-31 | 2015-04-07 | Canon Kabushiki Kaisha | Process of producing grating for X-ray image pickup apparatus |
| JP5773624B2 (ja) | 2010-01-08 | 2015-09-02 | キヤノン株式会社 | 微細構造体の製造方法 |
| JP2015178683A (ja) * | 2010-01-08 | 2015-10-08 | キヤノン株式会社 | 金属吸収格子及びタルボ干渉計 |
| JP5660910B2 (ja) * | 2010-03-30 | 2015-01-28 | 富士フイルム株式会社 | 放射線画像撮影用グリッドの製造方法 |
| DE102010017426A1 (de) * | 2010-06-17 | 2011-12-22 | Karlsruher Institut für Technologie | Gitter aus mindestens zwei Materialien für die Röntgenbildgebung |
| WO2012086121A1 (ja) | 2010-12-21 | 2012-06-28 | コニカミノルタエムジー株式会社 | 金属格子の製造方法ならびに該製造方法によって製造された金属格子およびこの金属格子を用いたx線撮像装置 |
| JP5893252B2 (ja) * | 2011-02-15 | 2016-03-23 | キヤノン株式会社 | 微細構造体の製造方法 |
| JP5804726B2 (ja) * | 2011-02-24 | 2015-11-04 | キヤノン株式会社 | 微細構造体の製造方法 |
| JP5656726B2 (ja) * | 2011-04-15 | 2015-01-21 | 株式会社日立ハイテクサイエンス | X線タルボ干渉計用位相型回折格子の製造方法 |
| JP5860613B2 (ja) * | 2011-05-26 | 2016-02-16 | 株式会社オプトニクス精密 | X線干渉計用の回折格子及びその製造方法 |
| JP6070555B2 (ja) | 2011-07-27 | 2017-02-01 | コニカミノルタ株式会社 | 金属格子の製造方法 |
| JP6245794B2 (ja) | 2011-07-29 | 2017-12-13 | キヤノン株式会社 | 遮蔽格子の製造方法 |
| JP5871549B2 (ja) * | 2011-07-29 | 2016-03-01 | キヤノン株式会社 | X線遮蔽格子の製造方法 |
| KR101306185B1 (ko) | 2011-12-28 | 2013-09-17 | 단국대학교 산학협력단 | 엑스선 간섭계의 나노 격자 제조 방법 |
| JP6667215B2 (ja) | 2014-07-24 | 2020-03-18 | キヤノン株式会社 | X線遮蔽格子、構造体、トールボット干渉計、x線遮蔽格子の製造方法 |
| JP7059545B2 (ja) * | 2017-09-20 | 2022-04-26 | 大日本印刷株式会社 | 構造体の製造方法、および構造体 |
| JP7319106B2 (ja) * | 2019-06-28 | 2023-08-01 | 株式会社ミツトヨ | 格子部品およびその製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61174502A (ja) * | 1985-01-29 | 1986-08-06 | Shimadzu Corp | 軟x線用光学素子 |
| JP3253716B2 (ja) * | 1992-12-24 | 2002-02-04 | キヤノン株式会社 | 貴金属単結晶群の適用品及びその製造方法 |
-
2007
- 2007-08-02 JP JP2007201570A patent/JP4642818B2/ja not_active Expired - Fee Related
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