JP4642818B2 - 回折格子の製造方法 - Google Patents

回折格子の製造方法 Download PDF

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Publication number
JP4642818B2
JP4642818B2 JP2007201570A JP2007201570A JP4642818B2 JP 4642818 B2 JP4642818 B2 JP 4642818B2 JP 2007201570 A JP2007201570 A JP 2007201570A JP 2007201570 A JP2007201570 A JP 2007201570A JP 4642818 B2 JP4642818 B2 JP 4642818B2
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JP
Japan
Prior art keywords
ray
diffraction grating
photosensitive resin
absorbing metal
ray absorbing
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Expired - Fee Related
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JP2007201570A
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English (en)
Japanese (ja)
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JP2009037023A5 (enExample
JP2009037023A (ja
Inventor
正 服部
大二 野田
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NANO CREATE COMPANY, LTD.
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NANO CREATE COMPANY, LTD.
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Priority to JP2007201570A priority Critical patent/JP4642818B2/ja
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Publication of JP2009037023A5 publication Critical patent/JP2009037023A5/ja
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  • Measurement Of Radiation (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2007201570A 2007-08-02 2007-08-02 回折格子の製造方法 Expired - Fee Related JP4642818B2 (ja)

Priority Applications (1)

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JP2007201570A JP4642818B2 (ja) 2007-08-02 2007-08-02 回折格子の製造方法

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JP2007201570A JP4642818B2 (ja) 2007-08-02 2007-08-02 回折格子の製造方法

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JP2009037023A JP2009037023A (ja) 2009-02-19
JP2009037023A5 JP2009037023A5 (enExample) 2010-09-24
JP4642818B2 true JP4642818B2 (ja) 2011-03-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8895934B2 (en) 2010-01-08 2014-11-25 Canon Kabushiki Kaisha Microstructure manufacturing method

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2443491B1 (en) * 2009-06-16 2020-03-04 Koninklijke Philips N.V. Tilted gratings and method for production of tilted gratings
US8999435B2 (en) * 2009-08-31 2015-04-07 Canon Kabushiki Kaisha Process of producing grating for X-ray image pickup apparatus
JP2015178683A (ja) * 2010-01-08 2015-10-08 キヤノン株式会社 金属吸収格子及びタルボ干渉計
JP5660910B2 (ja) * 2010-03-30 2015-01-28 富士フイルム株式会社 放射線画像撮影用グリッドの製造方法
DE102010017426A1 (de) 2010-06-17 2011-12-22 Karlsruher Institut für Technologie Gitter aus mindestens zwei Materialien für die Röntgenbildgebung
WO2012086121A1 (ja) 2010-12-21 2012-06-28 コニカミノルタエムジー株式会社 金属格子の製造方法ならびに該製造方法によって製造された金属格子およびこの金属格子を用いたｘ線撮像装置
JP5893252B2 (ja) * 2011-02-15 2016-03-23 キヤノン株式会社 微細構造体の製造方法
JP5804726B2 (ja) * 2011-02-24 2015-11-04 キヤノン株式会社 微細構造体の製造方法
JP5656726B2 (ja) * 2011-04-15 2015-01-21 株式会社日立ハイテクサイエンス Ｘ線タルボ干渉計用位相型回折格子の製造方法
JP5860613B2 (ja) * 2011-05-26 2016-02-16 株式会社オプトニクス精密 Ｘ線干渉計用の回折格子及びその製造方法
US20140241493A1 (en) 2011-07-27 2014-08-28 Mitsuru Yokoyama Metal Lattice Production Method, Metal Lattice, X-Ray Imaging Device, and Intermediate Product for Metal Lattice
JP6245794B2 (ja) 2011-07-29 2017-12-13 キヤノン株式会社 遮蔽格子の製造方法
JP5871549B2 (ja) * 2011-07-29 2016-03-01 キヤノン株式会社 Ｘ線遮蔽格子の製造方法
KR101306185B1 (ko) 2011-12-28 2013-09-17 단국대학교 산학협력단 엑스선 간섭계의 나노 격자 제조 방법
JP6667215B2 (ja) 2014-07-24 2020-03-18 キヤノン株式会社 Ｘ線遮蔽格子、構造体、トールボット干渉計、ｘ線遮蔽格子の製造方法
JP7059545B2 (ja) * 2017-09-20 2022-04-26 大日本印刷株式会社 構造体の製造方法、および構造体
JP7319106B2 (ja) * 2019-06-28 2023-08-01 株式会社ミツトヨ 格子部品およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61174502A (ja) * 1985-01-29 1986-08-06 Shimadzu Corp 軟ｘ線用光学素子
JP3253716B2 (ja) * 1992-12-24 2002-02-04 キヤノン株式会社 貴金属単結晶群の適用品及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8895934B2 (en) 2010-01-08 2014-11-25 Canon Kabushiki Kaisha Microstructure manufacturing method

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Publication number Publication date
JP2009037023A (ja) 2009-02-19

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